JP4303177B2 - Chemical valve - Google Patents

Description

  The present invention relates to a chemical valve for communicating a plurality of diaphragm valves communicating with a common port with individual output ports.

  In a semiconductor manufacturing apparatus, a liquid crystal manufacturing apparatus, etc., for example, a plurality of fluids such as water and chemicals are mixed and supplied at a predetermined flow rate, or a plurality of other types of fluids are appropriately mixed and supplied to one fluid. In addition, in order to distribute and supply one fluid to a plurality of locations, a chemical valve having a plurality of ports is used. FIG. 17 is a plan view of a conventional chemical valve 100. 18 is a cross-sectional view taken along the line GG in FIG.

  The chemical valve 100 is a three-port valve that includes a common port 102, a first port 103, and a second port 104 provided in the body 101, and switches the communication state of the ports by the first diaphragm valve 105 and the second diaphragm valve 106. . The body 101 is formed by molding a resin into a rectangular parallelepiped block shape, and a horizontal hole 107 is horizontally drilled in the longitudinal direction from the side surface. In the body 101, valve chambers 110 and 111 partitioned by diaphragms 108 and 109 are formed by attaching first and second diaphragm valves 105 and 106 to mounting openings formed on the upper side surface. On the same axis as 111, valve holes 112 and 113 are drilled so as to communicate vertically with respect to the lateral hole 107 from the upper side. Valve seats 114 and 115 are provided at openings of the valve holes 112 and 113 so that the diaphragms 108 and 109 come into contact with or separate from each other. In addition, the body 101 is formed with flow paths 116 and 117 that allow the valve chamber 110 and the first port 103 to communicate with each other, and the valve chamber 111 and the second port 104 to communicate with each other, and the common port 102 and the lateral hole 107 communicate with each other. A flow path 118 is formed, and the opening of the lateral hole 107 is sealed with a sealing member 119.

Accordingly, in the chemical valve 100, the common port 102 communicates with the second port 103 via the flow path 118, the lateral hole 107, the valve hole 112, the valve seat 114, the valve chamber 110, and the flow path 116, while the lateral hole 107, the valve If the opening and closing valve operations of the first and second diaphragm valves 105 and 106 are controlled by communicating with the third port 104 through the hole 113, the valve seat 115, the valve chamber 111, and the flow path 117, respectively, the common port 102 is connected to the third port 104. The first port 103 or the second port 104 can be communicated.
In addition, in this specification, since the chemical valve 100 is publicly implemented and a prior art document that is approximate cannot be found, information on the prior art document is not disclosed.

  However, in the conventional chemical valve 100, since the common port 102 is connected in the middle of the horizontal hole 107, a space X is formed on the opposite side of the first and second diaphragm valves 105 and 106 across the connecting portion, and the liquid pool is formed. Was generated.

That is, for example, when fluid is supplied from the common port 102 to the first and second ports 103 and 104, most of the fluid flows from the flow path 118 to the first and second diaphragm valves 105 and 106 side of the lateral hole 107. Although the fluid is output from the first and second ports 103 and 104, a part of the fluid flows into the space X. Since the fluid forms a flow in a direction in which it easily flows, the fluid that has flowed into the space X tends to stagnate. In addition, since the first and second diaphragm valves 105 and 106 are disposed on the downstream side of the space X, the chemical liquid valve 100 has a space even if the opening and closing operations of the first and second diaphragm valves 105 and 106 are switched. Fluid near X cannot be pushed out.
For example, when the first and second fluids supplied to the first and second ports 103 and 104 are switched and output from the common port 102, for example, the first diaphragm valve is closed with the second diaphragm valve 106 closed. 105 is opened, and the first fluid supplied to the first port 103 is output from the common port 102 via the lateral hole 107. Since most of the first fluid flows to the common port 102 to form a flow, the first fluid that has flowed into the space X tends to stagnate. Thereafter, when the first diaphragm valve 105 is closed and the second diaphragm valve 106 is opened, the second fluid supplied to the second port 104 is output from the common port 102 via the lateral hole 107. At this time, most of the second fluid also flows to the common port 102 to form a flow, so that it is difficult to push out the fluid staying in the space X.
As described above, the chemical valve 100 is liable to stagnate the space X and easily generate a liquid pool regardless of which of the common port 102, the first port 103, and the second port 104 is pressurized. Liquid pools are problematic because they change the properties of the fluid and adversely affect product quality.

  In addition, since the chemical valve 100 seals the opening of the lateral hole 107 with the sealing member 119, there is a risk of leakage from between the body 101 and the sealing member 119.

