JP2003049962A - Branch valve - Google Patents

Abstract

PROBLEM TO BE SOLVED: To shorten time required for purge or the like by shortening length of a flow passage and reducing a dead space, shorten a line for controlling gas supply, reduce the number of parts for standardization, easily perform isolation of the gas supply controlling line and heating, and improve airtightness. SOLUTION: A valve body 31 is equipped with a first flow passage 35, a second flow passage 36, and a third flow passage 38. The first flow passage 35 communicates a flow out side at a flow passage 19 of an accumulation base 1 and a valve chest 32. The second flow passage 35 communicates the valve chest 32 and a flow in side at the flow passage 19 of the accumulation base 1. The third flow passage 38 opens the valve chest 32 to the valve body 31 side, and an external pipe 39 is connected to the opened side. A diaphragm 46 is pressed and brought into contact with a valve seat 34, or opened. Thus, the first and the second flow passages 35 and 36 usually communicated with each other is communicated or shut off with respect to the third flow passage 38.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is used in a manufacturing apparatus for semiconductors, liquid crystals, and the like, and various gas supply control devices constitute a plurality of rows of gas supply control lines for supplying and controlling a high-purity gas. In the gas supply control device integrated in a panel, the process gas is passed through when the process gas is supplied, the purge gas is supplied to the gas supply control line as needed, or the gas supply control line side is supplied as necessary. The present invention relates to a branch valve used for discharging a purge gas supplied from a device or supplying a process gas supplied to a gas supply control line to another line.

[0002]

2. Description of the Related Art Conventionally, for example, in a semiconductor manufacturing apparatus, an integrated gas supply control device used for supplying and controlling a high-purity gas has a plurality of gas supply control lines. Each gas supply control line is a toggle-type manual diaphragm valve that manually opens and closes the gas flow path from the upstream side to the downstream side of the process gas, an automatic diaphragm valve that automatically opens and closes the gas flow path, and impurities contained in the process gas. A desired gas supply control device such as a filter unit for removing the gas, a regulator for adjusting the pressure of the process gas, a pressure transducer for detecting the pressure of the process gas, a mass flow controller for controlling the flow rate of the process gas, and the like are connected in combination.

In recent years, as the integrated gas supply control device, an integration base having a flow path is used, and desired gas supply control devices are sequentially connected to form a gas supply control line,
A configuration is known in which a plurality of sets are arranged in parallel and integrated in a panel.

In the conventional example as described above, in order to supply the purge gas to the gas supply control line, as an example, a flow path block having a flow path for the process gas and a flow path for the purge gas is used in the base for integration, When the process gas is allowed to flow, the branch channel of the process gas channel is blocked, and when the purge gas is supplied, the purge gas channel can be communicated with the branch channel of the process gas channel so that the purge gas can be automatically connected. A configuration is known in which a diaphragm valve is connected to the flow path block using a mounting block.

As another example of supplying the purge gas to the gas supply control line, a flow path for the process gas is provided in the base for integration, a flow path for the purge gas is formed between adjacent flow path blocks, and the gas supply is performed. A slender rectangular tube-shaped pipe member having a flow path for the purge gas is provided so as to extend in the direction orthogonal to the extension direction of the control line and across the parallel gas supply control lines, and the flow path block and the pipe member are connected to each other through the flow of the purge gas. Connect in a sealed state so that the passages communicate,
A configuration is known in which an automatic diaphragm valve for purging, which can switch between the flow path of the process gas and the flow path of the purge gas, is connected to the flow path block.

[0006]

However, in the former configuration among the above-mentioned conventional examples, the purge gas flow passage of the flow passage block is lengthened by itself due to processing restrictions, and
Since the process gas flow path has a branch flow path which is a long dead space that is not used for the flow of the process gas, there is a limit to the reduction of the purge time, and the purging work efficiency is poor. Further, as the purge gas flow path becomes longer as described above, the flow path block becomes longer in the extension direction of the gas supply control line, which restricts the miniaturization of the integrated gas supply control device as a whole.

On the other hand, in the latter configuration, since a pipe member having a purge gas flow passage is provided so as to straddle an adjacent flow passage block for connecting an automatic diaphragm valve for purging, standardization is required. There are many parts, and there is a limit to the reduction of total cost. When using a toxic process gas or an explosive process gas, it is necessary to separate the parallel gas supply control lines with a partition wall to ensure safety and independence. Since the piping member is required, the shape of the partition wall becomes complicated, and not only the work for providing the partition wall is troublesome but also expensive. In addition, since the piping member is required as described above, not only is it troublesome to provide the heating heater for each gas supply control line, but it is expensive. Further, it is necessary to maintain the airtightness between the flow path blocks having the purge gas flow path and between the flow path block and the piping member, and since the number of airtightness holding locations increases, the airtightness reliability becomes poor.

An object of the present invention is to reduce the flow path length for purging and the like, and to reduce the dead space as much as possible. Therefore, it is possible to shorten the purging time and the like. The work efficiency can be improved, and the length of the gas supply control line in the integration base in the extension direction can be shortened. Therefore, the integrated gas supply control device can be downsized as a whole. Further, the number of parts for standardization of the gas supply control line can be reduced, so that the total cost can be reduced, and a pipe member that intersects with the integration base between the gas supply control lines is unnecessary. Therefore, if necessary, a partition for ensuring safety and independence may be provided between the gas supply control lines or the gas may be It is possible to easily perform the work of providing a heater for each supply control line, further reduce the number of airtight holding points, and thus to provide a branch valve capable of improving airtightness reliability. To do.

[0009]

In order to solve the above-mentioned problems, a branch valve according to the present invention comprises a valve body which can be connected to a base for integration having a flow passage, and a valve chamber formed in the valve body. A first flow path formed in the valve body, the first opening communicating with an outflow-side opening in the flow path of the stacking base, and the second opening communicating with the valve chamber; A second channel formed in the valve body, the first opening communicating with the valve chamber, and the second opening communicating with the inflow side opening in the channel of the stacking base; First formed on the body
A side opening of the valve body, a second opening communicating with the valve chamber, a first opening connected to an external pipe, and a first flow path. Second in the flow path
Of the first flow path and the first flow path of the third flow path are always communicated with each other, and the second flow path of the first flow path and the first flow path of the third flow path and the third flow path of the third flow path are connected to each other. The opening / closing means that can block or communicate with the second opening in the flow path, and the driving means that performs the opening / closing operation of the opening / closing means.

