JP2007170484A - Structure for mounting flow control instrument - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a flow control instrument which does not require a positioning operation as required in a conventional method in a surface mounting operation, and can simultaneously and uniformly carry out sealing connection by mounting a flow control device by means of fastening bolts, and especially has simple components and can easily mount and dismount the flow control instrument, and as a result, becomes compact in size. <P>SOLUTION: In a structure for mounting the flow control instrument 3 by the surface mounting method, the body 11 of the flow control instrument 3 has an inlet port 12 and an outlet port 13 of fluid. Fastening bolts 17 for the surface mounting method are attached to both ends of the body 11 located outside positions of the inlet port 12 and the outlet port 13. The flow control instrument 3 is fixed to an attaching body 20 by means of the fastening bolts 17. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a flow control device (mass flow controller) in a planar mounting structure (surface mount system) mounted on a semiconductor integrated valve device used for controlling a processing gas used in a semiconductor manufacturing process such as semiconductor and liquid crystal. This relates to the mounting structure.

  Valves and mass flow controllers used in this type of integrated valve device are required to be compact as semiconductors are highly integrated and highly accurate. In particular, there is a request to develop ultra-small integrated valves. . In general, in order to meet this requirement, the block and various devices are provided with inlet and outlet flow paths, and this connection part constitutes a seal part with a gasket and is fastened with bolts from above the various devices. A compact design has been achieved.

Usually, the following means are adopted as countermeasures actually implemented.
First, there is an integrated gas control device in which a mass flow controller mounting device is constituted by a column, a clamping block, bolts, and the like, and the mass flow controller is mounted on the block by this mounting device (see, for example, Patent Document 1). ).
In this integrated gas control device, each metal gasket is tightened from directly above with one bolt, and both side portions of the mass flow controller are attached by a so-called center lock structure.

  Also, as a second means, the block is fastened to the body of the mass flow controller from the lateral direction with two bolts, and the inlet side and the outlet side of this integrated mass flow controller are separated into separate mounting blocks. On the other hand, there is a mass flow controller that is tightened with two bolts so as to straddle the flow path from above (see, for example, Patent Document 2). In this mass flow controller, a gasket is attached to the flow path between the mass flow controller and the two bolts of the block attached to the side surface, and the gasket is installed in the flow path between the block and the two bolts of another mounting block. The flow path is configured in the mounted state. Therefore, when installing the mass flow controller, it is necessary to locate the mass flow controller and the block in the vertical direction, and to locate this block and another mounting block in the left and right direction. The sealing performance is maintained.

The former Patent Document 1 arranges the gasket at the center position of one bolt, and the latter Patent Document 2 arranges the gasket at the center position straddling the two mounting bolts and tightens the individual gaskets. This structure prevents the gasket from tilting.
JP 2002-48299 A Japanese Patent No. 2865644

However, the mass flow controller in Patent Document 1 has a center lock structure in which the gasket is tightened at the center position of the bolt, and this center lock structure has struts standing on both sides of the gasket and a bolt for tightening directly above the gasket. However, when attaching and detaching the mass flow controller, it was troublesome to attach and detach because the fastening hardware had to be removed.
In particular, since the block is divided from the main body, and the mounting block is also attached to the lower side of the mass flow controller with bolts, it is necessary to position the inlet and outlet, resulting in poor workability.
There is also a problem that the mass flow controller has a complicated body flow path and a large number of components, and the split type is expensive. Furthermore, there is a problem that the structure of the center lock metal fitting and the support becomes complicated and expensive.

  On the other hand, the mass flow controller of Patent Document 2 must seal the fluid inlet and outlet separately by tightening the two sides of the gasket with two bolts while positioning in the vertical and horizontal directions. Depending on the structure, it becomes difficult to form a flow path in the device, and there is a problem that the body body and the mounting block of the mass flow controller must be divided, or the hole diameter of the flow channel in the device or block needs to be narrowed. For this reason, there are problems such as a complicated flow path and high cost.

  The present invention has been developed in view of the conventional problems, and the object of the present invention is to attach the flow control device with a fastening bolt without the need for positioning as in the conventional method at the time of planar mounting. Thus, the seal connection can be made simultaneously and uniformly, and in particular, the components are simple and the attachment / detachment work of the flow control device is facilitated, thereby providing a compact flow control device.