  The present invention has been made to solve the above-described problems, and an object of the present invention is to provide a chemical valve that can reduce a liquid pool portion and a leakage portion.

The chemical valve according to the present invention has the following configuration.
(1) The body is provided with a first port, a second port, and a third port, and a first diaphragm valve attached to the body communicates with the first port and the third port, In a chemical valve in which a second diaphragm valve attached to the body communicates with the second port and the third port , a first communication channel opening in a first valve chamber of the first diaphragm valve, and the second A second communication channel that opens to the second valve chamber of the diaphragm valve is formed in a direction that is inclined with respect to the moving direction of the valve body and faces each other , and the third port is arranged at the intersection It is characterized by being.

(2) In the invention described in (1), the side wall of the second valve chamber first connecting flow channel is the first valve chamber or to the second communication flow channel opening is opening, the first connecting flow It is characterized by being perpendicular to the path or the second communication channel .
(3) In the invention described in (1) or (2), the communication channel is a V-shaped channel.

In the chemical valve having the above-described configuration, the first valve chamber of the first diaphragm valve and the second valve chamber of the second diaphragm valve communicate with each other through a communication channel formed obliquely. The fluid supplied from the 3 ports to the first and second ports flows in the communication channel in a fixed direction, and it is difficult for a liquid pool to be generated in the communication channel. Further, since the communication flow path is formed in the body, it is not necessary to seal the body with a sealing member or the like, and the number of leakage points is reduced as compared with a conventional chemical valve.
Therefore, according to the chemical valve of the present invention, it is possible to reduce the liquid reservoir and the leaked portion.

Further, a chemical valve of the present invention, first the communication passage is opened, the side wall of the second valve chamber, because it is perpendicular to the communication passage, easily the communication flow path is formed such a drill, moreover Since the fluid forms a flow along the side walls of the first and second valve seats, it is easy to input and output the fluid between the first and second valve chambers and the communication flow path, and it is difficult to generate a staying portion.
Further, in the chemical valve of the present invention, the first and second valve chambers communicate with each other through the V-shaped channel, so that the communication channel can be easily provided without increasing the leak location.

(First embodiment)
Next, an embodiment of a chemical valve according to the present invention will be described with reference to the drawings. FIG. 1 is an external perspective view of the chemical valve 1A. FIG. 2 is a plan view of the chemical valve 1A.
Like the conventional chemical valve 100 (see FIGS. 17 and 18), the chemical valve 1A is incorporated in a semiconductor manufacturing apparatus or a liquid crystal manufacturing apparatus, and distributes and supplies one type of fluid or switches between two types of fluid. Used to supply. In the chemical valve 1A, the first and second diaphragm valves 6A and 6B are mounted on one body 2A, and a common port provided in the body 2A (corresponding to “third port” in the claims). 3. The communication state of the first port 4 and the second port 5 is switched by the first diaphragm valve 6A and the second diaphragm valve 6B. In the chemical valve 1A, the first and second diaphragm valves 6A and 6B are placed on the upper surface of the body 2A, and the screws N are passed from the first and second diaphragm valves 6A and 6B to the screw holes 7 in the body 2A (see FIG. 7), the first and second diaphragm valves 6A and 6B are fixed to the body 2A.

FIG. 3 is a cross-sectional view taken along the line AA of FIG. 4 is a cross-sectional view taken along line BB in FIG. 5 is a cross-sectional view taken along the line CC of FIG.
The first and second diaphragm valves 6A and 6B are air operated on-off valves and have the same structure. Therefore, here, the configuration of the first diaphragm valve 6A will be described, and the configuration of the second diaphragm valve 6B will be denoted by the same reference numerals in the drawings, and description thereof will be omitted.

  As shown in FIGS. 3 and 4, the first diaphragm valve 6 </ b> A has a cover 12 attached to a cylinder 11 that opens to one side to form a piston chamber 13. The piston chamber 13 is slidably loaded with the piston 14 and is hermetically partitioned into a primary chamber 13a and a secondary chamber 13b. A spring 15 is contracted in the primary chamber 13a, and a downward force in the figure is always applied to the piston 14. In the piston chamber 13, the breathing hole 16 opened in the cover 12 communicates with the primary chamber 13 a, while the operation port 17 established in the cylinder 11 communicates with the secondary chamber 13 b, and operation air is supplied to the operation port 17. If the secondary chamber 13b is supplied and pressurized, an upward force in the figure is applied to the piston 14, and if the operation air supply is stopped, the upward force in the figure can be released.

