JP5496773B2 - Connecting device for chemical flow path - Google Patents

Description

  The present invention relates to a structure of a flow path, and more particularly to a connection structure of flow paths for transporting a chemical solution handled in semiconductor manufacturing and other manufacturing processes.

  Semiconductor manufacturing apparatuses include apparatuses that use chemicals such as HMDS chemicals. The HMDS chemical solution is sent to the vaporizer by a pump via a chemical solution flow path such as a pipe or a manifold. In some cases, the chemical channel is required to be disconnected for reasons such as maintenance of the semiconductor manufacturing apparatus.

JP 2007-292217 A JP 2007-85504 A

  However, in the separation of the chemical liquid flow path, there has been a problem that the chemical liquid leaks to the outside (including vaporization) from the cut portion.

  The present invention was created to solve at least a part of the above-described conventional problems, and an object of the present invention is to provide a technique for suppressing leakage of a chemical liquid in the separation of a chemical liquid flow path.

  Hereinafter, effective means for solving the above-described problems will be described while showing effects and the like as necessary.

Means 1. A chemical flow channel coupling device capable of connecting and disconnecting a chemical flow channel,
A first chemical flow path through which the chemical liquid flows; a first connection flow path having a first connection surface; a sweeping fluid supply flow path to which a sweeping fluid is supplied; the first chemical liquid flow path; A first chemical liquid valve chamber communicating with the connection flow path and the sweeping fluid supply flow path, and a first inner wall surface of the first chemical liquid valve chamber are formed and communicated with the first chemical liquid flow path. A first connection unit having a first valve body for opening and closing the first chemical liquid opening, and a sweeping fluid supply control valve for opening and closing the sweeping fluid supply channel;
A second chemical flow path through which the chemical liquid flows, a second connection flow path having a second connection surface capable of being connected to and disconnected from the first connection surface, and a sweeping fluid discharge from which a sweeping fluid is discharged A second chemical liquid valve chamber communicating with the flow path, the second chemical liquid flow path, the second connection flow path, and the sweeping fluid discharge flow path; and a second inner wall surface of the second chemical liquid valve chamber. And a second valve body that opens and closes a second chemical liquid opening connected to the second chemical liquid flow path, and a sweeping fluid discharge control valve that opens and closes the sweeping fluid supply flow path. A connecting unit;
The chemical | medical solution flow-path coupling apparatus provided with.

  Means 1 is a chemical fluid flow channel coupling device capable of connecting and disconnecting a chemical fluid flow channel. The chemical flow path coupling device includes the first coupling unit having the first coupling surface and the second coupling unit having the second coupling surface capable of being connected to and disconnected from the first coupling surface. The chemical liquid channel can be connected and disconnected between the first connection unit and the second connection unit.

  A first chemical liquid valve chamber communicating with the first chemical liquid flow path and the sweeping fluid supply flow path communicates with the first connection flow path. The communication between the first chemical liquid flow path and the first chemical liquid valve chamber can be opened and closed by the first valve body at the first chemical liquid opening formed in the inner wall surface of the first chemical liquid valve chamber. Thereby, in the state which isolated the 1st chemical | medical solution flow path, it is possible to flow a sweeping fluid through the 1st connection flow path and the 1st chemical | medical solution valve chamber, and to discharge | release a chemical | medical solution from a flow path. On the other hand, since the sweeping fluid supply channel can be opened and closed by the sweeping fluid supply control valve, the first connection channel is connected only to the channel from which the chemical liquid is discharged by the sweeping fluid in the disconnected state. It is possible to operate so that it will be in the state.

  On the other hand, since the second connection unit has the same configuration as the first connection unit, the flow path in which the chemical solution is discharged by the sweeping fluid in the disconnected state also in the second connection flow path of the second connection unit. It is possible to operate so that it is connected only to. Thereby, the leakage of the chemical liquid in the separation of the chemical liquid flow path can be suppressed. The scavenging fluid may flow from the first connection unit side to the second connection unit, or may flow from the second connection unit side to the first connection unit.

Mean 2. The scavenging fluid is a gaseous scavenging gas,
The second connection unit is disposed above the first connection unit with respect to the direction of gravity,
The first chemical liquid opening is formed on the first inner wall surface, which is formed on the first inner wall surface with respect to the direction of gravity and higher than the opening communicating with the sweeping fluid supply channel. And disposed at a position lower than the opening communicating with the first connection channel,
The second chemical liquid opening is formed on the second inner wall surface, which is formed on the second inner wall surface with respect to the direction of gravity and higher than the opening communicating with the second connection channel. And the chemical liquid flow channel coupling device according to claim 1, which is disposed at a position lower than the opening communicating with the sweeping fluid discharge flow channel.

  In the chemical liquid flow channel coupling device of the means 2, the scavenging gas flows from the bottom in order from the sweep fluid supply flow channel to the first inner wall surface, the first chemical liquid opening, and the first internal flow to the first connection flow channel. The opening of the wall surface, the first connecting surface, the second connecting surface, the opening from the second connecting channel to the second inner wall, the second chemical solution opening, and the second inner wall to the sweeping fluid discharge channel It can flow into the opening. Thereby, a liquid chemical | medical solution can be discharged | emitted consistently from the downward | lower direction by scavenging gas, and smooth discharge | emission is realizable.

Means 3. The first connection unit includes:
Having a first valve body in which the sweeping fluid supply channel, the first chemical channel, and the first connection channel are formed;
The first chemical liquid control valve having the first valve body and the scavenging fluid supply control valve are assembled in a state of being in contact with each other while applying a first load in each direction to the first valve body,
A first frame member attached to the first chemical liquid control valve and the sweeping fluid supply control valve and having a shape for transmitting a reaction force in each direction of the first load from the outside of the valve body to the valve body; Have
The second connection unit includes:
A second valve body in which the sweeping fluid discharge channel, the second chemical channel, and the second connection channel are formed;
The second chemical liquid control valve having the second valve body and the scavenging fluid discharge control valve are assembled in a state where they are in contact with each other while applying a second load in each direction to the second valve body,
A second frame member mounted on the second chemical liquid control valve and the sweeping fluid discharge control valve and having a shape for transmitting reaction force in each direction of the second load from the outside of the valve body to the valve body; 3. The chemical liquid flow channel coupling device according to claim 1 or 2.

