JP5277278B2 - Fluid control device for coupling - Google Patents

Fluid control device for coupling Download PDF

Info

Publication number
JP5277278B2
JP5277278B2 JP2011072530A JP2011072530A JP5277278B2 JP 5277278 B2 JP5277278 B2 JP 5277278B2 JP 2011072530 A JP2011072530 A JP 2011072530A JP 2011072530 A JP2011072530 A JP 2011072530A JP 5277278 B2 JP5277278 B2 JP 5277278B2
Authority
JP
Grant status
Grant
Patent type
Prior art keywords
member
joint
fluid
device
fluid control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2011072530A
Other languages
Japanese (ja)
Other versions
JP2011149554A (en )
Inventor
伊知郎 徳田
道雄 山路
憲士 坪田
努 篠原
信一 池田
Original Assignee
株式会社フジキン
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Grant date

Links

Images

Abstract

<P>PROBLEM TO BE SOLVED: To provide a lightweight joint for a fluid control device which can greatly improve workability of the arrangement of the fluid control device on a vertical wall surface. <P>SOLUTION: This rectangular parallelepiped-shaped joint (13) for a fluid control device is divided into two, a concave-shaped connecting member (23) and flat rectangular parallelepiped-shaped communication member (24). The connecting member has a recessed groove (18) in the center, and has, on each side of the recessed groove (18), a bolt insertion hole (20) having a step (20a) for receiving the head of a joint mounting bolt (19) so as not to protrude from the joint (13) and an internal thread part (22) into which an external thread member for mounting a device structural member (21) is screwed. The communication member is inserted into the recessed groove (18) of the connecting member (23) and has only a U-shaped communication passage (12). The communication member (24) is made of stainless steel, and the connecting member (23) is made of polyamide 6. A positioning protrusion (36) is provided on the bottom face of the recessed groove (18) of the connecting member (23), a positioning recess (37) is provided on the bottom face of the communication member (24), and both are fitted together. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

本発明は、半導体製造装置などに使用される流体制御装置用継手に関する。 The present invention relates to a fluid control system for a joint for use in semiconductor manufacturing equipment.

流体制御装置において、一列に並べられた複数の装置構成部材の装置設置側に配置され、隣り合う装置構成部材の一方の装置構成部材の流体通路出口と他方の装置構成部材の流体通路入口とを連通させるか、外部導入管と流体制御装置の一端の装置構成部材の流体通路入口とを連通させるか、または外部排出管と流体制御装置の他端の装置構成部材の流体通路出口とを連通させるステンレス鋼製直方体状継手は、下記特許文献1に開示せられている。 In the fluid control device, disposed on the apparatus installation side of the plurality of devices components arranged in a row, and a fluid passage inlet of the fluid passage outlet and the other device components of one of the apparatus components of mutually device structure member adjacent or communicating, to communicate the fluid passage outlet at the other end of the apparatus components of the outer introduction tube and either communicating the fluid passage inlet at one end of the apparatus components of the fluid control system, or an external discharge pipe and the fluid controller stainless steel rectangular couplings are brought disclosed in Patent Document 1.

流体制御装置は、従来床の水平面に配置せられていたが、近時床面の有効利用のため、部屋の垂直壁面に配置せられるようになってきた。 Fluid control system, which had been brought arranged in a horizontal plane of the conventional bed, for effective utilization of recent floor, have come to be brought arranged in a vertical wall of a room. ところで、継手の連通路を流れる流体は一般に腐食性の強いものであるため、直方体状継手には耐食性のあるステンレス鋼が主として用いられている。 Meanwhile, since the fluid flowing through the communication passage of the joint is generally stronger corrosive, stainless steel with a corrosion resistance in a rectangular parallelepiped shape fitting is mainly used. ところが、ステンレス鋼は重量が大であるため、持ち運びに不便であるばかりか、人間が1人か2人で行う流体制御装置の垂直壁面への配置の作業性が悪かった。 However, stainless steel is because the weight is large, not only inconvenient to carry, humans were the poor workability of the arrangement of the vertical wall surface of the fluid control system for performing one or two people.

本発明の目的は、持ち運びが便利であり、しかも流体制御装置を垂直壁面へ配置する場合もその作業性が大幅に向上する軽量な流体制御装置用継手を提供することにある。 An object of the present invention, carry it is convenient, yet to provide a lightweight fluid control system for a joint work efficiency thereof is greatly improved when arranging a fluid control device to a vertical wall.

請求項1の発明による流体制御装置用継手は、一列に並べられた複数の装置構成部材の装置設置側に配置され、隣り合う装置構成部材の一方の装置構成部材の流体通路出口と他方の装置構成部材の流体通路入口とを連通させるか、他機器の流体通路出口若しくは流体源から配管された外部導入管と流体制御装置の一端の装置構成部材の流体通路入口とを連通させるか、または制御流体必要機器へ配管された外部排出管と流体制御装置の他端の装置構成部材の流体通路出口とを連通させる流体制御装置用継手において、中央に凹溝が設けられかつ装置構成部材取付け用おねじ部材によって装置構成部材が固定される接続部材と、凹溝内に存在しかつ連通路が形成された連通部材より構成され、 めねじ部品の素材および連通部材の素材が、ステン A fluid control system for a joint according to the invention of claim 1 is disposed on the apparatus installation side of the plurality of devices components arranged in a row, the fluid passage outlet of one of the device components of mutually device structure member adjacent the other device or to communicate the fluid passage inlet components, or to communicate the fluid passage inlet at one end of the apparatus components of the outer introduction tube and a fluid control apparatus as a pipe from the fluid passage outlet or fluid source of another device, or control in the fluid control device for a joint for communicating the fluid passage outlet at the other end of the apparatus components of the external discharge pipe and a fluid control system is a pipe to the fluid necessary equipment, central groove is provided in the bonito equipment components attached a connecting member device constituting member by a screw member is fixed, is constituted by the communicating member present and the communication passage is formed in the groove, the material of the internally threaded part of the material and the communicating member, Sten ス鋼またはステンレス合金であり、接続部材の素材が、アルミニウムであって、全体が溶湯鍛造法により鋳造せられて一体化せられているものである。 A scan steel or stainless steel alloy, material of the connecting member is a aluminum, in which the whole is allowed integrally forced cast by melt forging method.