In the first and second diaphragm valves 6A and 6B, the leg portion 18 of the piston 14 penetrates the partition wall of the cylinder 11 and protrudes from the secondary chamber 13b toward the body 2A, and is screwed into the first and second diaphragms 19 and 20, respectively. Match.
In the first and second diaphragm valves 6A and 6B, the cylinder 11, the cover 12, and the like are formed of a resin such as PPS (polyphenylene sulfide) from the viewpoint of corrosion resistance and the like.

  On the other hand, as shown in FIGS. 3 to 5, the body 2 </ b> A is made by injection molding or cutting a resin such as PFA (perfluoroalkyl vinyl ether copolymer) or PTFE (polytetrafluoroethylene) from the viewpoint of corrosion resistance or the like. The common port 3 is individually communicated with the first and second ports 4 and 5 via the first and second diaphragm valves 6A and 6B. The first and second ports 4 and 5 open on the side surface opposite to the side surface on which the common port 3 opens, and are provided in a direction opposite to the common port 3 by 180 degrees. As shown in FIGS. 3 and 4, the first and second bottomed holes 21 and 22 are opened on the upper side surface of the body 2 </ b> A, and are formed in the openings of the first and second bottomed holes 21 and 22. The first and second diaphragm valves 6A and 6B are tightly fitted and connected to the recesses 23 and 24, respectively. The peripheral edges of the first and second diaphragms 19 and 20 are sandwiched between the recesses 23 and 24 of the body 2A and the first and second diaphragm valves 6A and 6B. The body 2A and the first and second diaphragm valves The first and second valve chambers 25 and 26 are formed by airtightly dividing a space formed between 6A and 6B. The first and second diaphragms 19 and 20 are formed by cutting out a resin having corrosion resistance such as PTFE into a predetermined shape in order to constitute a liquid contact surface.

The body 2A is formed with first and second valve holes 27 and 28 coaxially with the first and second valve chambers 25 and 26, and the first and second valve chambers 25 and 26 and the first and second valve holes are formed. The first and second valve seats 29 and 30 with which the first and second diaphragms 19 and 20 come into contact with or separate from each other are formed as steps formed between the first and second diaphragms 19 and 20. First and second flow paths 31 and 32 are formed in the body 2A so that the first and second ports 4 and 5 communicate with the first and second valve holes 27 and 28, respectively. The body 2A is formed with a V-shaped flow path (corresponding to a “communication flow path” in the claims) 33 for communicating the first valve chamber 25 and the second valve chamber 26, as shown in FIG. As described above, the common port 3 communicates with the V-shaped flow path 33 via the common flow path 34.

  Accordingly, in the chemical valve 1A, the common port 3 has the common flow path 34, the V-shaped flow path 33, the first valve chamber 25, the first valve seat 29, the first valve hole 27, and the first flow path 31. One port 4 communicates with the second port 5 via the common flow path 34, the V-shaped flow path 33, the second valve chamber 26, the second valve seat 30, the second valve hole 28, and the second flow path 32. A flow path is formed in communication.

The flow channel structure of the body 2A will be described in more detail. FIG. 6 is a perspective view of the body 2A. FIG. 7 is a plan view of the body 2A. 8 is a cross-sectional view taken along the line DD of FIG.
The body 2A has a common flow path 34, a V-shaped flow path 33, first and second bottomed holes 21 and 22, first and second valve holes 27 and 28, first and second flows across the common port 3. The paths 31 and 32 and the first and second ports 4 and 5 are provided at left and right symmetrical positions, respectively.
The first and second bottomed holes 21 and 22 are opened in the vertical direction from the upper side surface of the body 2A with an interval necessary for arranging the first and second diaphragm valves 6A and 6B in parallel. V-shaped flow paths 33 are opened in the side walls of the first and second bottomed holes 21 and 22.

  As shown in FIG. 8, the V-shaped flow path 33 is formed on a cross section cut in the vertical direction so as to pass through the centers of the first and second bottomed holes 21 and 22, and is formed on the side wall of the first valve chamber 25. On the other hand, the first communication channel 331 communicates obliquely and the second communication channel 332 communicates obliquely with respect to the side wall of the second valve chamber 26. The first communication channel 331 is inclined by a predetermined angle P1 toward the second bottomed hole 22 with respect to the axis L1 of the first bottomed hole 21, while the second communication channel 332 is a second bottomed hole. Inclined by a predetermined angle P2 toward the first bottomed hole 21 with respect to the axis line L2. Here, the predetermined angles P1 and P2 are angles necessary to smoothly input and output fluid between the first and second communication channels 331 and 332 and the first and second bottomed holes 21 and 22. It is desirable to set to 45 to 75 degrees. The predetermined angles P1 and P2 are desirably set to the same angle so that the first and second communication channels 331 and 332 communicate with each other between the first and second bottomed holes 21 and 22. In the present embodiment, the predetermined angles P1 and P2 are set to 60 degrees.

