JP4724496B2 - 光学式エンコーダ - Google Patents
光学式エンコーダ Download PDFInfo
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- JP4724496B2 JP4724496B2 JP2005247669A JP2005247669A JP4724496B2 JP 4724496 B2 JP4724496 B2 JP 4724496B2 JP 2005247669 A JP2005247669 A JP 2005247669A JP 2005247669 A JP2005247669 A JP 2005247669A JP 4724496 B2 JP4724496 B2 JP 4724496B2
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- Prior art keywords
- light
- scale
- reflective scale
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- light source
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- 230000003287 optical effect Effects 0.000 title claims description 57
- 238000001514 detection method Methods 0.000 claims description 67
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/28—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with deflection of beams of light, e.g. for direct optical indication
- G01D5/30—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with deflection of beams of light, e.g. for direct optical indication the beams of light being detected by photocells
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
- G01D5/34715—Scale reading or illumination devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
Description
前記反射式スケールと前記光源の発光面の間の距離と、前記反射式スケールと前記複数の受光素子の受光面の間の距離が等しく、
前記反射式スケールに対して、前記反射式スケールの回転軸が前記光源および前記受光素子と同じ側に位置しており、
前記受光素子の検出基本周期<2×前記反射式スケールのピッチ
を満たすことを特徴とする。
本実施例において、光源10の光源点と光源10の発光点は同一の意味である。
次に、本発明である曲面形状の反射スケールの光学特性を説明するにあたり、本発明の検出センサで平面状の反射スケールを検出する場合の原理について説明する。
円筒状反射スケールの半径:R
光源と反射スケールの距離:G
発光中心と受光中心の距離:Ds
検出ヘッドの基本検出ピッチ:P
以下に図面を参照して本発明によるセンサ、および、スケールをレンズ鏡筒へ搭載した一実施例を説明する。
11 発光領域
20 反射スケール
21 リング状円筒支持体
22 PET基材
23 感光層
24 反射層
30 フォトIC
31 受光部
32〜35 受光素子エレメント群
40 検出ヘッド
44 半導体チップ実装基板
45 透明樹脂
46 透明硝子
48 遮光壁
R 円筒状反射スケールの半径
G 光源発光点と反射スケールの反射面の距離
P 検出ヘッド内の受光素子が検出するピッチ
Ps 反射スケールのピッチ
Ds 光源の発光領域中心と受光素子の受光エリアの中心間距離
L0 0次回折光の仮想光源点
L+ +1次回折光の仮想光源点
L− −1次回折光の仮想光源点
540 検出センサ
541 反射スケール
Claims (8)
- 回折格子として作用する格子状パターンが曲面に形成され、前記曲面の曲率中心を通る回転軸を中心に回転可能である反射式スケールと、前記反射式スケールを発散光束で照明するための光源と、前記反射式スケールで反射した光束を受光する為の複数の受光素子と、を有する光学式エンコーダにおいて、
前記反射式スケールと前記光源の発光面の間の距離と、前記反射式スケールと前記複数の受光素子の受光面の間の距離が等しく、
前記反射式スケールに対して、前記反射式スケールの回転軸が前記光源および前記受光素子と同じ側に位置しており、
前記受光素子の検出基本周期<2×前記反射式スケールのピッチを満たすことを特徴とする光学式エンコーダ。 - 回折格子として作用する格子状パターンが曲面に形成され、前記曲面の曲率中心を通る回転軸を中心に回転可能である反射式スケールと、前記反射式スケールを発散光束で照明するための光源と、前記反射式スケールで反射した光束を受光する為の複数の受光素子と、を有する光学式エンコーダにおいて、
前記反射式スケールと前記光源の発光面の間の距離と、前記反射式スケールと前記複数の受光素子の受光面の間の距離が等しく、
前記反射式スケールに対して、前記反射式スケールの回転軸が前記光源および前記受光素子の反対側に位置しており、