請求項2の発明は、請求項1記載の流体制御装置用継手において、 さらに、接続部材の両側に、接続部材と連通部材に跨って段部付きボルト挿通孔があけられているものである。 The invention of claim 2 provides a fluid control device for a joint according to claim 1, further on either side of the connecting member, in which the connecting member and the stepped portion bolt insertion holes across the communicating member is opened.

本発明よる流体通路連通用継手は、中央に凹溝が設けられかつ装置構成部材取付け用おねじ部材によって装置構成部材が固定される接続部材と、凹溝内に存在しかつ連通路が形成された連通部材より構成され、 めねじ部品の素材および連通部材の素材が、ステンレス鋼またはステンレス合金であり、接続部材の素材が、アルミニウムであって、全体が溶湯鍛造法により鋳造せられて一体化せられているから、継手の大部分が従来の継手に使用されていたステンレス鋼より軽い素材で占められることになり、結果的にこの継手は全体がステンレス鋼よりなるものに較べて大幅に軽量化される。 Fluid passages communicating Spoken joint with the present invention, a connecting member central groove is provided and apparatus components by the device component mounting male screw member is fixed, exists in the groove and the communication passage is formed is composed of communicating members, material of the female screw part of the material and the communicating member is a stainless steel or a stainless steel alloy, integral material of the connecting member is a aluminum, entirely brought cast by melt forging method since being canceller, the majority of the joint will be occupied by the light material of stainless steel have been used in conventional joints, resulting in significantly lighter this joint is compared with what the whole is made of stainless steel It is of. したがって、流体制御装置を床の水平面に配置しようと垂直壁面へ配置しようと、これの組み立てのための継手の持ち運びが楽であるばかりか、この継手が用いられた流体制御装置を垂直壁面へ配置する場合はその作業性が大幅に向上する。 Therefore, an attempt to place the fluid control device to try a vertical wall surface to place on a horizontal plane of the floor, not only carry fittings for this the assembly is easy, placing the fluid control device to which the fitting is used in a vertical wall If you want to work with that it is greatly improved. しかも、腐食性の強い流体が通過する連通路を備えた連通部材は、耐食性を有するから、耐食性に関しては、全体がステンレス鋼よりなる従来の継手と異ならない。 Moreover, the communicating member corrosive fluid with a communicating path passing through, since having corrosion resistance, with respect to corrosion resistance, do not differ from the conventional joint entirely made of stainless steel.

本発明の実施の形態を、以下図面を参照して説明する。 Embodiments of the present invention will be described with reference to the drawings. 以下の説明において、図1の左を前、同図の右を後、同図の上を上、同図の下を下という。 In the following description, the left of FIG. 1 before, after the right in the figure, on the top of the figure, that under the bottom of the figure.

図1は、本発明の継手が用いられている半導体製造装置用流体制御装置(E)が、ボックス(B)に収められて垂直壁面(W)にその長さ方向を垂直にして配置せられた状態を示す。 1, semiconductor manufacturing apparatus for a fluid control system joints are used in the present invention (E) is being housed in a box (B) so arranged that the length direction and perpendicular to the vertical wall surface (W) indicating the state. 図示は略したが、同じ流体制御装置(E)が複数その長さ方向を垂直にしかつ並列状に配置せられている。 Illustration is abbreviated, but the same fluid control device (E) is brought placing multiple its length direction perpendicular to vital parallel form. この流体制御装置(E)は、マスフローコントローラ(1)の下の流体通路入口側に上から順に2ポート開閉弁(2)、3ポート開閉弁(3)、圧力計(4)、圧力調整器(5)、フィルター(6)および手動弁(7)を一列に備えており、同上の流体通路出口側に2ポート開閉弁(8) を備えている(以下これらを単に装置構成部材(1)〜(8)という)。 The fluid control system (E) is 2-port on-off valve in order from the top to the fluid passage inlet side of the lower of the mass flow controller (1) (2), 3-port switch valve (3), the pressure gauge (4), a pressure regulator (5), a filter (6) and manual valve (7) comprises in a row, two-port on-off valve in the fluid passage outlet side of the same (8) and a (hereinafter to simply device component (1) to (8) hereinafter). 装置構成部材(1)の流体通路入口側と流体通路出口側には、直方体状張出部(1a)(1b)が、他の装置構成部材(2)〜(8)の各下端には、方形のフランジ部(2a)(3a)(4a)(5a)(6a)(7a)(8a)がそれぞれ設けられており、これらの後面はすべて面一とされている。 The fluid passage inlet and the fluid passage outlet side of the apparatus component (1) is rectangular parallelepiped projecting portion (1a) (1b) are each a lower end of the other device components (2) to (8), the flange portion of the square (2a) (3a) (4a) (5a) (6a) (7a) (8a) are provided, respectively, which rear face is all flush. 装置構成部材(1)〜(8)それぞれは、入口(9)および出口(10)が流体制御装置(E)の長さ方向すなわちガス状流体の流れ方向である下から上の方向に並んでいる流体通路を有している。 The device component (1) to (8), respectively, the inlet (9) and an outlet (10) is arranged in the direction from the bottom a length direction of flow of the direction, that the gaseous fluid of the fluid control system (E) and a fluid passageway there.

