JP4528592B2 - Gas supply integrated unit - Google Patents

Description

  The present invention relates to a gas supply integrated unit for controlling the supply of working gas.

  Conventionally, corrosive gas has been used for etching of photoresist processing and the like in semiconductor manufacturing processes. Since the photoresist processing (photoresist application, exposure, development, etching) is repeated a plurality of times in the semiconductor manufacturing process, a gas supply integrated unit that supplies a corrosive gas as needed is used in the actual semiconductor manufacturing process. The gas supply integrated unit includes a mass flow controller for accurately measuring the flow rate, an inlet on-off valve, an outlet on-off valve and a purge valve provided before and after the mass flow controller, a regulator for adjusting the gas pressure of the supply gas, and a supply A fluid control device such as a pressure gauge for monitoring the gas pressure is a constituent element. For example, in the photoresist process, ten or more kinds of gases may be supplied. In this case, as many gas supply integrated units as the number of kinds of gases are attached to the manifold. The semiconductor manufacturing apparatus has a strong demand for downsizing from the viewpoint of reducing space and improving production efficiency, and accordingly, downsizing of the gas supply integrated unit is desired.

FIG. 37 is a cross-sectional view of a conventional gas supply integrated unit 100. FIG. 38 is a view showing a connecting structure of manifold blocks 109 and 109 used in the conventional gas supply integrated unit.
The conventional gas supply integrated unit 100 includes fluid control devices such as an input block 101, an outlet block 107, a manual valve 102, a regulator 103, an inlet on / off valve 104, a mass flow controller 105, and an outlet on / off valve 106 in manifold blocks 108, 109, 110. , 111 are fixed from above by bolts 114, and the manifold blocks 108, 109, 119, 111 are fixed to the mounting plate 112 by mounting screws 113. The manifold blocks 108, 109, 110, and 111 are fixed by screws 114 with the convex portions 108 a, 109 a, and 111 a overlapped with the step portions 109 b and 110 b of the adjacent manifold blocks 109 and 110. The manifold blocks 108, 109, and 111 are formed with flow paths 108c, 109c, and 111c, and bolt holes 108d, 109d, 110d, and 111d for inserting the bolts 110, respectively. According to the structure of the manifold blocks 108 to 111, there is no useless gap between the manifold blocks 108 to 111, and the entire unit can be made compact (see, for example, Patent Document 1).

US Pat. No. 6,394,138

However, the conventional gas supply integrated unit 100 has the following problems.
(1) Since the conventional gas supply unit 100 has the flow paths 108c, 109c, 111c and the bolt holes 108d, 109d, 110d, 111d formed in the manifold blocks 108, 109, 111, the flow paths 108c, 109c, 111c The positional relationship with the bolt holes 108d, 109d, and 111d was uniquely determined. The fluid control devices such as the manual valve 102, the regulator 103, the inlet on / off valve 104, the mass flow controller 105, and the outlet on / off valve 106 have different bottom surface shapes, so that when installing the fluid control devices on the gas supply line in parallel, Manifold blocks 108-111 had to be used properly depending on the type of control equipment. The flow path varies depending on the purpose of use, and the conventional gas supply integrated unit 100 has to stock dozens of types of manifold blocks 108 to 111, which requires management costs. In addition, molds for molding various manifold blocks are also required, resulting in high production costs.

(2) In addition, the manifold blocks 108 to 111 are thickened in addition to the portions that form the flow paths 108c, 109c, and 111c and the bolt holes 108d, 109d, 110d, and 111d, which increases the weight of the entire unit. It was.

  Therefore, the present invention has been made to solve the above problems, and an object thereof is to provide an inexpensive and lightweight gas supply integrated unit.

The gas supply integrated unit according to the present invention has the following configuration.
(1) In a gas supply integrated unit that controls the supply or shut-off of a working gas by arranging a plurality of fluid control devices on a working plate by fixing them to a mounting plate using mounting bolts. A connection port that connects to the port that opens on the lower surface of the tube is opened on the upper surface, and a flow channel block that has an internal flow channel that communicates with the connection port is formed on the outer side of the flow channel block. The flow path block is sandwiched between the fluid control device and the mounting plate when the mounting bolt inserted through the screw block is fixed to the mounting plate.

(2) In the invention described in (1), the gasket disposed between the connection port and the port of the fluid control device is uniformly crushed between the flow path block and the fluid control device. It is characterized by.

(3) In the invention described in (1) or (2), the flow path block is provided with a positioning member standing on the lower surface, and the mounting plate is formed with a positioning hole through which the positioning member is inserted. .

(4) In the invention according to any one of (1) to (3), the flow path block includes two connection ports, and a first convex portion that opens one connection port; A pair of second convex portions provided symmetrically with respect to one convex portion, and a third convex portion provided opposite to the first convex portion to open the other connection port And

(5) In the invention described in (4), the flow path block has a first flow in which the first convex portion is provided in a square shape and the third convex portion is formed in the same square shape as the first convex portion. A second block having a road block, a first convex portion provided in the same square shape as the first convex portion of the first flow path block, and a third convex portion formed in a rectangular shape; The distance between the connection ports of the flow path block is longer than the distance between the connection ports of the first flow path block.

(6) In the invention according to any one of (1) to (5), the screw block has a cylindrical shape, is formed shorter than the height of the flow path block, and is a bolt hole for attaching the mounting bolt to the mounting plate. Is formed.

(7) In the invention according to any one of (1) to (5), the screw block is formed with a bolt hole for fastening the mounting bolt from the upper surface, and a bolt member is erected on the lower surface. The mounting plate is formed with a bolt hole for fastening the bolt member.