  The first and second communication channels 331 and 332 may be drilled in the body 2A so as to have a circular cross section with a drill, or in order to secure a flow rate, the end mill may have a non-elliptical cross section such as an oval or U shape. You may drill so that it may become circular. In this case, a drill, an end mill, or the like may hit the side walls of the first and second bottomed holes 21, 22, and part of the side walls may be inclined vertically with respect to the first and second communication channels 331, 332. If the side walls of the first and second bottomed holes 21 and 22 are uneven, it may cause a fluid to stay, which is not preferable. Therefore, the first and second bottomed holes 21 and 22 are provided with a taper of an angle perpendicular to the first and second communication channels 331 and 332 on the side wall, and the diameter increases from the lower side to the upper side. It is formed in a truncated cone shape. The first and second bottomed holes 21 and 22 are provided with first and second communication passages 331 and 321 in order to prevent the staying portion from occurring at the corners of the first and second valve chambers 25 and 26. It is desirable to set the width of the side wall according to the flow path diameter of 332.

As shown in FIGS. 6 and 7, the common port 3 is disposed in the middle of the first and second bottomed holes 21, 22, and the first and second communication channels 331, It communicates perpendicularly to the communicating portion of 332. That is, the common port 3 communicates with the middle of the V-shaped flow path 33.
Further, as shown in FIG. 8, the body 2A is formed with first and second valve holes 27 and 28 coaxially with the first and second bottomed holes 21 and 22, as shown in FIGS. The first and second flow paths 31 and 32 formed in parallel with the common flow path 34 communicate with the first and second valve holes 27 and 28 perpendicularly. First and second ports 4 and 5 are opened at the openings of the first and second flow paths 31 and 32.
The common port 3, the common flow path 34, the first and second flow paths 31, 32, and the first and second ports 4 and 5 are on the same cross section with respect to the body 2A in order to facilitate processing and piping. Is formed.

  As shown in FIG. 2, such a chemical valve 1A has resin joints 35, 36, and 37 attached to the common port 3 and the first and second ports 4 and 5, as shown in FIG. A mounting plate 38 made of a metal such as SUS or a resin such as PPS is fixed to the lower surface of the body 2A. The chemical liquid valve 1A is fixed to a semiconductor manufacturing apparatus, a liquid crystal manufacturing apparatus or the like via a mounting plate 38, and the common port 3, first and second ports 4 and 5 are connected to piping via joints 35, 36 and 37. Furthermore, an operation air supply device (not shown) is connected to the operation port 17 of the first and second diaphragm valves 6A and 6B.

  Then, for example, when the chemical liquid 1A is distributed and supplied, the chemical liquid valve 1A supplies the chemical liquid to the common port 3 in a closed state without supplying operation air to the first and second diaphragm valves 6A and 6B. To do. The chemical liquid flows from the common port 3 to the first and second valve chambers 25 and 26 via the common flow path 34 and the first and second communication flow paths 331 and 332 of the V-shaped flow path 33. Thereafter, for example, if it is desired to output the chemical solution from the first port 4, the operation air is supplied to the operation port 17 of the first diaphragm valve 4 to raise the piston 14, and the first diaphragm 19 is separated from the first valve seat 29. Let Then, the chemical liquid flows from the first valve chamber 25 to the first port 4 through the first valve seat 29, the first valve hole 27, and the first flow path 31, and is output from the first port 4. At this time, since the operation air is not supplied to the second diaphragm valve 6 </ b> B, the second diaphragm 20 seals the second valve seat 30 with the elastic force of the spring 15, and the chemical solution does not flow downstream from the second valve seat 30. Accordingly, the chemical liquid is output only from the first port 4.

