201115052 六、發明說明： 【發明所屬之技術領域】 本發明如3通2頭（2氣缸）式的3通閥，係關於一種 裝配複數個閥體、複數個軸桿及複數個活塞而作為一個 零件處理的流體控制器。 【先前技術】 作為流體控制器，過去已知有3通閥，其係包含複數 個閥體、保持此閥體的主體、上下移動而開關各閥體的 複數個軸桿、及使各軸桿上下移動的活塞的複數個零件 的裝配體（專利文獻1 )。 在此專利文獻1的3通閥方面，例如在更，換閥體的情 況下，要依次拆卸構成流體控制器的零件，更換閥體， 其後逐漸依次裝配拆卸的零件。此外，在其清洗之際， 採取使用專用的清洗機一體清洗、或分解所有零件後清 洗的任一方法。 先前技術文獻 專利文獻 專利文獻1 :特開2 0 0 0 — 3 2 0 7 0 0號公報 【發明内容】 發明欲解決之課題 在上述專利文獻1的3通閥方面，在更換閥體的情況 下，有費工夫的問題，也有花費用於分解清洗的成本或 工夫的問題。 本發明的目的在於提供一種使零件更換或分解清洗等 的維修性提高的流體控制器。 201115052 解決課題之手段 依據本發明的流體控制器，其特徵在於具備：主體組 件，其係包含複數個閥體及保持此閥體的主體的複數個 零件的裝配體；及促動組件，其係包含複數個活塞及藉 由與此活塞一體上下移動而開關各閥體的複數個軸桿的 複數個零件的裝配體；可分解地結合分別預先裝配的主 體組件與促動組件。 「複數」例如為二個，但亦可為三個以上。在具有二 個閥體及活塞的情況下，流體控制器例如係下述形態： 以2通閥與3通閥為一體，全體作為3通閥（3孔的流體 控制器）使用；但並不限於此。流體控制器有時為例如隔 膜（d i a p h r a g m )閥的形態，不限於此，也有時為例如波紋 管（be 1 lows)閥的形態。在主體上設置形成所需形狀的複 數個通路及其開口（開口於側面或底面的孔）。 促動構造可以是將活塞向上方移動及向下方移動雙方 都以壓縮空氣進行的構造（雙動式），也可以是以賦能構 件向通路經常成為開的方向將活塞賦能，以壓縮空氣向 閉鎖通路的方向使活塞移動的常開（η 〇 r m a 1 〇 p e η )，也可 以是以賦能構件向通路經常成為關的方向將活塞賦能， 以壓縮空氣向開放通路的方向使活塞移動的常閉 (normal close)。此外，除了以壓縮空氣使活塞上下移 動之外，亦可以電磁驅動使活塞上下移動。 内建複數個閥體及複數個活塞等的流體控制器通常係 由複數個零件構成，且作為可分解的一個裝配體（完成品 處理，在裝配及分解中途，作為中間品的「裝配體」不 存在。相對於此，依據本發明，利用作為中間品的裝配 201115052 體即主體組件與促動組件構成作為完成品的裝配體即流 體控制器。即，在裝配時，分別先裝配主體組件及促動 組件，可分解地結合此等主體組件與促動組件，藉此得 到本發明的流體控制器。因此，在需要更換閥體之際， 分解成主體組件與促動組件後，只要再分解主體組件， 更換閥體即可。此外，亦可同樣地容易進行主體組件的 分解清洗，零件更換或分解清洗等的維修性提高。 要可分解地結合主體組件與促動組件，例如使用適當 的螺栓手段即可，例如也可以使用潔淨夾（s a n i t a r y clamp)之類的連接夾或其他的固定夾具取代螺栓手段。 螺栓手段例如有時係由設在主體組件與促動組件中任一 方的預定地方的複數個内螺紋、及貫通同另一方而分別 旋入各内螺紋的複數個六角凹頭螺栓構成者，有時係由 貫通主體組件與促動組件的複數個螺栓、及與此螺栓分 別旋合的複數個螺母構成者。 主體組件及促動組件之任一者或雙方以複數層（例如 為2層，但亦可為3層以上）的層積體形成較好，層積體 彼此可分解地結合更好。 例如，設有流體通路，以支持作為閥體的隔膜的主體 為第1層積體，在此第1層積體上疊合經由隔膜壓板而 固定隔膜的第2層積體，可分解地結合第1層積體與第 2層積體，藉此形成主體組件較好。如此一來，主體組 件的分解容易，零件更換或分解清洗等的維修性更加提 高。 此外，較佳係疊合形成有活塞上下移動的氣缸室的第 3層積體與保持引導軸桿的導承的第4層積體，可分解 地 要 積 分 重 流 構 向 向 並 導 管 以 以 且 導 管 通 開 下 鎖 用 201115052 結合第3層積體與第4層積體，藉此形成促動組件 可分解地結合層積體彼此，可使用適當的螺栓手段 如此一來，流體控制器成為可分解地結合複數層的 體，在此等層積體内建有所需的零件者，零件更換 解清洗等的維修性更加提高。 隔膜及閥座可為樹脂製，但在分解後再使用時的開 現性之點上，較佳係為金屬製。 作為形成以2通閥與3通閥為一體的3通2頭構造 體控制器形成有以2通閥與3通閥為一體的3通2 造，有時在2通閥側及3通閥側分別設有用以使活 下方移動的流路閉鎖用壓縮空氣導入室及用以使活 上方移動的流路開放用壓縮空氣導入室的至少一方 且設有用以將壓縮空氣導入前述流路閉鎖用壓縮空 入室及前述流路開放用壓縮空氣導入室的壓縮空氣 連接部，或者有時在2通閥側及3通閥側分別設有 使活塞向下方移動的流路閉鎖用壓縮空氣導入室及 使活塞向上方移動的流路開放用壓縮空氣導入室， 分別設有用以將壓縮空氣導入各流路閉鎖用壓縮空 入室的壓縮空氣配管連接部，2通閥側的壓縮空氣 連接部與 3通閥側的流路開放用壓縮空氣導入室 ，3通閥側的壓縮空氣配管連接部與2通閥側的流 放用壓縮空氣導入室連通。 上述前者結構的「分別設有至少一方」，意味著可為 組合：2通閥側閉鎖用一3通閥側閉鎖用、2通閥側 用一3通閥側開放用、2通閥側開放用一 3通閥側閉 、2通閥側開放用一3通閥側開放用、2通閥側閉鎖 層 或 關 的 頭 塞 塞 氣 配 用 用 並 氣 配 連 路 以 閉 鎖 用 201115052 及開放用一3通閥側閉鎖用、2通閥側閉鎖用及開放用一 3通閥側開放用、2通閥側閉鎖用一 3通閥側閉鎖用及開 放用、2通閥側開放用一3通閥側閉鎖用及開放用與 2 通閥側閉鎖用及開放用一 3通閥側閉鎖用及開放用的合 計9個組合。 再者，在此說明書中，以活塞的移動方向（軸桿的軸線 方向）為上下方向。此方向為方便的方向，若是實際的安 裝，則不但上下方向為垂直方向，而且也為水平方向。 發明之效果 依據本發明的流體控制器，由於具備：主體組件，其 係包含複數個閥體及保持此閥體的主體的複數個零件的 裝配體；及促動組件，其係包含複數個活塞及藉由與此 活塞一體上下移動而開關各閥體的複數個軸桿的複數個 零件的裝配體；可分解地結合分別預先裝配的主體組件 與促動組件；所以在需要閥體的更換或分解清洗等的維 修之際，將流體控制器分解成主體組件與促動組件後， 在更換閥體的情況下，只要分解、再裝配主體組件即可， 並且亦可同樣地容易進行主體組件的分解清洗，零件更 換或分解清洗等的維修性提高。 【實施方式】 以下，參閱附圖說明本發明的實施形態。在以下的說 明中，上下、左右係指圖1的上下、左右。此外，將與 此等正交的方向稱為前後。 從圖1到圖5顯示依據本發明的流體控制器（1 )的第1 實施形態。 201115052 此流體控制器（1 )係稱為使左側的2通閥與右側的3 通閥一體化的3通2頭（氣缸）構造的3通閥者，具備： 主體組件（2 )，其係包含左右2個閥體（丨2 )(丨3 )及保持此 閥體的主體（1 1 )的複數個零件（丨丨）（丨2 )(丨3 )(丨4 )(丨5 ) (1 6 )( 1 7 )的裝配體；及促動組件（3 )，其係包含左右二個 活塞（3 1 )( 3 2 )及藉由與此活塞一體上下移動而開關各閥 體（1 2 ) (1 3 )的左右二個軸桿（3 3 ) ( 3 4 )的複數個零件（3 i ) (32)(33)(34)(35)(38)(39)(40)(41)的裝配體；利用組 件彼此結合用螺栓手段（4)可分解地結合分別預先裝配 的主體組件（2 )與促動組件（3 )。 主體（1 1 )形成為長方體塊狀，在其右側面設有第1孔 (18)’在其左側面設有第2孔（19)，在其前面（參閱圖 2 )設有第3孔（2 0 )。此外，在主體（1 1 )的上面分別設有 向上方開口的左右的圓形凹處（21)(22)。 第1孔（1 8 )與第2孔（1 9 )為從第1孔（1 8 )經由開口 (23a)而通到左圓形凹處（21)的周緣部的第 1入口通路 (2 3 )、及從左圓形凹處（2 1 )的中央部到第2孔（1 9 )的第 1出口通路（24)所連接，第3孔（20)經由從第3孔（20) 到右圓形凹處（22)的周緣部的第2入口通路（圖5中顯示 其開口（23b))、及從右圓形®處（22)的中央部通到第1 入口通路（23)的中途部分的第2出口通路（25)，連接於 第1孔（18)及第2孔（19)。在第1出口通路（24)的開口 周緣部設有環狀閥座（2 6 )，在右圓形凹處（2 2 )的第2出 口通路（2 5 )的開口周緣部也設有同樣的環狀閥座（2 7 )。 除了上述主體（11)之外，主體組件（2)還具有：隔膜（閥 體）（1 2 ) (1 3 )，其係嵌入各圓形凹處（2 1 ) ( 2 2 )，對環狀閥 201115052 座（26) (27)按壓或離開而開關各出口通路（24)(25):隔 膜壓板（15)(16) ’其係將隔膜（12)(13)保持在圓形凹處 (2 1 ) ( 2 2 )内；及長方體塊狀的閥帽（b 0 n n e t) (1 4 ) ’其係 具有嵌入隔膜壓板（15)(16)的上部並向下方開口的凹 處。 除了左右的活塞（31)(32)及左右的軸桿（33)(34)之 外，促動組件（3 )還具備：長方體塊狀的促動蓋（3 5 )，其 係形成有可上下移動地收納左右的活塞（3 1 )( 3 2 )並向下 方開口的左右的氣缸室（36)(37) ’左右的圓筒狀導承 (38)(39)，其係引導各軸桿（33)(34);及長方體塊狀的 促動罩（4 0 )，其係不能移動地保持此等導承（3 8 ) ( 3 9 )。 各活塞（3 1 )( 3 2 )經由〇形環而可滑動地配置於各氣缸 室（36)(37)内，以各活塞（31)(32)的上面與促動蓋（35) 的頂壁下面之間為流路閉鎖用壓縮空氣導入室 (36a)(37a)，以各活塞（31)(32)的下面與各導承（38)(39) 的上面之間為流路開放用壓縮空氣導入室（36b) (37b)。 在促動蓋（3 5 )的頂壁設有通到各流路閉鎖用壓縮空氣導 入室（36a) (37a)的流路閉鎖用壓縮空氣配管連接部 (42)(43)，在促動蓋（35)的周壁（參閱圖3)設有通到各 流路開放用壓縮空氣導入室（3 6 b )( 3 7 b )的流路開放用壓 縮空氣配管連接部（44)(45)。此處，在圖1所示的剖面 圖中，為了顯示通到流路開放用壓縮空氣導入室 (3 6 b ) ( 3 7 b )，流路開放用壓縮空氣配管連接部（4 4 ) ( 4 5 ) 以虛線顯不。 各軸桿（3 3 ) ( 3 4 )從各活塞（3 1 ) ( 3 2 )的下面中央部向下 方延伸’其下端部從圓筒狀導承（38)(39)的下面向下方 -10- 201115052 突出，抵接於隔膜（12)(13)的中央部。 圓筒狀導承（38)(39)包含：大徑部（38a)(39a)，其係 經由0形環而配置於氣缸室（3 6 )( 3 7 )内，為設於促動罩 (4 0 )上面的凹處所擋住；及小徑部（3 8 b ) ( 3 9 b )，其係從 大徑部（38a)(39a)的下面向下方延伸，插通設於促動罩 (40)上的貫通孔，為設於閥帽（14)上面的凹處所擔住。 於圖1中’在未導入壓縮空氣的狀態下，藉由各隔膜 (12)(13)的彈力’各軸桿（33)(34)在出口通路（24)(25) 被開放的上方位置’各活塞（3 1 )( 3 2 )其上面抵接於氣缸 室（3 6 )( 3 7 )的上面。從此狀態將各流路開放用壓縮空氣 導入室（3 6 b )( 3 7 b )排氣’而將壓縮空氣從各流路閉鎖用 壓縮空氣配管連接部（4 2 )( 4 3 )導入各流路閉鎖用壓縮空 氣導入室（36a)(37a)，藉此，各活塞（31)(32)向下方移 動’伴隨此移動，各軸桿（3 3 )( 3 4 )被移動到利用各隔膜 (12)(13)閉鎖出口通路（24)(25)的下方位置。