(8) In a gas supply integrated unit that controls the supply or shut-off of the working gas by arranging a plurality of fluid control devices on the mounting rail so as to be arranged side by side on the working gas supply line. A connection port to be connected to the port is opened on the upper surface, and a flow channel block in which an internal flow channel communicating with the connection port is formed, and a mounting bolt that is slidably mounted on the mounting rail and inserted into the fluid control device A screw block having a bolt hole to be fastened formed on the upper surface; a positioning member inserted into the flow channel block, the screw block, and the mounting rail; and the flow channel block fixing the mounting bolt to the screw block. By this, it is pinched between the fluid control device and the mounting rail.

(9) In the invention described in (8), the flow path block has two connection ports, and is formed in a square shape to open one connection port, and the first protrusion It has a pair of 2nd convex part provided symmetrically on both sides, and the 3rd convex part which is provided in the opposite direction to the 1st convex part, and opens the other connection port, It is characterized by the above-mentioned.

(10) In the invention described in (9), the flow path block includes a first flow path block in which the third convex portion is formed in the same square shape as the first convex portion, and the third convex portion is the first convex portion. The second flow path block is formed in a rectangular shape having a width from the first convex portion to the front end side, and the distance between the connection ports of the second flow path block is the distance between the connection ports of the first flow path block. Characterized by longer.

The operation and effect of the gas supply integrated unit having the above configuration will be described.
When the fluid supply device is fixed to the mounting plate, the gas supply integrated unit has, for example, a flow path block placed on the mounting plate and a screw block placed on the outside thereof, so that the port of the fluid control device is The fluid control device is placed on the flow path block so as to communicate with the connection port of the flow path block. Then, the fluid control device is fixed to the mounting plate using a mounting bolt inserted from the fluid control device into the screw block. The flow path block is held between the fluid control device and the mounting plate when the mounting bolt is fixed to the mounting plate. Since this gas supply integrated unit can individually adjust the position of the channel block and screw block according to the position of the port established on the lower surface of the fluid control device and the shape of the lower surface of the fluid control device, there are only a few types of channel blocks By providing them, it is possible to arbitrarily form a working gas flow path by combining them. And since the flow path block which forms only a flow path and the screw block which only penetrates an attachment bolt were separated, it is possible to omit an extra meat compared with the conventional manifold block.
Therefore, according to the gas supply integrated unit of the present invention, since there are few types of flow path blocks, the number of molds used when forming the flow path blocks can be reduced to reduce the production cost. Since the management cost can be reduced by reducing the stock amount of the road block, the cost can be reduced. In addition, since the flow path block and the screw block do not have extra meat unlike the conventional manifold block, the entire unit can be reduced in weight.

  Moreover, since the gas supply integrated unit of the present invention uniformly crushes the entire circumference of the gasket between the flow path block and the fluid control device, the sealing performance can be ensured.

  Further, the gas supply integrated unit of the present invention positions the flow channel block with respect to the mounting plate by inserting a positioning member standing on the lower surface of the flow channel block into a positioning hole formed in the mounting plate, and mounting bolts When the fluid control device is fixed to the mounting plate using the, the position of the flow control block and the connection port of the flow control block can be easily aligned because the flow passage block is not displaced. Is good.

  Also, the gas supply integrated unit of the present invention places the fluid control device on the second convex portion of the flow path block and supports the fluid control device at the cross portion of the flow path block, so that the fluid control device is held horizontally. Can do.

  Further, the gas supply integrated unit of the present invention includes the first flow path block and the second flow path block having different lengths between the connection ports, but the first convex portion of the first flow path block and the second flow path block. Since the shape of the pair of second convex portions is the same, the first convex portion of the first flow path block or the second flow path block is replaced with the first convex portion of the other first flow path block or the second flow path block. And the second convex portion in contact with each other, the connection ports can be collected in one place without providing a useless space.

  In the gas supply integrated unit of the present invention, the fluid control device is fixed to the mounting plate by inserting the mounting bolt into the screw block and fastened to the bolt hole of the mounting plate. Therefore, when the sealing force between the port of the fluid control device and the connection port of the flow path block is weak, the mounting force can be increased and the sealing force can be increased. In addition, when the lower surface of the fluid control device comes into contact with the screw block, the mounting bolt cannot be screwed any further, so that overtightening can be prevented.

  Further, the gas supply integrated unit of the present invention positions and fixes the screw block to the mounting plate by fastening a bolt member erected on the lower surface of the screw block to the bolt hole formed in the mounting plate. In order to fasten the mounting bolt inserted through the fluid control device, the fluid control device is fixed to the mounting plate via the screw block. In this case, the mounting bolt can be screwed deeply into the bolt hole of the screw block, and the mounting strength of the fluid control device can be ensured.

In addition, when attaching a fluid control apparatus to an attachment rail, a screw block is attached so that sliding is possible, for example, and a flow-path block is arrange | positioned among those screw blocks. At this time, the positioning member is inserted into the flow path block, the screw block, and the mounting rail for positioning. The fluid control device is placed on the flow channel block so that the port of the fluid control device communicates with the connection port of the flow channel block, and the mounting bolt inserted through the fluid control device is fastened to the bolt hole of the screw block. The fluid control device is fixed to the mounting rail through the screw block. The flow path block is sandwiched between the fluid control device and the mounting rail when the mounting bolt is tightened to the screw block. This gas supply integrated unit can adjust the position of the connection port of the flow path block and the position of the bolt hole of the screw block individually according to the position of the port of the fluid control device and the shape of the lower surface. It is possible to form a gas flow path. And since the flow path block which forms only a flow path and the screw block which forms only a bolt hole are provided separately, it is possible to omit an extra meat compared with the conventional manifold block.
Therefore, according to the gas supply integrated unit of the present invention, since there are few types of flow path blocks, the number of molds used when forming the flow path blocks can be reduced to reduce the production cost. Since the management cost can be reduced by reducing the stock amount of the road block, the cost can be reduced. In addition, since the flow path block and the screw block do not have extra meat unlike the conventional manifold block, the entire unit can be reduced in weight.

