WO2011024771A1

WO2011024771A1 - Fluid controller

Info

Publication number: WO2011024771A1
Application number: PCT/JP2010/064210
Authority: WO
Inventors: 久敏赤本; 睦典小艾
Original assignee: 株式会社フジキン
Priority date: 2009-08-31
Filing date: 2010-08-24
Publication date: 2011-03-03
Also published as: KR20120031519A; CN102483173A; CN102483173B; JPWO2011024771A1; JP5560276B2; TW201115052A; TWI470159B; KR101337086B1

Abstract

Provided is a fluid controller in which the maintenance property such as replacement of parts or disassembly and washing is enhanced. A fluid controller is provided with a body assembly (2) which is an assembly of a plurality of parts including two valve bodies and a body (11) which holds the valve bodies, and an actuator assembly (3) which is an assembly of a plurality of parts including two pistons and two stems (33, 34) which open and close the respective valve bodies by moving up and down integrally with the pistons. The body assembly (2) and the actuator assembly (3), both of which have been respectively assembled in advance, are connected to each other by an assembly connecting screw means (4) so as to enable disassembly when required.

Description

Fluid controller

The present invention relates to a fluid controller in which a plurality of valve bodies, a plurality of stems, and a plurality of pistons are assembled and handled as one component like a three-port two-head (two-cylinder) type three-port valve.

Conventionally, as a fluid controller, a plurality of parts including a plurality of valve bodies, a body that holds the valve bodies, a plurality of stems that open and close each valve body by moving up and down, and a piston that moves each stem up and down A three-port valve that is an assembly is known (Patent Document 1).

In the three-port valve of Patent Document 1, for example, when replacing the valve body, the components constituting the fluid controller are sequentially removed, the valve body is replaced, and then the removed components are sequentially assembled. It has become. In addition, when cleaning, either a single cleaning is performed using a dedicated cleaning machine, or all parts are disassembled before cleaning.

JP 2000-320700 A

The thing of the above-mentioned patent document 1 has a problem that it takes time to replace the valve body, and there is also a problem that it takes cost and trouble for disassembly and cleaning.

An object of the present invention is to provide a fluid controller having improved maintainability such as parts replacement and disassembly and cleaning.

The fluid controller according to the present invention opens and closes each valve body by moving up and down integrally with a body assembly that is an assembly of a plurality of parts including a plurality of valve bodies and a body that holds the valve bodies. And an actuator assembly that is an assembly of a plurality of parts including a plurality of stems, and a body assembly and an actuator assembly that are assembled in advance are connected to each other so as to be disassembled.

The “plurality” is two, for example, but can be three or more. In the case of having two valve bodies and a piston, the fluid controller is used as a three-port valve (three-port fluid controller) as a whole, for example, a two-port valve and a three-port valve are integrated. However, the present invention is not limited to this. The fluid controller may be in the form of a diaphragm valve, for example, and is not limited thereto, and may be in the form of a bellows valve, for example. The body is provided with a plurality of passages having a required shape and openings (ports opened on the side surface or the bottom surface).

The actuator structure may be one in which both the upward movement and the downward movement of the piston are performed by compressed air (double action type), and the piston is biased in a direction in which the passage is normally opened by a biasing member. The piston may be moved in a direction to close the passage with compressed air, and the piston may be urged in a direction in which the passage is normally closed by a biasing member, and the passage is opened in the direction by compressed air. It may be normally closed to move the piston. In addition to moving the piston up and down with compressed air, the piston can also be moved up and down by electromagnetic drive.

A fluid controller including a plurality of valve bodies and a plurality of pistons is usually handled as a single assembly (finished product) that is composed of a plurality of parts and can be disassembled. There was no "assembly" as. On the other hand, according to the present invention, the fluid controller, which is an assembly as a finished product, is constituted by a body assembly and an actuator assembly, which are assemblies as intermediate products. That is, at the time of assembly, the body assembly and the actuator assembly are each assembled first, and the body assembly and the actuator assembly are coupled in a dismountable manner, whereby the fluid controller according to the present invention is obtained. Therefore, when it is necessary to replace the valve body, after disassembling the body assembly and the actuator assembly, only the body assembly is further disassembled and the valve body may be replaced. Also, disassembly and cleaning of the body assembly can be easily performed in the same manner, and maintenance performance such as replacement of parts and disassembly and cleaning is improved.