In the above structure, the opening / closing means includes the valve seat and an opening / closing element provided so as to be in contact with or separated from the valve seat, and the second opening / closing means in the first flow path. Of the opening and the first of the second flow path
Can be arranged outside the valve seat, and the second opening in the third flow path can be arranged inside the valve seat.

Alternatively, the opening / closing means includes the valve seat and an opening / closing element provided so as to be in contact with or separated from the valve seat, and the second opening in the first flow path. And the first opening in the second flow passage can be arranged inside the valve seat, and the second opening in the third flow passage can be arranged outside the valve seat, in which case The second opening side of the first flow path and the first opening side of the second flow path can be combined so as to be shared.

The valve body is formed so that it can be inserted into the tubular portion of the stacking base, and the tubular screw member provided on the valve body is screwed onto the screw portion formed on the tubular portion. By doing so, the valve body can be configured to be connected to the collecting base. Alternatively, the valve body is formed so that it can be inserted into a tubular portion of a support base screwed to the collecting base with a flange portion, and a tubular screw member provided on the valve body is attached to the tubular portion. The valve body can be configured to be connected to the collecting base by being screwed onto the formed screw portion. In these cases,
The external pipe can be inserted into an open portion formed in a tubular portion into which the valve body is inserted.

Alternatively, the valve body may include a flange portion having a mounting hole screwed to the collecting base.

A diaphragm can be used as the switching element.

According to the present invention configured as described above,
Since the third flow path is opened to the side of the valve body and connected to the external pipe, the flow path length for purging and the like can be shortened, and the flow path of the accumulating base can be changed to the first flow path. Since the flow passage and the second flow passage are communicated with the valve chamber, it is possible to reduce the dead space that is not used for the flow of the purge gas or the like as much as possible, and as described above, the length of the flow passage for the purge or the like. Since it is possible to shorten the length of the gas supply control line in the integration base in the extension direction, it is possible to form a flow path for the purge gas supply in the integration base, Since it is not necessary to connect members, it is possible to reduce the number of parts for standardization of the gas supply control line, and further to form a flow path for supplying purge gas or the like in the integration base as described above,
Since it is not necessary to connect the pipe members, it is possible to reduce the number of airtightly held portions.

[0016]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings. First, a first embodiment of the present invention will be described. 1 and 2 are longitudinal sectional views showing a process gas supply state in which a branch valve according to a first embodiment of the present invention is connected to a flow path block in an integration base,
Fig. 3 is a horizontal cross-sectional view, Fig. 3 is a vertical cross-sectional view showing a purge gas supply state in which the branch valve is connected to a flow path block in an integration base, and Fig. 4 is a partial perspective view showing an integrated gas supply control device using the purge valve. It is a figure.

In FIGS. 1 to 4, 1 is a base for integration and 2 is a branch valve according to the present embodiment which is detachably attached to the base 1 for integration. In the semiconductor manufacturing apparatus, various gas supply control devices including the branch valve 2 are detachably mounted on the integration base 1 in order to control the supply of the high-purity process gas. In the illustrated example,
As a part of the gas supply control device, a toggle type manual diaphragm valve 3, an automatic diaphragm valve 4 and a filter 5 are shown in addition to the branch valve 2, and although not shown, a pressure transducer (pressure sensor) is also shown. , Automatic diaphragm valves, mass flow controllers, etc. are used. These gas supply control devices are combined to form a plurality of gas supply control lines.

First, an outline of an example of the base 1 for integration will be described. It is composed of a mounting block 11, an intermediate flow path block 12, and a terminal flow path block 13. Horizontal through-holes 14 in adjacent mounting blocks 11
Both side portions of the intermediate flow path block 12 are densely inserted into each one side portion of the
One side portion of the terminal flow path block 13 is densely inserted into the outer portion of the. The upper part of each mounting block 11 is formed in a cylindrical shape, and an installation hole 16 having an upward opening is formed inside the cylindrical portion 15, and a pair of positioning engaging portions 17 are integrally formed on the top surface of the cylindrical portion 15. Is provided for the purpose. At the bottom of the mounting hole 16 of the mounting block 11, each flow path block 12,
A flat surface 18 formed on 13 is arranged. Both ends of the flow path 19 formed in the intermediate flow path block 12 are opened to the flat surface 18, and one end of the flow path 20 formed in the terminal flow path block 13 is opened to the flat surface 18. An annular protruding portion 21 for sealing is formed on each flat surface 18 at the outer peripheral edges of the openings of the channels 19 and 20, and the annular protruding portion 21 for sealing is set such that the tip end thereof is pointed in cross section. A threaded portion 22 for mounting a device is formed on the outer peripheral surface of the upper portion of the cylindrical portion 15 of each mounting block 11. In the cylindrical portion 15 of the mounting block 11 to which the branch valve 2 is attached, an opening portion 23 is formed by a notch extending downward from the upper end at a position perpendicular to the extension direction of the flow passages 19 and 20 of the flow passage blocks 12 and 13. There is.

Next, the branch valve 2 according to this embodiment will be described. The valve body 31 is formed so that it can be inserted into the mounting hole 16 of the mounting block 11 from its lower end to its upper end, a valve chamber 32 is formed inside the upper portion of the valve body 31, and a central portion of the bottom portion of the valve chamber 32 is formed. An annular protrusion 33 is integrally provided, the base portion of the valve seat seat 34 is inserted into an annular groove formed in the protrusion 33, and the valve seat seat 34 is fixed by caulking the outer peripheral edge of the protrusion 33. ing. Valve body 3
A first flow path 35 and a second flow path 36 are formed on one side and the other side of the first parallel to the axis. First of the first flow path 35
The (lower) opening is opened to the bottom surface, and the second (upper) opening of the first flow path 35 is communicated (opened) with the valve chamber 32 at the outer peripheral portion of the valve seat 34. Second channel 3
The first (upper) opening of the valve seat 6 is located in the valve chamber 32.
In the outer peripheral portion of the first flow path 35 and the second opening portion of the first flow path 35 are communicated (opened) at a position shifted by approximately 180 degrees from each other,
The second (lower) opening of the second flow path 36 is open to the bottom surface. Therefore, the first flow path 35 and the second flow path 3
6 is always communicated with the valve chamber 32 through the valve chamber 32. The first opening of the first flow path 35 can communicate with the process gas outflow side opening of the flow path 19 of one of the intermediate flow path blocks 12 of the adjacent intermediate flow path blocks 12. The second opening of the second flow path 36 is arranged so as to communicate with the process gas inflow side opening of the flow path 19 of the other intermediate flow path block 12 of the adjacent intermediate flow path blocks 12. Has been done. Sealing annular protrusions 37 are formed on the peripheral edges of the first openings of the first flow paths 35 and the second openings of the second flow paths 36, and each of the sealing annular projections 37 has a tip end portion. The cross section is set to be sharp.