  The chemical liquid flow path coupling device of means 3 is composed of a valve body and a valve body actuator, and the valve body actuator is mounted by a frame member having a shape for transmitting the reaction force of the contact load from the outside of the valve body to the valve body. Has been. Thereby, shortening and straightening of the internal flow path of the chemical flow path coupling device can be easily realized. Since the valve body actuator can be mounted on the valve body without using a fastening member (for example, a bolt or a nut) that penetrates the valve body, the valve body is not hindered by the presence of the fastening member. This is because it is possible to form a plurality of chemical liquid flow paths for chemical liquid distribution.

  The present invention can be embodied not only in the chemical liquid flow channel coupling device but also in the form of, for example, a chemical liquid flow channel connection / disconnection control method, a computer program that embodies the method, and a program medium.

Sectional drawing which shows the internal flow path of the coupling device 11 for chemical | medical solution flow paths of 1st Embodiment. The perspective view which shows the connection unit 10 for chemical | medical solution flow paths which comprises the connection apparatus 11 for chemical | medical solution channels. The disassembled perspective view which shows the component of the connection unit 10 for chemical | medical solution flow paths. Sectional drawing which shows the chemical | medical solution distribution state of the connection units for chemical | medical solution flow paths 10, 10a. Sectional drawing which shows the state during the chemical | medical solution purge of the connection units for chemical | medical solution flow paths 10 and 10a. Sectional drawing which shows the state after the chemical | medical solution purge of the connection units 10 and 10a for chemical | medical solution flow paths. Sectional drawing which shows the state by which the connection units 10 and 10a were cut away. The perspective view which shows the coupling device 11a for chemical | medical solution flow paths of the 1st modification. The flow-path circuit diagram of the coupling device 11b for chemical | medical-solution flow paths of the 2nd modification. Sectional drawing which shows the internal flow path of the chemical | medical solution flow path switching apparatus 100 of 2nd Embodiment. Sectional drawing which shows the internal flow path of the flow-path switching apparatus 100 for chemical | medical solutions. The disassembled perspective view which shows the component of the connection unit 10 for chemical | medical solution flow paths. Sectional drawing which shows the distribution | circulation state of the 1st chemical | medical solution in the flow-path switching apparatus 100 for chemical | medical solutions. Sectional drawing which shows the distribution | circulation state of the 2nd chemical | medical solution in the flow-path switching apparatus 100 for chemical | medical solutions. The perspective view which shows the valve unit 10d of a modification. The disassembled perspective view which shows the component of the valve unit 10d of a modification. Sectional drawing which shows the internal flow path of a modification. Sectional drawing which shows the component of the internal flow path of a modification.

  Hereinafter, embodiments embodying the present invention will be described with reference to the drawings.

(Configuration and operation of the chemical flow path coupling device of the first embodiment)
FIG. 1 is a cross-sectional view illustrating an internal flow path of the chemical liquid flow path coupling apparatus 11 according to the first embodiment. FIG. 2 is a perspective view showing the chemical liquid flow channel coupling unit 10 constituting the chemical liquid flow channel coupling device 11. FIG. 3 is an exploded perspective view showing components of the chemical liquid flow channel coupling unit 10. The chemical liquid flow channel coupling device 11 includes two chemical liquid flow channel coupling units 10 and 10a and a coupling member 12 that mechanically couples them. The chemical liquid flow channel coupling units 10 and 10a function as a flow channel switching valve as a single unit, and are also referred to as a coupling unit. The connection unit 10a and the connection unit 10 are also referred to as a first connection unit and a second connection unit, respectively.

  The chemical liquid flow channel coupling device 11 includes an upstream chemical liquid flow channel coupling unit 10 that receives supply of chemical liquid from the chemical liquid supply pipe 91a, and a downstream chemical liquid flow channel connection unit 10a that supplies chemical liquid to the purge gas supply pipe 92a. By connecting and disconnecting, the chemical liquid flow channel can be connected and disconnected. The chemical liquid flow channel coupling device 11 further discharges the chemical liquid from the internal flow channel of the chemical liquid flow channel coupling device 11 to flow a purge gas for flowing the chemical liquid when the flow channel is disconnected, which will be described later. It has.

  The connecting member 12 is rotatably attached to a hinge 24 included in the connecting unit 10, and the connecting units 10 and 10 a are connected to each other by engaging with the hinge 24 a included in the connecting unit 10 a. However, the connecting member 12 schematically shows the principle of connecting the pair of connecting surfaces 37 and 37a by applying a load to each other while applying a load, and does not show an actual connecting mechanism. The connection surface 37 and the connection surface 37a are also referred to as a first connection surface and a second connection surface, respectively.

  As shown in FIGS. 2 and 3, the connecting unit 10 includes a valve body 30 made of a fluororesin in which an internal flow path is formed, and two valve bodies that perform connection and disconnection of the internal flow path. Actuators 40 and 50 and a frame member 20 for assembling the two valve body actuators 40 and 50 to the valve body 30 are provided. In the present embodiment, the connection unit 10 a has the same configuration as the connection unit 10.

  The valve body actuator 50 is mainly made of vinyl chloride, and is a functional component that operates and cuts off the communication of the chemical liquid flow path by operating the valve body with operation air. The valve body actuator 50 includes a diaphragm valve body 52 that performs communication and disconnection of the flow path, a piston 53 that drives the diaphragm valve body 52, and a pressure chamber 54 that applies a driving force in a direction that causes the piston 53 to communicate with the flow path. And a spring 56 for applying an urging force in the opposite direction to the piston 53, and an adapter 51 for supplying operation air to the pressure chamber 54. The diaphragm valve body 52 includes a protruding portion 52b having a cylindrical shape that performs communication and blocking of the flow path, and an annular seal portion 52s formed around the protruding portion 52b. The diaphragm valve body 52 corresponds to a diaphragm film part. The diaphragm valve body 52 may be made of, for example, the same type of fluororesin as the valve body 30.