前記受光素子の検出基本周期>2×前記反射式スケールのピッチを満たすことを特徴とする光学式エンコーダ。 - 回折格子として作用する格子状パターンが曲面に形成され、前記曲面の曲率中心を通る回転軸を中心に回転可能である反射式スケールと、前記反射式スケールを発散光束で照明するための光源と、前記反射式スケールで反射した光束を受光する為の複数の受光素子と、を有する光学式エンコーダにおいて、
前記反射式スケールと前記光源の発光面の間の距離と、前記反射式スケールと前記複数の受光素子の受光面の間の距離が等しく、
前記反射式スケールの曲率半径をR、前記光源の発光中心と前記反射式スケールとの間の距離をG、前記光源の発光中心と前記受光素子の中心との間の距離をDs、前記受光素子の検出基本周期をP、前記反射式スケールの回転方向の座標をx、前記回転軸と平行な方向の座標をy、前記光源の発光中心の座標(x=0、y=0)、前記反射式スケールの反射面の座標(x、y)とするとき、数式f(x、y)
が最小値を取るときのx座標値に基づいて前記反射式スケールのピッチが設定されていることを特徴とする光学式エンコーダ。 - 前記反射式スケールは、可撓性部材であることを特徴とする請求項1乃至3の何れか1項に記載の光学式エンコーダ。
- 前記光源が、半導体レーザであることを特徴とする請求項1乃至4の何れか1項に記載の光学式エンコーダ。
- 前記光源と前記複数の受光素子は、同一基板に形成されていることを特徴とする請求項1乃至5の何れか1項に記載の光学式エンコーダ。
- 請求項1乃至6の何れか1項に記載の光学式エンコーダをレンズ位置制御用センサーとして用いたことを特徴とするレンズ鏡筒。
- 請求項7に記載のレンズ鏡筒を有することを特徴とするカメラ。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005247669A JP4724496B2 (ja) | 2005-08-29 | 2005-08-29 | 光学式エンコーダ |
DE602006009996T DE602006009996D1 (de) | 2005-08-29 | 2006-08-23 | Optischer Kodierer und Gerät damit |
EP06119397A EP1760435B1 (en) | 2005-08-29 | 2006-08-23 | Optical encoder and apparatus using optical encoder |
US11/467,690 US7358865B2 (en) | 2005-08-29 | 2006-08-28 | Optical encoder and apparatus using optical encoder |
KR1020060082031A KR100900873B1 (ko) | 2005-08-29 | 2006-08-29 | 광학식 인코더 및 상기 광학식 인코더를 이용한 장치 |
CN200610126184A CN100580384C (zh) | 2005-08-29 | 2006-08-29 | 光学编码器和使用光学编码器的设备 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005247669A JP4724496B2 (ja) | 2005-08-29 | 2005-08-29 | 光学式エンコーダ |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011007093A Division JP2011099869A (ja) | 2011-01-17 | 2011-01-17 | 光学式エンコーダ |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2007064665A JP2007064665A (ja) | 2007-03-15 |
JP2007064665A5 JP2007064665A5 (ja) | 2009-11-19 |
JP4724496B2 true JP4724496B2 (ja) | 2011-07-13 |
Family
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Family Applications (1)
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JP2005247669A Expired - Fee Related JP4724496B2 (ja) | 2005-08-29 | 2005-08-29 | 光学式エンコーダ |
Country Status (6)
Country | Link |
---|---|
US (1) | US7358865B2 (ja) |
EP (1) | EP1760435B1 (ja) |
JP (1) | JP4724496B2 (ja) |
KR (1) | KR100900873B1 (ja) |
CN (1) | CN100580384C (ja) |
DE (1) | DE602006009996D1 (ja) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1790953A1 (de) * | 2005-11-04 | 2007-05-30 | Leica Geosystems AG | Optoelektrische Winkelmesseinrichtung |
EP2233892B1 (en) * | 2009-03-27 | 2015-05-27 | SICK STEGMANN GmbH | Cylindrical Grating Rotation Sensor |
JP2011013083A (ja) * | 2009-07-01 | 2011-01-20 | Canon Inc | 測定装置及びそれを用いた機器 |