(First embodiment)
Next, an embodiment of a gas supply integrated unit according to the present invention will be described with reference to the drawings. FIG. 1 is a cross-sectional view of the gas supply integrated unit 1.
The gas supply integrated unit 1 includes a plurality of manual valves 2, a regulator 3, a pressure sensor 4, an inlet on / off valve 5, a purge valve 6, a mass flow controller 7, and an outlet on / off valve 8 on a supply line through which working gas is input and output. Fluid control devices are arranged side by side and fixed to the mounting plate 9. The mounting plate 9 uses a thick aluminum plate (for example, 10 mm) so as to withstand the weight of the plurality of fluid control devices 2 to 8 and the like. Between each fluid control device 2-8 and the mounting plate 9, a first flow path block 10A and a second flow path block 10B are disposed to form a working gas flow path, and the base plate 11 is a working gas. A purge gas pipe and an output pipe are formed so as to be orthogonal to the supply line. A rod heater 13 is inserted into the mounting plate 9 to heat the gas supply integrated unit 1 without changing the line pitch or height. A spacer 12 is disposed between the mass flow controller 7 and the mounting plate 9 so that heat is transferred from the mounting plate 13 to the mass flow controller 7.

FIG. 2 is a diagram illustrating a fixing structure of the fluid control device.
For example, the inlet on / off valve 5 which is a fluid control device is placed on the second flow path block 10B placed on the mounting plate 9, and the mounting bolt 14 inserted through the inlet on / off valve 5 is inserted into the second flow path block 10B. Each screw block 15 arranged around is passed through, and the tip of the mounting bolt 14 is screwed into a bolt hole 16 formed in the mounting plate 9 to be fixed to the mounting plate 9. The second flow path block 10 </ b> B is sandwiched between the inlet opening / closing valve 5 and the mounting plate 9 while being positioned on the mounting plate 9 by positioning pins (corresponding to “positioning member”) 17.

  Next, the first and second flow path blocks constituting the flow path of the gas supply integrated unit 1 will be described. The first and second flow path blocks 10A and 10B are made of a metal such as SUS in a cross shape, and have a block shape having the same height. The first flow path block 10A is shorter in length than the second flow path block 10B, and is different in shape from the second flow path block 10B.

FIG. 3 is a plan view of the first flow path block 10A. FIG. 4 is a longitudinal sectional view of the first flow path block 10A. FIG. 5 is a right side view of the first flow path block 10A. FIG. 6 is a bottom view of the first flow path block 10A.
The first flow path block 10 </ b> A has a cross shape including a first convex portion 21, a pair of second convex portions 22, 22, and a third convex portion 23. A first connection port 24 and a second connection port 25 are opened on the upper surface of the first flow path block 10 </ b> A and communicate with each other via a U-shaped flow path 26.

  The first convex portion 21 has a vertical width and a horizontal width of the same square shape with a dimension A, and a first connection port 24 is formed on the upper surface. The second protrusions 22 and 22 are provided symmetrically in the figure with the first protrusion 21 interposed therebetween, and a fitting hole 27 into which the positioning pin 17 is fitted is formed on the lower surface with a predetermined interval C therebetween. The second convex portions 22 and 22 are for holding the positioning pins 17, and the width is set to a dimension B smaller than the dimension A. The third convex portion 23 is provided in the opposite direction to the first convex portion 21, and is formed in the same square shape with the vertical width and the horizontal width A as in the first convex portion 21, and the second connection port 25. Has been established on the top.

  The flow path 26 has a hole drilled coaxially from the first connection port 24 and a hole drilled coaxially from the second connection port 25 horizontally from the side surface of the first flow path block 10A. It is formed by communicating with a hole provided, closing the side opening 28 with a lid 40 and welding. Therefore, the flow path 26 is formed in a U-shaped cross section, and the thickness of the first flow path block 10A is reduced compared to the case where the V-shaped flow path is formed, thereby reducing the weight of the first flow path block 10A. . In addition, a leak groove 29 communicates with the first connection port 24, and a flow meter is connected to the leak hole of the fluid control device attached to the first flow path block 10A so that fluid leak can be detected.

FIG. 7 is a plan view of the second flow path block 10B. FIG. 8 is a longitudinal sectional view of the second flow path block 10B. FIG. 9 is a right side view of the second flow path block 10B. FIG. 10 is a bottom view of the second flow path block 10B.
Similar to the first flow path block 10A, the second flow path block 10B is formed by forming a metal such as SUS in a cross shape, and includes a first convex portion 31, a pair of second convex portions 32, and a third convex portion 33. With. A first connection port 34 and a second connection port 35 are opened on the upper surface of the second flow path block 10 </ b> B and communicate with each other via the flow path 36.

  The 1st convex part 31 is formed in the same square shape with the vertical width and the horizontal width of the dimension A, and the 1st connection port 34 is established in the upper surface. The pair of second convex portions 32, 32 are provided symmetrically in the figure with the first convex portion 31 in between, and a fitting hole 37 into which the end of the positioning pin 17 is fitted is provided on the lower surface with a predetermined interval C therebetween. Is formed. Since the second convex portions 32 and 32 hold the positioning pin 17, the width is set to a dimension B smaller than the dimension A. The 3rd convex part 33 protrudes on the opposite side to the 1st convex part 31, and the 2nd connection port 35 is established. The 3rd convex part 33 protrudes in the opposite side to the 1st convex part 31 by the dimension E which doubled the width dimension A, and makes a rectangular shape. The second connection port 35 is provided at the tip portion of the third convex portion 33 and is provided on the outer side by one connection port as compared with the second connection port 25 of the first flow path block 10A. Therefore, the distance D2 between the first and second connection ports 34 and 35 of the second flow path block is longer than the distance D1 between the first and second connection ports 24 and 25 of the first flow path block 10A. .