  The valve body 30 has a chemical flow path 34 connected to a chemical liquid receiving pipe 91 for receiving a chemical liquid, a chemical liquid valve chamber 38 communicating with the chemical liquid flow path 34 at the opening 32c, and a connecting flow communicating with the chemical liquid valve chamber 38. A path 33 is formed. The distribution path of the chemical liquid is the connection flow path 33, the chemical liquid valve chamber 38, and the chemical liquid flow path 34 in order. The chemical valve chamber 38 has an inner wall surface 38 s formed in the valve body 30 and a seal surface 32 s, and is sealed by contact between the seal surface 32 s and the seal portion 52 s of the diaphragm valve body 52. When the diaphragm valve body 52 operates, the chemical valve chamber 38 opens and closes the opening 32c by the projection 52b, and communication between the chemical liquid valve chamber 38 and the chemical liquid flow path 34 is realized. become.

  The valve body 30a includes a chemical liquid flow path 34a connected to a chemical liquid supply pipe 91a for supplying a chemical liquid, a chemical liquid valve chamber 38a communicating with the chemical liquid flow path 34a, and a connecting flow path 33a communicating with the chemical liquid valve chamber 38a. , Is formed. The distribution path of the chemical liquid is, in order, the chemical liquid flow path 34a, the chemical liquid valve chamber 38a, and the connection flow path 33a. In the chemical valve chamber 38a, communication between the chemical liquid valve chamber 38a and the chemical liquid flow path 34a and communication cut-off are realized by the inner wall surface 38as formed in the valve body 30 and the diaphragm valve body 52a.

  The chemical liquid valve chamber 38a and the chemical liquid valve chamber 38 are also referred to as a first chemical liquid valve chamber and a second chemical liquid valve chamber, respectively. The valve body 30a and the valve body 30 are also referred to as a first valve body and a second valve body, respectively. The inner wall surface 38as and the inner wall surface 38s are also referred to as a first inner wall surface and a second inner wall surface, respectively. Further, the opening of the chemical liquid flow path 34a communicating with the chemical liquid valve chamber 38a is also referred to as a first chemical liquid opening, and the opening of the chemical liquid flow path 34 communicating with the chemical liquid valve chamber 38 is also referred to as a second chemical liquid opening. . The connection channel 33a and the connection channel 33 are also referred to as a first connection channel and a second connection channel, respectively.

  The chemical liquid flow channel of the chemical liquid flow channel coupling device 11 is as follows. The chemical liquid is supplied from the chemical liquid supply pipe 91a, the chemical liquid flow path 34a, the chemical liquid valve chamber 38a, and the connection flow path 33a included in the connection unit 10a, the connection flow path 33, the chemical liquid valve chamber 38 included in the connection unit 10, and The chemical liquid flow path 34 and the chemical liquid receiving pipe 91 can be supplied in order. The flow path is configured such that the chemical liquid flows from below to above with respect to the direction of gravity G, and there is no portion from above to below.

  The switching configuration of communication and communication cutoff of the chemical liquid flow channel coupling device 11 is as follows. The connecting unit 10a can block the flow path from the chemical liquid supply pipe 91a in the chemical liquid valve chamber 38a. The connection unit 10 can block the flow path to the chemical solution receiving pipe 91 in the chemical valve chamber 38. Thereby, since the chemical | medical solution flow-path connection apparatus 11 can interrupt | block a flow path with the chemical | medical solution valve chamber 38 and the chemical | medical solution valve chamber 38a, it cuts off a flow path between the connection flow path 33a and the connection flow path 33. Also, leakage of the chemical solution from the chemical solution supply pipe 91a and the chemical solution reception pipe 91 can be prevented.

  On the other hand, the chemical liquid flow path coupling device 11 has a chemical liquid purge function from the chemical liquid flow path thus configured. The purge function is realized by the purge internal flow paths of the two valve bodies 30 and 30a and the two valve body actuators 40 and 40a.

  The valve body actuator 40 is a functional component that operates the valve body by operating air to connect and disconnect the purge gas flow path. In this embodiment, the valve body actuator 40 has the same configuration as the valve body actuator 50. The valve body actuator 40 includes a diaphragm valve body 42, a piston 43, a pressure chamber 44, and an adapter 41. The diaphragm valve body 42 is made of a fluororesin, and has a protruding portion 42b and a seal portion 42s.

  The valve body 30 includes a purge gas passage 35 connected to a purge gas discharge pipe 92 for discharging purge gas, a purge gas valve chamber 39 communicating with the purge gas passage 35, a purge gas valve chamber 39, and a chemical valve as purge gas passages. A connection flow path 36 communicating with the chamber 38 is formed. The purge gas valve chamber 39 is sealed by contact between the sealing surface 31 s and the sealing portion 42 s of the diaphragm valve body 42. In the purge gas valve chamber 39, the diaphragm valve element 42 realizes communication between the connection flow path 36 communicating with the chemical liquid valve chamber 38 and the purge gas flow path 35 and communication cut-off.

  The valve body 30 is formed with recesses 31 and 32 which are recesses into which the valve body actuators 40 and 50 are fitted. A chemical valve chamber 38 and a purge gas valve chamber 39 are disposed in the innermost portions of the recesses 31 and 32, respectively. The chemical valve chamber 38 and the purge gas valve chamber 39 are formed by mounting the valve body actuators 40 and 50 in the recesses 31 and 32, respectively.

  In the valve body 30a, as a purge gas flow path, a purge gas flow path 35a connected to a purge gas supply pipe 92a for supplying purge gas, a purge gas valve chamber 39a communicating with the purge gas flow path 35a, a purge gas valve chamber 39a, and a chemical valve A connection flow path 36a communicating with the chamber 38a is formed. In the purge gas valve chamber 39a, the diaphragm valve element 42a realizes communication between the connection flow path 36a communicating with the chemical valve chamber 38a and the purge gas flow path 35a, and communication cut-off.