A third flow path 38 is formed in the valve body 31. In the third flow path 38, the first opening is opened to the side of the intermediate portion of the valve body 31, and the second opening is communicated (opened) inside the valve seat 34 at the center of the valve chamber 32. The first opening side is arranged in the direction perpendicular to the shaft center, the second opening side is arranged along the shaft center, and is formed in a shape bent in the right direction as a whole. The horizontal portion 40 and the vertical portion 41 of the external pipe 39 are connected to both ends of the joint 42 by welding or the like, and the end portion of the horizontal portion 40 has the third flow path 38.
Is connected to the first opening by welding or the like, and the upper end of the vertical portion 41 is welded with a joint 43 as a connecting means.
The joint 43 is connected to a purge gas supply source (not shown) via a pipe 44, a joint 45 and the like.

A diaphragm 46, which is an opening / closing element, is provided in the valve chamber 32. The peripheral edge of the diaphragm 46 is placed on a protrusion 47 that is integrally provided on the bottom peripheral edge of the valve chamber 32, and the peripheral edge of the diaphragm 46 is sandwiched between the protrusion 47 and the bonnet 48. A pressing piece 49 is supported inside the bonnet 48 so as to be movable in the axial direction (vertical direction), and the diaphragm 46 is pressed against the valve seat 34 by the axial movement of the pressing piece 49, or the diaphragm 46 is moved. Valve seat 3
The pressure on 4 can be released.

Holding piece 49 and diaphragm 46
An air cylinder 51 is used as a driving means (actuator) 50 for activating. Explaining an example thereof, the cylinder 52 is composed of a cylinder body 53 and a lid body 54 screwed to the inner circumference of the lower end portion of the cylinder body 53. The protruding portion on the outer periphery of the lower end of the support plate 55 is clamped and fixed between the step portion on the inner periphery of the lower end portion of the cylinder body 53 and the base end portion of the lid 54, and is housed in an annular groove on the outer periphery of the support plate 55. The O-ring 56 has an annular groove and the cylinder body 53.
It is pressed against and sealed to the inner peripheral surface of the. Above the support plate 55 in the cylinder body 53, a piston 57 and a shaft portion 58 integral with the piston 57 are arranged in the cylinder body 53 and a cylindrical portion 59 integrally provided with the top portion of the cylinder body 53 in the axial direction. Movably supported along
The O-rings 60 and 61 housed in the annular groove on the outer periphery of the piston 57 and the shaft portion 58 are formed in the annular groove and the cylinder body 53.
And, it is pressed against the inner peripheral surface of the tubular portion 59 to be sealed.

A piston 62 and a shaft portion 63 integral with the piston 62 are movably supported in the axial direction in a through hole in the base portion of the lid 54 and in the central portion of the support plate 55, and are integral with the piston 62. The piston rod 64 of the lid 5
The O-ring 6 is movably supported in the axial direction of the cylindrical protruding portion 65 of the No. 4 and is housed in the annular groove of the outer circumference of the piston 62, the inner circumference of the support plate 55 and the outer circumference of the piston rod 64.
6, 67 and 68 are pressed against the annular groove and the inner peripheral surfaces of the lid 54, the shaft portion 63 and the cylindrical projecting portion 65 to be sealed. A compression spring 69 is interposed between the piston 57 and the inner surface of the upper portion of the cylinder body 53, and the elasticity of the compression spring 69 urges the double pistons 57 and 62 and the piston rod 64 downward.

An air supply hole 70 is formed inside the tubular portion 59 of the cylinder body 53, and the air supply hole 70 is connected to a compressed air supply source (not shown). The piston 57 and the shaft portion 58, and the piston 62 and the shaft portion 63 have air passages 71 and 7 communicating with the air supply hole 70 along the axial direction.
2 are formed in the air flow path 72, and the air flow paths 73 and 74 opened between the piston 57 and the support plate 55 and between the piston 62 and the lid 54 are branched and formed.

When the compressed air is not supplied to the air supply hole 70, the elasticity of the compression spring 69 causes the pistons 57, 62, the piston rod 64 and the like to always advance downward. On the contrary, when compressed air is supplied to the air supply hole 70, the compressed air is supplied to the air flow passages 71 and 7.
It is supplied between the piston 57 and the support plate 55, and between the piston 62 and the lid 54 through 2, 73 and 74, whereby the pistons 57 and 62, the piston rod 64 and the like resist the elasticity of the compression spring 69. Then, it is set back upward.

The air cylinder 51 constructed as described above.
A threaded portion 75 formed on the outer circumference of the distal end portion of the cylindrical protruding portion 65 of the lid 54 is screwed onto a threaded portion 76 formed on the inner circumference of the upper portion of the valve chamber 32 of the valve body 31. By attaching the air cylinder 51 to the valve main body 31 in this manner, the tip of the cylindrical protrusion 65 is engaged with the bonnet 48, and the bonnet 48 holds the peripheral edge of the diaphragm 46 in a fixed state as described above. be able to. Further, as the piston rod 64 moves forward as described above, the pressing piece 49 moves forward as described above to bring the diaphragm 46 into close contact with the valve seat seat 34, and the second opening portion in the first flow path 35 and It is possible to block the first opening in the second flow path 36 and the second opening in the third flow path 38 (see FIGS. 1 and 2). On the contrary,
When the piston rod 64 retracts, the pressing force of the pressing piece 49 against the diaphragm 46 can be released, whereby the diaphragm 46 pushes up the pressing piece 49 by its elasticity and separates from the valve seat seat 34. The second opening in the flow path 35, the first opening in the second flow path 36, and the second opening in the third flow path 38 can be communicated with each other (FIG. 3).
reference).

A flange portion 77 is integrally provided on the outer periphery of the upper portion of the valve body 31, and a positioning engaging portion 78 is cut out in the flange portion 77. A union nut 79 for connecting to the accumulating base 1 is rotatably fitted to the outer circumference of the valve body 31, and an engaging portion of the inner circumference of the upper part of the union nut 79 is engaged with the flange portion 77 to be pulled out downward. It has been stopped.