  The flow path 36 has a hole drilled coaxially from the first connection port 34 and a hole drilled coaxially from the second connection port 35 horizontally from the side surface of the second flow path block 10B. It is formed by communicating with a hole provided, closing the side opening 38 with a lid 40 and welding. Therefore, the flow path 26 is formed in a U-shape, and the thickness of the second flow path block 10B is made thinner than in the case of forming the V-shaped flow path, thereby making the second flow path block 10B lighter. In addition, a leak groove 39 communicates with the first connection port 34, and a flow meter is connected to a leak hole of a fluid control device attached to the second flow path block 10B so that a fluid leak can be detected.

  Therefore, in the first and second flow path blocks 10A and 10B, the first convex portions 21 and 31 and the second convex portions 22 and 32 have the same shape, and only the longitudinal lengths of the third convex portions 23 and 33 are included. Is different. Therefore, the first and second flow path blocks 10A and 10B can be freely combined like a puzzle even if the shapes are different. FIG. 11 is a diagram illustrating a combination example of the first and second flow path blocks.

The second flow path block 10B at the center is formed on the end surface of the first convex portion 31 from the upper side in the drawing from the upper side in the figure, and the third convex portion of the first flow path block 10A from the left side in the drawing. The convex portion 33 is in contact with the third convex portion 33 of the second flow path block 10B from the lower side in the figure, but since the width is the same with the dimension A, there is no useless space between the blocks. It is possible to collect the connection ports in one place.
Moreover, since the 3rd convex part 33 is longer than the convex part 23 of 10 A of 1st flow path blocks in the 2nd flow path block 10B by one connection port, like the 2nd flow path block 10B of the upper right in the figure, The end surface of the third convex portion 33 abuts the side surface of the third convex portion 33 of the other second flow path block 10B and the end surface of the third convex portion 23 of the first flow path block 10A to provide a useless space between the blocks. It is possible to collect the connection ports in one place without any problem.

Next, the screw block 15 will be described. FIG. 12 is a view showing a retaining structure for the screw block 15.
The screw block 15 is formed of a metal such as SUS in a cylindrical shape, and is slightly shorter than the height of the first and second flow path blocks 10A and 10B. The screw block 15 is provided with a rubber stopper 19 in a hollow hole, and the screw portion of the mounting bolt 14 is tightened toward the center to make it difficult to remove the mounting bolt 14.

Such a gas supply integrated unit 1 fixes the fluid control device to the mounting plate 9 as follows. FIG. 13 is an exploded perspective view of the gas supply integrated unit 1. FIG. 14 is a partially enlarged view of FIG.
As shown in FIG. 13, a plurality of bolt holes 16 and positioning holes 18 are formed in the mounting plate 9 according to the layout of the fluid control devices 2 to 8 and the first and second flow path blocks 10A and 10B. . The positioning pins 17 are fitted into the fitting holes 27 and 37 and integrated with the first and second flow path blocks 10A and 10B.

  As shown in FIGS. 5 and 9, the positioning pin 17 is formed of a metal such as SUS in a cylindrical shape, and the diameter can be changed by an external force by a groove 17a formed in a zigzag in the axial direction. ing. The positioning pin 17 is formed slightly larger than the fitting holes 27 and 37, and can be fitted into the fitting holes 27 and 37 by closing the groove 17a, and after being fitted into the fitting holes 27 and 37, the fitting is performed. Since it deform | transforms so that the groove | channel 17a may be opened in the holes 27 and 37, it is hard to remove | deviate from 1st, 2nd flow-path block 10A, 10B.

  As shown in FIGS. 13 and 14, the first and second flow path blocks 10 </ b> A and 10 </ b> B are inserted with the positioning pins 17 aligned with the positioning holes 18 of the mounting plate 9. The positioning pin 17 positions and fixes the first and second flow path blocks 10A and 10B and the mounting plate 9. In this way, the first and second flow path blocks 10A and 10B are arranged side by side along the working gas supply line. At this time, the first and second flow path blocks 10A and 10B can be attached to and detached from the mounting plate 9 with a single touch, and the handleability is good.

  A base plate 11 is attached to the attachment plate 9. The base plate 11 has a long block shape, and a flow path is formed long in the longitudinal direction. A connection port 20 opened on the upper surface communicates with the flow path. Positioning pins 17 are also erected on the lower surface of the base plate 11, and the base plate 11 and the mounting plate 9 are positioned and fixed by the positioning pins 17.

  Since the bolt holes 16 of the mounting plate 9 are exposed around the first and second flow path blocks 10 </ b> A and 10 </ b> B attached to the mounting plate 9, the screw blocks 15 are arranged according to the bolt holes 16. . And the gasket which is not illustrated is set to the 1st, 2nd connection port 24, 34, 25, 35 of 1st, 2nd flow-path block 10A, 10B, and the fluid control apparatus 2-8 is 1st, 2nd from upper direction. It mounts on flow-path block 10A, 10B. At this time, since the fluid control devices 2 to 8 are supported by the second convex portions 22 and 32 of the first and second flow path blocks 10A and 10B, they are held horizontally.

  Then, the mounting bolt 14 is passed from the fluid control devices 2 to 8 to the screw block 15, and the tip portion is fastened to the bolt hole 16 to fix the fluid control devices 2 to 8 to the mounting plate 9. At this time, since the screw block 15 is slightly lower than the first and second flow path blocks 10A and 10B, the tightening force of the mounting bolt 14 is changed from the fluid control devices 2 to 8 to the first and second flow path blocks 10A and 10A. The gasket (not shown) acts directly on 10B and is crushed with a uniform force between the fluid control devices 2 to 8 and the first and second flow path blocks 10A and 10B.