  In order to achieve the above object, according to a first aspect of the present invention, there is provided a mounting structure in which a flow control device is mounted in a plane mounting method, wherein a fluid inlet and outlet are provided in a body of the flow control device, and the inlet and outlet are located. This is a mounting structure for a flow rate control device in which fastening bolts for plane mounting are attached to both ends of the outer body, and the flow rate control device is fixed to the mounted body with the fastening bolts.

  According to the second aspect of the present invention, in the flow control device, an inlet and an outlet communicating with the inside of the device are integrally formed on the bottom surface of the body, and the projecting portions which are both ends of the outer body where the inlet and the outlet are located. It is the attachment structure of the flow control apparatus which formed the bolt hole for fastening bolts.

  The invention according to claim 3 is the mounting structure of the fluid control device in which the fastening bolt is fixed by fastening the protruding portions at both ends of the body of the flow control device with one fastening bolt.

  According to a fourth aspect of the present invention, the mounted body is a flow path block in which an inlet and an outlet are integrally formed. The flow path block has a first inlet and a second outlet for fluid at both ends thereof. It is a mounting structure of a flow control device in which a first outlet and a second inlet are formed to communicate the inlet and the outlet of the flow control device on the inner upper surface from the position.

  According to the fifth aspect of the present invention, the screw block is detachably attached to the upper surfaces of both ends of the flow path block, and the fastening bolts attached to both ends of the flow control device are screwed into the screw block, whereby the flow control device is made into the flow block. It is a mounting structure for a flow control device that is tightened and fixed.

  The invention according to claim 6 is the mounting structure of the flow control device in which the screw block is formed separately from the flow channel block, and both ends of both screw blocks are mounted to the flow channel block with two mounting bolts.

  The invention according to claim 7 is the mounting structure of the flow rate control device in which the fastening bolt inserted through the bolt holes at both ends of the flow rate control device is screwed into the flow path block and fixed.

  The invention according to claim 8 is the mounting structure of the flow control device in which the gasket is interposed between the inlet and outlet of the flow path block and the body inlet and outlet of the flow control device.

  The invention according to claim 9 is the mounting structure of the flow rate control device in which the fastening bolt is fastened and fixed to the center position in the longitudinal direction of the device where the flow path or gasket of the flow rate control device is located.

  The invention according to claim 10 is the mounting structure of the flow rate control device in which the flow path block is fixed to the base body by surface mounting with a fixing bolt.

  According to the invention of claim 1, by tightening the flow control device with, for example, one fastening bolt, the inlet and outlet gaskets can be simultaneously and uniformly sealed and connected by a simple mounting operation, and the structure is simplified. Therefore, it is possible to obtain a mounting structure for a flow control device that can contribute to downsizing and can be applied to an ultra-small integrated valve.

  According to the second aspect of the present invention, the flow path of the fluid inlet and outlet of the flow rate control device can be formed in a simple structure. Therefore, the flow rate control device mounting structure is easy to process and can be manufactured compactly.

  According to the invention which concerns on Claim 3, since both ends can be clamp | tightened with two fastening bolts, attachment work can be performed easily and reliably.

  According to the invention according to claim 4, since the flow path block is integrally formed, it is not necessary to position the inlet and the outlet as in the conventional mounting method of the flow rate control device, and the integral is fixed to the base body. By attaching the flow rate control device to the flow path block, it is not necessary to have a troublesome positioning, and the attachment / detachment operation can be performed easily and reliably.

  According to the invention which concerns on Claim 5, it becomes possible to attach with each one fastening bolt, and in particular, the height of the flow path block can be made as low as the blocks located before and after the integrated valve, saving expensive materials. This makes it possible to easily perform the curing process by burnishing the seal portion, and to reduce the overall mounting height of the flow control device.

  According to the invention which concerns on Claim 6, since a screw block can be fixed with an attachment bolt with respect to a flow-path block, a flow control apparatus can be attached to the screw block currently fixed to the flow-path block.