Reference numeral 80 in the figure denotes the upper piston 5
7, an air vent hole formed in the cylinder body 53 above 81, 81 an air vent hole formed in the cylinder body 53 between the support plate 55 and the lower piston 62, and 82 and 83 valve body 31 and a hole for a leak test formed in the hood 48.

In order to use the branch valve 2 configured as described above in the gas supply control line, the valve body 31 of the branch valve 2 is inserted into the mounting hole 16 in the mounting block 11, and the horizontal portion 40 of the external pipe 39 is connected. Opening part 2 of mounting block 11
3, and the metal gasket 84 held by the holding member 87 on the valve body 31 is interposed between the sealing annular protrusion 37 of the valve body 31 and the sealing annular protrusion 21 of the intermediate flow path block 12. . The metal gasket 84 has holes 85 and 86.
5 and 86, the flow path 19 of one intermediate flow path block 12
Process gas outflow side opening and first flow path 35 in
And the second opening of the second flow path 36 and the opening of the process gas inflow side of the flow path 19 of the other intermediate flow path block 12 are made to communicate with each other. . At this time, by engaging the positioning engagement portion 78 of the flange portion 77 of the valve body 31 with the positioning engagement portion 17 of the cylindrical portion 15, the flow passage 19 of the intermediate flow passage block 12 and the first and the first passages. Two flow paths 35, 36
Can be easily and surely aligned.

Then, the union nut 79 provided on the branch valve 2 is detachably screwed to the threaded portion 22 of the mounting block 11 so that the branch valve 2 is connected to the intermediate passage block 12.
It can be attached to the collecting base 1 in a state of being connected to. In this attached state, the sealing annular protrusion 37,
21 bites into the metal gasket 84 around the holes 85 and 86, and a reliable sealed state can be obtained. After the branch valve 2 is attached to the collecting base 1 in this manner, the joint 43 of the external pipe 39 and the purge gas supply source are connected to the pipe 44.
Etc. to connect.

As described above, one union nut 79 provided on the outer circumference of the branch valve 2 is attached to the threaded portion 2 of the mounting block 11.
Since the branch valve 2 can be attached to the collecting base 1 by screwing it on 2, the attaching work can be easily performed.
In addition, it can be performed quickly, and the entire branch valve 2 can be tightened in good balance without generating couples.
Therefore, assembling work efficiency can be improved, and close sealing property can be ensured and reliability can be improved. Also, the union nut 79
This union nut 79 is used to attach the block 11
The branch valve 2 is connected to the flow path block 12 by being screwed into the threaded portion 22 formed on the outer periphery of the cylindrical portion 15 of FIG. Particles that are generated are mounting blocks 11
Mounting hole 16, that is, the flow path 1 of the flow path block 12
No more invading 9. Therefore, it is possible to contribute to high purification of the process gas.

The toggle type manual diaphragm valve 3, the automatic diaphragm valve 4, the filter 5 and the like used as other gas supply control devices also have the main body attached to the collecting base 1 in the same manner as the branch valve 2.

The operation of the above arrangement will be described below. Now, as shown in FIGS. 1 and 2, the branch valve 2
At the same time, the elasticity of the compression spring 69 causes the piston 57, the shaft portion 58, the piston 62, the shaft portion 63, and the piston rod 64 to integrally advance downward, and accordingly, the pressing piece 49 moves forward to move the diaphragm 46 to the valve seat. The sheet 34 is closely attached to the sheet 34, and the second opening of the third flow path 38 is blocked from the second opening of the first flow path 35 and the first opening of the second flow path 36. Suppose In this state, the second opening of the first flow path 35 and the second opening
Is communicated with the first opening of the flow passage 36 via the valve chamber 32, so that the process gas is flowed through the flow passages 20 and 19 in the integration base 1 and the upstream toggle-type manual diaphragm valve 3, the automatic type. It flows through the diaphragm valve 4, the flow path 19 in the base 1 for integration, the hole 85 in the metal gasket 84, and then flows into the first flow path 35 in the branch valve 2. Subsequently, the process gas flows into the flow passage 19 of the integration base 1 through the valve chamber 32 of the branch valve 2, the second flow passage 36, and the hole 86 of the metal gasket 84, and the process gas of the downstream side filter 5 and the like. Each is a supply control device, the flow path 1 of the base 1 for integration
It is supplied through 9 and 20 to a desired supply destination.

When the supply of the process gas is stopped, the compressed air supply source supplies the air supply hole 70 and the air flow paths 71, 72, 7 with each other.
As shown in FIG. 3, by supplying compressed air between the piston 57 and the support plate 55 and between the piston 62 and the lid 54, the piston 57 and the shaft 5
8, piston 62, shaft 63 and piston rod 64
And the like are integrally retracted upward against the elasticity of the compression spring 69. Along with this, the pressing force on the pressing piece 49 is released, and the diaphragm 46 pushes up the pressing piece 49 by its own repulsive elasticity, restores and separates from the valve seat seat 34, and the second opening in the third flow path 38. Department and first
Second opening and second flow path 36 in the flow path 35 of
Through the valve chamber 32. Then, the purge gas is caused to flow from the purge gas supply source into the valve chamber 32 through the pipe 44, the joint 43, the external pipe 39, and the third flow passage 38, and the purge gas is supplied to the first flow passage 3
5 and the second flow path 36, the hole 8 of the metal gasket 84
It is possible to supply from 5 and 86 to the respective channels 19 and 20 of the integration base 1 to perform purging (purification, replacement with purge gas).

After purging, the compressed air supply to the air cylinder 51 is stopped to open the flow path of the compressed air into the atmosphere, and as shown in FIGS. 1 and 2, the repulsive elasticity of the compression spring 69 causes the piston to move. 57 and shaft 58,
The piston 62, the shaft portion 63 and the piston rod 64 are integrally advanced downward. Along with this, the pressing piece 4
9 is advanced to bring the diaphragm 46 into close contact with the valve seat 34, to block the third flow path 38 from the first flow path 35 and the second flow path 36, and to close the first flow path 35 and the second flow path 35. Channel 36
Only communicate with each other. Therefore, the supply of the process gas can be controlled as described above.