In order to detachably connect the body assembly and the actuator assembly, for example, an appropriate screw means may be used. Instead of the screw means, a connection clamp such as a sanitary clamp or other fixing jig is used. You can also. The screw means includes, for example, a plurality of female screws provided at a predetermined position of one of the body assembly and the actuator assembly, and a plurality of hexagon socket bolts that pass through the other and are respectively screwed into the female screws. In some cases, a plurality of bolts penetrating the body assembly and the actuator assembly and a plurality of nuts respectively screwed to the bolts.

Either or both of the body assembly and the actuator assembly are preferably formed of a laminate of a plurality (for example, two layers, but may be three or more layers), and the laminates are coupled so as to be disassembled. More preferably.

For example, a body that supports a diaphragm as a valve body that is provided with a fluid passage is used as a first laminated body, and a second laminated body that fixes the diaphragm via a diaphragm holder is overlaid on the first laminated body, It is preferable that the body assembly is formed by the 1 laminated body and the 2nd laminated body being connected so that decomposition | disassembly is possible. If it does in this way, disassembly of a body assembly will become easy and maintenance nature, such as parts exchange and disassembly washing, will improve further.

Moreover, the 3rd laminated body in which the cylinder chamber in which a piston moves up and down was formed and the 4th laminated body holding the guide which guides a stem were piled up, and the 3rd laminated body and the 4th laminated body can be disassembled. It is preferable that the actuator assembly is formed by being coupled to each other. An appropriate screw means can be used for releasably coupling the laminates.

In this way, the fluid controller is configured such that a plurality of laminates are releasably coupled, and necessary components are built in these laminates, so that maintainability such as parts replacement and disassembly cleaning is further improved. improves.

The diaphragm and the valve seat may be made of resin, but are preferably made of metal in terms of reproducibility of opening and closing when reused after disassembly.

As a fluid controller having a 3 port 2 head structure in which a 2 port valve and a 3 port valve are integrated, a 2 port valve and a 3 port valve are integrated in a 3 port 2 head structure. At least one of a compressed air introduction chamber for closing the flow path for moving the piston downward and a compressed air introduction chamber for opening the flow path for moving the piston upward is provided on the port valve side and the 3-port valve side, respectively. , A compressed air pipe connecting part for introducing compressed air into the channel closing compressed air introducing chamber and the channel opening compressed air introducing chamber may be provided. The port valve side is provided with a compressed air introducing chamber for closing the flow path for moving the piston downward and a compressed air introducing chamber for opening the flow path for moving the piston upward, respectively. Compressed air piping connection portions for introducing compressed air into the compressed air introduction chamber are provided, and the compressed air piping connection portion on the 2-port valve side and the compressed air introduction chamber for opening the flow path on the 3-port valve side are communicated with each other. The compressed air piping connection part on the 3 port valve side and the compressed air introduction chamber for opening the flow path on the 2 port valve side may be communicated with each other.

In the former configuration, “at least one is provided” means for closing the 2-port valve side, for closing the 3-port valve side, for closing the 2-port valve side, for opening the 3-port valve side, for opening the 2-port valve side -3 port valve side closing, 2 port valve side opening, -3 port valve side opening, 2 port valve side closing and opening, -3 port valve side closing, 2 port valve side closing and opening, -3 For port valve side opening, for 2 port valve side closing, for 3 port valve side closing and opening, for 2 port valve side opening, for 3 port valve side closing and opening, for 2 port valve side closing and for opening This means that a total of nine combinations for closing and opening the three-port valve side are possible.

In this specification, the moving direction of the piston (the axial direction of the stem) is referred to as the vertical direction. This direction is convenient, and in actual mounting, the vertical direction is not only the vertical direction but also the horizontal direction.