  The purge gas flow path of the chemical liquid flow path coupling device 11 is as follows. The purge gas supplied from the purge gas supply pipe 92a is, in order, a purge gas flow path 35a, a connection flow path 36a, a chemical liquid valve chamber 38a, a connection flow path 33a, a connection flow path 33, a chemical liquid valve chamber 38, a connection flow path 36, and The purge gas passage 35 can be supplied to the purge gas discharge pipe 92 in order. As a result, the chemical liquid valve chamber 38a shuts off the flow path from the chemical liquid supply pipe 91a, and the chemical liquid valve chamber 38 shuts off the flow path to the chemical liquid receiving pipe 91, thereby connecting the flow path 36a and the chemical liquid valve chamber 38a with purge gas. The chemical liquid can be discharged from the connection flow path 33 a, the connection flow path 33, the chemical liquid valve chamber 38, and the connection flow path 36.

  The connection state of each flow path to each chemical valve chamber 38, 38a is as follows. The chemical liquid valve chamber 38a is connected to the connection flow path 36a at the lowest position with respect to the direction of gravity G, and is connected to the connection flow path 33a at the highest position. On the other hand, the chemical liquid valve chamber 38 is connected to the connection flow path 33 at the lowest position and connected to the connection flow path 36 at the highest position with respect to the gravity direction G.

  Further, in the chemical flow path coupling device 11 of the first embodiment, each of the valve body actuators 40, 50, 40a, 50a is brought into contact with the valve bodies 30, 30a while applying a load (contact load). It is installed by doing. The valve body actuator 40 is fastened to the screw hole 29 of the frame member 20 with four screws S in a state where the fitting hole 21 of the frame member 20 is passed through. As a result, the valve body actuator 40 is fitted into the recess 31 of the valve body 30, and is mounted with the seal surface 32s and the seal portion 42s of the diaphragm valve body 42 in contact with each other. Similarly, the valve body actuator 50 passes through the fitting hole 22 of the frame member 20 and is fitted into the recess 32 of the valve body 30. The number of screws S is preferably four or more.

  Key grooves 25 and 28 are formed in the two fitting holes 21 and 22 of the frame member 20, respectively. The key grooves 25 and 28 have a role of restricting the direction of the valve body actuators 40 and 50 and determining the direction at the time of assembly. Further, the cut portion 23 has a shape as a cut instead of a through-hole so that the connecting member 18 on which the connecting surface 37 of the valve body 30 is formed can be mounted. Thereby, since the frame member 20 can be arrange | positioned around the connection member 18, the fastening load of the coupling member 12 can be smoothly flowed through the valve body 30. FIG.

  The valve body actuator 50a and the valve body actuator 50 are also referred to as a first chemical liquid control valve and a second chemical liquid control valve, respectively. The load applied to the valve body 30a by the valve body actuators 40a and 50a is also called a first load. The load applied to the valve body 30 by the valve body actuators 40 and 50 is also called a second load.

  According to this mounting method, the reaction force of the contact load is, for example, via the inner wall surface 26 and the inner wall surface 27 of the frame member 20 when the valve body actuator 50 and the valve body actuator 40 of the connection unit 10 are mounted. It can flow to the valve body 30. The valve body actuators 40, 50, 40a, 50a are fastened to the screw holes 29 by four screws S with respect to the valve bodies 30, 30a. The above-described contact load can be adjusted by this fastening torque. The screw hole 29 corresponds to a mounting portion.

  The inventor has a valve body actuator 40, 40a, 50, 50a made of an organic material such as a valve body 30, 30a made of an organic material such as fluororesin or polyvinyl chloride (PVC), a metal Further, the characteristics of a structure made of an isomeric material composed of a frame member 20 made of a material such as PEEK (polyetheretherketone) resin were also analyzed. The characteristic analysis was performed from the viewpoint of thermal stress, plastic deformation, and longitudinal elastic modulus.

  The thermal stress is as follows. For example, when a metal material is used for the frame member 20, the frame member 20 has a smaller linear expansion coefficient than the valve bodies 30 and 30 a and the valve body actuators 40, 40 a, 50, and 50 a made of an organic material. Therefore, in a high temperature environment, the surface pressure of the sealing surface (for example, the contact surface between the sealing surface 32s and the sealing portion 42s) increases due to thermal expansion of the valve body 30 and the valve body actuator 40 and the like. become. As a result, it is possible to have a preferable feature that the sealing performance is not easily lowered by a temperature rise.

  Furthermore, the organic material such as fluororesin constituting the valve bodies 30 and 30a and the valve body actuators 40, 40a, 50, and 50a has a linear expansion coefficient adjusted by filling with glass fibers or mixing as glass fiber reinforcing materials. It is also possible to provide a degree of design freedom.

  The plastic deformation is as follows. An organic material such as a fluororesin constituting the valve bodies 30 and 30a has a strong resistance to volume strain, but has a property of being easily plastically deformed (shape deformation). According to the analysis of the present inventor, for example, in the prior art (Japanese Patent Application Laid-Open No. 2007-292217), the plastic deformation is caused by a gap or rattling due to an elliptical shape of the hole of the fitting portion due to thermal stress on the fitting portion of the nut. It is predicted. Such gaps and backlashes are problems that lead to, for example, fluid leakage and functional component dropout.

  In this embodiment, since the periphery of the valve bodies 30 and 30a is constrained by surrounding the valve bodies 30 and 30a with the frame member 20, the degree of freedom of plastic deformation is limited. Thereby, it turns out that the structure surrounding the valve bodies 30 and 30a with the frame member 20 improves the resistance to plastic deformation. This is because organic materials such as fluororesin have resistance to volume strain as described above. On the other hand, it is the present invention that such a problem of gaps and backlash does not occur in the fastening between the valve body actuators 40, 40a, 50, 50a made of an organic material such as polyvinyl chloride and the frame member 20. Confirmed by the person.

  The longitudinal elastic modulus is as follows. The valve body actuators 40, 40 a, 50, 50 a made of an organic material such as polyvinyl chloride have a high elastic coefficient and a large mechanical strength, and can be firmly fastened to the frame member 20. On the other hand, the valve body actuators 40, 40a, 50, 50a and the valve bodies 30, 30a are elastic at the contact surfaces of the seal surface 32s of the fluororesin valve body 30 and the seal portion 42s of the diaphragm valve body 42. It is fastened while being deformed.