因此，在 右側的3通閥，從流路閉鎖用壓縮空氣配管連接部（4 3) 將壓縮空氣導入流路閉鎖用壓縮空氣導入室（3 7a)中，並 且在左側的2通閥’從流路開放用壓縮空氣配管連接部 (44 )將壓縮空氣導入流路開放用壓縮空氣導入室（3 6b ) 中’藉此可使左側的2通閥成為開，並使右側的3通閥 成為關，而在左側的2通閥，從流路閉鎖用壓縮空氣配 營連接部（4 2)將壓縮空氣導入流路閉鎖用壓縮空氣導入 室（3 6 a)中’並且在右側的3通閥，從流路開放用壓縮空 氣配管連接部（45)將壓縮空氣導入流路開放用壓縮空氣 -11 - 201115052 導入室（3 7b )中’藉此可使左側的2通閥成為關並使右 側的3通閥成為開。 主體（1 1 )與閥帽（1 4 )互相疊合並為主體結合用螺检手 段（17)所結合’如圖2及圖5所示，此主體結合用螺检 手段（1 7 )係由设於主體（1 1 )上的合計六個内螺紋（2 8 )、 貫通閥帽（14)的合計六個螺栓插通孔（29)、及從閥帽（丨4) 側插通各螺栓插通孔（2 9 )並分別旋入各内螺紋（2 8 )中的 合計6支六角凹頭螺栓（3 〇 )構成。如此一來，主體组件 (2 )成為利用主體結合用螺栓手段（丨7 )可分離地結合作 為第1層積體的主體（11)與作為第2層積體的閱帽 (14)，並在其内部内建有2個隔膜（12)(13)與二個隔膜 壓板（15)(16)者。 ' 同樣地’促動蓋（35)與促動罩（40)互相疊合並為促動 結合用螺栓手段（4 1 )所結合’如圖3所示，此促動於人 用螺栓手段（4 1 )係由設於促動蓋（3 5 )上的合計四個内螺 紋（圖示省略）、貫通促動罩（4 0 )的合計四個螺栓插通孔 (4 6 )、及從促動罩（4 0 )側插通各螺栓插通孔（4 6 )並分別 旋入各内螺紋中的合計四支六角凹頭螺栓（4 7 )構成。如 此一來’促動組件（3)成為利用促動結合用螺栓手段（4工） 可分離地結合作為第3層積體的促動蓋（35)與作為第4 層積體的促動罩（40)，並在其内部内建有二個活夷 (31)(32)、一根轴桿（33)(34)及二個圓筒狀導承（38)(30) 等者。 如圖4等中所示’結合主體組件（2 )與促動組件（3 )的 201115052 組件彼此結合用螺栓手段（4 )係由設於促動組件（3 )的促 動罩（40)上的二個内螺紋（51)、貫通主體組件（2)的主體 (1 1 )及閥帽（1 4 )的二個螺栓插通孔（5 2 )、及從主體組件 (2 )側插通螺栓插通孔（5 2 )並分別旋入各内螺紋（5 1 )中 的二支六角凹頭螺栓（5 3 )構成。 如此一來，此流體控制器（1 )成為利用適當的結合手段 (圖示為組件彼此結合用螺栓手段）（4 )可分解地結合分 別由複數層（圖示為二層）的層積體（11) (14) (35) (40) 構成、預先裝配好的主體組件（2 )與促動組件（3 )者。因 此，依據此流體控制器（1 )，在需要更換隔膜（閥 體）（1 2 )( 1 3 )之際，藉由拆卸組件彼此結合用螺栓手段 (4 )，分解成主體組件（2 )與促動組件（3 )後，如圖5所 示’只要再分解主體組件（2 )，更換隔膜（1 2 )( 1 3 )即可， 並且亦可同樣地容易進行主體組件（3)的分解清洗，零件 更換或分解清洗等的維修性提高。 隔膜（12)(13)及環狀閥座（2 6)(27)均為金屬製，藉此 可確保分解流體控制器（1 )後再使用時的開關重現性。 此流體控制器（1)並不限於上述實施形態者，可將其結 構進行各種變更’例如也可以形成以孔數（閥體等數量） 為3個以上的多連構造。此外，流體控制器（丨）的促動器 的構造也可以全部形成為雙動式（如上述實施形態所 示，利用壓縮空氣進行活塞（31)(32)的上下移動雙方的 形態）’但藉由變更活塞的形狀或變更使此上下移動的結 構’也可以將其一部分或全部形成為常閉（n〇rmai close)(活塞（3 1)(32)向上方的移動’係藉由從流路開放 -13- 201115052 用壓縮空氣配管連接部（4 4 ) ( 4 5 )向流路開放用壓縮空氣 導入室（36b)(37b)導入壓縮空氣而進行，活塞（31)(32) 向下方的移動，係藉由壓縮螺旋彈簧等的賦能構件取代 從流路閉鎖用壓縮空氣配管連接部（4 2 )( 4 3 )向流路閉鎖 用壓縮空氣導入室（36a)(37a)導入壓縮空氣而進行的形 態）或常開（normal open)(活塞（31)(32)向下方的移 動，係藉由從流路閉鎖用壓縮空氣配管連接部（4 2 ) ( 4 3 ) 向流路閉鎖用壓縮空氣導入室（3 6 a) ( 3 7 a)導入壓縮空氣 而進行，活塞（3 1 )( 3 2 )向上方的移動，係藉由壓縮螺旋 彈簧等的賦能構件取代從流路開放用壓縮空氣配管連接 部（44 )( 45 )向流路開放用壓縮空氣導入室（3讣）（371))導 入壓縮空氣而進行的形態）。 此外，依據上述第1實施形態，壓縮空氣配管連接部 (4 2 )(43 )(43 )( 44)全部有四個，藉由互相賦予關聯而 開、關從各壓縮空氣配管連接部（4 2 ) ( 4 3 4 3 ) (4 4 )導入 的壓縮空氣，可切換2通閥為開、3通閥為關的狀態與2 通閥為關、3通閥為開的狀態，但也可以如圖6 ^圖7 所示，藉由將壓縮空氣配管連接部（68 )( 69 )減為二個， 並且追加所需要的壓縮空氣通路（71)(72)，在從—方的 壓縮空氣配管連接部（68)導入壓縮空氣時，成為2通問 為開、3通閥為關的狀態，在從另一方的壓縮空氣配管 連接部（6 9)導入壓縮空氣時，成為2通閥為關、3通閥 為開的狀態。纟以下的說明中，在與圖"目同的結構： 附上相同的符號’而省略其詳細的說明。 在圖Θ及圖γ中，第2實施形態的流體控制器（丨）係 為使左側的2通閥與右側的3通閥一體化的3通2頭（氣 -14- 201115052 缸）構造的3通閥者’具備：主體組件（2) ’其係包含左 右2個閥體（1 2 )( 1 3 )及保持此閥體的主體（1 1 )的複數個 零件（11)(12)(13)(14)(15)(16)(17)的裝配體；及促動 組件（3 )，其係包含左右2個活塞（6 1 )( 6 2 )及藉由與此活 塞一體上下移動而開關各閥體（1 2 )( 1 3 )的左右二個軸桿 (6 3 ) ( 6 4 )的複數個零件（6 1 ) ( 6 2 ) ( 6 3 ) ( 6 4 ) ( 6 5 ) ( 3 8 ) ( 3 9 ) (40 )( 4 1 )的裝配體；利用組件 可分解地結合分別預先裝配的主體組件（2 )與促動組件 (3) ° 各活塞（6 1 )( 6 2 )經由0形環而可滑動地配置於各氣缸 室（6 6 ) ( 6 7 )内’以各活塞（6 1 ) ( 6 2 )的上面與促動蓋（6 5 ) 的頂壁下面之間為流路閉鎖用壓縮空氣導入室 (66a)(67a)’以各活塞（61)(62)的下面與各導承（38)(39) 的上面之間為流路開放用壓縮空氣導入室（66b)(67b)。 在各軸桿（6 3 )( 6 4 )的上部設有下端通到流路開放用壓縮 空氣導入室（66b)(67b)、上端開口於各軸桿（63)(64)的 上端面的流路開放用壓縮空氣通路（71)(72)。 促動蓋（6 5 )上在其左側及右側分別設有壓縮空氣配管 連接部（68)(69)。此等壓縮空氣配管連接部（68)(69)兼 用作流路閉鎖用壓縮空氣導入室（66a)(67a)及流路開放 您壓縮工氣導入室（6 6 b )( 6 7b )。即，左側的壓縮空氣配 連接。卩（6 8 )經由主通路（7 3 )通到2通閥側的流路開放 =壓縮空氣通路⑴)，並且經由倒L字狀的延長通路(⑴ 到3通閥側的流路閉鎖用壓縮空氣導入室（67a)，右側201115052 VI. Description of the Invention: [Technical Field] The present invention is a 3-way 2-head (2-cylinder) 3-way valve for assembling a plurality of valve bodies, a plurality of shafts and a plurality of pistons as one Fluid controller for part handling. [Prior Art] As a fluid controller, a three-way valve has been known, which includes a plurality of valve bodies, a main body that holds the valve body, a plurality of shafts that move up and down to switch the valve bodies, and a plurality of shafts An assembly of a plurality of parts of a piston that moves up and down (Patent Document 1). In the case of the three-way valve of Patent Document 1, for example, in the case of changing the valve body, the components constituting the fluid controller are sequentially removed, the valve body is replaced, and the detached parts are gradually assembled in order. In addition, at the time of cleaning, any method of cleaning with a dedicated washing machine or disassembling all parts is carried out. CITATION LIST OF THE INVENTION PROBLEM TO BE SOLVED BY THE INVENTION In the case of the three-way valve of Patent Document 1, the valve body is replaced. Under the problem of having to work hard, there is also the problem of cost or time spent on decomposing cleaning. An object of the present invention is to provide a fluid controller which is improved in maintainability such as replacement of parts, disassembly, and cleaning. 