JP2002195443A - Fluid control valve - Google Patents

Abstract

PROBLEM TO BE SOLVED: To downsize the whole of fluid control device or the whole of a fluid piping route compact improve fluid replacement characteristics and passage resistance, improve assemblage work efficiency of the fluid control device or the fluid piping route, provide both opening/closing functions and checking functions in a simple constitution, and achieve a low cost. SOLUTION: A diaphragm 9 is provided in such a way that it gets in contact with a valve seat 8 of a valve main body by its elasticity is disconnect a passage 4 from a passage 5, that it is elastically deformed to be isolated from the valve seat 8 to communicate the passage 4 with the passage 5 as a pressure in the passage 4 becomes higher than a pressure in the passage 5, and that it is in contact with the valve seat 8 to keep a checking condition as the pressure in the passage 5 becomes higher than the pressure in the passage 4. A diaphragm 10 is pressed by an opening/closing means 13 to be elastically deformed to press the check diaphragm 9 to the valve seat 8 for holding the passage 4 and the passage 5 in a disconnected state. As it is released from a pressed state, the check diaphragm 9 is release by its restoration elasticity.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fluid control device which is used for a device for controlling a fluid or a piping route for controlling a fluid, and particularly needs to control various fluids such as a semiconductor manufacturing device. Or a fluid control valve suitable for use in a fluid control piping path.

[0002]

2. Description of the Related Art Conventionally, in order to control a fluid in a fluid control device or a fluid control piping as described above, an on-off valve and a check valve are separately constructed and used in combination.

[0003] An example of the open / close valve will be briefly described. A piston and a piston rod are advanced by the urging force of a spring to press a holding piece, and a diaphragm is pressed against a valve seat by the holding piece. The flow path and the downstream flow path are shut off. Conversely, the piston and the piston rod are retracted by air pressure against the urging force of the spring, and the holding piece is released from the pressed state, whereby the pressing force on the diaphragm is released, and the diaphragm itself is released. By being restored by the elastic force of the above and separated from the valve seat, the upstream flow path and the downstream flow path are configured to communicate with each other.

[0004] Another example of the opening / closing valve will be briefly described. When the manual lever is operated, the advancing / retreating member is advanced together with the urging force of the spring to press the holding piece, and the holding piece presses the diaphragm against the valve seat. Thus, the upstream flow path and the downstream flow path are shut off. Conversely, the operation of the manual lever causes the advance / retreat member to retreat against the urging force of the spring and release the pressing piece from the pressed state, thereby releasing the pressing force against the diaphragm and causing the diaphragm to release itself. By being restored by the elastic force and separated from the valve seat, the upstream channel and the downstream channel are configured to communicate with each other.

[0005] An example of the check valve will be described briefly. A valve body (poppet) is pressed against a valve seat by elasticity of a spring to shut off an upstream flow path and a downstream flow path. When the valve body is separated from the valve seat against the urging force of the spring due to the pressure of the fluid, the upstream flow path and the downstream flow path communicate with each other, and the fluid flows. When the fluid flows backward and the fluid pressure becomes higher than the pressure in the upstream flow path, the valve element is pressed against the valve seat by the pressure of the fluid and the urging force of the spring as described above, and the upstream flow path and the downstream flow The side flow path is maintained in a state of being cut off, and is configured to prevent the fluid from flowing backward from the downstream flow path to the upstream flow path.

Conventionally, as another example, a compound valve may be used instead of using a combination of the on-off valve and the check valve which are separately constructed as described above. This composite valve is configured by combining the on-off valve configured as described above and the check valve configured as described above in two stages, upper and lower.

[0007]

However, if a combination of an on-off valve and a check valve which are individually constructed as in the above-mentioned conventional example is used, a lot of space is required for disposing them. In particular, in applications where various gases need to be controlled, such as semiconductor manufacturing equipment, a large number of on-off valves and check valves are required. The whole installation area becomes large. In addition, a dead space that is unnecessary for the flow of the fluid by the pipes and the joints increases, the fluid replacement characteristics deteriorate, and the flow path resistance increases. In addition, the two types of on-off valve and check valve are used in combination, which is expensive.