垂直壁面(W)に取り付けられたボックス(B)の底壁に固定せられた基板(11)と、間隔をおいて一列に並べられた8つの装置構成部材(1)〜(8)との間に、内部に形成せられたU字状(図1では横向きU字状であるが、これは継手のみる向きによって変わるものであるから、単に「U字状」という)連通路(12)により各隣り合う2つの装置構成部材(7) (6)、 (6) (5)、 (5) (4)、 (4) (3)、 (3) (2) (2) (1) および(1) (8)の一方の装置構成部材の流体通路出口 (10) と他方の装置構成部材の流体通路入口(9)とをそれぞれステンレス鋼製シール材(図示略)を介して接続する第1直方体状継手(13) (14) (15)ならびに内部に形成せられたL字状(図1では逆L字状であるが、L字状は継手の見る向きによって変わるものであるから、単に「L A box mounted on a vertical wall surface (W) substrate (11) which is being fixed to the bottom wall of the (B), 8 single device components that are arranged in a line at intervals (1) to (8) during, formed within allowed is U-shaped (although FIG. 1, horizontal U-shape, because this is what varies depending on the direction seen the joint, simply referred to as "U-shaped") communication path (12) the two devices components adjacent each (7) (6), (6) (5), (5) (4), (4) (3), (3) (2) (2) (1) and (1) first be connected through the fluid passage outlet of one of the device components of (8) and (10) the other device component fluid passage inlet (9) and the respective stainless steel sealing material (not shown) 1 cuboid joint (13) (14) (15) and internally formed was obtained L-shaped (although inverted L-shape in FIG. 1, because the L-shaped is intended to vary the direction of view of the joint, simply "L 字状」という)連通路(16) により外部導入管(図示略)と流体制御装置(E)の下端の装置構成部材(7)の流体通路入口(9)とを、また流体制御装置(E)の上端の装置構成部材(8)の流体通路出口(10)と外部排出管(図示略)とをそれぞれステンレス鋼製シール材(図示略)を介して接続する第2直方体状継手(17)が、第1直方体状継手(13) (14) (15)とともに、前面がすべて面一となされて介在せられている。 External inlet pipe by shape "hereinafter) communication passage (16) and (fluid passage inlet at the lower end of the apparatus components of not shown) and fluid control system (E) (7) (9), also the fluid control device (E fluid passage outlet (10) and an external discharge pipe of the upper end of the device components (8) of) (not shown) and each stainless steel sealing material (the second rectangular solid joint connecting via the not shown) (17) There, the first rectangular solid couplings (13) (14) (15), are intervening been front all flush.

上記流体制御装置に使用した本発明による3種類の第1直方体状継手(13) (14) (15)のうちの1つの第1直方体状継手部材(13)の詳細を図2ないし図6に示す。 The details of the three first cuboid joint according to the present invention used in the fluid control system (13) (14) one first rectangular solid joint member of (15) (13) in FIGS. 2-6 show.

第1直方体状継手(13)は、流体の流れ方向すなわち垂直方向にのびた凹溝(18)が長さの中央に横断状に設けられ、かつ凹溝(18)の両側に継手(13)を基板(11)に取付ける継手取付け用ボルト(19)の六角孔付き頭を継手(13)から突出しないように受ける段部(20a)付きボルト挿通孔(20)および装置構成部材取付け用おねじ部材(21)がねじ込まれるめねじ部(22)がそれぞれ設けられた凹字状接続部材(23)と、接続部材(23)の凹溝(18)に嵌め込まれかつ連通路(12)のみを有する扁平直方体状連通部材(24)とに全体が2分割せられ、連通部材(24 )がステンレス鋼よりなり、接続部材(23 )がステンレス鋼より比重の軽い素材であるポリアミド6よりなるものである。 First cuboid joint (13), fluid flow direction, that the groove extending in the vertical direction (18) are provided in cross-shaped in the center of the length, and the joint (13) on either side of the groove (18) It stepped portion for receiving so as not to protrude from the hexagon socket head cap head fittings substrate (11) fitting the mounting bolts for mounting the (19) (13) (20a) with bolt insertion holes (20) and the device component mounting male screw member (21) has to have concave-shaped connection member internally threaded portion (22) is respectively provided to be screwed (23), only fitted into the groove (18) and the communication passage of the connecting member (23) (12) flat rectangular parallelepiped communication member (24) and whole is allowed 2 division, made of a communication member (24) is stainless steel, in which connection member (23) is made of polyamide 6 is a light material specific gravity than stainless steel . なお、おねじ部材(21) も六角孔付き頭を有している。 Incidentally, the male screw member (21) also has a head hex hole.

ボルト挿通孔(20)は、凹溝(18)の長さの中央部分を介してその両側に凹溝(18)に近接して位置している。 Bolt insertion holes (20) is located in proximity to the groove (18) on both sides via the central portion of the length of the groove (18). 1対のめねじ部(22)は、U字状連通路(12)の入口(25)を介して、他の1対のめねじ部(22)は、U字状連通路(12)の出口(26)を介してそれぞれ存在し、後者の各めねじ部(22)がそれぞれ接続部材(23)の隅にあるのに対し、前者の各めねじ部(22) はそれぞれ接続部材(23) の隅から離れて凹溝(18)寄りにある。 Internal thread portion of the pair (22) via the inlet (25) of the U-shaped communication passage (12), the internal thread portion of the other pair (22) is U-shaped communication passage (12) each exists through the outlet (26), each female screw portion of the latter with respect to the corner located in the (22), each connecting member (23), each female screw portion of the former (22), each connecting member (23 in the groove (18) closer away from the corner of). このように両者に間隔の差があるのは、第1直方体状継手(13)に取付けられる連通路(12)の入口(25)側の装置構成部材の幅と連通路(12)の出口(26) 側の装置構成部材の幅とに相違があるからである。 Thus both there is a difference in distance, the outlet width and the communication path of the inlet (25) side of the apparatus components of the communication path attached to the first rectangular solid couplings (13) (12) (12) ( 26) to the width of the side of the apparatus component there is a difference. したがって、第1直方体状継手(13)の両側の装置構成部材の幅がこの場合と逆になる場合、第1直方体状継手(13)はその上下を逆にして用いられる。 Therefore, if the width of each side of the apparatus components of the first cuboid joint (13) is reversed and this case, the first rectangular solid couplings (13) is used in the upside down.