According to the fluid controller of the present invention, a body assembly that is an assembly of a plurality of parts including a plurality of valve bodies and a body that holds the valve bodies, and a plurality of pistons and the respective valve bodies are moved up and down integrally therewith. Actuator assembly, which is an assembly of a plurality of parts including a plurality of stems that can be opened and closed, and a preassembled body assembly and an actuator assembly are connected to each other so that they can be disassembled. When maintenance such as cleaning is necessary, disassemble and reassemble the body assembly only when disassembling the valve body after disassembling the fluid controller into a body assembly and an actuator assembly. The body assembly can be easily disassembled and cleaned in the same way, with parts replacement and disassembly. It is improved maintenance properties such as purification.

1 is a front sectional view showing a first embodiment of a fluid controller according to the present invention. It is a perspective view which shows the body assembly of the fluid controller by this invention. It is a perspective view which shows the actuator assembly of the fluid controller by this invention. It is a disassembled perspective view of the fluid controller by this invention. It is a disassembled perspective view of the body assembly of the fluid controller by this invention. It is front sectional drawing which shows 2nd Embodiment of the fluid controller by this invention. It is the same top view.

(1) Fluid controller
(2) Body assembly
(3) Actuator assembly
(4) Screw means for connecting the assemblies together
(11) Body (first laminate)
(12) (13) Diaphragm (valve)
(14) Bonnet (second laminate)
(15) (16) Diaphragm holder
(17) Body coupling screw means
(23) First inlet passage (fluid passage)
(24) First outlet passage (fluid passage)
(25) Second outlet passage (fluid passage)
(31) (32) Piston
(33) (34) Stem
(35) Actuator cap (third laminate)
(36) (37) Cylinder chamber
(36a) (37a) Compressed air introduction chamber for channel closing
(36b) (37b) Compressed air introduction chamber for channel opening
(38) (39) Cylindrical guide
(40) Actuator case (4th laminate)
(42) (43) Compressed air piping connection for channel closing
(61) (62) Piston
(63) (64) Stem
(65) Actuator cap (third laminate)
(66) (67) Cylinder chamber
(66a) (67a) Compressed air introduction chamber for channel closing
(66b) (67b) Compressed air introduction chamber for channel opening
(68) (69) Compressed air piping connection

Embodiments of the present invention will be described below with reference to the drawings. In the following description, the upper, lower, left, and right refer to the upper, lower, left, and right in FIG. Further, a direction orthogonal to these is referred to as front and rear.

1 to 5 show a first embodiment of a fluid controller (1) according to the present invention.

This fluid controller (1) is called a three-port valve with a three-port two-head (cylinder) structure in which a left-hand two-port valve and a right-hand three-port valve are integrated. Body assembly (11) (12) (13) (14) (15) (16) (17) body assembly comprising a body (12) (13) and a body (11) holding the body (12) 2) and two left and right pistons (31) (32) and a plurality of left and right stems (33) (34) that open and close each valve body (12) (13) by moving up and down integrally therewith. Actuator assembly (3), which is an assembly of parts (31) (32) (33) (34) (35) (38) (39) (40) (41) The assembly (2) and the actuator assembly (3) are detachably coupled by the assembly-to-assembly coupling screw means (4).

The body (11) has a rectangular parallelepiped block shape, the first port (18) on the right side, the second port (19) on the left side, and the second port (19) on the front (see FIG. 2). Three ports (20) are provided. Further, left and right circular recesses (21) and (22) opening upward are provided on the upper surface of the body (11), respectively.

The first port (18) and the second port (19) are connected to the peripheral edge of the left circular recess (21) from the first port (18) via the opening (23a). The inlet passage (23) is connected to the first outlet passage (24) from the center of the left circular recess (21) to the second port (19), and the third port (20) A second inlet passage (shown in FIG. 5 by its opening (23b)) from the third port (20) to the peripheral edge of the right circular recess (22), and the right circular recess ( 22) is connected to the first port (18) and the second port (19) via the second outlet passage (25) leading from the center of the first inlet passage (23) to the middle portion of the first inlet passage (23). . An annular valve seat (26) is provided at the opening peripheral edge of the first outlet passage (24), and the opening peripheral edge of the second outlet passage (25) in the right circular recess (22) is the same. An annular valve seat (27) is provided.