  According to the seventh aspect of the present invention, the flow control device can be fastened with each one fastening bolt, and positioning of the inlet and outlet is not required for mounting, and the mounting work can be simplified.

  According to the eighth aspect of the present invention, the inlet and outlet gaskets can be simultaneously and uniformly sealed with two bolts, and the flow control device mounting structure is particularly suitable for an ultra-small integrated valve.

  According to the ninth aspect of the present invention, since the fastening bolt can be fastened with a single bolt by being mounted directly above the flow path, it is a simple mounting operation and is suitable for an ultra-small integrated valve. The connection site is securely sealed.

  According to the invention of claim 10, since the integral flow path block can be fixed to the base body, for example, the flow control device can be easily and accurately attached and detached, and is particularly applicable to an ultra-small integrated valve. it can.

Hereinafter, an embodiment of a mounting structure of a flow control device according to the present invention will be described in detail with reference to the drawings.
In FIG. 1 to FIG. 3, the integrated gas control apparatus 1 includes pressure control and flow rate control of a fluid such as nitrogen gas, hydrogen gas, monosilane, sidilan, hydrogen diluted phosphine, N ₂ O, and trifluoride chloride. The gas control line 2 is configured to perform supply control such as control at the time of supply of mixing, purge gas, etc. The gas control line 2 is, for example, arranged in parallel in a plurality of rows on a base-like member (not shown). The apparatus is configured (in this embodiment, only one row of the integrated valve apparatus is shown).

  On the gas control line 2, a device for controlling the fluid is mounted while forming a flow path, and a flow rate control device (mass flow controller) 3 is mounted as one of the devices. Further, in addition to the flow rate control device 3, this device includes, for example, automatic diaphragm valves 4a and 4b for opening and closing the gas flow path, a purge valve 4c for supplying purge gas, a filter (not shown), various valves, and manual operation. Various control devices 4 such as on-off valves are mounted, and these constitute one gas supply line.

  The flow rate control device 3 is mounted together with other control devices 4 by a mounting structure having a planar mounting method. In the planar mounting method in this embodiment, a long base body 35 is fixed to the upper surface of the base-like member. The flow path block 20 is fixed by surface mounting while a screw block 30 described later is interposed on the base body 35, and is attached using the fastening bolts 17 from above. The flow rate control device 3 measures the mass and flow rate of the fluid with high accuracy by, for example, the flow rate sensor unit 18 shown in FIG. 1, and opens and closes a valve (not shown) of the actuator unit 19 based on the measurement result. The flow rate is controlled. The flow control device 3 in this example includes various mass flow controllers.

As shown in FIGS. 1 and 3, the flow control device 3 according to the present embodiment is provided in a structure in which, for example, a flow sensor unit 18 and an actuator unit 19 that are integrated on the upper part of the body 11 are attached and configured integrally. . In this case, there are various other types of flow control devices having the body 11. For example, the flow rate sensor unit and the actuator unit are provided separately, and each of these flow control devices is attached to the body 11. May be.
The body 11 of the flow control device 3 is integrally formed as shown in FIG. 3 in the present embodiment, and an inlet channel that communicates the flow rate sensor unit 18 and the actuator unit 19 in the device with the bottom surface 11a of the body. 12a and the inlet 12 and outlet 13 of the outlet channel 13a are integrally formed to provide inlets and outlets 12 and 13 for fluids such as gas fluid, and the inlet 12 and outlet 13 are formed on the same surface of the bottom surface. Is done. Further, the inlet 12 and the outlet 13 are formed on the same line at the center position in the longitudinal direction of the body 11.