  Thereafter, when it is desired to output the chemical solution from the second port 5, if the supply of the operation air to the first diaphragm valve 6A is stopped and then closed, the operation air is supplied to the second diaphragm valve 6B and opened. The chemical solution can be output only from the third port 5 by the same operation as described above. At this time, the chemical solution at the time of opening the first diaphragm valve 6A remains in the second valve chamber 26. However, when the second diaphragm valve 6B is opened, the second communication channel 332 opens the second liquid passage 332. Since the chemical liquid ejected into the two-valve chamber 26 pushes out the chemical liquid remaining in the second valve chamber 26, the old chemical liquid does not stay. In particular, after the chemical liquid ejected from the second communication channel 332 to the second valve chamber 26 hits the second diaphragm 20, the direction is changed along the thin film portion of the second diaphragm 20, and then the second valve chamber 26 is further changed. Since it flows along the side wall and then flows into the second valve hole 13, it is difficult for a stagnant portion to occur near the thin film portion of the second diaphragm 20 or the corner of the second valve chamber 26.

  In addition, the chemical valve 1A is common because the first port 4 and the second port 5 are provided in a bilaterally symmetrical position with the common port 3 interposed therebetween, and the flow path structure of the body 2A is bilaterally symmetrical with respect to the common port 3. After the chemical solution supplied to the port 3 collides with the side wall of the V-shaped flow path 33, the chemical liquid is distributed substantially uniformly to the first and second valve chambers 25 and 26 via the first and second communication flow paths 331 and 332. It is possible to output the chemical solution from the 1 port 4 and the second port 5 at substantially the same flow rate.

  Next, for example, when the chemical liquid valve 1A switches and outputs the first chemical liquid and the second chemical liquid, the first chemical liquid is supplied to the first port 4 with the first and second diaphragm valves 6A and 6B closed. And the second chemical solution is supplied to the second port 5. The first chemical liquid flows from the first port 4 through the first flow path 31 and the first valve hole 27 to the first valve seat 29, while the second chemical liquid flows from the second port 5 to the second flow path 32, the second flow path 32, and the second flow path 32. It flows to the second valve seat 30 through the two valve holes 28. Thereafter, when it is desired to output the first chemical liquid, operating air is supplied to the first diaphragm valve 6 </ b> A to raise the piston 14, and the first diaphragm 19 is separated from the first valve seat 29. Then, the first chemical liquid flows into the first valve chamber 25 from the first valve seat 29, flows to the common port 3 via the first communication flow path 331 and the common flow path 34 of the V-shaped flow path 33, and is shared Output from port 3. At this time, the first chemical liquid also flows into the second valve chamber 26 via the second communication flow path 332 of the V-shaped flow path 33, but the second diaphragm 20 is pressed by the elastic pressure of the spring 15 and the second valve seat 30. Therefore, the first chemical solution and the second chemical solution are not mixed.

  Thereafter, when it is desired to output the second chemical solution from the common port 3, if the second diaphragm valve 6B is opened after the first diaphragm valve 6A is closed, the second chemical solution is supplied by the same operation as described above. Can be output from. When the first chemical liquid is switched to the second chemical liquid, the first chemical liquid remains in the second valve chamber 26. However, when the second chemical liquid is supplied, the first chemical liquid is supplied to the second valve chamber by the second chemical liquid. Since it is pushed out from 26 to the V-shaped flow path 33, the common flow path 34, and the common port 3, it does not stay. In particular, since the second communication channel 332 is open on the side wall of the second valve chamber 26, the second chemical liquid is ejected from the second valve seat 30 and hits the thin film portion of the second diaphragm 20. It flows along the side wall of the valve chamber 26 and easily flows into the second communication channel 332.

Therefore, in the chemical valve 1A of the present embodiment, the first communication channel 331 in which the first valve chamber 25 of the first diaphragm valve 6A and the second valve chamber 26 of the second diaphragm valve 6B are formed obliquely. Since it communicates via the V-shaped flow path 33 composed of the second communication flow path 332 formed obliquely, when supplying a chemical solution from the common port 3 to the first port 4 or the second port 5, When a chemical solution such as a chemical solution is supplied from the 1 port 4 or the second port 5 to the common port 3, the chemical solution flows through the V-shaped channel 33 in a certain direction, and it is difficult for a liquid pool to be generated in the V-shaped channel 33. Further, since the V-shaped flow path 33 is formed in the body 2A, it is not necessary to seal the body 2A with a sealing member or the like, and the number of leakage points is reduced compared to the conventional chemical valve 100 (see FIG. 18).
Therefore, according to the chemical valve 1A of the present embodiment, it is possible to reduce the liquid reservoir and the leaked portion.