In addition to the body (11), the body assembly (2) is fitted into the circular recesses (21) and (22), and is pressed and spaced apart from the annular valve seats (26) and (27). (24) (25) Diaphragm (valve) (12) (13) that opens and closes and diaphragm retainer (15) (16) that holds the diaphragm (12) (13) in the circular recess (21) (22) ) And a rectangular parallelepiped block-shaped bonnet (14) having a recess opened downwardly into which the upper portions of the diaphragm holders (15) and (16) are fitted.

The actuator assembly (3) opens to the lower side where the left and right pistons (31) (32) and the left and right pistons (31) (32) can be moved up and down in addition to the left and right pistons (31) (32) and the left and right stems (33) (34). A rectangular parallelepiped block-shaped actuator cap (35) in which left and right cylinder chambers (36) and (37) are formed, and left and right cylindrical guides (38) and (39) for guiding each stem (33) and (34), A rectangular parallelepiped block-like actuator case (40) that holds the guides (38) and (39) so as not to move is provided.

Each piston (31) (32) is slidably disposed in each cylinder chamber (36) (37) via an O-ring, and the upper surface of each piston (31) (32) and actuator cap (35 ) Between the lower surface of the top wall of each of the pistons (31), (32) and the upper surfaces of the guides (38), (39). Are the compressed air introduction chambers (36b) and (37b) for opening the flow path. The top wall of the actuator cap (35) is provided with a compressed air pipe connection part (42) (43) for closing the flow path leading to each compressed air introduction chamber (36a) (37a) for closing the flow path. The peripheral wall (see FIG. 3) of 35) is provided with compressed air pipe connection portions (44) and (45) for opening the flow channels that lead to the compressed air introduction chambers (36b) and (37b) for opening the flow channels. Here, in order to show that the compressed air pipe connection portions (44) and (45) for opening the flow passage lead to the compressed air introduction chambers (36b) and (37b) for opening the flow passage in the cross-sectional view shown in FIG. Are indicated by broken lines.

Each stem (33) (34) extends downward from the center of the lower surface of each piston (31) (32), and its lower end protrudes downward from the lower surface of the cylindrical guide (38) (39), It is made to contact | abut to the center part of a diaphragm (12) (13).

The cylindrical guides (38) and (39) are arranged in the cylinder chambers (36) and (37) via O-rings and are received by large diameter portions (received by recesses provided on the upper surface of the actuator case (40)). 38a) (39a) and a recess provided on the upper surface of the bonnet (14) through the through hole provided in the actuator case (40) extending downward from the lower surface of the large diameter portion (38a) (39a). The small-diameter portion (38b) (39b) is received.

In FIG. 1, in a state where compressed air is not introduced, the stems (33) and (34) are located above the outlet passages (24) and (25) by the elastic force of the diaphragms (12) and (13). The upper surfaces of the pistons (31) and (32) are in contact with the upper surfaces of the cylinder chambers (36) and (37). From this state, the compressed air introduction chambers (36b) (37b) for opening the respective channels are exhausted, and the compressed air is compressed from the compressed air pipe connection portions (42), (43) for closing the respective channels. By introducing the air into the air introduction chamber (36a) (37a), each piston (31) (32) moves downward, and accordingly, each stem (33) (34) is moved to each diaphragm (12). (13), the outlet passages (24) and (25) are moved to a lower position where they are closed. Accordingly, in the right three-port valve, the compressed air is introduced from the compressed air pipe connection portion (43) for closing the channel into the compressed air introduction chamber (37a) for closing the channel, and in the two-port valve on the left side, By introducing compressed air from the open compressed air pipe connection part (44) into the compressed air introduction chamber (36b) for opening the flow path, the left 2-port valve is opened and the right 3-port valve is closed. In addition, in the left two-port valve, the compressed air is introduced into the compressed air introduction chamber (36a) for closing the flow path from the compressed air piping connection part (42) for closing the flow path, and the three ports on the right side. In the valve, the compressed air is introduced into the compressed air introduction chamber (37b) for opening the flow path from the compressed air pipe connection part (45) for opening the flow path, thereby closing the left two-port valve and The port valve can be opened.