  The elastic deformation amount can be stably set without depending on the fastening force excessively by setting the mutual relationship between the size of the frame member 20 and the valve bodies 30 and 30a. Specifically, the elastic deformation amount can be adjusted (set) by setting the valve bodies 30 and 30a to a larger size in order to perform preset elastic deformation. Thereby, adjustment of the surface pressure between the sealing surface 32s and the sealing portion 42s by elastic deformation is realized, and high sealing performance is generated.

  As described above, the structural form in which the frame member 20 surrounds the valve bodies 30 and 30a and the effective use of the material characteristics ensure that each component is securely fastened and fluid leakage is prevented.

  Note that when the valve body actuator 40 or the like is fitted into the recess 31, a fitting tolerance that allows for elastic deformation of the fluororesin recess 31 can be used. Therefore, for example, a positional relationship tolerance between the two recesses 31 and 32 can be used. Etc. can be relaxed and simple manufacturing can be realized. Further, the seal portion 42s and the like of the diaphragm valve body 42 and the like may be configured to be a buffer layer using a material having a smaller longitudinal elastic coefficient than that of the material of the valve body 30 and the like, for example. Since the present structure realizes a structure that applies only a compressive load to the valve body 30 and the like, high durability can be realized.

  Thereby, the valve body actuator can be mounted on the valve body without using a fastening member (for example, a bolt or a nut) penetrating the valve body. As a result, in the valve body 30, a substantially linear short flow path is formed between the purge gas valve chamber 39 a and the purge gas valve chamber 39. Furthermore, since the purge flow path is always realized from the bottom to the top, that is, without having a path in the reverse direction (downward), the purge efficiency can be significantly increased.

  Next, with reference to FIG. 4 thru | or FIG. 6, the content of separation operation | movement of the coupling device 11 for chemical | medical solution flow paths is demonstrated.

  FIG. 4 is a cross-sectional view showing a chemical solution distribution state of the chemical solution flow channel coupling units 10 and 10a. The chemical liquid circulation state is realized by communicating the chemical flow path 34a and the coupling flow path 33a of the connection unit 10 and communicating the connection flow path 33 and the chemical flow path 34 of the connection unit 10a. Communication between the chemical liquid flow path 34a and the connection flow path 33a is performed by supplying operation air from the adapter 51a to the valve body actuator 50a. Communication between the chemical liquid flow path 34 and the connection flow path 33 is performed by supplying operation air from the adapter 51 to the valve body actuator 50.

  On the other hand, the purge gas flow path 35 of the connection unit 10 is cut off from the connection flow path 36 that communicates with the chemical valve chamber 38. The purge gas flow path 35a is cut off from the connection flow path 36a that communicates with the chemical valve chamber 38a. The communication cutoff between the purge gas channel 35 and the connection channel 36 is performed by connecting an exhaust path to the adapter 41 of the valve body actuator 40. The communication cutoff between the purge gas flow path 35a and the connection flow path 36a is performed by connecting an exhaust path to the adapter 41 of the valve body actuator 40a.

  In this manner, in the chemical solution distribution state, the chemical solution supplied from the chemical solution supply pipe 91a is the chemical solution flow channel 34a, the chemical solution valve chamber 38a, the connection flow channel 33a, the connection flow channel 33, the chemical solution valve chamber 38, and the chemical solution flow channel 34. Are sequentially supplied to the chemical solution receiving pipe 91. At this time, the purge gas flow path 35 and the purge gas flow path 35a are blocked from the flow path through which the chemical solution flows by the valve body actuators 40 and 40a.

  Before the connection units 10 and 10a are disconnected, the supply of operation air to all the valve element actuators 40, 40a, 50, and 50a is stopped after stopping the chemical pump (not shown). On the other hand, a purge gas supply pump (not shown) is started. Thereby, the connection units 10 and 10a are cut off from the chemical solution receiving pipe 91, the chemical solution supply pipe 91a, the purge gas discharge pipe 92, and the purge gas supply pipe 92a.

  FIG. 5 is a cross-sectional view illustrating a state in which the chemical liquid flow channel coupling units 10 and 10a are being purged with chemical liquid. The chemical liquid purge is a process of introducing a purge gas into the chemical liquid flow path to discharge the chemical liquid from the internal flow paths of the chemical liquid flow path connecting units 10 and 10a. In the chemical liquid purge state, the purge gas supplied from the purge gas supply pipe 92a is purge gas flow path 35a, connection flow path 36a, chemical liquid flow path 34a, chemical liquid valve chamber 38a, connection flow path 33a, connection flow path 33, and chemical liquid valve chamber 38. Then, the chemical solution is discharged together with the chemical solution to the purge gas discharge pipe 92 through the chemical solution flow channel 34, the connection flow channel 36, and the purge gas flow channel 35 in order. This figure shows a state in which the chemical liquid is discharged from the chemical liquid flow path 34 a, the chemical liquid valve chamber 38 a, and the connection flow path 33 a, and the chemical liquid is being discharged from the connection flow path 33.

  FIG. 6 is a cross-sectional view showing a state after the chemical liquid purge of the chemical liquid flow channel coupling units 10 and 10a. The chemical liquid is purge gas flow path 35a, connection flow path 36a, chemical liquid flow path 34a, chemical liquid valve chamber 38a, connection flow path 33a, connection flow path 33, chemical liquid valve chamber 38, chemical liquid flow path 34, connection flow path 36, and purge gas. After being discharged from all of the flow paths 35, the pressure is reduced while flowing the purge gas. Thereby, the chemical | medical solution adhering to a flow path can be vaporized and the residue of a chemical | medical solution can be reduced notably.