On the other hand, by using a compound valve as in the conventional example, the flow path length is shortened as compared with the case where an individual on-off valve and a check valve are used in combination as described above. The installation area can be reduced, and the number of assembling steps can be reduced to improve the assembling workability. However,
The height of the compound valve increases, requiring a large installation space in the height direction of the entire device, and since the fluid flows through both the check valve and the on-off valve, the fluid replacement characteristics and the flow path resistance are improved. Can not contribute much.
Further, since the compounding valve has the open / close valve and the check valve connected in two stages, upper and lower, it is expensive as in the conventional example.

SUMMARY OF THE INVENTION An object of the present invention is to solve the above-mentioned conventional problems. The purpose of the present invention is to provide an opening / closing function of a flow path and a check function in one place to shorten the flow path length. , The size of the entire fluid control device or the entire fluid piping path can be reduced, and the fluid replacement characteristics,
The flow path resistance can be improved, the assembly work efficiency can be improved by reducing the number of assembly steps in the fluid control device or the fluid piping path, and one component is added to the conventional on-off valve An object of the present invention is to provide a fluid control valve which can have both an opening / closing function and a check function with a simple configuration as much as possible, and can achieve cost reduction.

[0010]

In order to solve the above problems, a fluid control valve according to the present invention has an upstream flow path and a downstream flow path for a fluid, and these upstream flow path and downstream flow path are provided. A valve body having one of the openings at the center and the other at the side, and having a valve seat around the end of the opening at the center, By pressing against the valve seat by force, the upstream flow path and the downstream flow path can be shut off, and the pressure of the upstream flow path becomes higher than the pressure of the downstream flow path, so that the elasticity is increased. By being deformed and separated from the valve seat, the upstream flow path and the downstream flow path can be communicated, and the pressure of the downstream flow path becomes higher than the pressure of the upstream flow path, A check diaphragm provided so as to be able to be held in a shut-off state in pressure contact with the valve seat; By being pressed, the upstream-side flow path and the downstream-side flow path can be elastically deformed to press the check diaphragm against the valve seat to keep the upstream flow path and the downstream flow path in a shut-off state. By this, the opening / closing diaphragm provided so that the check diaphragm can be released from the pressed state by its own restoring elasticity, and the opening / closing diaphragm is pressed toward the valve seat side, or from the pressed state. Opening / closing means for opening.

In the above configuration, the opening / closing means may include:
A cylinder member connected to the valve body, to which fluid is supplied or discharged, and an opening / closing member that is provided so as to be able to expand and contract with respect to the cylinder member and presses the opening / closing diaphragm, or releases the pressing state. A spring may be provided for urging the opening / closing member in a direction opposite to the pressure direction of the fluid supplied into the cylinder member. As the opening / closing member, a pressing piece that presses the opening / closing diaphragm or can be released from the pressed state, a piston provided on the cylinder member movably in the axial direction, and provided integrally with the piston, And a piston rod capable of pressing the holding piece or releasing the pressing piece from the pressed state.

As the opening / closing means, a case connected to the valve body, and an opening / closing mechanism provided in the case and the valve body so as to be able to advance and retreat, for pressing the opening / closing diaphragm or releasing the diaphragm from the pressed state. A member, a spring for urging the opening / closing member in a pressing direction of the opening / closing diaphragm, and rotatably supported by the case;
A manual lever connected to the opening / closing member may be provided to move the opening / closing member in a direction against the urging force of the spring or in the urging direction of the spring with rotation. As the opening / closing member, a pressing piece that presses the opening / closing diaphragm or can be released from the pressing state, and is provided so as to be able to advance and retreat with the rotation of the manual lever, and presses the pressing piece or releases the pressing state. And a reciprocating member.

The non-return diaphragm may be formed in a disk so as to have holes at a plurality of positions on the outer peripheral side of the valve seat, or the non-return diaphragm may be a disk-shaped one. Alternatively, as the check diaphragm, a hole may be formed in the center of the disk so as to be located on the inner peripheral side of the valve seat.