The body (11) and the bonnet (14) are overlapped with each other and joined by body coupling screw means (17). As shown in FIGS. 2 and 5, the body coupling screw means (17) A total of six female screws (28) provided on the body (11), a total of six bolt insertion holes (29) passing through the bonnet (14), and each bolt insertion hole (29) from the bonnet (14) side It is composed of a total of six hexagon socket head bolts (30) that are inserted into the respective female screws (28). Thus, in the body assembly (2), the body (11) as the first laminated body and the bonnet (14) as the second laminated body are detachably coupled by the body coupling screw means (17), Two diaphragms (12) and (13) and two diaphragm holders (15) and (16) are built in the inside.

Similarly, the actuator cap (35) and the actuator case (40) are overlapped with each other and coupled by the actuator coupling screw means (41). The actuator coupling screw means (41) is shown in FIG. Thus, a total of four female screws (not shown) provided in the actuator cap (35), a total of four bolt insertion holes (46) penetrating the actuator case (40), and each from the actuator case (40) side A total of four hexagon socket head bolts (47) inserted through the bolt insertion holes (46) and screwed into the respective female screws are provided. Thus, in the actuator assembly (3), the actuator cap (35) as the third laminated body and the actuator case (40) as the fourth laminated body are detachably coupled by the actuator coupling screw means (41). In addition, two pistons (31) and (32), two stems (33) and (34), two cylindrical guides (38) and (39), and the like are incorporated therein.

As shown in FIG. 4 and the like, the assembly-to-assembly screw means (4) for connecting the body assembly (2) and the actuator assembly (3) is provided on the actuator case (40) of the actuator assembly (3). Two bolts (51), two bolt insertion holes (52) that penetrate the body (11) and bonnet (14) of the body assembly (2), and bolt insertion holes (52) from the body assembly (2) side It is composed of two hexagon socket head bolts (53) that are inserted and screwed into the female screws (51).

Thus, the fluid controller (1) is composed of a multilayer body (11, 14), (35), and (40) each having a plurality of layers (two layers in the figure), and a pre-assembled body assembly (2) and actuator assembly ( And 3) are connected to each other by appropriate connecting means (illustrated screw means for connecting the assemblies) (4). Therefore, according to this fluid controller (1), when the diaphragm (valve) (12) (13) needs to be replaced, the assembly assembly coupling screw means (4) is removed to remove the body assembly. After disassembling the actuator assembly (2) and the actuator assembly (3), as shown in FIG. 5, only the body assembly (2) may be further disassembled and the diaphragms (12) and (13) may be replaced. The assembly (3) can be easily disassembled and cleaned in the same way, and maintenance such as parts replacement and disassembly cleaning is improved.

The diaphragm (12) (13) and the annular valve seat (26) (27) are both made of metal, so that the opening and closing reproducibility during reuse after disassembling the fluid controller (1) is improved. It is secured.

The fluid controller (1) is not limited to the above-described embodiment, and the configuration thereof can be variously changed. For example, the fluid controller (1) can have a number of ports (number of valve bodies, etc.) of three or more. It can also be a continuous structure. In addition, the structure of the actuator of the fluid controller (1) may be all double action type (a form in which both the vertical movement of the pistons (31) and (32) is performed by compressed air as shown in the above embodiment). By changing the shape of the piston or changing the configuration to move it up or down, part or all of it is normally closed (the upward movement of the pistons (31) and (32) is the compressed air for opening the flow path). The compressed air is introduced into the compressed air introduction chamber (36b) (37b) for opening the flow path from the pipe connection (44) (45), and the downward movement of the piston (31) (32) is for closing the flow path. Instead of introducing compressed air from the compressed air piping connection part (42) (43) into the compressed air introduction chamber (36a) (37a) for closing the flow path, it is implemented by a biasing member such as a compression coil spring) or normally open (The downward movement of the piston (31) (32) is connected to the compressed air piping for closing the flow path. (42) Compressed air is introduced from the (43) into the compressed air introduction chamber (36a) (37a) for closing the flow path, and the upward movement of the pistons (31) (32) is performed by compressed air piping for opening the flow path. Instead of introducing compressed air from the connection portions (44) and (45) into the compressed air introduction chambers (36b) and (37b) for opening the flow path, it is possible to adopt a configuration in which the biasing member such as a compression coil spring is used.