Further, in the chemical valve 1A of the present embodiment, the side walls of the first and second valve chambers 25 and 26 in which the V-shaped channel 33 opens are perpendicular to the first and second communication channels 331 and 332. Therefore, the first and second communication channels 331 and 332 of the V-shaped channel 33 can be easily formed with a drill or the like. Moreover, since the first and second valve chambers 25 and 26 become smaller in diameter toward the first and second valve seats 29 and 30, the chemical solution flows from the common port 3 to the first and second ports 3 and 4. In addition, the chemical solution easily flows into the first valve seats 29 and 35, and conversely, when the chemical solution flows from the first and second ports 4 and 5 to the common port 3, the first and second valve seats 29 and 30 are also provided. After the chemical liquid ejected from the first and second chambers 23 and 24 collides with the first and second diaphragms 19 and 20, it is collected along the side walls of the first and second valve chambers 25 and 26. It is easy to flow into the second communication flow paths 331 and 332. In this manner, the chemical liquid valve 1A is configured so that the chemical liquid forms a flow along the first and second valve chambers 25 and 26, and therefore, the chemical liquid valve 1A is disposed between the V-shaped flow path 33 and the first and second valve chambers 25 and 26. It is easy to input and output a chemical solution, and it is difficult to generate a retention portion in the first and second chambers 23 and 24.
Furthermore, in the chemical valve 1A of the present embodiment, the first and second valve chambers 25 and 26 are communicated with each other through the V-shaped flow path 33, so that the communication flow path can be easily provided without increasing the number of leakage points.

(Second Embodiment)
Then, 2nd Embodiment which concerns on the chemical | medical solution valve of this invention is described with reference to drawings. FIG. 9 is a plan view of the chemical valve 1B. 10 is a central longitudinal cross-sectional view of the chemical valve 1B shown in FIG. FIG. 11 is a plan view of the chemical valve 1C. FIG. 12 is a central longitudinal sectional view of the chemical valve 1C shown in FIG.
The chemical valves 1B and 1C of the present embodiment are the same as those of the first embodiment provided with only the first and second ports 4 and 5 in that three or more ports are provided for one common port 3. Unlike the chemical valve 1A, the other points are common. Therefore, here, the configuration different from the first embodiment will be mainly described, and the common configuration is denoted by the same reference numeral in the drawing, and the description thereof is omitted as appropriate.

  The chemical valve 1B is provided with first to third ports 4, 5, and 41 in the body 2B in a direction 180 degrees opposite to the common port 3, and through the first to third diaphragm valves 6A, 6B, and 6C having the same structure. Thus, the common port 3 is individually communicated with the first to third ports 4, 5, and 41. Similarly to the first and second diaphragm valves 6A and 6B, the chemical valve 1B includes a third valve chamber 43 defined by a third diaphragm 42 between the body 2B and the third diaphragm valve 6C. The chamber 43 communicates with the third port 41 via the third valve hole 44 and the third flow path 45 formed in the same manner as the first and second valve holes 27 and 28 and the first and second flow paths 31 and 32. is doing. The step between the third valve chamber 43 and the third valve hole 44 is a third valve seat 46 with which the third diaphragm 42 abuts or separates. In the body 2 </ b> B, the common port 3 communicates with the second valve chamber 26 via a common flow path 47. The second valve chamber 26 communicates with the first valve chamber 25 via the V-shaped flow path 33A, and communicates with the third valve chamber 43 via the V-shaped flow path 33B. A flow path is formed by communicating with the first to third ports 4, 5, 41 via the path 47, V-shaped flow paths 33 </ b> A, 33 </ b> B, and the like. The flow path structure of the body 2B is symmetric with respect to the common port 3.

  On the other hand, the chemical valve 1C is provided with first to fourth ports 4, 5, 41, 51 in the body 2B in the direction opposite to the common port 3 by 180 degrees, and the first to fourth diaphragm valves 6A, 6B having the same structure. , 6C, 6D, the common port 3 is individually connected to the first to fourth ports 4, 5, 41, 51. Similarly to the first and second diaphragm valves 6A and 6B, the chemical valve 1C is a first and second diaphragm valves 42 and 52 defined between the body 2C and the third and fourth diaphragm valves 6C and 6D. The third and fourth valve chambers 43 and 53 are formed in the same manner as the first and second valve holes 27 and 28 and the first and second flow paths 31 and 32. The third and fourth ports 41 and 51 communicate with each other via the third and fourth valve holes 44 and 54 and the third and fourth flow paths 45 and 55. The steps between the third and fourth valve chambers 43 and 53 and the first and second valve holes 44 and 54 are the third and fourth valve seats with which the third and fourth diaphragms 42 and 52 come into contact with or separate from each other. 46, 56. The body 2C is formed with V-shaped flow paths 33A, 33B, and 33C that allow adjacent valve chambers to communicate with each other. The common port 3 communicates with the V-shaped flow path 33B through a common flow path 57. Are connected to the first to third ports 4, 5, 41 through the common flow channel 57, the V-shaped flow channels 33 </ b> A, 33 </ b> B, 33 </ b> C, and the like to form a flow channel. The flow path structure of the body 2C is symmetric with respect to the common port 3.