  Here, since the screw block 15 is slightly shorter than the height of the first and second flow path blocks 10 </ b> A and 10 </ b> B, a gap is formed between the fluid control devices 2 to 8 and the screw block 15. Therefore, when the sealing force is insufficient, the mounting bolt 14 can be tightened to increase the sealing force. On the other hand, when the fluid control devices 2 to 8 come into contact with the screw block 15, the mounting bolt 14 cannot be tightened any more, and thus the mounting bolt 14 can be prevented from being overtightened.

  By the way, in the gas supply integrated unit having the flow path branching portion on the working gas line, the flow path configuration is more complicated than the gas supply integrated unit 1 in which the fluid control devices are connected in series. Therefore, the flow path configuration of the gas supply integrated unit having a branch point will be described. FIG. 15 is an example of a circuit diagram of the gas supply integrated unit 41.

  In the gas supply integrated unit 41, a manual valve 42, a filter 43, a regulator 44, and a pressure sensor 45 are connected in series, and a first air operated valve 46 and a second air operated valve 48 are parallel to the pressure sensor 45. Connected. A mass flow controller 49, a third air operated valve 50, and a filter 51 are connected to the second air operated valve 48 in series. The first air operated valve 46 is connected between the mass flow controller 49 and the third air operated valve 50 via a needle valve 47.

  For such a gas supply integrated unit 41, a flow path is formed using a conventional manifold block, and a flow path is formed using the first and second flow path blocks 10A and 10B of the present invention. With this, there is a difference in the types of parts. FIG. 16 is a view showing a flow path structure corresponding to the circuit diagram shown in FIG. 15, and shows a case where a conventional manifold block is used. FIG. 17 is a plan view of a gas supply integrated unit corresponding to the circuit diagram shown in FIG. 15, and shows a case where a conventional manifold block is used. FIG. 18 is a view showing a flow channel structure corresponding to the circuit diagram shown in FIG. 15, and shows a case where the flow channel block of the present invention is used. FIG. 19 is a plan view of the gas supply integrated unit corresponding to the circuit diagram shown in FIG. 15, and shows a case where the flow path block of the present invention is used.

  As shown in FIG. 16, when the flow path of the gas supply integrated unit 41 is configured by a conventional manifold block, six types of manifold blocks 121, 122, 123, 124, 125, 126 are used to Need to form. There are manifolds described in the prior art in places where the manual valve 42, the filter 43, the regulator 44 and the pressure sensor 45 are connected in series, and where the mass flow controller 49, the third air operated valve 50 and the filter 51 are connected in series. A manifold block 122 having the same structure as that of the block 109 (see FIG. 38) is continuously connected. However, the manifold block 125 is fitted on the lower surface of the manifold blocks 124 and 126 at the branch points where the first and second air operated valves 46 and 48 are connected in parallel to the pressure sensor 45 so that the manifold blocks 124 and 126 communicate with each other. There is a need. Moreover, it is necessary to use the manifold block 123 in the location which switches a flow path upward. Furthermore, it is necessary to connect the manifold block 121 to the manifold block 122 at a place supporting the manual valve 42 and the mass flow controller 49 to prevent the manifold block 122 from being inclined. The manifold blocks 121 to 126 arranged in this way are fixed to the mounting plate with mounting screws inserted from the back side of the mounting plate.

  As shown in FIG. 17, the manifold blocks 121 to 126 are configured such that the fluid control devices 42 to 51 are placed from above, and the mounting bolts 114 are inserted from the fluid control devices 42 to 51 into the manifold blocks 121 to 126. Fasten and fix the fluid control devices 42 to 51 to the mounting plate. At this time, since the connecting structure of the manifold blocks 124 to 126 is complicated, a useless gap is formed between the fluid control devices constituting the line of the first air operated valve 46 and the line of the second air operated valve 48. The

  On the other hand, as shown in FIG. 18, when the flow path of the gas supply integrated unit 41 is constituted by the flow path block 10 of the present invention, two of the first flow path block 10A and the second flow path block 10B. Only types can be used to form the flow path. That is, the second flow path is provided at a place where the manual valve 42, the filter 43, the regulator 44, and the pressure sensor 45 are connected in series, and at a place where the mass flow controller 49, the third air operated valve 50, and the filter 51 are connected in series. The end face of the road block 10B is butted and provided continuously. At the branch point where the first and second air operated valves 46 and 48 are connected in parallel to the pressure sensor 45, the flow path is formed by changing the direction of the second flow path block 10B. In addition, the first flow path block 10A is disposed at a location where the flow direction is switched to shorten the flow path. A screw block 15 is disposed outside the first flow path block 10A and the second flow path block 10B thus disposed.

  As shown in FIG. 19, the fluid control devices 42 to 51 are placed on the upper surfaces of the first and second flow path blocks 10 </ b> A and 10 </ b> B from above, and the mounting bolt 14 is connected to the fluid control devices 42 to 51 and the screw block 15. And the fluid control devices 42 to 51 are fixed to the mounting plate 9 by fastening to the bolt holes 16 of the mounting plate 9. At this time, since the second flow path block 10B is gathered without forming a useless space at the branch portion, the line of the first air operated valve 46 and the line of the second air operated valve 48 are separated. No wasted space is formed between them.