In the longitudinal direction of the flow rate control device 3, projecting portions 15, 15 are formed at both ends of the body 11 so as to project toward the flow path side. The projecting portions 15 and 15 are located on the outer side of the inlet 12 and the outlet 13, and the projecting portions 15 and 15 are formed with bolt holes 16 and 16 for plane mounting fastening bolts 17 and 17, respectively. Therefore, each bolt hole 16, 16 is located outside the inlet 12 and the outlet 13. Further, the bolt holes 16, 16 are formed at the center position in the longitudinal direction of the body 11, which is collinear with the formation positions of the inlet 12 and the outlet 13, and the bolt holes 16 formed one at each end of the body 11. , 16 can be fastened with a single fastening bolt 17, and when the bolt holes 16, 16 are fastened with the fastening bolt 17, the bolts 16, 16 are arranged on the same line with one fastening bolt provided on each side. A force can be applied to the bolt holes 16 and 16 to equalize the pressure.
The projecting portions 15 and 15 can be formed separately from the body 11. In this case, the body is formed in a substantially rectangular parallelepiped shape, and the projecting portion formed in a substantially rectangular parallelepiped shape on the side surface of the body is bolted or the like. These can be integrated by fixing from the side.

  The inlet flow channel 12a and the outlet flow channel 13a communicating from the inlet 12 and the outlet 13 are mounted on the upper part of the body 11 to the flow rate sensor unit 18 and the actuator unit 19 that function the flow rate control device 3. It is connected. A gasket 38 is mounted between the inlet 12 and outlet 13 and the flow rate sensor portion 18 and the actuator portion 19, and both are sealed by the gasket 38. A communication hole 38a is formed in the central portion of the gasket 38, and the primary side and the secondary side can be communicated with each other through the communication hole 38a. The gasket 38 is made of stainless steel or the like, and is sandwiched between the body 11 and the flow path block 20 so as to be crushed. The gasket 38 is sealed by metal touch to prevent gas leakage. The structure and material of the gasket 38 are the same in the following.

Although the inlet channel 12a and the outlet channel 13a can be formed at an appropriate angle, in this embodiment, the inlet channel 12a and the outlet channel 13a are formed in the vertical direction. It flows smoothly and prevents stagnation, and can be easily formed and processed in the body 11.
In the body 11, a connection channel 14 having an appropriate shape for connecting the flow sensor unit 18 and the actuator unit 19 is formed and processed, and the connection channel 14, the flow sensor unit 18, and the actuator unit 19 are connected. A gasket 38 is also attached to the part to seal each other.

The flow path block 20 is an attached body to which the body 11 of the flow control device 3 is attached. In the present embodiment, the flow path block 20 is formed into a block shape by integral molding as shown in FIGS. The flow path block 20 has internal flow paths 25 and 26, respectively, and an inlet 21 and an outlet 22 of the internal flow paths 25 and 26 are integrally formed.
With respect to the inlet 21 and the outlet 22, a first inlet 21a and a second outlet 22b of fluid are formed at both ends of the flow path block 20, and the inlet flow path 12 and the outlet flow of the flow control device 3 are formed on the inner upper surface from the positions of both ends. A first outlet 21b and a second inlet 22a that can communicate with the passage 13 are formed. In addition, it is also possible to separate the flow path block and integrate it.

  The first outlet 22 a and the second inlet 21 b are integrally formed on the upper surface side of the flow path block 20 so as to be on the same plane, and are provided on the same line at the center position in the longitudinal direction of the flow path block 20. . The distance between the first outlet 22a and the second inlet 21b is the same as the distance between the inlet 12 and the outlet 13 on the body 11 side, and the diameter of the flow path is also the same. Since the first outlet 22a and the second inlet 23b have the same spacing as the inlet 12 and the outlet 13, the inlet 12 can communicate with the first outlet 22a and the outlet 13 can communicate with the second inlet 21b.

Further, fitting grooves 27, 27 are formed in a concave shape between the first inlet 21a and the first outlet 22a, and between the second inlet 21b and the second outlet 22b, and the bottom of the fitting groove 27 is flat. It is formed in a shape. Two bolt holes 28 and 28 are formed in each bottom portion at positions crossing the internal flow paths 25 and 26 and the flow paths. 2 is screwed into the bolt hole 28 so that a screw block 30 described later can be detachably attached to the fitting grooves 27 on the upper surfaces of both ends.
In the present embodiment, the first inlet 21a and the second outlet 22b are formed at the same height as the first outlet 22a and the second inlet 21b, but the height of the first inlet 21a and the second outlet 22b. May be changed according to the type, shape, height, and the like of the control device 4 connected adjacent to the flow rate control device 3.