  Therefore, even if the liquid chemical valves 1B and 1C of the present embodiment are provided with three or more ports, if the adjacent valve chambers are communicated with each other by the V-shaped flow path 33, the one common port 3 is connected. Since three or more ports can be individually communicated with each other via a diaphragm valve, a flow path can be easily formed in the bodies 2B and 2C to increase the number of ports. Further, since the valve chambers communicate with each other through the V-shaped flow path 33, the liquid reservoir and the leaked portion do not increase as the number of ports increases.

(Third embodiment)
Then, 3rd Embodiment which concerns on the chemical | medical solution valve of this invention is described with reference to drawings. FIG. 13 is an external perspective view of the chemical valve 1D. FIG. 14 is a plan view of the chemical valve 1D. 15 is a cross-sectional view taken along line EE in FIG. 16 is a cross-sectional view taken along line FF in FIG.
The chemical valve 1D of the present embodiment is different from the chemical valve 1A of the first embodiment in the flow path structure, and the other points are common. Therefore, here, the configuration different from the first embodiment will be mainly described, and the common configuration is denoted by the same reference numeral in the drawing, and the description thereof is omitted as appropriate.

  The body port 2D of the chemical liquid valve 1D is provided with a first port 61 that is 90 degrees away from the common port 60, a third port 62 is provided on the opposite side of 180 degrees, and the common port 60 is the first and first ports. The first and second ports 61 and 62 are individually communicated with each other via the two diaphragm valves 6A and 6B. First and second valve chambers 25 and 26 are formed between the body 2 </ b> D and the first and second diaphragm valves 6 </ b> A and 6 </ b> B, and communicate with each other via a V-shaped flow path 33. The first valve chamber 25 communicates with the first port 61 via the first valve hole 27 and the first flow path 31, while the second valve chamber 25 passes through the second valve hole 28 and the second flow path 63. And communicates with the second port 62. In the body 2D, the common flow path 64 opens to the opposite side of the first valve chamber 25 from the V-shaped flow path 33, and the common port 60 and the first valve chamber 25 are communicated with each other.

  In such a chemical liquid valve 1D, when the chemical liquid is distributed and output from the first and second ports 61 and 62, the chemical liquid is supplied to the common port 60 with the first and second diaphragm valves 6A and 6B closed. To do. The chemical solution flows from the common flow path 64 to the first valve chamber 25, the V-shaped flow path 33, and the second valve chamber 26 and is filled. For example, when the chemical solution is output from the first port 61, when the first diaphragm valve 6A is opened, the chemical solution is supplied from the valve chamber 25 to the first valve seat 29, the first valve hole 27, and the first flow path 31. Through the first port 61 and output from the first port 61. Thereafter, when the chemical solution is output from the second port 62, the second diaphragm valve 6B is opened after the first diaphragm valve 6A is closed, and then the chemical solution is supplied from the second valve chamber 26 to the second valve seat 30, It flows to the second port 62 through the second valve hole 28 and the second flow path 63, and is output from the second port 62. At this time, since the first and second valve chambers 25 and 26 communicate with each other through the V-shaped flow path 33, the chemical liquid flows in one direction through the V-shaped flow path 33 and does not generate a staying part or leakage.

  Further, when the chemical solution 1D switches and outputs the chemical solution, the first chemical solution is supplied to the first port 61 and the second port 62 is supplied with the first and second diaphragm valves 6A and 6B closed. Two chemical solutions are supplied. The first chemical liquid flows from the first port 61 to the first valve seat 29 via the first flow path 31 and the first valve hole 27, and the second chemical liquid flows from the second port 62 to the second flow path 63 and the second flow path 63. It flows to the second valve seat 30 through the valve hole 28. When outputting the first chemical liquid, if the first diaphragm valve 6 </ b> A is opened, the first chemical liquid flows into the first valve chamber 25 from the first valve seat 29 and is shared via the common flow path 64. Output from port 60. Thereafter, when the second chemical solution is output, the second chemical solution flows into the second valve chamber 26 from the second valve seat 30 by opening the second diaphragm valve 6B after closing the first diaphragm valve 6A. Then, it is output from the common port 60 via the V-shaped flow path 33, the first valve chamber 25, and the common flow path 64. At this time, since the second chemical liquid pushes out the first chemical liquid, the first chemical liquid does not stay in the V-shaped flow path 33 or the like.