  FIG. 7 is a cross-sectional view showing a state where the connecting units 10 and 10a are separated. The connection units 10 and 10a are disconnected by rotating the coupling member 12 in the clockwise direction to release the engagement with the hinge 24a. As a result, the connection between the pair of connection surfaces 37 and 37a is released, and the connection channel 33 and the connection channel 33a are opened to the atmosphere. In connection with this, all the flow paths 38, 38a, 36, 36a communicating with the connection flow path 33 and the connection flow path 33a are also opened to the atmosphere. In the present embodiment, since the chemical liquid is previously excluded from all the flow paths 33, 33a, 38, 38a, 36, and 36a, the external leakage of the chemical liquid due to the disconnection of the connecting units 10 and 10a is suppressed. be able to.

On the other hand, the connection units 10 and 10a can be connected by the following steps.
(1) The worker performs mechanical connection by the coupling member 12.
(2) In the state where the purge gas valve chamber 39a and the connection flow path 36a are disconnected, the worker communicates the purge gas valve chamber 39 and the connection flow path 36 and evacuates the purge gas discharge pipe 92. Thereby, an internal channel will be in a low pressure state.
(3) The worker puts the purge gas valve chamber 39 and the connection flow path 36 into a state where communication is cut off.
(4) The worker causes the chemical liquid flow path 34 and the chemical liquid valve chamber 38 to communicate with each other and causes the chemical liquid flow path 34a and the chemical liquid valve chamber 38a to communicate with each other. Thereby, a chemical | medical solution is drawn in to each flow path.
(5) The worker can restart the circulation of the chemical liquid by operating a chemical liquid pump (not shown).

  Thus, since the chemical | medical solution flow-path coupling apparatus 11 of 1st Embodiment can purge effectively the chemical | medical solution inside the linear flow path which is short and goes upwards from the downward | lower direction, when disconnecting connection, Leakage can be effectively suppressed. Furthermore, downsizing of the chemical flow path coupling device 11 is realized by downsizing the valve bodies 30 and 30a.

(Configuration and operation of the chemical flow path coupling device of the modification of the first embodiment)
FIG. 8 is a perspective view showing a chemical liquid flow channel coupling device 11a of a first modification. The modified chemical flow path coupling device 11a includes a coupling unit 10b having a controller 15 and a coupling unit 10c configured to be operable by the coupling unit 10b. This is different from the chemical flow path coupling device 11. The controller 15 can automatically execute the above-described processing sequence by operating a total of four valve body actuators (not shown) built in the connection unit 10b and the connection unit 10c.

  The connection unit 10 b includes an operation button 16 and an LED indicator 17 in addition to the controller 15. The operator can start the above-described sequence by pressing the operation button 16 when the connection has to be disconnected for maintenance, for example. The LED indicator 17 is lit red in the middle of the processing sequence, and the lighting color is changed to blue in accordance with the completion of processing (preparation for separation). The connection unit 10b may be configured as a mechanism that allows connection to be released upon completion of the processing sequence.

  FIG. 9 is a flow path circuit diagram of the chemical flow path coupling device 11b of the second modification. The chemical flow path coupling device 11b is different in that both the purge gas discharge pipe 92 and the purge gas supply pipe 92a are connected to both the purge gas valve chambers 39v and 39av. In this configuration, when the connecting units 10 and 10a are connected, the purge gas can be discharged from the purge gas valve chambers 39v and 39av, so that the purge gas can be effectively prevented from being mixed into the chemical solution at the time of connection.

  Specifically, in the communication state (valve V1, V1a opened) in which the chemical solution can be supplied to the chemical valve chambers 38, 38a, the purge gas valve chamber 39 is set in the communication cut-off state (valve V2 closed), and the purge gas valve chamber If 39 is in the communication cut-off state (valve V2a open state), the purge gas inside the connection flow path 33 can be discharged via the purge gas valve chamber 39 by supplying the chemical solution. On the other hand, the purge gas inside the connection flow path 33a can be discharged via the purge gas valve chamber 39a by supplying a chemical liquid when the valve V2 is opened and the valve V2a is closed when the valves V1 and V2 are open. .

(Configuration and operation of the chemical liquid channel switching device of the second embodiment)
FIG.10 and FIG.11 is sectional drawing which shows the internal flow path of the chemical | medical solution flow path switching apparatus 100 of 2nd Embodiment. FIG. 12 is an exploded perspective view showing components of the chemical liquid flow switching device 100. The chemical liquid flow switching device 100 is a device that switches a plurality of different chemical flow paths, and includes five valve body actuators 70, 70a, 70b, 70c, 70d, a valve body 60, and a first frame. Member 80. In the present embodiment, the plurality of chemical solutions are a first chemical solution and a second chemical solution that are different from each other.

  The valve body actuator 70 includes a diaphragm valve body 72, a piston 73, a pressure chamber 74, and an adapter 71. The diaphragm valve body 72 includes a protrusion 72v and a seal portion 72s. On the other hand, the valve body actuator 70a includes a diaphragm valve body 72a, a piston 73a, a pressure chamber 74a, and an adapter 71a. The diaphragm valve body 72a has a seal portion 72as, a protruding end portion 72ab, a cylindrical inclined surface 72am, and a protruding surface 72at. The role of the cylindrical inclined surface 72am and the protruding surface 72at will be described later. The valve body actuators 70b, 70c, and 70d have the same configuration as the valve body actuator 70a.

  The valve body 60 is formed with an inner wall surface 82 s that forms a flow path switching chamber 82 between the valve body actuator 70 and the diaphragm valve body 72 of the valve body actuator 70. On the inner wall surface 82s, a first chemical liquid flow path 63 that is a flow path for supplying the first chemical liquid to the flow path switching chamber 82 and a second chemical liquid flow that is a flow path for supplying the second chemical liquid to the flow path switching chamber 82 are provided. The channel 64 and the outlet channel 61 for supplying either the first chemical solution or the second chemical solution from the flow channel switching chamber 82 to the outside communicate with each other.

  By contacting the first frame member 80 with respect to the valve body 60, a first chemical liquid flow path 83 communicating with the first chemical liquid flow path 63 and a second chemical liquid flow path communicating with the second chemical liquid flow path 64 are provided. 84 and an outlet channel 81 that contacts the outlet channel 61 are formed. The first frame member 80 has fastening portions (for example, screw holes) for mounting five valve body actuators 70, 70a, 70b, 70c, 70d.