201115052 The object of the present invention is to provide a fluid controller according to the present invention, comprising: a main body assembly comprising a plurality of valve bodies and an assembly of a plurality of parts for holding the main body of the valve body; and an actuating assembly An assembly comprising a plurality of pistons and a plurality of parts that switch a plurality of shafts of the valve bodies by moving up and down integrally with the pistons; the pre-assembled body assembly and the actuating assembly are decomposably coupled. The "plural number" is, for example, two, but it may be three or more. In the case of having two valve bodies and pistons, the fluid controller is, for example, in the form of a 2-way valve and a 3-way valve, and the whole is used as a 3-way valve (a 3-hole fluid controller); Limited to this. The fluid controller may be in the form of, for example, a diaphragm (d i a p h r a g m ), and is not limited thereto, and may be in the form of, for example, a bellows valve. A plurality of passages forming a desired shape and openings thereof (holes opening to the side or bottom surface) are provided on the main body. The actuating structure may be a structure in which the piston is moved upward and moved downward to be compressed air (double-acting), or the energizing member may energize the piston in a direction in which the passage is often opened to compress the air. The normally open (η 〇rma 1 〇pe η ) that moves the piston in the direction of the blocking passage may also energize the piston in a direction in which the energizing member often turns off, so that the piston is compressed toward the open passage. Normal close of movement. Further, in addition to moving the piston up and down with compressed air, it is also possible to electromagnetically drive the piston up and down. A fluid controller in which a plurality of valve bodies and a plurality of pistons are built in is usually composed of a plurality of parts, and is used as an assembly that can be decomposed (finished product, in the middle of assembly and disassembly, as an "assembly" of intermediate products. In contrast, according to the present invention, the assembly of the main body assembly and the actuating assembly, which is an assembly of the intermediate product, constitutes a fluid controller which is an assembly of the finished product, that is, at the time of assembly, the main assembly and the main assembly are respectively assembled. The actuating assembly is decomposably coupled to the main body assembly and the actuating assembly, thereby obtaining the fluid controller of the present invention. Therefore, when the valve body needs to be replaced, it is decomposed after being decomposed into the main body assembly and the actuating assembly. The main body assembly can be replaced with a valve body. In addition, the disassembly and cleaning of the main body assembly can be easily performed, and the maintainability of the parts replacement, disassembly, and cleaning can be improved. The main body assembly and the actuating assembly can be decomposed and combined, for example, using appropriate The bolt means can be used. For example, a connecting clip such as a sanitary clamp or other fixing jig can also be used. The bolt means may be, for example, a plurality of internal threads provided at predetermined places on either one of the main body assembly and the actuating assembly, and a plurality of hexagonal recessed bolts which are respectively screwed into the internal threads by the other side. The constructor may be composed of a plurality of bolts that penetrate the main body assembly and the actuating assembly, and a plurality of nuts that are respectively screwed to the bolts. One or both of the main body assembly and the actuating assembly are in multiple layers (for example A laminate of two or more layers may be preferably formed, and the laminates may be decomposed and bonded to each other. For example, a fluid passage is provided to support the main body of the diaphragm as the valve body. In the laminate, the second laminate in which the separator is fixed via the diaphragm presser is superposed on the first laminate, and the first laminate and the second laminate are decomposed, thereby forming a main assembly. In this way, the disassembly of the main body assembly is easy, and the maintainability of the parts replacement, disassembly cleaning, and the like is further improved. Further, it is preferable to superpose the third laminate body of the cylinder chamber in which the piston moves up and down and the guide shaft that holds the guide shaft. Guided The fourth laminate, which is decomposable to integrate the heavy flow direction and the conduit, and the conduit is opened and locked, and the third layer body and the fourth layer body are combined with 201115052, thereby forming the actuating assembly to be decomposably In combination with the laminated bodies, an appropriate bolting means can be used, and the fluid controller becomes a body which can be decomposed and combined with a plurality of layers, and the necessary parts are built in the laminated body, and the parts are replaced and cleaned. The maintenance property is further improved. The diaphragm and the valve seat may be made of resin, but it is preferably made of metal at the point of liquidity when it is used after being decomposed. As a three-way valve and a three-way valve are integrated. The two-head structure controller is formed of a three-way valve in which a