According to the branch valve 2 of this embodiment, the external pipe 39 is projected in the direction intersecting with the extending direction of the flow paths 20 and 19 in the collecting base 1 to form the intermediate flow path block 12 connecting the branch valve 2. Since it is not necessary to form a flow path for purging, the purge flow path length can be shortened. Further, the flow passages 20 and 19 of the accumulating base 1 are communicated with the valve chamber 32 by the first flow passage 35 and the second flow passage 36, and the second opening portion of the first flow passage 35 and the first flow passage 35 are connected to each other. The first opening of the second flow passage 36 is communicated with the outer peripheral portion of the valve seat seat 34, and the third flow passage 38 is formed.
Since the second opening is communicated with the inside of the valve seat 34, the dead space that is not used for the flow of the purge gas in the flow direction of the process gas can be eliminated so as to be zero. Therefore, the purging work efficiency can be improved. In addition, as described above, the branch valve 2
It is not necessary to form a purging flow path in the intermediate flow path block 12 that connects the gas supply control lines, and the length of the gas supply control line in the integration base 1 in the extension direction can be shortened. Therefore, it is possible to reduce the size of the integrated gas supply control device as a whole. Further, it is not necessary to form a flow path for supplying purge gas or connect a piping member to the accumulating base 1. Therefore, it is possible to easily install a partition wall between the gas supply control lines for ensuring safety and independence or to provide a heating heater for each gas supply control line, if necessary. The number of parts for standardization of the supply control line can be reduced, therefore
It is possible to reduce the total cost, further reduce the number of airtight holding portions, and improve the airtight reliability.

Next, a second embodiment of the present invention will be described. FIG. 5 is a vertical cross-sectional view showing a supply state of purge gas in which a branch valve according to a second embodiment of the present invention is connected to a flow path block in an integration base, and FIG. 6 is an integrated gas supply control using the same branch valve. It is a partial perspective view which shows an apparatus.

The branch valve 2 of this embodiment is different from the first embodiment in that the first, second and third flow paths 35, 36,
38 and the external pipe 39 are different in arrangement, shape, and the like, and other configurations are the same, so the same portions are denoted by the same reference numerals, and different portions will be mainly described.

As shown in FIGS. 5 and 6, the valve body 31
The first flow path 35, the second flow path 36, and the third flow path 3
8 is formed. The first opening of the first flow path 35 and the second opening of the second flow path 36 are opened to both sides of the bottom surface, and the second opening of the first flow path 35 and the second opening of the second flow path 36 are opened. The first opening of the flow path 36 is formed in the vertical direction and in the inclined direction so as to communicate (open) with the valve chamber 32 inside the valve seat seat 34. The first flow path 35 and the second flow path 36 are located on the second opening side of the first flow path 35 and the first opening side of the second flow path 36, that is, on the valve chamber 32 side. The valve chambers 32 are combined into one (one flow path) so as to be shared.
It is open to the public. Therefore, the first flow path 35 and the second flow path 35
The flow path 36 is always in communication with the valve chamber 32.
The first opening of the first flow path 35 is the intermediate flow path block 12
The second opening of the second flow path 36 is connected to the process gas inflow side opening of the flow path 19 of the intermediate flow path block 12 so as to communicate with the process gas outflow side opening of the flow path 19. It is arranged so that it can communicate.

In the third flow path 38, the first opening has the valve body 3
1 is opened to the side of the middle portion, the second opening is communicated (opened) with the valve chamber 32 at the outer peripheral portion of the valve seat 34, and the first opening is arranged in the direction perpendicular to the axis. The second opening side is arranged along the axis, and is formed in a shape bent in the right angle direction as a whole. Third channel 38
The horizontal portion 40 of the external pipe 39 is connected to the first opening of the same by welding or the like. The third flow path 38 is, in the illustrated example,
The first flow path 35 and the second flow path 36 are arranged in series along the gas supply control line direction.

The branch valve 2 in this embodiment is the first valve
In the same manner as in the first embodiment, the union nut 79 is attached to the mounting block 11, and the first opening of the first flow path 35 and the second opening of the second flow path 36 are connected to the metal gasket 8.
One of the intermediate flow path blocks 12 through the four holes 85 and 86.
The flow-out side opening of the process gas in the flow path 19 is communicated with the flow-in side opening of the process gas in the flow path 19 of the other intermediate flow path block 12. At this time, as described above, since the third flow path 38 is arranged so as to be in series with the first flow path 35 and the second flow path 36, the horizontal portion 40 of the external pipe 39 is connected to the gas. It will be arranged in the extension direction of the supply control line. Along with this, the intermediate flow path block 1
2 has a length in the gas supply control line direction longer than that of the first embodiment by the space required for disposing the external pipe 39 between the branch valve 2 and the filter 5, but in the lateral direction. The width can be reduced.

Also in the branch valve 2 of this embodiment, the diaphragm 4 is made elastic by the elasticity of the compression spring 69 (see FIGS. 1 to 3).
6 is brought into close contact with the valve seat 34, and the second opening in the third flow path 38 is set to the second opening in the first flow path 35 and the first opening in the second flow path 36. Since the second opening in the first flow path 35 and the first opening in the second flow path 36 communicate with each other through the valve chamber 32 by shutting off the flow of the base 1 for integration, Road 20, 1
As in the first embodiment, the process gas can be passed through 9, the first flow passage 35, the valve chamber 32, the second flow passage 36, and the like.

When the supply of the process gas is stopped, the diaphragm 46 is separated from the valve seat 34 by the operation of the air cylinder 51, and the first opening and the second opening in the third flow path 38 are separated from the first opening, as shown in FIG. The second opening in the flow path 35 and the first opening in the second flow path 36 are communicated with each other through the valve chamber 32, so that the purge gas is supplied to the external pipe as in the first embodiment. 39, the third flow path 38, the valve chamber 32, the first flow path 35, the second flow path 36, etc., to each of the flow paths 19, 20 of the accumulating base 1 to perform purging. it can.