  The valve body 60 is assembled to the first frame member 80 as follows. First, the valve body 60 is mounted in the inner recess 86 of the first frame member 80. Next, the second frame member 85 is fastened to the inner recess 86 with a screw M while pressing the valve body 60 that is easily elastically deformed with respect to the inner recess 86. Thereby, a structure in which the first frame member 80, the second frame member 85, and the valve body 60 are in close contact with each other can be produced. As described above, the frame member may be configured to include a plurality of parts. If the frame member is constituted by a plurality of parts, the valve body 60 can be easily inserted and surrounded by the frame member, so that the degree of freedom of the shape of the valve body 60 can be increased.

  By attaching five valve body actuators 70, 70a, 70b, 70c, 70d to this structure, and gradually tightening them while maintaining the balance of their respective fastening forces, the chemical liquid channel switching device 100 is provided. Is completed. However, in the present embodiment, the mutual positional relationship between the five valve body actuators 70, 70a, 70b, 70c, 70d and the valve body 60 is regulated by the first frame member 80, so that the tightening is performed regardless of the assembly method. A balance of power can be achieved.

  A valve body chamber 65 (see FIG. 10) is formed in the first chemical liquid channel 63 and communicates with the channel switching chamber 82 by a communication inclined hole 63a which is a cylindrical inclined hole. A valve body chamber 66 (see FIG. 10) is formed in the second chemical liquid channel 64 and communicates with the channel switching chamber 82 through a communication inclined hole 64a which is a cylindrical inclined hole. The flow path switching chamber 82 corresponds to a first valve body chamber. The outlet channels 61 and 81 correspond to the first channel. The first chemical liquid flow path 63, the first chemical liquid flow path 83, the second chemical liquid flow path 64, and the second chemical liquid flow path 84 correspond to the second flow path.

  The opening of the outlet channel 61 formed in the inner wall surface 82s corresponds to the first opening. The openings of the first chemical liquid flow path 63 and the second chemical liquid flow path 64 formed in the inner wall surface 82s both correspond to the second opening. The communication inclined hole 63a corresponds to a communication passage. The valve body chamber 65 and the valve body chamber 66 correspond to a second valve body chamber.

  The valve body actuator 70a can operate the diaphragm valve body 72a to switch the communication between the flow path switching chamber 82 and the second chemical liquid flow path 64 and the communication cut-off state. The valve body actuator 70b can operate the diaphragm valve body 72b to switch the communication between the flow path switching chamber 82 and the second chemical liquid flow path 64 and the communication cut-off state.

  The valve body actuator 70c can switch the communication between the flow path switching chamber 82 and the purge gas supply flow path (not shown) and the communication cut-off state. The valve body actuator 70d can switch the communication between the flow path switching chamber 82 and the purge gas discharge flow path (not shown) and the communication cut-off state. The diaphragm valve body 72 corresponds to a first valve body. Diaphragm valve bodies 72a, 72b, 72c, 72d all correspond to the second valve body.

  The communication cut-off state may be realized, for example, by bringing the cylindrical inclined surface 72am into contact with the inner surface of the communication inclined hole 63a, or the surface of the protruding end 72ab on the inner wall surface of the valve body chamber 66. You may make it implement | achieve by making it contact | abut. In the configuration in which the communication is cut off by the contact of the cylindrical inclined surface 72am, the protruding end 72ab may be deleted. On the other hand, in the configuration in which the communication is blocked by the contact of the projection end 72ab, a configuration in which a gap is generated between the projection end 72ab and the communication inclined hole 63a by reducing the diameter of the projection end 72ab is possible. The communication blocking by the contact of the projecting end portion 72ab also provides a degree of design freedom in which, for example, a convex portion is provided on the end face of the projecting end portion 72ab to increase the surface pressure and enhance the sealing performance.

  The diaphragm valve body 72a of the present embodiment only needs to be configured to reduce the volume of the recess that is inserted into the communication inclined hole 63a and communicates with the flow path switching chamber 82. By so doing, it is possible to suppress unintentional mixing of the chemical solution resulting from the switching of the flow path.

  The valve body actuator 70a operates the diaphragm valve body 72a in the valve body chamber 65, and inserts the cylindrical inclined surface 72am and the protruding surface 72at into the communication inclined hole 64a. The projecting surface 72at is disposed at the same plane as the inner wall surface 82s or at a position protruding from the inner wall surface 82s to the inside of the flow path switching chamber 82. Thereby, the flow path switching chamber 82 can be disconnected from the first chemical liquid flow path 63 without forming a recess with respect to the first chemical liquid flow path 63. Similarly to the valve body actuator 70a, the valve body actuator 70b can cut off the flow path switching chamber 82 from the second chemical liquid flow path 64 without forming a recess in the second chemical liquid flow path 64.

  Note that the communication inclined hole 63a and the cylindrical inclined surface 72am are not necessarily inclined, and a part of the diaphragm valve body 72a is inserted into the communication inclined hole 63a to form a recess that communicates with the flow path switching chamber 82. Anything that reduces the volume may be used. However, if both are inclined and can be sealed, an advantage can be obtained that unexpected mixing of chemicals can be remarkably suppressed. The communication inclined hole 63a corresponds to a communication channel.

  In the second embodiment, the contact loads between the five valve body actuators 70, 70a, 70b, 70c, 70d and the valve body 60 are configured to cancel each other. That is, since the five valve element actuators 70, 70a, 70b, 70c, 70d are arranged symmetrically at positions facing each other, members corresponding to the inner wall surface 26 and the inner wall surface 27 of the first embodiment are used. It means not necessarily required.

  FIG. 13 is a cross-sectional view showing a flow state of the first chemical liquid in the chemical liquid flow switching device 100. The flow state of the first chemical liquid is such that the valve body actuator 70 and the valve body actuator 70b are actuated so that the first chemical liquid flow path 83 and the outlet flow path 81 are in communication. Thereby, the chemical | medical solution flow-path switching apparatus 100 functions as a valve | bulb which distribute | circulates a 1st chemical | medical solution.