  Therefore, according to the chemical valve 1D, if the first and second valve chambers 25 and 26 are communicated with each other through the V-shaped flow path 33, the common port 60, the second The arrangement of the first and second ports 61 and 62 can be designed arbitrarily, and the liquid reservoir and the leaked portion can be reduced.

Although the embodiments of the present invention have been described, the present invention is not limited to the above-described embodiments, and various applications are possible.
(1) For example, in the above embodiment, an air operated on-off valve is used as the diaphragm valve, but a flow rate adjusting valve may be used. In this case, for example, the first chemical liquid is supplied to the first port 4 of the chemical liquid valve 1A, the second chemical liquid is supplied to the second ports 4 and 5, and the first and second diaphragm valves 6A and 6B are opened. If the degree is adjusted, the first and second chemicals can be mixed at a predetermined rate when flowing from the V-shaped flow path 33 to the common flow path 34 and output from the common port 3.
(2) For example, in the above-described embodiment, the case where the chemical liquid valves 1A, 1B, 1C, and 1D control the chemical liquid has been described. However, the control target may be various fluids such as pure water, N2 gas, and air.
(3) For example, in the above-described embodiment, the air operated diaphragm valves 6A, 6B, 6C, and 6D are used. However, the driving method is not limited to this, and a manual valve or the like may be used.
(4) For example, in the above embodiment, the V-shaped flow path 33 in which the first and second communication flow paths 331 and 332 are symmetrical is used as the communication flow path. On the other hand, the angles P1 and P2 at which the first and second communication channels 331 and 332 are inclined with respect to the axes L1 and L2 of the first and second bottomed holes 21 and 22 are not the same angle, and the first The second communication flow paths 331 and 332 may be a flow path that is asymmetrical to the left and right. Further, the first and second valve chambers may be communicated with each other through an oblique linear communication channel. Also in this case, the fluid flows in one direction in the communication channel and does not generate a liquid pool, and the channel can be designed arbitrarily.

1 is an external perspective view of a chemical valve according to a first embodiment of the present invention. Similarly, it is a top view of a chemical valve. Similarly, it is AA sectional drawing of FIG. Similarly, it is BB sectional drawing of FIG. Similarly, it is CC sectional drawing of FIG. Similarly, it is a perspective view of a body. Similarly, it is a top view of a body. Similarly, it is DD sectional drawing of FIG. It is a top view of a chemical | medical solution valve concerning 2nd Embodiment of this invention. Similarly, it is the center longitudinal cross-sectional view of the chemical | medical solution valve shown in FIG. Similarly, it is a top view of a chemical valve. Similarly, it is the center longitudinal cross-sectional view of the chemical | medical solution valve shown in FIG. It is an external appearance perspective view of a chemical | medical solution valve concerning 3rd Embodiment of this invention. Similarly, it is a top view of a chemical valve. Similarly, it is EE sectional drawing of FIG. Similarly, it is FF sectional drawing of FIG. It is a top view of the conventional chemical | medical solution valve. It is GG sectional drawing of FIG.

Explanation of symbols

1A, 1B, 1C, 1D Chemical valve 2A, 2B, 2C, 2D Body 3 Common port 4 First port 5 Second port 6A, 6B, 6C, 6D Diaphragm valve 33, 33A, 33B, 33C V-shaped flow path 331 1st 1 communication channel 332 2nd communication channel 25 1st valve chamber 26 2nd valve chamber

Claims (3)

The body is provided with a first port, a second port, and a third port, and a first diaphragm valve attached to the body communicates with the first port and the third port, while being attached to the body in the chemical liquid valve second diaphragm valve communicates with said third port and said second port that is,
The first communication channel that opens to the first valve chamber of the first diaphragm valve and the second communication channel that opens to the second valve chamber of the second diaphragm valve are inclined with respect to the moving direction of the valve element. Thus , the liquid valve is formed in a direction facing each other , and the third port is disposed at the intersection . In the chemical valve according to claim 1,
Vertical side wall of the second valve chamber first valve chamber or to the second communication flow channel is opening, to said first communication channel or said second communication flow channel wherein the first communication flow channel is opened A chemical valve characterized by In the chemical valve according to claim 1 or 2,
The chemical valve, wherein the communication channel is a V-shaped channel.

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