In the branch valve 2 of this embodiment, the second opening of the first flow path 35 and the first opening of the second flow path 36 are located inside the valve chamber 32 inside the valve seat 34. Since they are communicated with each other, the purge gas flow path can be shortened. Further, when the external pipe 39 is arranged in the extension direction of the gas supply control line as described above, the length of the gas supply control line is slightly longer than that in the case of the first embodiment. This can be shortened as compared with the case where the flow passage for supplying the purge gas is formed in the flow passage block as in the example. Further, a dead space at the time of supplying the purge gas is also generated in the outer peripheral portion of the valve chamber 32 and cannot be made zero as in the first embodiment, but the purge gas is supplied to the flow path block as in the conventional example. The number can be reduced (shortened) as compared with the configuration in which the flow path is formed. In the present embodiment, the third flow path 38 is connected to the first flow path 35 and the second flow path 35.
Since the third flow path 38 is arranged outside the flow path 36, the third flow path 38 is arranged inside the first flow path 35 and the second flow path 36 as in the case of the first embodiment. Second channel 3
8, that is, the arrangement of the external pipe 39 is not restricted, and an arbitrary direction can be selected from all directions. Therefore, the extension direction of the gas supply control line or the crossing direction of the external pipe 39 can be selected according to the installation space of the integrated gas supply control device, so that versatility can be improved.

Next, a third embodiment of the present invention will be described. 7 and 8 are a longitudinal sectional view, a lateral sectional view, and FIG. 9 showing the supply state of the purge gas in which the branch valve according to the third embodiment of the present invention is connected to the flow path block in the base for integration. It is a partial exploded perspective view showing the state before connecting with a channel block in an accumulation base.

As shown in FIGS. 7 to 9, an example of the integrating base 1 used in this embodiment will be briefly described. It is composed of a base body 90, an intermediate flow path block 91, and a terminal flow path block 92. It The base body 90 has protrusions 94 formed on both sides of the bottom plate 93 in the longitudinal direction, and groove-like recesses 95 are formed between the protrusions 94. The four corners of each device are attached to the protrusions 94 from the upper surface downward. A screw hole 96 for forming is formed. The intermediate flow path block 91 is formed so as to be housed in the recess 95 of the base body 90, has a flow path 97, and both ends of the flow path 97 are opened to the upper flat surface 98. The same annular protrusion 99 for sealing is formed in the portion.
The terminal flow path block 92 is formed so that one side portion is housed in the recess 95 of the base body 90, and has a flow path 100,
One end of the flow path 100 is opened to the upper flat surface 98, and the sealing annular protrusion 99 similar to the above is formed at the outer peripheral edge of this opening.

Since the branch valve 2 of the present embodiment has the same structure as the branch valve 2 according to the first embodiment, the same parts are designated by the same reference numerals and the description thereof will be omitted.

To mount the branch valve 2 on the collecting base 1, the union nut 79, the support base 101 and the like provided on the valve body 31 are used. The support base 101 is a cylindrical portion 1.
A square flange portion 103 is integrally provided on the outer periphery of the lower end portion of 02. The threaded portion 1 is provided on the outer periphery of the cylindrical portion 102.
04 are formed, and screw mounting holes 105 having a spot facing are formed at four corners of the flange portion 103. Each screw mounting hole 105 has four screw holes 96 on the base body 90.
Is set to correspond to. The cylindrical portion 102 is set so that the valve body 31 of the purge valve 2 can be inserted therein, and a pair of positioning engaging portions 106 are provided on the top surface of the cylindrical portion 102.
Are projected integrally at a position shifted in phase by approximately 180 degrees. The cylindrical portion 102 has an opening 107 formed by a notch extending downward from the upper end at a position perpendicular to the extending direction of the flow paths 97, 100 of the flow path blocks 91, 92.

In order to use the branch valve 2 in this embodiment for the gas supply control line, first, the support base 101 is placed on the protrusions 94 on both sides of the base body 90, and the screws 108 are attached at the four corners of the support base 101. Hole 105 through base body 9
0 into the screw hole 96 to attach the support base 101 to the base body 9
Attach it to 0. Next, the valve body 31 of the branch valve 2 is attached to the support base 1
01 of the valve body 31 and the positioning engaging portion 78 of the flange portion 77 of the valve body 31 is inserted into the cylindrical portion 102.
The horizontal engaging portion 40 of the external pipe 39 is inserted into the open portion 107 of the cylindrical portion 102 by engaging with the positioning engaging portion 106. Along with this, the metal gasket 84 held by the holding member 87 on the valve body 31 is interposed between the sealing annular protruding portion 37 of the valve body 31 and the sealing annular protruding portion 99 of the intermediate flow path block 91 to form the metal gasket. One of the intermediate flow path blocks 9 is formed by the holes 85 and 86 of 84.
The first gas flow passage 97 is connected to the process gas outflow side opening and the first flow path 35 by the second flow passage 35.
The second opening in the flow path 36 and the flow-in side opening of the process gas in the flow path 97 of the other intermediate flow path block 91 are communicated with each other.

Then, the union nut 79 provided in the branch valve 2 is detachably screwed to the threaded portion 104 of the cylindrical portion 102 so that the branch valve 2 is connected to the intermediate flow path block 91. Can be attached to 1. In this attached state, the sealing annular protrusion 37,
99 bites into the metal gasket 84 around the holes 85 and 86, and a reliable sealed state can be obtained. After the branch valve 2 is attached to the collecting base 1 in this manner, the joint 43 of the external pipe 39 and the purge gas supply source are connected to the pipe 44.
Etc. to connect. Other gas supply control devices also branch valve 2
The main body is attached to the collecting base 1 in the same manner as.

Also in the branch valve 2 of this embodiment, the elasticity of the compression spring 69 (see FIGS. 1 to 3) causes the diaphragm 4 to move.
6 is brought into close contact with the valve seat 34, and the second opening in the third flow path 38 is set to the second opening in the first flow path 35 and the first opening in the second flow path 36. Since the second opening in the first flow path 35 and the first opening in the second flow path 36 communicate with each other through the valve chamber 32 by shutting off the flow of the base 1 for integration, Road 97, 1
00, the first flow path 35, the valve chamber 32, the second flow path 36, etc., the process gas can be passed therethrough as in the first embodiment.

When the supply of the process gas is stopped, the diaphragm 46 is separated from the valve seat 34 by the operation of the air cylinder 51, and the second opening in the third flow path 38 is formed. By communicating the second opening in the first flow path 35 and the first opening in the second flow path 36 with each other via the valve chamber 32, the first opening
In the same manner as in the above embodiment, the purge gas is passed through the external pipe 39, the third flow path 38, the valve chamber 32, the first flow path 35, the second flow path 36, etc. It can be supplied to 97, 100 for purging.