接続部材(23)は、上記のようにポリアミド6よりなるものであるから、めねじが設けられない。 Connection member (23), since it is made from polyamide 6 as described above, the female screw is not provided. そこで、図4および図5に示すように、めねじ部(22)が、接続部材(23)に埋入せられたステンレス鋼製めねじ部品(27)により形成せられている。 Therefore, as shown in FIGS. 4 and 5, the internal thread portion (22) are forced formed by connecting members (23) to cause implantation was stainless steel internally threaded part (27). すなわち、めねじ部品(27)は、めねじ(28)を備えたステンレス鋼製円柱体状のもので、溝(29)付き頭(30)を有しており、接続部材(23)の前後方向にあけられた頭受け段部(31a)付き貫通孔(31)に密に嵌め入れられている。 That is, the internal thread part (27), the internal thread (28) intended to stainless steel cylindrical body shape having has a groove (29) with the head (30), front and rear connecting members (23) encased tightly fitted into the headrest stepped portion opened in a direction (31a) with through holes (31). そして、接続部材(23)の上面、左側面または右側面から頭(30)を貫通している有底孔(32)に固定ピン(33)が打ち込まれることにより、めねじ部品(27)が接続部材(23)に固定され、おねじ部材(21)との共回りが防がれる。 The upper surface of the connecting member (23), by bottomed hole from the left side or right side penetrates the head (30) (32) to the fixing pin (33) is driven, internally threaded part (27) is fixed to the connecting member (23), co-rotation is prevented between the male screw member (21). 頭(30)の溝(29)は、頭(30)の孔と接続部材(23)の孔とを一致せしめるのにめねじ部品(27)を回動調整するドライバー先端を係合させるためのものである。 Head (30) a groove (29) of the head (30) holes and the connecting member (23) of the hole and the female screw part to allowed to match (27) for engaging the driver tip to pivot adjusting the it is intended.

接続部材(23)に嵌め合わされた連通部材(24)は、凹溝(18)の長さ方向にずれないようになっている。 Communicating member fitted to the connecting member (23) (24) is adapted not to deviate in the length direction of the groove (18). すなわち、接続部材(23)の凹溝(18) の両側面それぞれに第1位置決め用凸部(34)がボルト挿通孔(20)の段部(20a)の一部を含むように凸円弧状に設けられ、連通部材(24)の両側面それぞれに第1位置決め用凹部(35)が凹円弧状に設けられて両者が嵌合せられている。 That is, the connection member (23) of the groove (18) both side surfaces first positioning protrusions respectively (34) bolt insertion holes (20) stepped portion (20a) convex arcuate to include a portion of the provided, first positioning recesses (35) are combined fitting is both provided concave arcuate on each sides of the communication member (24). また、接続部材(23)の凹溝(18) の底面に第2位置決め用凸部(36)が設けられ、連通部材(24)の底面に第2位置決め用凹部(37)が設けられて両者が嵌合せられている。 Further, the bottom surface second positioning projection (36) is provided in the groove (18), and second positioning recesses (37) are provided on the bottom surface of the communication member (24) both of the connecting member (23) There has been combined fit. なお、第2位置決め用凸部(36)および第2位置決め用凹部(37)は、第1位置決め用凸部(34)および第1位置決め用凹部(35)がない場合は必要であるが、この場合は必ずしも必要としない。 Note that the second positioning projection (36) and the second positioning recesses (37), if no first positioning projection (34) and the first positioning recesses (35) is necessary, this not necessarily the case.

第1直方体状継手(13)と継手幅およびU字状連通路(12)の入口(25)側の1対のめねじ部(22)の位置が異なるだけで、他はこれと異ならない他の第1直方体状継手(14)の詳細を図7および図8に示す。 Only the position of the female screw portion of the pair of inlet (25) of the first cuboid joint (13) and the joint width and the U-shaped communication passage (12) (22) are different, the other is not different from this other It shows a first rectangular parallelepiped joint (14) details of the FIGS. 後者の第1直方体状継手(14)は、前者の第1直方体状継手(13)より幅が広く、U字状連通路(12)の入口(25)側の各めねじ部(22)の位置が同出口(26)側の1対のめねじ部(22)の位置と同様接続部材(23)の隅にある点で前者の第1直方体状継手(13)と異なる。 The latter first rectangular parallelepiped fitting (14), from the wider former first cuboid joint (13), each female thread of the inlet (25) of the U-shaped communication passage (12) (22) position is different from the same outlet (26) side of one of the former at a point in the corner position similar connecting member of the female screw portion of the pair (22) (23) first cuboid joint (13). 後者の第1直方体状継手(14)は、これに取付けられる連通路(12)の入口(25)側の装置構成部材の幅と連通路(12)の出口(26) 側の装置構成部材の幅とが同じでかつ前者の第1直方体状継手(13)に取付けられる両側の装置構成部材の幅より幅の広い装置構成部材を接続するのに用いられる。 The latter first rectangular parallelepiped fitting (14) comprises an inlet (25) side of the width and the communication path of the device components (12) outlet (26) of the side of the apparatus components of the communication path attached thereto (12) width and is used to connect the wide device component width than the width of each side of the apparatus components mounted on the same a and former first cuboid joint (13).
さらに他の第1直方体状継手(15)の詳細図示は略したが、これは上記第1直方体状継手(14)より幅が狭いだけのものであり、その他は上記第1直方体状継手(14)と異ならないものである。 Although further details shown in the other first rectangular solid couplings (15) was short, this is merely than narrow the first rectangular parallelepiped fitting (14), the other of the first rectangular parallelepiped fitting (14 ) are those that do not differ from the.