two-way valve and a three-way valve are integrated, and a flow path for locking the lower movable side is provided on the two-way valve side and the three-way valve side, respectively. At least one of the compressed air introduction chamber and the compressed air introduction chamber for opening the flow path for moving the upper side is provided with the compressed air introduced into the flow passage lock compression empty chamber and the flow passage open compressed air introduction chamber. Compressed air connection, In the case of the two-way valve side and the three-way valve side, a compressed air introduction chamber for closing the flow path for moving the piston downward and a compressed air introduction chamber for opening the flow path for moving the piston upward are provided, respectively. The compressed air is introduced into the compressed air pipe connecting portion of the compressed air inlet chamber for the flow passage, the compressed air connecting portion on the two-way valve side, and the compressed air introducing chamber in the flow path opening on the three-way valve side, and the compressed air on the three-way side The piping connection portion communicates with the compressed air introduction chamber for the excretion on the 2-way valve side. The "there is at least one of the above-mentioned configurations" means that the combination can be a 3-way valve side lock for 2-way valve side lock, a 3-way valve side open for 2-way valve side, and 2-way valve side open for 2-way valve side. Use a 3-way valve side closing, 2-way valve side opening with a 3-way valve side opening, 2-way valve side blocking layer or closed head plug gas distribution with a gas distribution circuit for locking 201115052 and opening 3-way valve side lock, 2-way valve side lock and open 3-way valve side open, 2-way valve side lock 3-way valve side lock, and open, 2-way valve side open type 3 The combination of the valve-side closing and opening is used in combination with the 2-way valve side closing and the opening 3-way valve side closing and opening. Further, in this specification, the moving direction of the piston (the axial direction of the shaft) is the up and down direction. This direction is a convenient direction. If it is the actual installation, the vertical direction is not only the vertical direction but also the horizontal direction. EFFECTS OF THE INVENTION According to the fluid controller of the present invention, the main body assembly includes a plurality of valve bodies and an assembly of a plurality of parts for holding the body of the valve body, and an actuating assembly including a plurality of pistons And an assembly of a plurality of parts that switch a plurality of shafts of each valve body by moving up and down integrally with the piston; and separately disassembling the pre-assembled body assembly and the actuating assembly; therefore, the replacement of the valve body is required or In the case of maintenance such as disassembly cleaning, after disassembling the fluid controller into the main assembly and the actuating assembly, in the case of replacing the valve body, it is only necessary to disassemble and reassemble the main assembly, and it is also easy to perform the main assembly. The maintenance of the disassembly cleaning, part replacement or disassembly cleaning is improved. [Embodiment] Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following description, the upper and lower sides and the left and right sides refer to the upper and lower sides and the right and left of Fig. 1 . Further, the direction orthogonal to this is referred to as front and rear. A first embodiment of a fluid controller (1) according to the present invention is shown in Figs. 1 to 5 . 201115052 This fluid controller (1) is a three-way valve with a three-way, two-head (cylinder) structure that integrates the two-way valve on the left side with the three-way valve on the right side. It has a main body unit (2). a plurality of parts (丨丨) (丨2)(丨3)(丨4)(丨5) containing two left and right valve bodies (丨2) (丨3) and a main body (1 1 ) holding the valve body ( (5) ( 1 6 ) (1 7 ) assembly; and an actuating assembly (3) comprising two left and right pistons (3 1 ) ( 3 2 ) and switching the valve bodies by moving up and down integrally with the piston (1) 2) (1 3 ) The multiple parts (3 i ) of the left and right shafts (3 3 ) ( 3 4 ) (32) (33) (34) (35) (38) (39) (40) ( The assembly of 41); the main assembly (2) and the actuating assembly (3), which are respectively pre-assembled, are decomposed by a bolt means (4) by means of a combination of components. The main body (1 1 ) is formed in a rectangular parallelepiped shape, and a first hole (18) is provided on the right side surface thereof, and a second hole (19) is provided on the left side surface thereof, and a third hole is provided in front of the front surface (see FIG. 2). (2 0 ). Further, left and right circular recesses (21) (22) opening upward are provided on the upper surface of the main body (1 1 ). The first hole (18) and the second hole (1 9 ) are first inlet