Moreover, according to said 1st Embodiment, there are four compressed air piping connection parts (42) (43) (43) (44), and each compressed air piping connection part (42) (43) (43 ) By turning the compressed air introduced from (44) on and off in relation to each other, the two-port valve is open and the three-port valve is closed, and the two-port valve is closed and the three-port valve is open. As shown in FIGS. 6 and 7, by reducing the number of compressed air pipe connections (68) (69) to two and adding the required compressed air passages (71) (72), When the compressed air is introduced from the compressed air piping connection (68), the 2-port valve is opened and the 3-port valve is closed, and when the compressed air is introduced from the other compressed air piping connection (69), The 2-port valve may be closed and the 3-port valve may be open. In the following description, the same components as those in FIG. 1 are denoted by the same reference numerals, and detailed description thereof is omitted.

6 and 7, the fluid controller (1) of the second embodiment includes a 3-port valve having a 3-port 2-head (cylinder) structure in which a 2-port valve on the left side and a 3-port valve on the right side are integrated. A plurality of parts (11) (12) (13) (14) (15) (16) including two left and right valve bodies (12) (13) and a body (11) for holding them (17) body assembly (2), two left and right pistons (61) (62) and two left and right pistons (12) (13) that open and close each valve body by moving up and down together Actuator assembly (3) which is an assembly of a plurality of parts (61) (62) (63) (64) (65) (38) (39) (40) (41) including stem (63) (64) The body assembly (2) and the actuator assembly (3), which are assembled in advance, are connected to each other by a screw means (4) for connecting the assemblies to each other.

Each piston (61) (62) is slidably disposed in each cylinder chamber (66) (67) via an O-ring, and the upper surface of each piston (61) (62) and actuator cap (65 ) Is the compressed air introduction chamber (66a) (67a) for closing the flow path between the lower surface of each piston (61) (62) and the upper surface of each guide (38) (39). Is a compressed air introduction chamber (66b) (67b) for opening the flow path. At the top of each stem (63) (64), the lower end communicates with the compressed air introduction chamber (66b) (67b) for opening the flow path, and the upper end opens at the upper end surface of each stem (63) (64). Compressed air passages (71) (72) for opening the flow passage are provided.

The actuator cap (65) is provided with compressed air piping connections (68, 69) on the left and right sides, respectively. These compressed air pipe connections (68) (69) are also used as the compressed air introduction chambers (66a) (67a) for closing the flow paths and the compressed air introduction chambers (66b) (67b) for opening the flow paths. ing. That is, the left compressed air pipe connecting portion (68) communicates with the two-port valve side passage opening compressed air passage (71) through the main passage (73), and an inverted L-shaped extension passage. (75) is connected to the compressed air introduction chamber (67a) for closing the flow path on the 3 port valve side, and the compressed air pipe connection part (69) on the right side is connected to the 3 port valve via the main passage (74). To the compressed air passage (72) for opening the flow passage on the side, and to the compressed air introduction chamber (66a) for closing the flow passage on the two-port valve side through the inverted L-shaped extension passage (76). Yes.

The extension passages (75) and (76) are not in the same cross section as the compressed air pipe connection portions (68) and (69), but as shown in FIG. Although they are shifted, in FIG. 6, they are shown in the same figure for convenience.