要するに、内部に形成せられたU字状連通路により隣り合う2つの装置構成部材の一方の装置構成部材の流体通路出口と他方の装置構成部材の流体通路入口とを接続する第1直方体状継手の幅は、2つの装置構成部材の幅に広狭のある場合、幅の広い方に対応できるように決められ、U字状連通路の流体通路入口側の1対のめねじ部の間隔は、この部分に接続せられる一方の装置構成部材の幅に対応せしめられ、同流体通路出口側の1対のめねじ部の間隔は、この部分に接続せられる他方の装置構成部材の幅に対応せしめられる。 In short, the first rectangular solid joint which connects the fluid passage inlet of the fluid passage outlet and the other device components of one of the apparatus components of the two devices component adjacent the U-shaped communication passage is allowed formed therein the width, if a wide or narrow the width of the two devices components, determined to accommodate the wider width, spacing of the female screw portion of the pair of fluid passage inlet side of the U-shaped communication passage, is allowed corresponding to the width of one of the device components which are being connected to this part, the interval of the female screw portion of the pair of the fluid passage outlet side allowed corresponds to the width of the other device components that are not connected to the portion It is.

上記流体制御装置(E)に使用した本発明による第2直方体状継手部材(17)の詳細を図9および図10に示す。 The details of the fluid control device second cuboid joint member according to the present invention using the (E) (17) shown in FIGS.

同図に示す第2直方体状継手(17)は、流体制御装置(E)の下端の装置構成部材(7)の流体通路入口(9)と外部導入管とをそれぞれ接続するものであり、連通部材(24)の下面に外部導入管との接続用突出短筒状入口(38)が設けられている。 The second rectangular parallelepiped joint shown in FIG. (17) is provided for connecting fluid passage inlet at the lower end of the apparatus components of the fluid control system (E) (7) and (9) and an outer inlet tube respectively, communicating member lower surface connection protruding short cylindrical inlet with the outside introduction pipe (24) (38) is provided. 第2直方体状継手(17)を第1直方体状継手(13)と対比してその他これと異なるのは、ボルト挿通孔(20)が凹溝(18)の下端寄り部分を介してその両側に近接して位置している点および1対のめねじ部(22)のみがL字状連通路(16)の出口(39)を介して存在し、各めねじ部(22)がそれぞれ接続部材(23)の隅にある点である。 The second rectangular parallelepiped fitting (17) in comparison with the first rectangular solid couplings (13) Other This differs from, on both sides of the bolt insertion hole (20) through a lower end portion near the groove (18) internal thread portion of the points and a pair close to being located only (22) is present via the outlet (39) of the L-shaped communication passage (16), each female screw portion (22) is connected member is a point in the corner of the (23).

L字状連通路(16) により外部排出管と流体制御装置(E)の上端の装置構成部材(8)の流体通路出口(10)とを接続する場合は、図示の第2直方体状継手(17)の上下が逆にせられる。 When connecting the fluid passage outlet (10) of the upper end of the apparatus components of the external discharge pipe and the fluid control device (E) (8) by L-shaped communication passage (16), a second rectangular parallelepiped joint shown ( upper and lower 17) is Sera in reverse. すると、ボルト挿通孔(20)が凹溝(18)の上端寄り部分を介してその両側に近接して位置し、1対のめねじ部(22)がL字状連通路(16)の入口(40)を介して存在し、連通部材(24)の上面に外部排出管との接続用突出短筒状出口(41)が設けられていることになる(図1参照)。 Then, the bolt insertion hole (20) is positioned in proximity to both sides through the upper end portion near the groove (18), the inlet of the female screw portion of the pair (22) is L-shaped communication passage (16) (40) there through, so that the protruding for connection to an external exhaust pipe short cylindrical outlet (41) is provided on the upper surface of the communication member (24) (see FIG. 1).

3ポート開閉弁である装置構成部材(3)には、上下の第1直方体状継手(13) (13)に挟まれるとともに、並列配置の隣の流体制御装置に接続せられかつL字状連通路(42)を有する直方体状継手(43)が、左右2つのおねじ部材(44)により装置構成部材(3)のフランジ部(3a)に連結せられている。 3 The port is operated shutoff valve device component (3), together with the sandwiched above and below the first cuboid joint (13) (13), are being connected to the fluid control apparatus adjacent to the parallel arrangement and L-shaped communication passage (42) rectangular parallelepiped fitting (43) having has brought coupled to the flange portion of the device components (3) (3a) by left and right Tsunooneji member (44). この直方体状継手(43)はその幅が、L字状連通路(42)を確保し得るだけの狭いものであるから、従来と同様全体がステンレス鋼製であって本発明の対象外である。 The cuboid joint (43) is a width, since only narrow the possible to secure the L-shaped communication passage (42), the whole as in the conventional is not subject to the present invention there is provided a stainless steel . おねじ部材(44)をねじ込むめねじは、ステンレス鋼製直方体状継手(43)にL字状連通路(42)に達しないよう直接設けられている。 Internal thread screwing male screw member (44) is provided directly to the stainless steel cuboid joint (43) does not reach the L-shaped communication passage (42).

上記実施形態において、めねじ部品(27)は、めねじ(28)を備えたステンレス鋼製円柱体状のもので、円形貫通孔に密に嵌め込まれているが、めねじ部品を四角または六角等の角柱状のものとし、これを角形貫通孔に密に嵌め込むようにすれば、おねじ部材との共回りを防ぐことができ、固定ピンが不要となる。 In the above embodiment, the internal thread part (27) is intended internal thread of stainless steel cylindrical body shape having (28), have been fitted tightly into the circular through-hole, a female thread part square or hexagonal shall prismatic etc., if this so closely fitted into the rectangular through hole, it is possible to prevent the co-rotation of the male screw member, the fixing pin is not required.
図11に示す第1直方体状継手(51) は、図7および図8に示す第1直方体状継手(14)の変形例を示すものである。 11 first cuboid joint shown in (51) shows a modification of the first rectangular solid joint shown in FIGS. 7 and 8 (14).