  As shown in FIG. 2, attachment holes 20 a are formed at both ends of the flow path block 20 so as to straddle the first inlet 21 a and the second outlet 22 b, and communication between the flow path block 20 and the flow path block 20 is adjacent. With the control device 4 of FIG. 1 placed on the block 5, a fixing bolt (not shown) is fixed to the mounting hole 20a so that the control device 4 can be attached to connect the flow path.

  The annular recesses 23a, 23b24a, 24b, the annular recess 12b, the inlets 21a, 21b and the outlets 22a, 22b on the flow channel block 20 side, and the gaskets 12 can be interposed at the inlet 12 and the outlet 13 on the body 11 side. 13b is provided, and a gasket 38 is interposed therebetween to seal the connection portion of the flow path.

  Further, in this flow path block 20, an unillustrated protruding portion is provided at an appropriate position on the upper surface side in contact with the body 11, while an unillustrated concave portion in which the protruding portion can be fitted in the body 11 is formed. Then, when the flow control device 3 is placed on the flow path block 20, the flow control device 3 can be positioned with respect to the flow path block 20.

The screw block 30 is formed separately from the flow path block 20, and has a length in the longitudinal direction that is substantially the same as the protruding portion 15 of the body 11. Further, this length is set to a length that can be fitted into the fitting groove 27, so that when the screw block 30 is placed on the flow path block 20, the screw block 30 fits into the fitting groove 27. Positioning in the longitudinal direction is performed, and the lower surface side of the protruding portion 15 of the body 11 is placed in contact with the positions of the screw blocks 30 on both sides.
Through holes 31 and 31 into which two mounting bolts 29 can be mounted are formed at both ends of each screw block 30, and seats that can store the heads 29 a of the mounting bolts 29 above each through hole 31. A counterbore 32 is formed.

  When the screw block 30 is fitted into the fitting groove 27, the through hole 31 communicates with the bolt hole 28, and the mounting bolt 29 is screwed from above to attach the screw block 30 to both ends of the flow path block 20. Removably attached to the top surface. In this way, by attaching the both sides of the screw block 30 with the two mounting bolts 29, 29, this flow path block is avoided while avoiding the inlet flow path 12a and the outlet flow path 13a formed at the central position of the flow path block 20. The screw block 30 can be mounted at an accurate position with respect to 20.

After the attachment bolt 29 is attached, the head portion 29a is accommodated in the spot facing portion 32, and the head portion 29 does not protrude from the upper surface side of the screw block 30, and the planar state on the upper surface side of the screw block 30 is maintained.
For this reason, when the protruding portion 15 is placed on the screw block 30, the lower surface of the protruding portion 15 is surely brought into surface contact with the upper surface of the screw block 30, and is fixed in a highly sealed state. Further, the height of the screw block 30 at this time is such that the lower surface of the body 11 and the upper surface of the flow path block 20 can come into surface contact with each other, so that the inlet 12, the outlet 13, the first outlet 22a, and the second inlet 21b A high sealing state can be achieved.

A fastening hole 33 to which a fastening bolt 17 for fixing the body 11 to the screw block 30 can be screwed is provided at the center position of the two through holes 31, 31 of the screw block 30. After the attachment to the road block 20, the fastening hole 33 opens to the upper side.
The fastening hole 33 is disposed concentrically with the through-hole 31, and the body 111 is placed on the screw block 30 to attach the flow control device 3, and the mounting bolt for plane mounting inserted through the bolt hole 16. 17 is screwed into the flow path block 20 so that the flow path of the flow rate control device 3 and the gasket 38 are tightened and fixed at the center position in the longitudinal direction of the device. Since the pressing force can be applied to the position, the lower surface side of the body 11 is brought into contact with the upper surface side of the flow path block 20 with an equal surface pressure, and the same surface disposed between the fastening holes 33. The flow control device 3 can be fastened and fixed to the flow path block 20 while applying a uniform pressure to the first outlet 22a, the second inlet 21b, the inlet 12, and the outlet 13 to communicate with each other.

