JP5560276B2 - 流体制御器 - Google Patents

流体制御器 Download PDF

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Publication number
JP5560276B2
JP5560276B2 JP2011528783A JP2011528783A JP5560276B2 JP 5560276 B2 JP5560276 B2 JP 5560276B2 JP 2011528783 A JP2011528783 A JP 2011528783A JP 2011528783 A JP2011528783 A JP 2011528783A JP 5560276 B2 JP5560276 B2 JP 5560276B2
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JP
Japan
Prior art keywords
compressed air
port valve
assembly
introduction chamber
air introduction
Prior art date
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Active
Application number
JP2011528783A
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English (en)
Japanese (ja)
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JPWO2011024771A1 (ja
Inventor
久敏 赤本
睦典 小艾
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikin Inc
Original Assignee
Fujikin Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Inc filed Critical Fujikin Inc
Priority to JP2011528783A priority Critical patent/JP5560276B2/ja
Publication of JPWO2011024771A1 publication Critical patent/JPWO2011024771A1/ja
Application granted granted Critical
Publication of JP5560276B2 publication Critical patent/JP5560276B2/ja
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/02—Construction of housing; Use of materials therefor of lift valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
    • F16K11/10—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit
    • F16K11/20—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit operated by separate actuating members
    • F16K11/22—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit operated by separate actuating members with an actuating member for each valve, e.g. interconnected to form multiple-way valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/02—Construction of housing; Use of materials therefor of lift valves
    • F16K27/0263—Construction of housing; Use of materials therefor of lift valves multiple way valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Fluid-Driven Valves (AREA)
  • Multiple-Way Valves (AREA)
  • Valve Housings (AREA)
JP2011528783A 2009-08-31 2010-08-24 流体制御器 Active JP5560276B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011528783A JP5560276B2 (ja) 2009-08-31 2010-08-24 流体制御器

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2009199226 2009-08-31
JP2009199226 2009-08-31
PCT/JP2010/064210 WO2011024771A1 (ja) 2009-08-31 2010-08-24 流体制御器
JP2011528783A JP5560276B2 (ja) 2009-08-31 2010-08-24 流体制御器

Publications (2)

Publication Number Publication Date
JPWO2011024771A1 JPWO2011024771A1 (ja) 2013-01-31
JP5560276B2 true JP5560276B2 (ja) 2014-07-23

Family

ID=43627876

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011528783A Active JP5560276B2 (ja) 2009-08-31 2010-08-24 流体制御器

Country Status (5)

Country Link
JP (1) JP5560276B2 (zh)
KR (1) KR101337086B1 (zh)
CN (1) CN102483173B (zh)
TW (1) TWI470159B (zh)
WO (1) WO2011024771A1 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106704704A (zh) * 2017-01-13 2017-05-24 徐州徐工基础工程机械有限公司 一种泥水平衡顶管机用的机外旁通结构

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013238279A (ja) * 2012-05-15 2013-11-28 Kawasaki Heavy Ind Ltd 流体制御機器用ケーシング及びこれを使用するマルチコントロール弁装置
JP6195759B2 (ja) * 2013-08-12 2017-09-13 アドバンス電気工業株式会社 定流量弁
CN105814352B (zh) * 2013-12-19 2019-01-04 通用电气健康护理生物科学股份公司 用于生物液体加工系统的远程促动阀
AT517391B1 (de) 2015-07-03 2018-11-15 Sonderhoff Eng Gmbh Ventileinrichtung
JP7375264B2 (ja) * 2019-06-28 2023-11-08 トーステ株式会社 分岐流路切換弁
JP7389461B2 (ja) * 2019-10-31 2023-11-30 株式会社フジキン バルブ装置および流体制御装置
JP7425462B2 (ja) * 2019-10-31 2024-01-31 株式会社フジキン 流体制御装置および半導体製造装置
JP7468220B2 (ja) * 2020-07-23 2024-04-16 株式会社デンソー 流路切替装置

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2675204A (en) * 1948-09-30 1954-04-13 Johnson Clarence Noncorrodible fluid-pressure operated valve
JPH02118202A (ja) * 1988-10-27 1990-05-02 Nippon Pneumatic Mfg Co Ltd 分岐回路ユニット
JPH04262178A (ja) * 1990-10-15 1992-09-17 Mannesmann Ag 流体のための弁
JP2000320700A (ja) * 1999-05-14 2000-11-24 Smc Corp ３ポート弁
JP2002508491A (ja) * 1997-12-15 2002-03-19 コールター インターナショナル コーポレイション 流体回路用のダイアフラム弁
US20050022814A1 (en) * 2003-04-22 2005-02-03 John Manhard Valve for conducting hyperpolarized gas
JP2006046562A (ja) * 2004-08-06 2006-02-16 Ckd Corp 薬液弁
JP2006511347A (ja) * 2002-12-20 2006-04-06 アプライド　マテリアルズ　インコーポレイテッド 半導体処理装置のためのマイクロ加工一体化流体配送システム
WO2008146637A1 (ja) * 2007-05-24 2008-12-04 Mitsubishi Gas Chemical Company, Inc. 無色透明樹脂フィルムの製造方法及び製造装置
JP2009127704A (ja) * 2007-11-21 2009-06-11 Alps Electric Co Ltd バルブ装置及び多層化基板

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6736370B1 (en) * 2002-12-20 2004-05-18 Applied Materials, Inc. Diaphragm valve with dynamic metal seat and coned disk springs
JP5079393B2 (ja) * 2007-05-25 2012-11-21 サーパス工業株式会社 流体機器ユニット構造

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2675204A (en) * 1948-09-30 1954-04-13 Johnson Clarence Noncorrodible fluid-pressure operated valve
JPH02118202A (ja) * 1988-10-27 1990-05-02 Nippon Pneumatic Mfg Co Ltd 分岐回路ユニット
JPH04262178A (ja) * 1990-10-15 1992-09-17 Mannesmann Ag 流体のための弁
JP2002508491A (ja) * 1997-12-15 2002-03-19 コールター インターナショナル コーポレイション 流体回路用のダイアフラム弁
JP2000320700A (ja) * 1999-05-14 2000-11-24 Smc Corp ３ポート弁
JP2006511347A (ja) * 2002-12-20 2006-04-06 アプライド　マテリアルズ　インコーポレイテッド 半導体処理装置のためのマイクロ加工一体化流体配送システム
US20050022814A1 (en) * 2003-04-22 2005-02-03 John Manhard Valve for conducting hyperpolarized gas
JP2006046562A (ja) * 2004-08-06 2006-02-16 Ckd Corp 薬液弁
WO2008146637A1 (ja) * 2007-05-24 2008-12-04 Mitsubishi Gas Chemical Company, Inc. 無色透明樹脂フィルムの製造方法及び製造装置
JP2009127704A (ja) * 2007-11-21 2009-06-11 Alps Electric Co Ltd バルブ装置及び多層化基板

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106704704A (zh) * 2017-01-13 2017-05-24 徐州徐工基础工程机械有限公司 一种泥水平衡顶管机用的机外旁通结构

Also Published As

Publication number Publication date
TWI470159B (zh) 2015-01-21
CN102483173B (zh) 2014-08-13
JPWO2011024771A1 (ja) 2013-01-31
WO2011024771A1 (ja) 2011-03-03
TW201115052A (en) 2011-05-01
CN102483173A (zh) 2012-05-30
KR101337086B1 (ko) 2013-12-05
KR20120031519A (ko) 2012-04-03

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