Next, a fourth embodiment of the present invention will be described. FIG. 10 is a vertical cross-sectional view showing a purge gas supply state in which a branch valve according to a fourth embodiment of the present invention is connected to a flow path block in an integration base.

Regarding the branch valve 2 in this embodiment,
The branch valve 2 according to the second embodiment has the same configuration,
The collecting base 1 to which the branch valve 2 is attached, the support base 101, and the like have the same configuration as that of the third embodiment.
The same parts are designated by the same reference numerals and the description thereof will be omitted.

Also in the branch valve 2 of this embodiment, the elasticity of the compression spring 69 (see FIGS. 1 to 3) causes the diaphragm 4 to move.
6 is brought into close contact with the valve seat 34, and the second opening in the third flow path 38 is set to the second opening in the first flow path 35 and the first opening in the second flow path 36. Since the second opening in the first flow path 35 and the first opening in the second flow path 36 communicate with each other through the valve chamber 32 by shutting off the flow of the base 1 for integration, Road 97, 1
00, the first flow path 35, the valve chamber 32, the second flow path 36, and the like, as in the third embodiment and the like, the process gas can be passed.

When the supply of the process gas is stopped, the diaphragm 46 is separated from the valve seat 34 by the operation of the air cylinder 51, and the third flow passage 38 is formed, as shown in FIG.
The third opening by communicating the second opening in the first flow path 35 with the second opening in the first flow path 35 and the first opening in the second flow path 36 through the valve chamber 32. Similar to the configuration, the purge gas is supplied to the external pipe 39, the third flow path 38, the valve chamber 32, the first flow path 35, and the second flow path 36.
Purging can be performed by supplying the respective flow paths 97 and 100 of the base 1 for integration through the above.

Next explained is the fifth embodiment of the invention. 11 and 12 are a longitudinal sectional view, a lateral sectional view, and a longitudinal sectional view showing a purge gas supply state in which a branch valve according to a fifth embodiment of the present invention is connected to a flow path block in an integration base.
3 is a partial perspective view showing an integrated gas supply control device using the same branch valve.

As shown in FIGS. 11 and 12, in the branch valve 2 of this embodiment, the shape of the valve body 31 is different from that of the first to fourth embodiments, and the base for integration is different. Other structures are the same except that the structure to be attached to No. 1 is different, and thus the same parts are denoted by the same reference numerals, and mainly different parts will be described.
Further, since the collecting base 1 to which the branch valve 2 is attached has the same structure as that of the collecting base 1 used in the third embodiment, the same parts are designated by the same reference numerals and the description thereof will be omitted.

The valve main body 31 is integrally provided with a rectangular flange portion 110 on the outer periphery of the lower end portion, and screw mounting holes 111 having counterbores are formed at the four corners of the flange portion 110.

The branch valve 2 according to this embodiment has a valve body 31.
The metal gasket 84 between the sealing annular projection 37 of the valve body 31 and the sealing annular projection 99 of the intermediate flow path block 91. Gasket 8
The holes 85 and 86 of No. 4 make the process gas outflow side opening in the flow path 97 of the one intermediate flow path block 91 communicate with the first opening of the first flow path 35, and the second flow path 36. And the process gas inflow side opening in the flow path 97 of the other intermediate flow path block 91 are communicated with each other. Then, the screws 112 are screwed from the screw mounting holes 111 at the four corners of the valve body 31 to the screw holes 96 of the base body 90.
The purge valve 2 can be detachably attached to the collecting base 1 in a state where the purge valve 2 is connected to the intermediate flow path block 91 by being screwed into. As for the other gas supply control devices, the main body is attached to the collecting base 1 in the same manner as the branch valve 2.

Also in the branch valve 2 of this embodiment, the elasticity of the compression spring 69 (see FIGS. 1 to 3) causes the diaphragm 4 to move.
6 is brought into close contact with the valve seat 34, and the second opening in the third flow path 38 is set to the second opening in the first flow path 35 and the first opening in the second flow path 36. Since the second opening in the first flow path 35 and the first opening in the second flow path 36 communicate with each other through the valve chamber 32 by shutting off the flow of the base 1 for integration, Road 97, 1
00, the first flow path 35, the valve chamber 32, the second flow path 36, and the like, as in the third embodiment and the like, the process gas can be passed.

When the supply of the process gas is stopped, the diaphragm 46 is separated from the valve seat 34 by the operation of the air cylinder 51, and the second opening in the third flow path 38 is formed. By communicating the second opening portion of the first flow path 35 and the first opening portion of the second flow path 36 with each other through the valve chamber 32, as in the third embodiment and the like, External piping for purge gas 3
9, third flow path 38, valve chamber 32, first flow path 35, second
Each flow path 97, 1 of the integration base 1 via the flow path 36 of
00, and purging can be performed.

Next explained is the sixth embodiment of the invention. FIG. 14 is a vertical cross-sectional view showing a purge gas supply state in which a branch valve according to a sixth embodiment of the present invention is connected to a flow path block in an integration base.

As shown in FIG. 14, the branch valve 2 of the present embodiment is different from the branch valve 2 of the second embodiment in that a rectangular flange portion 110 is integrally formed on the outer periphery of the lower end portion of the valve body 31. And the same configuration except that it has screw mounting holes 111 having spot facings at the four corners of the flange portion 110, and therefore the same portions are denoted by the same reference numerals and description thereof is omitted. Further, since the collecting base 1 to which the branch valve 2 is attached has the same structure as that of the collecting base 1 used in the third embodiment, the same parts are designated by the same reference numerals and the description thereof will be omitted.

The passage of the process gas and the supply of the purge gas in the branch valve 2 of this embodiment are the same as those in the third and fifth embodiments and so on, and therefore their explanations are omitted.

In each of the above embodiments, the case where the purge gas is supplied to the gas supply control line from the external pipe 39 has been described, but the present invention is not limited to this, and the gas is supplied from the gas supply control line, for example. It can be used when the purge gas is discharged from the external pipe 39 or the process gas supplied to the gas supply control line is supplied to another line by the external pipe 39. In addition, the first flow path 35, the second flow path 36, and the third flow path 38.
The related arrangement of is not limited to the above-described embodiments, and a desired related arrangement can be selected. Further, the opening / closing means can adopt a configuration other than the valve seat 34 and the diaphragm 46, and the driving means of the opening / closing means can use an air cylinder other than that of the above-described embodiment or any other desired means. . Further, the integration base 1 to which the branch valve 2 is attached is not limited to the above embodiment, and a desired configuration can be used, for example, connecting flow path blocks having flow paths. In addition, the present invention can be modified in various ways without departing from the basic technical idea thereof.