  FIG. 14 is a cross-sectional view showing a flow state of the second chemical liquid in the chemical liquid flow switching device 100. The flow state of the second chemical liquid is such that the valve body actuator 70 and the valve body actuator 70a are actuated so that the second chemical liquid flow path 84 and the outlet flow path 81 are in communication with each other. Thereby, the chemical | medical solution flow-path switching apparatus 100 functions as a valve | bulb which distribute | circulates a 2nd chemical | medical solution.

Switching from the flow state of the first chemical solution to the flow state of the second chemical solution can be performed as follows.
(1) The valve body actuator 70 and the valve body actuator 70b are actuated so that all the flow paths are shut off.
(2) The first chemical liquid is discharged from the flow path switching chamber 82 by operating the two valve body actuators 70c and 70d and scavenging with the purge gas.
(3) The valve body actuator 70 and the valve body actuator 70a are operated to bring the second chemical liquid channel 84 and the outlet channel 81 into communication.

  As described above, the chemical liquid flow path switching device 100 according to the second embodiment includes the five valve body actuators 70, 70 a, 70 b, 70 c, and 70 d so as to sandwich the valve body 60. Therefore, the flow path design can be realized freely inside the valve body 60. Thereby, the valve chamber formed by the other valve body actuator 70a and the like can be directly communicated with the flow path switching chamber 82 formed by the valve body actuator 70. As a result, the diaphragm valve bodies 72a, 72b, 72c, 72d of the other valve body actuators 70a, 70b, 70c, 70d are inserted into the flow path switching chamber 82, and the gas purge efficiency is remarkably improved.

(Other embodiments)
The present invention is not limited to the above embodiment, and may be implemented as follows, for example.

  (1) In the above embodiment, the present invention is embodied as a device having a function of separating and switching the flow path. For example, the valve unit 10d shown in FIGS. 15, 16, 17, and 18 Thus, it may be embodied as a valve that simply performs on / off switching and opening degree adjustment. The valve unit 10d has a single valve body actuator 40, a valve body 96, and a frame member 95, and is a valve unit that performs on / off switching and opening degree adjustment between the two chemical liquid channels 93 and 94.

  Thus, even when the present invention is applied to such a valve unit, it has an advantage that it can be downsized and can be easily manufactured. In such a configuration, the plurality of chemical liquid channels have a wide concept including, for example, the above-described chemical channels 93 and 94.

  (2) In the second embodiment, the frame member is not necessarily an essential component. Since the second embodiment is characterized in that the opening formed in the valve chamber in which the valve body operates is opened and closed by another valve body, the second embodiment is limited to the mounting method of the valve body actuator to the valve body. Is not to be done. In addition, a flow path for the purge fluid is not essential. It suffices that at least three or more flow paths capable of communication or communication interruption are connected, and the number of valve body actuators may be five or more.

  (3) In each of the above embodiments, the chemical liquid is discharged from the flow path by scavenging with a purge gas that is a gas. However, the chemical liquid may be discharged from the flow path by flowing a liquid. In general, any device may be used as long as the fluid is swept to discharge the chemical solution. The valve body actuator 40a and the valve body actuator 40 are also called a sweeping fluid supply control valve and a sweeping fluid discharge control valve, respectively. The connection channel 36a and the connection channel 36 are also referred to as a sweep fluid supply channel and a sweep fluid discharge channel, respectively.

  (4) In the above embodiment, the HMDS chemical solution for semiconductor manufacturing apparatus is exemplified as the chemical solution, but another type of chemical solution may be flowed, or another type of liquid may be flowed.

  DESCRIPTION OF SYMBOLS 10 ... Chemical liquid flow path connection unit, 11 ... Chemical liquid flow path connection device, 20 ... Frame member, 30 ... Valve body, 40 ... Valve body actuator, 50 ... Valve body actuator, 60 ... Valve body actuator, 70 ... Valve body actuator 80: Frame members.

Claims (1)

A chemical flow channel coupling device capable of connecting and disconnecting a chemical flow channel,
A first chemical flow path through which the chemical liquid flows; a first connection flow path having a first connection surface; a sweeping fluid supply flow path to which a sweeping fluid is supplied; the first chemical liquid flow path; A first chemical liquid valve chamber communicating with the connection flow path and the sweeping fluid supply flow path, and a first inner wall surface of the first chemical liquid valve chamber are formed and communicated with the first chemical liquid flow path. A first connection unit having a first valve body for opening and closing the first chemical liquid opening, and a sweeping fluid supply control valve for opening and closing the sweeping fluid supply channel;
A second chemical flow path through which the chemical liquid flows, a second connection flow path having a second connection surface capable of being connected to and disconnected from the first connection surface, and a sweeping fluid discharge from which a sweeping fluid is discharged A second chemical liquid valve chamber communicating with the flow path, the second chemical liquid flow path, the second connection flow path, and the sweeping fluid discharge flow path; and a second inner wall surface of the second chemical liquid valve chamber. And a second valve body that opens and closes a second chemical liquid opening connected to the second chemical liquid flow path, and a sweeping fluid discharge control valve that opens and closes the sweeping fluid supply flow path. A connecting unit;
Equipped with a,
The first connection unit includes:
Having a first valve body in which the sweeping fluid supply channel, the first chemical channel, and the first connection channel are formed;
The first chemical liquid control valve having the first valve body and the scavenging fluid supply control valve are assembled in a state of being in contact with each other while applying a first load in each direction to the first valve body,
A first frame member attached to the first chemical liquid control valve and the sweeping fluid supply control valve and having a shape for transmitting a reaction force in each direction of the first load from the outside of the valve body to the valve body; Have
The second connection unit includes:
A second valve body in which the sweeping fluid discharge channel, the second chemical channel, and the second connection channel are formed;
The second chemical liquid control valve having the second valve body and the scavenging fluid discharge control valve are assembled in a state where they are in contact with each other while applying a second load in each direction to the second valve body,
A second frame member mounted on the second chemical liquid control valve and the sweeping fluid discharge control valve and having a shape for transmitting reaction force in each direction of the second load from the outside of the valve body to the valve body; The chemical | medical solution flow-path coupling apparatus which has.

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