passages that pass from the first hole (18) to the peripheral portion of the left circular recess (21) through the opening (23a) (2) 3) and connected from the central portion of the left circular recess (2 1 ) to the first outlet passage (24) of the second hole (1 9 ), and the third hole (20) passes through the third hole (20) The second inlet passage (the opening (23b) shown in FIG. 5) to the peripheral portion of the right circular recess (22), and the first inlet passage (23) from the central portion of the right circular portion (22) The second exit passage (25) in the middle portion is connected to the first hole (18) and the second hole (19). An annular valve seat (26) is provided in the peripheral edge portion of the opening of the first outlet passage (24), and the same is provided in the peripheral edge portion of the opening of the second outlet passage (25) of the right circular recess (2 2 ). Annular seat (2 7 ). In addition to the above main body (11), the main body assembly (2) has a diaphragm (valve body) (1 2 ) (1 3 ) which is embedded in each circular recess (2 1 ) ( 2 2 ), opposite to the ring Valve 201115052 Block (26) (27) Press or leave and switch each outlet passage (24) (25): Diaphragm pressure plate (15) (16) 'Maintain diaphragm (12) (13) in a circular recess (2 1 ) ( 2 2 ); and a cuboid bonnet (b 0 nnet) (1 4 ) ' has a recess that is inserted into the upper portion of the diaphragm platen (15) (16) and opens downward. In addition to the left and right pistons (31) (32) and the left and right shafts (33) (34), the actuating assembly (3) further includes: a rectangular parallelepiped actuating cover (35), which is formed The left and right cylinder chambers (36) (37) of the right and left pistons (3 1 ) (3 2 ) are moved up and down, and the left and right cylindrical guides (38) (39) guide the shafts. Rod (33) (34); and a rectangular parallelepiped actuating cover (40) that is immovably held by the guides (38) (39). Each piston (3 1 ) ( 3 2 ) is slidably disposed in each of the cylinder chambers (36) (37) via a ring-shaped ring, with the upper surface of each piston (31) (32) and the actuation cover (35) Between the lower surfaces of the top walls is a flow passage locking compressed air introduction chamber (36a) (37a), and a flow path is opened between the lower surface of each piston (31) (32) and the upper surface of each guide (38) (39). Introduce the chamber (36b) (37b) with compressed air. The top wall of the actuating cover (35) is provided with a flow path closing compressed air pipe connecting portion (42) (43) that opens to each of the flow path closing compressed air introduction chambers (36a), and is actuated. The peripheral wall of the cover (35) (see Fig. 3) is provided with a compressed air supply connection portion (44) (45) for opening the compressed air introduction chamber (3 6 b ) (3 7 b ) for opening each flow path. . Here, in the cross-sectional view shown in FIG. 1, in order to show the compressed air introduction chamber (3 6 b ) ( 3 7 b ) to the flow path opening, the flow path opening compressed air pipe connection portion (4 4 ) ( 4 5 ) Shown by dotted line. Each of the shafts (3 3 ) ( 3 4 ) extends downward from a central portion of the lower surface of each of the pistons ( 3 1 ) ( 3 2 ), and the lower end portion thereof is downward from the lower surface of the cylindrical guide (38) (39) - 10- 201115052 Stand out and abut against the center of the diaphragm (12) (13). The cylindrical guide (38) (39) includes a large diameter portion (38a) (39a) which is disposed in the cylinder chamber (36) (37) via an O-ring and is provided in the actuator cover. (4 0 ) the upper recess is blocked; and the small diameter portion (3 8 b ) ( 3 9 b ) extends downward from the lower surface of the large diameter portion (38a) (39a), and is inserted into the actuator cover The through hole in (40) is held by a recess provided on the upper surface of the bonnet (14). In Fig. 1, 'the elastic force of each diaphragm (12) (13) is in the state where the respective shafts (33) (34) are opened at the outlet passage (24) (25) in a state where no compressed air is introduced. The respective pistons (3 1 ) ( 3 2 ) abut against the upper surface of the cylinder chamber (3 6 ) ( 3 7 ). In this state, each of the flow path opening compressed air introduction chambers (3 6 b ) ( 3 7 b ) is exhausted, and compressed air is introduced from each of the flow path blocking compressed air pipe connection portions (4 2 ) ( 4 3 ). The flow path locks the compressed air introduction chamber (36a) (37a), whereby the pistons (31) (32) move downward. With this movement, the respective shafts (3 3 ) ( 3 4 ) are moved to each The diaphragm (12) (13) latches the position below the outlet passage (24) (25). Therefore, in the three-way valve on the right side, the compressed air is introduced into the flow passage lock compressed air introduction chamber (37a) from the flow passage lock compressed air pipe connection portion (43), and the two-way valve on the left side The flow path opening compressed air pipe connecting portion (44) introduces compressed air into the flow path opening compressed air introduction chamber (36b), thereby making the left two-way valve open and the right three-way valve In the two-way valve on the left side, the compressed air is connected to the compressed air introduction chamber (3 6 a) from the compressed air distribution connection portion (42) for the flow path blocking, and the 3-way on the right side The valve is introduced into the flow-opening compressed air -11 - 201115052 into the introduction chamber (3 7b ) from the flow-opening compressed air pipe connection portion (45), thereby making the left 2-way valve closed and The 3-way valve on the right side is opened. The main body (1 1 ) and the bonnet (1 4 ) are stacked on each other to be combined with the screwing means (17) for main body bonding. As shown in FIG. 2 and FIG. 5, the main body combined with the screw detecting means (17) is A total of six internal threads (28) provided on the main body (1 1 ), a total of six bolt insertion holes (29) penetrating the bonnet (14), and a bolt inserted from the bonnet (丨4) side Insert the through holes (2 9 ) and screw them into the total of 6 hexagonal socket head bolts (3 〇) in each internal thread (28). In this way, the main body unit (2) is detachably coupled to the main body (11) as the first laminate and the reading cap (14) as the second laminate by the main body bonding bolt means (丨7). Two diaphragms (12) (13) and two diaphragm pressure plates (15) (16) are built in the interior thereof. 'Similarly' the actuating cover (35) and the actuating cover (40) are stacked on each other to be combined with the actuating coupling bolt means (4 1 ) as shown in FIG. 3, which is actuated by a human bolt means (4) 1) four total bolt insertion holes (4 6 ), which are provided by the total of four internal threads (not shown) provided on the actuating cover (35), and through the actuating cover (40), and The movable cover (40) side is inserted into each bolt insertion hole (4 6 ) and screwed into a total of four hexagonal socket bolts (4 7 ) in each internal thread. In this way, the actuator assembly (3) is detachably coupled to the actuating cover (35) as the third laminate and the actuating cover as the fourth laminate by the means of the actuating coupling bolt (4 work). (40), and built therein two active (31) (32), one shaft (33) (34) and two cylindrical guides (38) (30). As shown in FIG. 4 and the like, the 201115052 components that combine the main body assembly (2) and the actuating assembly (3) are coupled to each other by a bolt means (4) by an actuating cover (40) provided on the actuating assembly (3). Two internal threads (51), two body insertion holes (52) penetrating through the body (1 1 ) of the main body assembly (2) and the bonnet (1 4 ), and being inserted from the side of the main assembly (2) The bolt insertion holes (5 2 ) are respectively screwed into two hexagonal socket bolts (5 3 ) of the internal threads (5 1 ). In this way, the fluid controller (1) is decomposed into a laminate of a plurality of layers (shown as two layers) by means of suitable bonding means (illustrated as a combination of components with bolts) (4). (11) (14) (35) (40) The pre-assembled main assembly (2) and the actuating assembly (3). Therefore, according to the fluid controller (1), when the diaphragm (valve body) (1 2 ) (1 3 ) needs to be replaced, the disassembling components are combined with each other by bolt means (4) to be decomposed into the main body assembly (2). After the component (3) is actuated, as shown in FIG. 5, it is only necessary to disassemble the body component (2), and the diaphragm (1 2 ) (1 3 ) is replaced, and the body component (3) can be easily performed in the same manner. The maintenance of the disassembly cleaning, part replacement or disassembly cleaning is improved. The diaphragm (12) (13) and the annular seat (26) (27) are made of metal, which ensures the reproducibility of the switch when the fluid controller (1) is decomposed and reused. The fluid controller (1) is not limited to the above-described embodiment, and various modifications can be made to the configuration. For example, a multi-connection structure in which the number of holes (the number of valve bodies or the like) is three or more can be formed. Further, the structure of the actuator of the fluid controller may be all double-acting (as shown in the above embodiment, the pistons (31) (32) are moved up and down by compressed air). By changing the shape of the piston or changing the structure for moving up and down, it is also possible to form part or all of the piston to be normally closed (the movement of the piston (3 1) (32) upwards). Flow path opening-13- 201115052 Compressed air is introduced into the flow path opening compressed air introduction chamber (36b) (37b) by the compressed air pipe connection unit (4 4 ) ( 4 5 ), and the piston (31) (32) is directed. The lower movement is introduced into the flow passage lock compressed air introduction chamber (36a) (37a) by the energizing member such as a compression coil spring