[0067]

As described above, according to the present invention, since the third flow path is opened to the side of the valve body and is connected to the external pipe, the flow path length for purging is shortened. In addition, since the flow path of the integration base is connected to the valve chamber by the first flow path and the second flow path, it is possible to reduce the dead space that is not used for the flow of the purge gas and the like as much as possible. Therefore, the purging time can be shortened and the purging work efficiency can be improved. Further, as described above, since the flow path length for purging or the like can be shortened, the length of the gas supply control line in the base for integration in the extending direction can be shortened, and therefore the integrated gas supply control device as a whole. Can be miniaturized. Further, since it is not necessary to form a flow path for supplying purge gas or to connect a piping member to the base for integration, it is possible to reduce the number of parts for standardizing the gas supply control line, and therefore the total cost. Of the gas supply control lines as described above, it is possible to eliminate the need for a piping member that intersects with the integration base, so that safety and independence can be secured as necessary. It is possible to easily perform the work of providing the partition between the gas supply control lines and providing the heating heater for each gas supply control line. Further, as described above, since it is not necessary to form a flow path for supplying purge gas or to connect a piping member to the base for integration,
The number of airtight holding portions can be reduced, and thus the airtightness reliability can be improved.

[Brief description of drawings]

FIG. 1 is a vertical cross-sectional view showing a process gas supply state in which a branch valve according to a first embodiment of the present invention is connected to a flow path block in an integration base.

FIG. 2 is a horizontal cross-sectional view showing a process gas supply state in which the branch valve is connected to a flow path block in an integration base.

FIG. 3 is a vertical cross-sectional view showing a purge gas supply state in which the branch valve is connected to a flow path block in an integration base.

FIG. 4 is a partial perspective view showing an integrated gas control device using the same branch valve.

FIG. 5 is a vertical cross-sectional view showing a purge gas supply state in which a branch valve according to a second embodiment of the present invention is connected to a flow path block in an integration base.

FIG. 6 is a partial perspective view showing an integrated gas supply control device using the same branch valve.

FIG. 7 is a vertical cross-sectional view showing a purge gas supply state in which a branch valve according to a third embodiment of the present invention is connected to a flow path block in an integration base.

FIG. 8 is a transverse cross-sectional view showing a purge gas supply state in which the branch valve is connected to a flow path block in an integration base.

FIG. 9 is a partially exploded perspective view showing a state before the branch valve is connected to the flow path block in the integration base.

FIG. 10 is a vertical cross-sectional view showing a purge gas supply state in which a branch valve according to a fourth embodiment of the present invention is connected to a flow path block in an integration base.

FIG. 11 is a vertical cross-sectional view showing a purge gas supply state in which a branch valve according to a fifth embodiment of the present invention is connected to a flow path block in an integration base.

FIG. 12 is a transverse cross-sectional view showing a purge gas supply state in which the branch valve is connected to a flow path block in an integration base.

FIG. 13 is a partial perspective view showing an integrated gas supply control device using the same branch valve.

FIG. 14 is a vertical cross-sectional view showing a purge gas supply state in which a branch valve according to a sixth embodiment of the present invention is connected to a flow path block in an integration base.

[Explanation of symbols]

1 Base for integration 2-branch valve 11 Mounting block 12 Intermediate flow path block 13 Terminal flow path block 18 channels 19 channels 31 valve body 32 valve chambers 34 valve seat 35 First Channel 36 Second flow path 38 Third Channel 39 External piping 46 diaphragm 50 driving means 51 air cylinder 79 Union Nut 91 Base body 92 Intermediate flow path block 93 Terminal flow path block 97 channel 100 channels 101 support

Claims (9)

[Claims] 1. A valve main body connectable to a base for integration having a flow path, a valve chamber formed in the valve main body, a first opening formed in the valve main body, and a first opening of the base for integration. A first flow path formed in the valve body, the first flow path communicating with the outflow side opening of the flow path and the second opening communicating with the valve chamber, and the first opening communicating with the valve chamber. A second opening formed in the valve body and a second opening in which the second opening communicates with an inflow opening in the passage of the accumulating base, and the first opening is formed laterally of the valve body. A third flow path that is opened and has a second opening communicating with the valve chamber and the first opening connected to an external pipe; and a second opening in the first flow path and the third flow path. The first opening portion of the second flow path is always communicated with the second opening portion of the first flow path and the second flow path. A branch valve provided with an opening / closing means for blocking or allowing communication between the first opening and the second opening in the third flow path, and a driving means for performing the opening / closing operation of the opening / closing means. 2. The opening / closing means includes a valve seat and an opening / closing element provided so as to be in contact with or separated from the valve seat, and the second opening and the second opening in the first flow path. Two
The branch valve according to claim 1, wherein the first opening in the flow passage is arranged outside the valve seat, and the second opening in the third flow passage is arranged inside the valve seat. 3. The opening / closing means includes a valve seat and an opening / closing element provided so as to come into contact with or separate from the valve seat, and the second opening and the second opening in the first flow path are provided. Two
The branch valve according to claim 1, wherein the first opening in the flow passage is arranged inside the valve seat, and the second opening in the third flow passage is arranged outside the valve seat. 4. The branch valve according to claim 3, wherein the branch valve is integrated so that the second opening side of the first flow path and the first opening side of the second flow path are shared. 5. A valve main body is formed so that it can be inserted into a tubular portion of a stacking base, and a tubular screw member provided on the valve main body is screwed onto a screw portion formed on the tubular portion. The branch valve according to any one of claims 1 to 4, wherein the valve body is connected to the collecting base by being attached. 6. A valve body is formed so that it can be inserted into a tubular portion of a support base screwed to a stacking base with a flange portion, and a tubular screw member provided on the valve body is the tubular body. The branch valve according to any one of claims 1 to 4, wherein the valve body is connected to the collecting base by being screwed into a threaded portion formed in the cylindrical portion. 7. The branch valve according to claim 5, wherein the external pipe is inserted into an opening formed in a tubular portion into which the valve body is inserted. 8. The branch valve according to claim 1, wherein the valve body includes a flange portion having a mounting hole screwed to the collecting base. 9. The switching element is a diaphragm.
9. The branch valve according to any one of 1 to 8.