  The flow path block 20 and the screw block 30 are desirably made of stainless steel or a material having corrosion resistance equivalent to that of stainless steel in order to prevent impurities from entering the fluid. Moreover, it is preferable to process the screw block 30 and the flow path block 20 and the planar portion where the screw block 30 and the body 11 and the body 11 and the flow path block 20 come into contact with each other by high-precision processing such as mirror surface processing.

As shown in FIG. 2, the base body 35 is formed in an elongated shape in the flow path direction, and a female screw 36 for mounting the flow path block 20 is provided on the upper surface side of the base body 35. The female screws 36 are provided at intervals between the fixing holes 20b of the fixing bolts 37 that fix both ends of the flow path block 20, and by tightening the fixing bolts 37 from above with the fixing holes 20b and the female screws 36 communicating with each other, The flow path block 20 is attached to the base body 35 by surface mounting.
Since the base body 35 does not come into contact with the fluid, for example, a lightweight material such as aluminum can be used, and thereby the integrated gas control device 1 can be reduced in weight. The overall weight can be reduced.

  As described above, the flow control device 3 is provided with the fluid inlet channel 12 and the outlet channel 13 in the body 11, and bolt holes are formed at both ends of the outer body 11 where the inlet channel 12 and the outlet channel 13 are located. The mounting structure of the flow control device is provided with 16 and 16, mounting bolts 17 and 17 for planar mounting are attached to the bolt holes 16 and 16, and the flow passage block 20 which is an attached body is fixed by the fastening bolt 17. Therefore, the flow control device 3 can be easily attached to and detached from the gas control line 2 by tightening or loosening the fastening bolt 17 while being compacted by being fastened from above the flow control device 3. .

  When the flow rate control device 3 is mounted, the flow rate control device 3 is simply attached to the flow path block 20, and the body 11 side inlet flow path 12, the outlet flow path 13 and the flow path block 20 side first outlet 22, second inlet. 23 can be communicated while being positioned, so that it is not necessary to bother to perform a troublesome positioning operation, and it is possible to improve the workability.

  Moreover, since the attachment / detachment site | part to the flow-path block 20 of the body 11 of the flow control apparatus 3 can be integrated, a flow path can be simplified and it can manufacture at low cost by being able to reduce a component. Further, since the fastening position (bolt hole 16) of the fastening bolt 17 is shifted outward from the inlet flow path 12 and the outlet flow path 13, they do not overlap with each other. Therefore, it is not necessary to make the hole diameter of the flow path narrow, and a sufficient flow path can be secured.

  Here, the flow of the fluid in the vicinity of the flow rate control device 3 in the gas control line 2 will be described. First, when fluid enters the first inlet 21a from the control device 4c on the primary side, the fluid passes through the internal flow path 25 and enters the first flow. 1 exit 22a is reached. This fluid is flow-controlled from the inlet 12 of the body 11 through the inlet channel 12a through the flow rate sensor unit 18, the connection channel 14, and the actuator unit 19, and passes through the outlet channel 13a from the outlet 13 to the second inlet. 21b is reached. The fluid that has reached the second inlet 21b reaches the second outlet 22b through the internal flow path 26, and is sent from the second outlet 22b to the secondary control device 4b. At this time, since the first outlet 22a and the inlet 12 and the outlet 13 and the second inlet 21b are connected by a high seal through the gasket 38, the fluid is not leaked to the outside and the flow rate is controlled with high accuracy. be able to.

Next, the effect | action in the said embodiment of the attachment structure of the flow control apparatus of this invention is demonstrated.
When mounting the fluid control device 3, first, the flow path block 20 is attached to the base body 35 in advance.
The flow path block 20 is placed in a state where the fixing hole 20b is aligned with the female screw 36 of the base body 35, and the fixing bolt 37 is screwed onto the fixing hole 20b so that the flow path block 20 is attached to the base body 35. On the other hand, it is fixed by surface mounting. At this time, the installation space of the flow path block 20 can be reduced by forming the formation site of the fixing hole 20b to a minimum.

  Since the first outlet 22a and the second inlet 21b are directly provided on the upper surface side of the flow path block 20, the inlet 12 of the flow rate control device 3 with respect to the first outlet 22a and the second inlet 21b, The outlet 13 can be directly connected, which eliminates the need to connect a mounting block or the like provided in advance to the flow rate control device 3, eliminates the configuration of the flow path by the mounting block, and saves labor. be able to.