instead of the flow passage lock compressed air pipe connection portion (4 2 ) ( 4 3 ). The mode of the compressed air or the normal open (the movement of the piston (31) (32) downward is performed by the compressed air pipe connection portion (4 2 ) ( 4 3 ) from the flow path blocking The road lock is compressed into the compressed air introduction chamber (3 6 a) ( 3 7 a) In the row, the upward movement of the piston (3 1 ) ( 3 2 ) is replaced by an energizing member such as a compression coil spring instead of the flow path opening compressed air pipe connecting portion (44) (45). The air introduction chamber (3) (371)) is formed by introducing compressed air. Further, according to the first embodiment, the compressed air pipe connecting portions (4 2 ) (43) (43) (44) are all four, and the compressed air pipe connecting portions are opened and closed by mutual connection. 2) ( 4 3 4 3 ) (4 4 ) The introduced compressed air can be switched between the 2-way valve is open and the 3-way valve is closed, the 2-way valve is closed, and the 3-way valve is open, but it can also be As shown in Fig. 6 to Fig. 7, by reducing the compressed air pipe connection portion (68) (69) to two, and adding the required compressed air passage (71) (72), the compressed air in the slave side When the compressed air is introduced into the pipe connecting portion (68), the two-way valve is opened and the three-way valve is closed. When the compressed air is introduced from the other compressed air pipe connecting portion (69), the two-way valve is The off and 3-way valves are open. In the following description, the same components as those in the drawings are denoted by the same reference numerals, and the detailed description thereof will be omitted. In the figure 图 and the diagram γ, the fluid controller (丨) of the second embodiment is a three-way two-head (gas-14-201115052 cylinder) structure in which the left 2-way valve and the right 3-way valve are integrated. The 3-way valve person has: a main body assembly (2) 'which includes two left and right valve bodies (1 2 ) (1 3 ) and a plurality of parts (11) (12) that hold the main body (1 1 ) of the valve body (13) The assembly of (14)(15)(16)(17); and the actuating assembly (3) comprising two left and right pistons (6 1 ) (6 2 ) and by being integrated with the piston Moving a plurality of parts (6 1 ) ( 6 2 ) ( 6 3 ) ( 6 4 ) ( 6 4 ) of the left and right shafts (6 3 ) ( 6 4 ) of each valve body (1 2 ) ( 1 3 ) 5) (3 8 ) ( 3 9 ) (40 ) ( 4 1 ) assembly; the assembly can be decomposed and combined with the pre-assembled main assembly (2) and the actuating assembly (3) ° pistons (6 1 ) (6 2 ) slidably disposed in each of the cylinder chambers (6 6 ) ( 6 7 ) via the O-rings' with the top of each piston (6 1 ) ( 6 2 ) and the top of the actuation cover (6 5 ) Between the lower wall is a compressed air introduction chamber (66a) (67a)' for the flow path blocking with the lower surface of each piston (61) (62) and each guide (3) 8) The upper side of (39) is a compressed air introduction chamber (66b) (67b) for opening the flow path. The lower end of each of the shafts (6 3 ) (6 4 ) is provided with a lower end that opens into the flow passage opening compressed air introduction chamber (66b) (67b), and an upper end that opens to the upper end surface of each of the shafts (63) (64). The flow path is opened by a compressed air passage (71) (72). A compression air pipe connection portion (68) (69) is provided on the left and right sides of the actuation cover (65). These compressed air pipe connecting portions (68) (69) also serve as a flow path closing compressed air introducing chamber (66a) (67a) and a flow path opening and compressing the working gas introducing chamber (6 6 b ) (67b). That is, the compressed air on the left side is connected.卩 (6 8 ) The flow path to the 2-way valve side via the main passage ( 7 3 ) is opened = compressed air passage (1)), and the L-shaped extended passage (the passage of the (1) to the 3-way valve side is blocked. Compressed air introduction chamber (67a), right side
的壓縮空氣配管連接A 連接°P(69)經由主通路（74)通到3通閥 側的流路開放用壓縮空 工虱通路（7 2 )’並且經由倒l字狀 201115052 的延長通路（76)通到2通閥側的流路閉鎖用壓縮空氣導 入室（66a)。 再者，各延長通路（75 )( 76 )並不是在與壓縮空氣配管 連接部（ 68 ) ( 69 )相同的剖面内，而是如圖7所示，在前 後（在圖7的上下）錯離，但在圖6中，為了方便起見， 顯示於同一圖上。 於圖6中，在未導入壓縮空氣的狀態下 各隔膜 (12K13)的彈力，各軸桿（6 3 )( 6 4 )在出〇通^( 24 )( 25 ) 被開放的上方位置，各活塞⑷)(62)之上面抵接於氣缸 室（⑻⑻)的上面。在此狀態下，從左侧的壓縮空氣配 官連接部(68)冑入壓縮空氣’壓縮空氣就經由主通路 (73)及2通閥側的流路開放用壓縮空氣通路（71)被導入 2通閥側的流路開放用壓縮空氣導入室（66匕）中，並且缺 由延長通路(75)被導入3通闊側的流路閉鎖用壓缩空： 導入室⑻a)中。結果，2通閥側的活塞（61)向上方移 動，3通閥側的活塞（62)向下方移動。