Therefore, according to the gas supply integrated unit 1 of the present embodiment, the first and second flows are matched to the positions of the ports opened on the lower surfaces of the fluid control devices 2 to 8 and the lower surface shapes of the fluid control devices 2 to 8. Since the positions of the path blocks 10A and 10B and the screw block 15 can be individually adjusted, it is possible to arbitrarily form the working gas flow path by combining the first and second flow path blocks 10A and 10B. . Since the first and second flow path blocks 10A and 10B that only form the flow paths 26 and 36 and the screw block 15 that only allows the mounting bolts 15 to be inserted are made separate, they are extra in comparison with the conventional manifold block. It is possible to omit unnecessary meat.
Therefore, according to the gas supply integrated unit 1 of the present embodiment, since there are only two types of flow path blocks 10A and 10B, the mold used when molding the first and second flow path blocks 10A and 10B. It is possible to reduce the production cost by reducing the number of the like, or reduce the stock amount of the first and second flow path blocks 10A and 10B to reduce the management cost. In addition, since the first and second flow path blocks 10A and 10B and the screw block 15 do not have extra meat unlike conventional manifold blocks, the entire unit can be reduced in weight.

  Further, the gas supply integrated unit 1 according to the present embodiment uniformly crushes the entire circumference of the gasket (not shown) between the first and second flow path blocks 10A and 10B and the fluid control devices 2 to 8, so that the seal Performance can be ensured.

  Further, the gas supply integrated unit 1 of the present embodiment inserts the positioning pins 17 erected on the lower surfaces of the first and second flow path blocks 10A and 10B through the positioning holes 18 formed in the mounting plate 9, When the first and second flow path blocks 10A and 10B are positioned with respect to the mounting plate 9 and the fluid control devices 2 to 8 are fixed to the mounting plate 9 using the mounting bolts 14, the first and second flow paths Since the blocks 10A and 10B are not displaced, the ports of the fluid control devices 2 to 8 are aligned with the first and second connection ports 24, 25, 34, and 35 of the first and second flow path blocks 10A and 10B. It can be done easily and has good workability.

  Moreover, the gas supply integrated unit 1 of this Embodiment mounts the fluid control apparatuses 2-8 on the 2nd convex part 22 and 32 of 1st, 2nd flow-path block 10A, 10B, and 1st, 2nd flow-path. Since the fluid control devices 2 to 8 are supported by the cross portions of the blocks 10A and 10B, the fluid control devices 2 to 8 can be held horizontally.

(Second Embodiment)
Next, a second embodiment according to the gas supply integrated unit of the present invention will be described with reference to the drawings. FIG. 20 is a diagram illustrating an example of a fixing structure of the fluid control device.
This embodiment is different from the first embodiment in that the screw block 55 is directly screwed and fixed to the mounting plate 9. Therefore, here, a different part from 1st Embodiment is demonstrated in detail, About the common part, the same code | symbol is attached | subjected to drawing and description is abbreviate | omitted suitably.

  The screw block 55 is formed of a metal such as SUS in a cylindrical shape, and a bolt member 56 having a male screw formed on the outer peripheral surface thereof is erected on the lower end surface. The screw block 55 is fixed to the mounting plate 9 by screwing a bolt member 56 into the bolt hole 16 of the mounting plate 9. The screw block 55 is provided with a bolt hole 57 in which a female screw is formed on the inner periphery, and the mounting bolt 14 inserted through the fluid control device 5 is fastened.

  Therefore, the gas supply integrated unit of the present embodiment positions the screw block 55 to the mounting plate 9 by fastening the bolt member 56 erected on the lower surface of the screw block 55 to the bolt hole 16 formed in the mounting plate 9. In order to fix and fasten the mounting bolt 14 inserted through the fluid control devices 2 to 8 to the screw block 55, the fluid control devices 2 to 8 are fixed to the mounting plate 9 via the screw block 55. In this case, the mounting bolt 14 can be screwed deeply into the bolt hole 57 of the screw block 55, and the mounting strength of the fluid control devices 2 to 8 can be ensured.

(Third embodiment)
Next, a third embodiment according to the gas supply integrated unit of the present invention will be described with reference to the drawings. FIG. 21 is a side view of the gas supply integrated unit 61.
The gas supply integrated unit 61 of the present embodiment is different from the first embodiment in that the fluid control devices 2 to 8 are attached to the attachment rail 62. Therefore, here, the points different from the first embodiment will be described in detail, and common points will be denoted by the same reference numerals in the drawings, and description thereof will be omitted as appropriate.

FIG. 22 is a diagram illustrating a fixing structure of the fluid control device. FIG. 23 is a plan view of the mounting rail.
In the gas supply integrated unit 61, the inlet opening / closing valve 5, which is a fluid control device, is mounted on the mounting rail 61, and the mounting bolt 14 inserted into the inlet opening / closing valve 5 is inserted into a screw block 65 fixed to the mounting rail 62. By fastening, it is fixed to the mounting rail 62. At this time, the second flow path block 10B is held between the inlet on-off valve 5 and the mounting rail 61, and seals the connection ports 34 and 35 by crushing the entire circumference of the gasket (not shown) with a uniform force.

  The mounting rail 62 is formed by molding a metal such as SUS into a rectangular parallelepiped block, and a pair of rail grooves 63 are formed in a substantially L shape. Claw portions 64 are formed at both ends so as to protrude toward the rail groove 63 side. A positioning hole 18 is formed in the upper surface of the mounting rail 62 in accordance with the arrangement of the first and second flow path blocks 10A and 10B, and the first and second flow path blocks 10A and 10B are positioned via the positioning pins 17. It is supposed to be fixed.

  A screw block 65 to which the mounting bolt 14 is fastened is slidably held in the rail grooves 63, 63 so that a fluid control device can be freely added or modified. Therefore, the position of the mounting bolt 14 changes depending on the arrangement of the fluid control device, and it is necessary to prepare several types of screw blocks 65 to cope with the change. In the present embodiment, three types of screw blocks 65A, 65B, and 65C are prepared.