In FIG. 6, in a state where compressed air is not introduced, the stems (63) and (64) are moved upwardly from the outlet passages (24) and (25) by the elastic force of the diaphragms (12) and (13). The upper surfaces of the pistons (61) and (62) are in contact with the upper surfaces of the cylinder chambers (66) and (67). In this state, when compressed air is introduced from the compressed air pipe connection part (68) on the left side, the compressed air passes through the main passage (73) and the compressed air passage (71) for opening the passage on the two-port valve side. The air is introduced into the compressed air introduction chamber (66b) for opening the flow path on the port valve side and introduced into the compressed air introduction chamber (67a) for closing the flow path on the 3-port valve side via the extension passage (75). As a result, the piston (61) on the 2-port valve side moves upward, and the piston (62) on the 3-port valve side moves downward. Accordingly, the passage (24) on the 2-port valve side is open and the passage (25) on the 3-port valve side is closed.

In the state of FIG. 6, when compressed air is introduced from the compressed air pipe connection part (69) on the right side, the compressed air passes through the main passage (74) and the compressed air passage (72) for opening the passage on the three-port valve side. Are introduced into the compressed air introduction chamber (67b) for opening the flow path on the 3-port valve side and introduced into the compressed air introduction chamber (66a) for closing the flow path on the 2-port valve side through the extension passage (76). The As a result, the piston (61) on the 2-port valve side moves downward, and the piston (62) on the 3-port valve side moves upward. Accordingly, the passage (24) on the 2-port valve side is closed and the passage (25) on the 3-port valve side is opened.

In the second embodiment, as in the first embodiment, maintainability such as component replacement and disassembly and cleaning is improved, and the opening and closing of the 2-port valve and the closing or opening of the 3-port valve are improved. Can be obtained simultaneously by one operation, and the opening / closing control can be easily and reliably performed.

The fluid controller according to the present invention can be used in various applications, for example, as a three-port valve to open and close the fluid passage, and is easy to handle because of improved maintenance such as parts replacement and disassembly and cleaning. At the same time, the usage is expanded.

Claims

A plurality of valve assemblies and a plurality of parts including a body holding the body assembly, and a plurality of pistons and a plurality of stems that open and close each valve body by moving up and down integrally therewith A fluid controller comprising: an actuator assembly which is an assembly of parts, wherein a body assembly and an actuator assembly assembled in advance are releasably coupled to each other.
The fluid controller according to claim 1, wherein either or both of the body assembly and the actuator assembly are formed of a plurality of laminated bodies.
The body that supports the diaphragm as a valve body with a fluid passage is provided as a first laminated body, and a second laminated body that fixes the diaphragm via a diaphragm retainer is superposed on the first laminated body. 3. The fluid controller according to claim 2, wherein a body assembly is formed by releasably connecting the body and the second laminated body.
The third laminated body in which the cylinder chamber in which the piston moves up and down is overlapped with the fourth laminated body that holds the guide for guiding the stem, and the third laminated body and the fourth laminated body are coupled so as to be disassembled. 4. The fluid controller according to claim 2, wherein an actuator assembly is formed.
Compressed air introduction chamber for closing the flow path for moving the piston downward on the 2-port valve side and the 3-port valve side, having a 3-port 2-head structure in which the 2-port valve and the 3-port valve are integrated. And at least one of a channel opening compressed air introduction chamber for moving the piston upward, and introduces compressed air into the channel closing compressed air introduction chamber and the channel opening compressed air introduction chamber. The fluid controller according to any one of claims 1 to 4, wherein a compressed air pipe connection portion is provided.
Compressed air introduction chamber for closing the flow path for moving the piston downward on the 2-port valve side and the 3-port valve side, having a 3-port 2-head structure in which the 2-port valve and the 3-port valve are integrated. And a compressed air introduction chamber for opening the flow passage for moving the piston upward, and a compressed air pipe connection portion for introducing the compressed air into each compressed air introduction chamber for closing the flow passage, respectively, The 2 port valve side compressed air pipe connection and the 3 port valve side flow path opening compressed air introduction chamber communicate with each other, and the 3 port valve side compressed air pipe connection part and the 2 port valve side flow path opening compression The fluid controller according to claim 1, wherein the fluid introduction chamber communicates with the air introduction chamber.