  A screw block 30 is placed on the upper surface of both ends of the flow path block 20 from above so as to be fitted into the fitting grooves 27 of the flow path block 20, and the through holes 31 at both ends of both screw blocks 30. The screw block 30 is attached to the flow path block 20 by screwing two mounting bolts 29 from above. Since the screw block 30 is fitted in the fitting groove 27, the screw block 30 is prevented from moving in the longitudinal direction and is fixed in a state where it is accurately positioned by the two mounting bolts 29, 29.

The flow control device 3 simply mounts the protrusions 15, 15 at both ends of the body 11 on the screw blocks 30, 30, and the integrated flat portion at the lower part of the body 11 becomes the integrated flat portion of the flow path block 20. The inlet 12, the outlet 13, the first outlet 22a, and the second inlet 21b formed in the planar portion can be reliably positioned.
When the fastening bolts 17 and 17 are screwed into the fastening holes 33 and 33 from the bolt holes 16 and 16 of the flow control device 3, the inlet 12, the outlet 13, the first outlet 22a, and the second inlet 21b are positioned. Since the flow paths can be connected, there is no need to mount the channels while positioning each other through troublesome work, and the flow paths can be formed easily.

  Moreover, the fastening bolt 17 is fixed by fastening the protruding portions 15 and 15 at both ends of the body 11 with a single bolt, respectively, so that the flow path of the flow control device 3 and the gasket 38 are located in the longitudinal direction of the device. The center position of the inlet side and outlet side gaskets 38, 38 is simultaneously tightened from the outer side of the gaskets 38, 38, and the inlet 12, the outlet 13, the first outlet 22a, and the second inlet 21b are tightened. Can be sealed. At this time, by simply screwing in the fastening bolts 17 on both sides, the flow passage positions and the pressing state on the body 11 side and the flow passage block 20 side can be adjusted automatically and connected. Therefore, the fastening work of the fastening bolt 17 can be easily performed.

Thus, since the flow paths are provided on the lower surface of the body 11 of the flow rate control device 3 and the upper surface of the flow path block 20, and these flow paths are connected, the flow path is formed on the side surface of the body 11 and this flow path is formed. There is no need to connect the mounting blocks divided into the flow paths, and therefore, there is no need to perform positioning in different directions in the vertical and horizontal directions as in the case of using the mounting blocks.
Further, since the fastening position of the fastening bolt 17 does not overlap with the flow path, it is not necessary to make the hole diameter of the flow path in the device or block narrow, and the flow path can be easily provided. Manufacturing costs can be reduced due to the simple configuration of the road and the reduced number of bolts.
A mounting structure for a flow rate control device that can exhibit a highly accurate mounting effect while saving space and contribute to ultra-miniaturization of the entire integrated valve is provided by mounting the mounting method using the fastening bolt 17. be able to.

4 to 6 show other embodiments of the flow control device mounting structure according to the present invention. In addition, in other embodiment, the same location as the said embodiment is represented by the same code | symbol, and the description is abbreviate | omitted.
As shown in the figure, the flow control device 6 according to another embodiment is provided with fastening holes 46 and 46 of the fastening bolts 17 and 17 in the flow channel block 45, and the body 41 of the flow control device 6 is connected to the flow channel block 45. The fastening bolts 17 and 17 inserted directly through the bolt holes 42 and 42 at both ends are directly screwed into the fastening holes 46 of the flow path block 45 so as to be fastened and fixed. In this way, the screw nut portion for fastening the fastening bolt 17 may be directly formed in the integrally formed flow path block 45.

  Thereby, the fastening by only one fastening bolt 17 attached to both ends of the body 41 on the outer side of the inlet 43 and the outlet 44 of the flow control device 6 is possible. When the body 41 is placed on the flow path block 45, the body 41 is sandwiched between the inlet 43 and outlet 44 on the body 41 side and the first outlet 48a and second inlet 47b on the flow path block 45 side. Positioning is performed by the gasket 38, and there is no need to perform positioning. Note that the first inlet 47a and the second outlet 48b communicate with the first outlet 48a and the second inlet 47b through the internal flow paths 49 and 50, respectively.