この第1直方体状継手(51)は、長さの中央に凹溝(52)が設けられかつ凹溝(52)の両側に装置構成部材取付け用おねじ部材(21)がねじ込まれるめねじ部(53)がそれぞれ2つ隅に設けられたアルミニウム製接続部材(54)と、凹溝(52)内全体に存在しかつU字状連通路(55)が形成されたステンレス鋼製連通部材(56)とで構成され、接続部材(54)の凹溝(52)の両側に、接続部材(54)と連通部材(56)に跨って段部付きボルト挿通孔(57)が2つあけられ(図11の鎖線部分にあけられる)、めねじ部(53)が、接続部材(54)に埋入せられたステンレス鋼製円柱状めねじ部品(58) により形成せられているものである。 The first rectangular solid joint (51), a female screw portion on both sides in the apparatus component mounting male screw member and is provided grooves (52) in the center of the length groove (52) (21) is screwed (53) is of aluminum connecting member provided on the two corners, respectively (54), grooves (52) in the entire existence vital U-shaped communication passage (55) is formed of stainless steel communication member ( consists out with 56), on both sides of the groove (52) of the connecting member (54), a stepped portion with bolt insertion holes (57) are two spaced across the connecting member (54) and the communication member (56) (drilled into the chain line portion in FIG. 11), the internal thread portion (53) is one that is forced formed by implantation was obtained stainless steel cylindrical internally threaded part (58) to the connecting member (54) .

上記第1直方体状継手(51)は、溶湯鍛造法により、つぎのようにして鋳造せられる。 The first cuboid joint (51), the molten metal forging is brought cast as follows. すなわち、平板部材に連通部材(56)の垂直断面と同じ断面でこれより若干背の高い1本の横長角棒状ステンレス鋼を置き、これを介してその両側にめねじ部品(58)と同じ水平断面でこれより若干背の高い数本の円柱状ステンレス鋼を所定間隔をおいて各1列に配置し、ともに平板部材に小ねじで止める。 That is, the flat plate member placed to communicate member (56) Horizontal angle rod-like stainless steel slightly taller one than this the same cross-section as the vertical section of the same horizontal internally threaded part (58) on both sides through which the several cylindrical stainless steel slightly higher tall than this in section at a predetermined interval and disposed in the first column, stopping in small screws on both flat plate members. つぎに、平板部材の周囲に方形枠状の鋳型を嵌めた後、角棒状ステンレス鋼と円柱状ステンレス鋼を埋め金として鋳型内にアルミニウム溶湯を流し込み、圧力を加えて鋳ぐるみ成形する。 Then, after fitting the rectangular frame-shaped mold around the flat plate members, pouring molten aluminum into the mold as a metal filled the square bar stainless steel and a cylindrical stainless steel and casting-molding under pressure. その後、鋳型を除き、これを連通部材(56)相当の大きさの1つの扁平直方体と4つの円柱体を有する第1直方体状継手(51)相当の大きさになるように複数箇所で切断するとともにに、小ねじのある部分の上方位置から下部分を平板部材もろとも旋盤等で切断除去し、所定の直方体状鋳塊を複数得る。 Thereafter, except for the mold, which is cut with a communicating member (56) corresponding in size one flat cuboid and the four first rectangular-shaped fitting (51) having a cylindrical body corresponding at a plurality of positions such that the magnitude of with the the lower portion is cut away at the flat plate member Morotomo lathe or the like from above the portion of the machine screw, to obtain a plurality of predetermined rectangular parallelepiped ingot. 各直方体状鋳塊をひっくり返し、扁平直方体部分にU字状連通路(55)を加工形成してステンレス鋼製連通部材(56)となすとともに、各円柱体部分にめねじ(53)を加工形成してステンレス鋼製円柱状めねじ部品(58)が埋入せられたアルミニウム製接続部材(54)となす。 Turn the respective rectangular solid ingot, processed with eggplant U-shaped communication passage (55) and processed form to a stainless steel communication member (56) in a flat cuboid portion and a female thread (53) to each cylinder portion formed to form a stainless steel cylindrical internally threaded part (58) of implantation was obtained aluminum connecting member (54). そして、接続部材(54)の中央両側に、一体となった接続部材(54)と連通部材(56)に跨って段部付きボルト挿通孔(57)を2つあけることにより第1直方体状継手(51)を得る。 The central on both sides, the first rectangular solid joint by drilling two stepped portions bolt insertion holes (57) across the communicating member and the connecting member together (54) (56) of the connecting member (54) obtaining (51).
第1直方体状継手(51)は、図7および図8に示す第1直方体状継手(14)の変形例であるが、これと同じ要領で図2ないし図6に示す第1直方体状継手(13)、第1直方体状継手(14)より幅が狭いだけの第1直方体状継手(15)および図9および図10に示す第2直方体状継手(17)の各変形例を溶湯鍛造法により得ることができる。 First cuboid joint (51) is a modification of the first rectangular parallelepiped fitting (14) shown in FIGS. 7 and 8, the first rectangular solid joint shown in FIGS. 2 to 6 in the same manner as this ( 13), by a respective modification of the second rectangular parallelepiped joint shown in the first rectangular parallelepiped fitting (14) only from the narrow first cuboid joint (15) and 9 and 10 (17) molten metal forging process it is possible to obtain.

上記実施形態では、連通路(12) (55)がU字状であるが、これはV字状でもよい。 In the above embodiment, the communication passage (12) (55) is a U-shaped, which may be a V-shape.