EP2579005A4 (en) * | 2010-05-31 | 2013-10-23 | Yaskawa Denki Seisakusho Kk | ROTARY ENCODER, ROTARY MOTOR AND ROTARY MOTOR SYSTEM |
JP5516096B2 (ja) * | 2010-06-09 | 2014-06-11 | 横浜ゴム株式会社 | 操舵角検出装置および操舵角検出方法 |
JP6129735B2 (ja) * | 2011-06-09 | 2017-05-17 | コーデンシ株式会社 | ロータリーエンコーダ用スケール及びその射出成型方法、それを用いたロータリーエンコーダ |
JP5984364B2 (ja) * | 2011-11-22 | 2016-09-06 | キヤノン株式会社 | 光学式エンコーダおよびこれを備えた装置 |
JP6016479B2 (ja) | 2012-06-29 | 2016-10-26 | キヤノン株式会社 | エンコーダ、レンズ装置、および、カメラ |
DE102012222077A1 (de) | 2012-12-03 | 2014-06-05 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
US10807248B2 (en) | 2014-01-31 | 2020-10-20 | Systems, Machines, Automation Components Corporation | Direct drive brushless motor for robotic finger |
US9871435B2 (en) * | 2014-01-31 | 2018-01-16 | Systems, Machines, Automation Components Corporation | Direct drive motor for robotic finger |
JP6035467B2 (ja) * | 2014-03-31 | 2016-11-30 | 並木精密宝石株式会社 | 反射型エンコーダ |
CN104019827A (zh) * | 2014-06-10 | 2014-09-03 | 北京路桥瑞通养护中心有限公司 | 道路3d数据采集车数字里程传感器系统 |
US9602706B2 (en) | 2014-12-01 | 2017-03-21 | Canon Kabushiki Kaisha | Rotatable operating member and electronic device having the same |
JP6614883B2 (ja) * | 2014-12-01 | 2019-12-04 | キヤノン株式会社 | 操作部材及び電子機器 |
JP6584252B2 (ja) | 2015-09-14 | 2019-10-02 | キヤノン株式会社 | 電子機器および撮像装置 |
TWI585372B (zh) * | 2016-02-05 | 2017-06-01 | 曾信得 | 光學掃描式導光編碼器 |
TWI633282B (zh) * | 2016-04-15 | 2018-08-21 | 曾信得 | 正向對焦掃描式導光編碼器 |
JP6973398B2 (ja) * | 2016-09-13 | 2021-11-24 | ソニーグループ株式会社 | レンズ装置 |
JP6971822B2 (ja) * | 2017-12-11 | 2021-11-24 | キヤノン株式会社 | エンコーダ、ロボット及びギャップ測定方法 |
US11480448B2 (en) * | 2018-09-07 | 2022-10-25 | Canon Kabushiki Kaisha | Rotation detection apparatus, operation apparatus, lens apparatus and image pickup apparatus |
CN110686712A (zh) * | 2019-11-22 | 2020-01-14 | 中国科学院长春光学精密机械与物理研究所 | 一种反射式图像光电编码器 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5961711A (ja) * | 1982-09-30 | 1984-04-09 | Matsushita Electric Works Ltd | 反射型エンコ−ダ |
JPH05203465A (ja) * | 1992-01-27 | 1993-08-10 | Omron Corp | ロータリエンコーダ |
JP2610680B2 (ja) * | 1988-04-16 | 1997-05-14 | ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミト・ベシュレンクテル・ハフツング | 光電的角度測定装置 |
US20050061961A1 (en) * | 2003-09-23 | 2005-03-24 | Sebastian Tondorf | Position-measuring device |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN85204150U (zh) * | 1985-07-25 | 1986-05-21 | 重庆大学 | 软片长光栅角位移传感装置 |
US4943716A (en) * | 1988-01-22 | 1990-07-24 | Mitutoyo Corporation | Diffraction-type optical encoder with improved detection signal insensitivity to optical grating gap variations |