因此，成為2通 閥側的通路(24)為開、3通閥側的通路(⑸為_的狀態二 在圖6的狀態下，從右側的壓縮空氣配管連接 導入壓縮空氣’壓縮空氣就經由主通路(⑷及3通 的流路開放用I缩空氣通路（72)被導人3通閱The compressed air pipe connection A connection °P (69) is passed through the main passage (74) to the flow path opening compression air work passage (7 2 )' on the 3-way valve side and via the extended path of the inverted l-shaped 201115052 ( 76) A compressed air introduction chamber (66a) for closing the flow path to the 2-way valve side. Further, each of the extension passages (75) (76) is not in the same cross section as the compressed air piping connection portion (68) (69), but is shown in Fig. 7 before and after (upper and lower in Fig. 7). Off, but in Figure 6, for the sake of convenience, it is shown on the same figure. In Fig. 6, the elastic force of each diaphragm (12K13) in a state where compressed air is not introduced, and each shaft (6 3 ) (6 4 ) is opened at the upper position of the outlet (24) (25), The upper surface of the piston (4)) (62) abuts against the upper surface of the cylinder chamber ((8) (8)). In this state, compressed air is injected from the compressed air distribution connecting portion (68) on the left side. The compressed air is introduced through the main passage (73) and the flow passage opening compressed air passage (71) on the 2-way valve side. The flow path of the two-way valve side is opened in the compressed air introduction chamber (66 匕), and the flow passage for closing the three-way wide side, which is not extended by the extension passage (75), is compressed into the introduction chamber (8) a). As a result, the piston (61) on the 2-way valve side moves upward, and the piston (62) on the 3-way valve side moves downward. Therefore, the passage (24) on the two-way valve side is the passage on the open and three-way valve side (the state in which (5) is _ is in the state of Fig. 6, and the compressed air is introduced from the compressed air pipe on the right side. The main passage (the (4) and the three-way flow path opening I-shrinking air passage (72) is guided by the guide 3
開放用壓空氣導人λ. /；，L 、 堂細工轧導入至（67b)中，並且經由延長通 被導入2通閥側的流路閉鎖用壓縮空氣導入 中。結果’ 2通閥側的活塞(⑴向下方移動 ： 活塞⑽向上方移動。因此’成為2通闊側的;;= 為關、3通閥側的通路（2 5 )為開的狀態。 在此第2實施形態的流體控制器方盥 一矛1實施形 -16 - 201115052 態的流體控制器相同，零件更換或分解清洗等的維修性 提高，並且以一個操作可同時得到 2通閥的開或關與3 通閥的關或開，所以可容易且確實地進行其開關控制。 產業上之利用可能性 依據本發明的流體控制器，例如作為3通閥，為了開 關流體通路，可在各種用途中使用，零件更換或分解清 洗等的維修性提高，所以處理容易，並且使用用途擴大。 【圖式簡單說明】 圖1為顯示依據本發明的流體控制器的第1實施形態 的正面剖面圖。 圖2為顯示依據本發明的流體控制器的主體組件的立 體圖。 圖3為顯示依據本發明的流體控制器的促動組件的立 體圖。 圖4為依據本發明的流體控制器的分解立體圖。 圖5為依據本發明的流體控制器的主體組件的分解立 體圖。 圖6為顯示依據本發明的流體控制器的第2實施形態 的正面剖面圖。 圖7為同平面圖。 【主要元件符號說明】 1 流體控制器 2 主體組件 3 促動組件 4 組件彼此結合用螺栓手段 11 主體（第1層積體） -17- 201115052 12 ' 13 隔膜（閥體） 14 閥帽（第2層積體） 1 5 ' 1 6 隔膜壓板 17 主體結合用螺栓手段 23 第1入口通路（流體通路） 24 第1出口通路（流體通路） 25 第2出口通路（流體通路） 31 ' 32 活塞 33 ' 34 軸桿 35 促動蓋（第3層積體） 36 ' 37 氣缸室 36a、 37a 路閉鎖用壓縮空氣導入室 36b 、 37b 路開放用壓縮空氣導入室 38、39 狀導承 40 促動罩（第4層積體） 42 ^ 43 流路閉鎖用壓縮空氣配管連接部 61 ' 62 活塞 63 ' 64 軸桿 65 促動蓋（第3層積體） 66 ' 67 氣缸室 66a、 67a 流路闊鎖用壓縮空氣導入室 66b 、 67b 流路開放用壓縮空氣導入室 68 ' 69 壓縮空氣配管連接部 -18-The open-air air-conducting λ. /;, L, and the fine-worked rolling are introduced into (67b), and the compressed air is introduced into the flow path of the 2-way valve side via the extension. [Results] The piston on the 2-way valve side ((1) moves downward: the piston (10) moves upward. Therefore, 'the two-way wide side;;= the closed, 3-way valve side passage (2 5 ) is open. The fluid controller of the second embodiment is the same as the fluid controller of the type -16150150, and the maintenance of the parts replacement or the disassembly cleaning is improved, and the 2-way valve can be simultaneously opened by one operation. Or shutting off or opening the 3-way valve, so that its switching control can be easily and surely performed. Industrial Applicability According to the fluid controller of the present invention, for example, as a 3-way valve, in order to switch the fluid passage, various types can be used. It is easy to handle, and the use is expanded, and the use of the parts is easy to use, and the use is expanded. Fig. 1 is a front cross-sectional view showing the first embodiment of the fluid controller according to the present invention. Figure 2 is a perspective view showing the main assembly of the fluid controller in accordance with the present invention. Figure 3 is a perspective view showing the actuating assembly of the fluid controller in accordance with the present invention. Fig. 5 is an exploded perspective view of the main body assembly of the fluid controller according to the present invention. Fig. 6 is a front cross-sectional view showing a second embodiment of the fluid controller according to the present invention. [Main component symbol description] 1 Fluid controller 2 Main body assembly 3 Actuating assembly 4 Components are combined with bolts 11 Main body (1st laminate) -17- 201115052 12 ' 13 Diaphragm (valve body) 14 bonnet ( 2nd laminate) 1 5 ' 1 6 Diaphragm pressure plate 17 Main body coupling bolt means 23 First inlet passage (fluid passage) 24 First outlet passage (fluid passage) 25 Second outlet passage (fluid passage) 31 ' 32 Piston 33 ' 34 Axle 35 Actuating cover (3rd layer) 36 ' 37 Cylinder chambers 36a, 37a Road blocking compressed air introduction chambers 36b, 37b Road opening compressed air introduction chamber 38, 39-shaped guide 40 Actuation Cover (4th layer) 42 ^ 43 Compressed air piping connection part 61 ' 62 Piston 63 ' 64 Shaft 65 Actuating cover (3rd layer) 66 ' 67 Cylinder chamber 66a, 67a Flow path Compressed air introduction chamber for wide lock 66b, 67b Compressed air introduction chamber for flow path opening 68 ' 69 Compressed air piping connection -18-