上記実施形態は、本発明の継手が用いられている半導体製造装置用流体制御装置が、垂直壁面にその長さ方向を垂直にして配置せられたものであるが、半導体製造装置用流体制御装置は、垂直壁面にその長さ方向を水平にして配置せられることもあり、場合によっては、これが床の水平面に配置せられることもある。 The above-described embodiment, a semiconductor manufacturing device for a fluid control system coupling of the present invention is used is, but in which its length direction is allowed disposed perpendicularly to the vertical wall surface, a semiconductor manufacturing device for a fluid control device is sometimes brought place the length direction perpendicular wall in the horizontal, in some cases, this is not arranged in a horizontal plane of the floor.

上記実施形態の流体制御装置(E)は、半導体製造装置用のものであるが、半導体製造装置以外にも用い得る。 Fluid control apparatus of the above embodiment (E), which is for a semiconductor manufacturing apparatus, may also be used in addition to a semiconductor manufacturing device.

本発明の継手が用いられている半導体製造装置用流体制御装置が、垂直壁面にその長さ方向を垂直にして配置せられた状態を示す一部を切り欠いた側面図である。 Semiconductor manufacturing device for a fluid control device that joint of the present invention is used is a side view, with parts cut away showing a state in which its length direction is allowed disposed perpendicularly to the vertical wall. 本発明の1実施形態である第1直方体状継手の拡大詳細正面図である。 Is an enlarged detailed front view of a first rectangular solid joint is one embodiment of the present invention. 図2のIII−III線にそう断面図である。 Yes sectional view of line III-III in FIG. 図2の第1直方体状継手の背面図である。 Is a rear view of a first rectangular parallelepiped fitting in FIG. 図4のV−V線にそう断面図である。 Yes sectional view in line V-V in FIG. 図2の第1直方体状継手の拡大分解斜視図である。 Is an enlarged exploded perspective view of a first rectangular parallelepiped fitting in FIG. 本発明の他の実施形態である第1直方体状継手の拡大詳細正面図である。 It is an enlarged detailed front view of a first rectangular solid joint which is another embodiment of the present invention. 図7のVIII−VIII線にそう断面図である。 Yes sectional view line VIII-VIII in FIG. 本発明のさらに他の実施形態である第2直方体状継手の拡大詳細正面図である。 It is an enlarged detailed front view of the second cuboid joint according to still another embodiment of the present invention. 図9のX−X線にそう断面図である。 Yes sectional view line X-X in FIG. 図7および図8の第1直方体状継手の変形例を示す斜視図である。 It is a perspective view showing a modified example of the first cuboid joint of FIGS.

(1)〜(8) 装置構成部材 (1) to (8) device components
(9) 装置構成部材の流体通路出口 (9) the fluid passage outlet of the device components
(10) 装置構成部材の流体通路入口 (10) a fluid passage inlet of the device components
(12) (16) (55) 連通路 (12) (16) (55) communicating passage
(13) (14) (15) (17) (51) 継手 (13) (14) (15) (17) (51) Joint
(18) (52) 凹溝 (18) (52) groove
(19) 継手取付け用ボルト (19) Joint mounting bolts
(20) (57) ボルト挿通孔 (20) (57) bolt holes
(20a) ボルト挿通孔の段部 (20a) stepped portion of the bolt insertion hole
(21) 装置構成部材取付け用おねじ部材 (21) device component mounting male screw member
(22) (53) めねじ部 (22) (53) internal thread portion
(23) (54) 接続部材 (23) (54) connecting member
(24) (56) 連通部材 (24) (56) communicating member
(27) (58) めねじ部品 (27) (58) female screw parts
(34) (36) 位置決め用凸部 (34) (36) positioning projections
(35) (37) 位置決め用凹部(E)流体制御装置(W)垂直壁面 (35) (37) positioning recesses (E) fluid control device (W) perpendicular wall

特開2003−322127号公報 JP 2003-322127 JP

Claims (2)

  1. 一列に並べられた複数の装置構成部材の装置設置側に配置され、隣り合う装置構成部材の一方の装置構成部材の流体通路出口と他方の装置構成部材の流体通路入口とを連通させるか、他機器の流体通路出口若しくは流体源から配管された外部導入管と流体制御装置の一端の装置構成部材の流体通路入口とを連通させるか、または制御流体必要機器へ配管された外部排出管と流体制御装置の他端の装置構成部材の流体通路出口とを連通させる流体制御装置用継手において、中央に凹溝が設けられかつ装置構成部材取付け用おねじ部材によって装置構成部材が固定される接続部材と、凹溝内に存在しかつ連通路が形成された連通部材より構成され、接続部材には、装置構成部材取付け用おねじ部材がねじ込まれるめねじ部品が埋入せられており、 Arranged device installation side of the plurality of devices components arranged in a row, or to communicate the fluid passage inlet of the fluid passage outlet and the other device components of one of the apparatus components of mutually device components that next, other or to communicate the fluid passage inlet at one end of the apparatus components of the outer introduction tube and a fluid control apparatus as a pipe from the fluid passage outlet or fluid source of the device, or tubing to an external discharge pipe and fluid control to control fluid necessary equipment in the fluid control device for a joint for communicating the fluid passage outlet at the other end of the apparatus components of the apparatus, and the connecting member groove in the center is provided and apparatus components mounting apparatus components by male screw members for being fixed , is composed of communicating member present and the communication passage is formed in the groove, the connecting member has brought incoming horses internally threaded part to be screwed device component mounting male screw member, ねじ部品の素材および連通部材の素材が、ステンレス鋼またはステンレス合金であり、接続部材の素材が、アルミニウムであって、全体が溶湯鍛造法により鋳造せられて一体化せられている流体制御装置用継手。 Material of threaded fasteners of the material and the communicating member is a stainless steel or a stainless steel alloy, material of the connecting member is a aluminum, entirely fluid control device are brought integrally forced cast by melt forging method joint.
  2. さらに、接続部材の両側に、接続部材と連通部材に跨って段部付きボルト挿通孔があけられている請求項1記載の流体制御装置用継手。 Furthermore, connected to both sides of the member, the connection member communicates with a fluid control system for joint according to claim 1, wherein the stepped portion with a bolt insertion hole is drilled across the member.
JP2011072530A 2011-03-29 2011-03-29 Fluid control device for coupling Active JP5277278B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011072530A JP5277278B2 (en) 2011-03-29 2011-03-29 Fluid control device for coupling