JP2704017B2 (ja) | 1989-12-26 | 1998-01-26 | キヤノン株式会社 | 光学式エンコーダー |
US5323001A (en) * | 1989-12-26 | 1994-06-21 | Canon Kabushiki Kaisha | Rotary encoder with scale member and interference of zero and first order diffraction beam |
JPH0587589A (ja) * | 1991-09-30 | 1993-04-06 | N F Keisoku Syst:Kk | エンコーダ装置 |
JPH05248818A (ja) * | 1992-03-04 | 1993-09-28 | Yokogawa Electric Corp | 光学式エンコーダ |
JP3028716B2 (ja) * | 1993-09-29 | 2000-04-04 | キヤノン株式会社 | 光学式変位センサ |
JP3196459B2 (ja) * | 1993-10-29 | 2001-08-06 | キヤノン株式会社 | ロータリーエンコーダ |
JPH08210814A (ja) * | 1994-10-12 | 1996-08-20 | Canon Inc | 光学式変位測定装置 |
US5909283A (en) * | 1997-10-07 | 1999-06-01 | Eselun; Steven Albert | Linear encoder using diverging light beam diffraction |
US6803560B1 (en) * | 1999-06-10 | 2004-10-12 | Canon Kabushiki Kaisha | Optical encoder |
JP2002243502A (ja) | 2001-02-09 | 2002-08-28 | Olympus Optical Co Ltd | エンコーダ装置 |
JP2004069654A (ja) | 2002-08-09 | 2004-03-04 | Olympus Corp | 光学式エンコーダ |
US7265336B2 (en) * | 2003-12-01 | 2007-09-04 | Avago Technologies Ecbu Ip (Singapore) Pte. Ltd. | Encoder utilizing a reflective cylindrical surface |
-
2005
- 2005-08-29 JP JP2005247669A patent/JP4724496B2/ja not_active Expired - Fee Related
-
2006
- 2006-08-23 DE DE602006009996T patent/DE602006009996D1/de active Active
- 2006-08-23 EP EP06119397A patent/EP1760435B1/en not_active Revoked
- 2006-08-28 US US11/467,690 patent/US7358865B2/en active Active
- 2006-08-29 CN CN200610126184A patent/CN100580384C/zh not_active Expired - Fee Related
- 2006-08-29 KR KR1020060082031A patent/KR100900873B1/ko active IP Right Grant
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5961711A (ja) * | 1982-09-30 | 1984-04-09 | Matsushita Electric Works Ltd | 反射型エンコ−ダ |
JP2610680B2 (ja) * | 1988-04-16 | 1997-05-14 | ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミト・ベシュレンクテル・ハフツング | 光電的角度測定装置 |
JPH05203465A (ja) * | 1992-01-27 | 1993-08-10 | Omron Corp | ロータリエンコーダ |
US20050061961A1 (en) * | 2003-09-23 | 2005-03-24 | Sebastian Tondorf | Position-measuring device |
Also Published As
Publication number | Publication date |
---|---|
US20070047050A1 (en) | 2007-03-01 |
EP1760435A2 (en) | 2007-03-07 |
CN1924528A (zh) | 2007-03-07 |
JP2007064665A (ja) | 2007-03-15 |
EP1760435A3 (en) | 2007-11-07 |
DE602006009996D1 (de) | 2009-12-10 |
KR20070026073A (ko) | 2007-03-08 |
CN100580384C (zh) | 2010-01-13 |
KR100900873B1 (ko) | 2009-06-04 |
US7358865B2 (en) | 2008-04-15 |
EP1760435B1 (en) | 2009-10-28 |
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