  Further, in the mounting structure of the flow rate control device according to the present invention, if the inlet and outlet of the fluid are formed inside the fastening bolt 17 and are tightened by the outer fastening bolt, the fastening bolt fastened to each end side. The number of 1 may be two or more, and the tightening force can be increased by increasing the number of bolts.

  In addition to the above, the structure of the flow path block can be formed separately by dividing the inlet side and the outlet side, but in this case, in order to prevent the gasket 38 and the fastening bolt 17 from being tightly tightened, the flow path block is not shown. It is necessary to attach a flow control device after attaching each flow path block to a simple base body.

  Furthermore, the mounting structure of the flow control device of the present invention can be applied to mounting other than the flow control device, and by using this mounting structure, various kinds of control valves such as a control valve mounted in a plane on a semiconductor integrated valve device or the like. By attaching the control device, an even more compact integrated valve device can be formed.

It is the front view which showed embodiment of the attachment structure of the flow control apparatus in this invention. FIG. 2 is a partially enlarged exploded perspective view of FIG. 1. FIG. 2 is a partially enlarged front view of FIG. 1. It is the front view which showed other embodiment of the attachment structure of the flow control apparatus in this invention. FIG. 5 is a partially enlarged exploded perspective view of FIG. 4. FIG. 5 is a partially enlarged front view of FIG. 4.

Explanation of symbols

3 Flow Control Device 11 Body 11a Bottom 12 Inlet 13 Outlet 15 Projection 16 Bolt Hole 17 Fastening Bolt 20 Channel Block (To-be-attached Body)
21 inlet 21a first inlet 21b second inlet 22 outlet 22a first outlet 22b second outlet 27 fitting groove 29 mounting bolt 30 screw block 35 base body 37 fixing bolt 38 gasket

Claims (10)

  In the mounting structure where the flow control device is mounted by the plane mounting method, the body of the flow control device is provided with a fluid inlet and outlet, and mounting bolts for plane mounting are attached to both ends of the outer body where the inlet and outlet are located. A mounting structure for a flow control device, wherein the flow control device is fixed to a body to be mounted with the fastening bolt.   In the flow control device, an inlet and an outlet communicating with the inside of the device are integrally formed on the bottom surface of the body, and bolt holes for fastening bolts are formed in projecting portions which are both ends of the outer body where the inlet and the outlet are located. The mounting structure of the flow rate control device according to claim 1, wherein:   The mounting structure of the fluid control device according to claim 1 or 2, wherein the fastening bolts are fixed by tightening protrusions at both ends of the body of the flow control device with a single fastening bolt.   The attached body is a flow channel block in which an inlet and an outlet are integrally formed. The flow channel block forms a first inlet and a second outlet for fluid at both ends thereof, and is formed on an inner upper surface from the positions of both ends. The flow control device mounting structure according to claim 1, wherein a first outlet and a second inlet for communicating the inlet and the outlet of the flow control device are formed.   A screw block is detachably attached to the upper surfaces of both ends of the flow channel block, and the flow control device is fastened and fixed to the flow channel block by screwing fastening bolts attached to both ends of the flow control device into the screw block. The mounting structure of the flow control device according to claim 4.   6. The flow control device mounting structure according to claim 5, wherein the screw block is formed separately from the flow channel block, and both ends of both screw blocks are mounted to the flow channel block with two mounting bolts.   The mounting structure of the flow control device according to claim 4, wherein fastening bolts inserted through bolt holes at both ends of the flow control device are screwed into the flow path block and fixed.   The flow control device mounting structure according to any one of claims 1 to 7, wherein a gasket is interposed between an inlet and an outlet of the flow path block and a body inlet and an outlet of the flow control device.   The flow control device mounting structure according to any one of claims 1 to 8, wherein the fastening bolt is fastened and fixed to a center position in a longitudinal direction of the device where a flow path or a gasket of the flow control device is located. The flow control device mounting structure according to any one of claims 4 to 9, wherein the flow path block is fixed to a base body by surface mounting with a fixing bolt.

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