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011072530A JP5277278B2 (en) 2011-03-29 2011-03-29 Fluid control device for coupling

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2005356183 Division 2005-12-09

Publications (2)

Publication Number Publication Date
JP2011149554A true JP2011149554A (en) 2011-08-04
JP5277278B2 true JP5277278B2 (en) 2013-08-28

Family

ID=44536702

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011072530A Active JP5277278B2 (en) 2011-03-29 2011-03-29 Fluid control device for coupling

Country Status (1)

Country Link
JP (1) JP5277278B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9624615B2 (en) 2013-03-15 2017-04-18 Whirlpool Corporation Methods and compositions for treating laundry items
US9702074B2 (en) 2013-03-15 2017-07-11 Whirlpool Corporation Methods and compositions for treating laundry items

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6175300B2 (en) * 2013-07-17 2017-08-02 株式会社フジキン Fluid control device for a coupling member and fluid control system

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0726040Y2 (en) * 1992-03-30 1995-06-14 桐生機械株式会社 Pressure casting equipment
JPH10300000A (en) * 1997-02-28 1998-11-13 Benkan Corp Accumulated gas control device
JP3814704B2 (en) * 1997-05-08 2006-08-30 忠弘 大見 Fluid control dexterity coupling
CN1107830C (en) * 1998-03-05 2003-05-07 斯瓦戈洛克公司 Surface mount manifold designed under standard form
JP4244254B2 (en) * 1999-04-30 2009-03-25 株式会社キッツエスシーティー Integrated gas control device
JP2001140509A (en) * 1999-11-17 2001-05-22 Sekisui Chem Co Ltd Handle mounting structure
JP2001153290A (en) * 1999-11-30 2001-06-08 Air Water Inc Module block for accumulation type gas supply unit
JP2001280595A (en) * 2000-03-29 2001-10-10 Air Water Inc Module block for integrated type gas supply unit
JP4156184B2 (en) * 2000-08-01 2008-09-24 株式会社キッツエスシーティー Integrated gas control device
WO2004021412A3 (en) * 2002-08-27 2004-09-02 Celerity Group Inc Modular substrate gas panel having manifold connections in a common plane
JP2006507463A (en) * 2002-11-26 2006-03-02 スワゲロック カンパニー Modular surface installed fluid system
US6874538B2 (en) * 2003-03-26 2005-04-05 Kevin S. Bennett Fluid delivery system
JP4312088B2 (en) * 2004-01-27 2009-08-12 シーケーディ株式会社 Passage block

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9624615B2 (en) 2013-03-15 2017-04-18 Whirlpool Corporation Methods and compositions for treating laundry items
US9631310B2 (en) 2013-03-15 2017-04-25 Whirlpool Corporation Methods and compositions for treating laundry items
US9644301B2 (en) 2013-03-15 2017-05-09 Whirlpool Corporation Methods and compositions for treating laundry items
US9689101B2 (en) 2013-03-15 2017-06-27 Whirlpool Corporation Methods and compositions for treating laundry items
US9702074B2 (en) 2013-03-15 2017-07-11 Whirlpool Corporation Methods and compositions for treating laundry items
US9758914B2 (en) 2013-03-15 2017-09-12 Whirlpool Corporation Methods and compositions for treating laundry items
US10011935B2 (en) 2013-03-15 2018-07-03 Whirlpool Corporation Methods and compositions for treating laundry items
US10017893B2 (en) 2013-03-15 2018-07-10 Whirlpool Corporation Methods and compositions for treating laundry items
US10072373B2 (en) 2013-03-15 2018-09-11 Whirlpool Corporation Methods and compositions for treating laundry items

Also Published As

Publication number Publication date Type
JP2011149554A (en) 2011-08-04 application

Similar Documents

Publication Publication Date Title
US5983933A (en) Shutoff-opening device
US7614593B2 (en) Lined clamp for hoses and control lines
US5860676A (en) Modular block assembly using angled fasteners for interconnecting fluid components
US5000488A (en) Adapter fittings and connectors
US6039360A (en) Couplings for fluid controllers
US6340059B1 (en) Threadless sprinkler head assembly
US20040000337A1 (en) Fire-control sprinkler riser systems
US20020017329A1 (en) Integrated gas control device
JP2002349797A (en) Fluid control device
US7146999B2 (en) Modular fluid handling device
CN2884081Y (en) Mechanism for fixing limiting evaporator of drawer-type refrigerator
US8425264B2 (en) Electrical connector
CN2795531Y (en) Bolt for conveniently and quickly mounting
US20070182156A1 (en) Self-sealing fluid fitting and method
US2126897A (en) Valve
JP2005195558A (en) Gas meter connection mechanism and gas meter connection unit and gas meter
US20090183792A1 (en) Fluid Control Device
JP2008133933A (en) Adaptor for connecting
US7814797B2 (en) Pressure sensor apparatus and pressure sensor built-in fluid control equipment
JPH10220698A (en) Fluid control device
US7665940B2 (en) Fastener assembly
US20100006787A1 (en) Fluid Controller With Joint
US7874316B2 (en) Purge gas unit and purge gas supply integrated unit
US20150075660A1 (en) Fluid control apparatus
US8783295B2 (en) Fluidic device unit structure

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20110329

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20121106

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20121228

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20130423

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20130520

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250