FIG. 24 is a plan view of the first screw block 65A. FIG. 25 is a side view of the first screw block 65A. FIG. 26 is a longitudinal sectional view of the first screw block 65A.
The first screw block 65A is made of a metal such as SUS having a substantially L-shaped cross section. The first flow path block 65 </ b> A has two bolt holes 66, 66 formed on the upper surface, and is formed with an engaging portion 67 that is provided with a step and engages the mounting rail 62. The engaging portion 67 is formed with an insertion hole 68 through which the positioning pin 17 is inserted, and is positioned with respect to the mounting rail 62. An engagement groove 69 that engages with the claw portion 64 of the attachment rail 62 is formed on the side surface of the first screw block 65A, and is prevented from falling off from the rail groove 63 of the attachment rail 62.

FIG. 27 is a plan view of the second screw block 65B. FIG. 28 is a side view of the second screw block 65B. FIG. 29 is a longitudinal sectional view of the second screw block 65B.
The second flow path block 65B has the same basic structure as the first flow path block 65A, but is wider than the first screw block 65A, and the space between the bolt holes 66, 66 is wider than the first flow path block 65A. Has been. The second flow path block 65 </ b> B is provided with two insertion holes 68 so that the second flow path block 65 </ b> B is firmly attached to the attachment rail 62.

FIG. 30 is a plan view of the third screw block 65C. FIG. 31 is a side view of the third screw block 65C. FIG. 32 is a longitudinal sectional view of the third screw block 65C.
The basic structure of the third screw block 65C is the same as that of the first flow path block 65A, but it is narrower than the first screw block 65A and is provided with only one bolt hole 66. Further, since the third screw block 65C is disposed at the end of the gas supply integrated unit, the insertion hole 68 is not provided unlike the first screw block 65A.

Such a gas supply integrated unit 61 is attached with a fluid control device as follows. FIG. 33 is a layout diagram of the flow path block 10 and the screw block 65.
The screw block 65 inserts the engaging portion 67 into the rail groove 63 of the mounting rail 62 and slides it to a predetermined position, and aligns the insertion hole 68 with the positioning hole 68 of the mounting rail 62. Then, the positioning pin 17 erected on the second flow path block 10B (first flow path block 10A) is passed from above the mounting rail 62 to the positioning hole 18 and the insertion hole 68 of the screw block 65, and the second flow path. The block 10B (flow path block 10A), the mounting rail 62, and the screw block 65 are uniquely positioned and fixed. In this manner, the first and second flow path blocks 10A and 10B and the screw block 65 are disposed at predetermined positions on the mounting rail 62.

  At this time, the screw block 65 is properly used as follows. When one side of the first and second connection ports 24, 25 (34, 35) of the first and second flow path blocks 10A (10B) comes to the center of the position where the mounting bolt 14 is fastened, the screw block 65B Place. When both the connection ports 24 and 25 (34 and 35) of the first and second flow path blocks 10A (10B) do not come to the center of the mounting bolt 14, a screw block 65A is disposed. Further, a screw block 65C is disposed at the end of the unit.

  Then, the fluid control devices 2 to 8 are placed on the first and second flow path blocks 10A and 10B, the mounting bolts 14 are inserted into the respective screw blocks 65 from the fluid control devices 2 to 8 side, and are fastened. The devices 2 to 8 are fixed to the mounting rail 62 via the screw block 65.

Therefore, according to the gas supply integrated unit 61 of the present embodiment, the first and second of the first and second flow path blocks 10A and 10B are matched to the position of the port and the bottom surface shape of the fluid control devices 2 to 8. Since the positions of the connection ports 24, 25, 34, 35 and the bolt holes 66 of the screw block 65 can be individually adjusted, it is possible to form a working gas flow path by combining several kinds of flow path blocks. Since the first and second flow path blocks 10A and 10B that form only the flow path and the screw block that forms only the bolt hole 77 are separated, it is possible to save extra meat compared to the conventional manifold block. It is.
Therefore, according to the gas supply integrated unit of the present embodiment, the first and second flow path blocks 10A and 10B are used when molding the first and second flow path blocks 10A and 10B because there are few first and second flow path blocks 10A and 10B. The production cost can be reduced by reducing the number of dies, etc., and the management cost can be reduced by reducing the stock amount of the first and second flow path blocks 10A and 10B. it can. In addition, since the first and second flow path blocks 10A and 10B and the screw block 15 do not have extra meat unlike conventional manifold blocks, the entire unit can be reduced in weight.

  Although the embodiments of the present invention have been described, the present invention is not limited to the above-described embodiments, and various applications are possible.

(1) For example, in the said 1st Embodiment, although the screw block 15 was made free with respect to the attachment board 9, you may fix with an adhesive agent or weld.

(2) For example, in the first embodiment, an aluminum plate is used as the mounting plate. However, as shown in FIG. 34, a metal plate such as SUS having a thickness smaller than the aluminum plate is used as the mounting plate 71. Weight reduction may be achieved. In this case, the fluid control device 5 can be fixed to the mounting plate 71 by providing the mounting plate 71 with the screw hole 72 and fastening the mounting bolt 14 inserted through the screw block 15. If the mounting plate 71 is made thinner, the weight can be reduced, but the mounting bolts 14 and the positioning pins 17 protrude to the back side. In this case, both ends of the mounting plate 71 may be bent by pressing or the like so that clogs can be put on.

(3) For example, in the third embodiment, the rail 62 is provided so as to cover the engagement portion 67 of the screw block 65 from the outer periphery. However, as shown in FIG. The weight may be reduced. In this case, the attachment rail 73 may be provided with a claw portion 74, and an engagement groove 77 that engages with the claw portion 74 may be formed on the lower surface of the screw block 75 to prevent the screw block 75 from falling off.

(4) For example, in the above embodiment, the mounting bolt 14 is prevented from falling off using the rubber stopper 19, but as shown in FIG. 36, a stopper that combines the resin member 78 and the rubber member 79 is screw-blocked. 15, and the rubber member 79 may be brought into contact with the thread of the mounting bolt 14 to prevent the mounting bolt 14 from falling off.

It is sectional drawing of the gas supply integrated unit concerning 1st Embodiment of this invention. Similarly, it is a figure which shows the fixation structure of a fluid control apparatus. Similarly, it is a top view of a 1st channel block. Similarly, it is a longitudinal sectional view of the first flow path block. Similarly, it is a right side view of the first flow path block. Similarly, it is a bottom view of the first flow path block. Similarly, it is a top view of the 2nd channel block. Similarly, it is a longitudinal sectional view of the second flow path block. Similarly, it is a right side view of the second flow path block. Similarly, it is a bottom view of the second flow path block. Similarly, it is a figure which shows the example of a combination of the 1st, 2nd flow path block. Similarly, it is a figure which shows the retaining structure of a screw block. Similarly, it is a disassembled perspective view of a gas supply integrated unit. Similarly, it is the elements on larger scale of FIG. Similarly, it is an example of a circuit diagram of a gas supply integrated unit. Similarly, it is a figure which shows the flow-path structure corresponding to the circuit diagram shown in FIG. 15, Comprising: The case where the conventional manifold block is used is shown. Similarly, it is a top view of the gas supply integrated unit corresponding to the circuit diagram shown in FIG. 15, and shows a case where a conventional manifold block is used. Similarly, it is a figure which shows the flow-path structure corresponding to the circuit diagram shown in FIG. 15, Comprising: The case where the flow-path block of this invention is used is shown. Similarly, it is a top view of the gas supply integrated unit corresponding to the circuit diagram shown in FIG. 15, and shows the case where the flow path block of the present invention is used. It is a figure concerning a 2nd embodiment of the present invention and shows an example of the fixation structure of fluid control equipment. It is a side view of the gas supply integrated unit concerning 3rd Embodiment of this invention. Similarly, it is a figure which shows the fixation structure of a fluid control apparatus. Similarly, it is a top view of an attachment rail. Similarly, it is a top view of a 1st screw block. Similarly, it is a side view of a 1st screw block. Similarly, it is a longitudinal cross-sectional view of a 1st screw block. Similarly, it is a top view of the 2nd screw block. Similarly, it is a side view of the second screw block. Similarly, it is a longitudinal cross-sectional view of a 2nd screw block. Similarly, it is a top view of a 3rd screw block. Similarly, it is a side view of a 3rd screw block. Similarly, it is a longitudinal cross-sectional view of a 3rd screw block. Similarly, it is an arrangement plan of a channel block and a screw block. It is a figure which shows the modification of the fixation structure of a fluid control apparatus. It is a figure which shows the modification of the fixation structure of a fluid control apparatus. It is a modification of the screw block retaining structure. It is sectional drawing of the conventional gas supply integrated unit. It is a figure which shows an example of the connection structure of the manifold block used with the conventional gas supply integrated unit.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Gas supply integrated unit 2-8 Fluid control apparatus 9 Mounting plate 10A 1st flow path block 10B 2nd flow path block 14 Mounting bolt 15 Screw block 16 Bolt hole 17 Positioning pin 18 Positioning hole 21 1st convex part 22 2nd convex Part 23 Third convex part 24 First connection port 25 Second connection port 26 Channel 31 First convex part 32 Second convex part 33 Third convex part 34 First connection port 35 Second connection port 36 Channel 55 Screw block 56 Bolt member 61 Gas supply integrated unit 62 Mounting rail 65 Screw block 66 Bolt hole 68 Insertion hole 71 Mounting plate 72 Bolt hole 73 Mounting rail

Claims (6)

In the gas supply integrated unit that controls the supply or shut-off of the working gas by arranging a plurality of fluid control devices in parallel on the working gas supply line by fixing them to the mounting plate using mounting bolts,
A connection port connected to a port opened on the lower surface of the fluid control device is opened on the upper surface, and a flow channel block in which an internal flow channel communicating with the connection port is formed,
A screw block disposed outside the flow path block and inserted through the mounting bolt;
The flow path block is sandwiched between the fluid control device and the mounting plate when the mounting bolt inserted through the screw block is fixed to the mounting plate;
The flow path block is provided with a positioning member on the lower surface,
A positioning hole through which the mounting plate is inserted through the positioning member;
An integrated gas supply unit. In the gas supply integrated unit according to claim 1,
A gas supply characterized in that a gasket disposed between the connection port and the port of the fluid control device is uniformly crushed between the flow path block and the fluid control device. Integrated unit. In the gas supply integrated unit according to claim 1 or 2 ,
The flow path block has two connection ports, a first protrusion that opens one connection port, and a pair of second protrusions provided symmetrically across the first protrusion. A gas supply integrated unit, comprising: a third protrusion provided opposite to the first protrusion to open the other connection port. In the gas supply integrated unit according to claim 3 ,
The channel block
A first flow path block in which the first convex portion is provided in a square shape, and the third convex portion is formed in the same square shape as the first convex portion;
The first convex portion is provided in the same square shape as the first convex portion of the first flow path block, and the third convex portion includes a second flow path block formed in a rectangular shape,
The gas supply integrated unit, wherein a distance between connection ports of the second flow path block is longer than a distance between connection ports of the first flow path block. In the gas supply integrated unit according to any one of claims 1 to 4 ,
The screw block has a cylindrical shape, is formed shorter than the height of the flow path block,
A gas supply integrated unit, wherein a bolt hole for mounting the mounting bolt is formed in the mounting plate. In the gas supply integrated unit according to any one of claims 1 to 5 ,
The screw block is formed from the upper surface with a bolt hole for fastening the mounting bolt, and a bolt member is erected on the lower surface,
A gas supply integrated unit, wherein the mounting plate is formed with a bolt hole for fastening the bolt member.

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