According to the present invention configured as described above,
By providing an opening / closing diaphragm and a check diaphragm, the opening / closing diaphragm pressed by the opening / closing means presses the check diaphragm against the valve seat to shut off the upstream flow path and the downstream flow path. By releasing the opening / closing diaphragm by the opening / closing means and resiliently restoring and releasing the non-return diaphragm from the pressing state, the non-return diaphragm is pushed by the fluid pressure flowing from the upstream side flow path and separated from the valve seat. When the pressure of the downstream flow path becomes higher than the pressure of the upstream flow path due to some trouble or the like, the check diaphragm is opened. It is possible to prevent the fluid from flowing backward from the downstream flow path to the upstream flow path by holding the fluid in a shut-off state in which the fluid is pressed against the fluid. As described above, the opening and closing function of the flow path and the check function are provided in one place, and the flow path length can be shortened. Further, since the on-off valve and the check valve are configured as a single unit, the number of assembly steps in the fluid control device or the fluid piping path can be reduced. Further, the opening / closing function and the check function can be combined with a simple configuration in which one component, that is, a check diaphragm is added to the conventional on-off valve.

[0015]

Embodiments of the present invention will be described below with reference to the drawings. First, a first embodiment of the present invention will be described. FIG. 1 shows a fluid control valve according to a first embodiment of the present invention. FIG. 2 is a longitudinal sectional view showing a state in which a flow path can be communicated, FIG. 2 is an enlarged view of a part II, and FIG. FIG. 4 is an enlarged view similar to FIG. 2 in a state in which the flow path is blocked, and FIGS. 4A and 4B are a plan view, a central sectional view, and a view, respectively, showing an example of a check diaphragm used in the fluid control valve. 5 (a) and 5 (b) are a plan view and a central sectional view showing another example of the check diaphragm used for the fluid control valve, respectively, and FIGS. 6 (a) and 6 (b) respectively show the same for the fluid control valve. Plan view showing still another example of a non-return diaphragm to be used,
It is a center section view.

As shown in FIGS. 1 to 3, a valve body (valve box) 1 is provided integrally with a body 2 so that their axes are perpendicular to each other at the center of the body 2. And a cylindrical connecting portion 3. An upstream (primary) flow path 4 through which fluid flows into one side and the other side of the main body 2 and a downstream (secondary) flow path 5 through which fluid flows out are formed. The outlet side 4a of the upstream side flow path 4 and the inlet side 5a of the downstream side flow path 5 are communicated by a space (valve chamber) 6 in the connecting portion 3, and the outlet side of the upstream side flow path 4 is a center of the space 6 , And the inlet side of the downstream flow path 5 is opened vertically in the side of the cavity 6. An annular groove 7 is formed at the end of the outlet side opening of the upstream channel 4, and the base side of the valve seat 8 is inserted into the annular groove 7, and the valve seat is formed by caulking the outer peripheral edge of the annular groove 7. The seat 8 is fixed so as to protrude around the distal end side.

In the empty space 6, a metal check diaphragm 9 is provided.
And a metal opening / closing diaphragm 10 are provided. One example of the check diaphragm 9 is shown in FIG.
As is clear from (a) and (b), as a whole, it is disk-shaped, and at the peripheral portion, from the outer peripheral edge to the inner side,
Inclined so as to gradually increase gradually, the circumferential portion, that is, in the inner peripheral portion of the inclined portion, as it reaches the inner peripheral side,
It is inclined so as to be gradually lowered gradually, and the inside of the inclined portion is formed to be flat at a low position.
In the check diaphragm 9, a portion corresponding to the outer peripheral portion of the valve seat 8 is formed with a concentric arcuate hole 11 intermittently and double, and the inner peripheral side arcuate hole 11 and the outer peripheral side are formed. Are arranged so as to be out of phase with each other and the intermittent portion is shifted. The opening / closing diaphragm 10 has a disk shape as a whole and is curved so as to gradually and gently protrude from the periphery to the center.

The check diaphragm 9 and the opening / closing diaphragm 10 are arranged such that the check diaphragm 9 is located on the valve seat 8 side. The check diaphragm 9 and the opening / closing diaphragm 10 have their outer peripheral portions superimposed on each other, and the outer peripheral portion of the bottom surface of the cylindrical bonnet 12 inserted into the cylindrical coupling portion 3 and the cylindrical coupling portion of the valve body 1. It is clamped by an annular projection 3a projecting from the bottom inside the cavity 6 inside the cavity 3. In this state, the inside of the holding portion of the check diaphragm 9 is slightly elastically deformed, and the lower portion of the central portion is pressed against the valve seat 8 by its own elastic force, so that the outlet opening of the upstream side flow path 4 is opened. The portion 4 a is closed, and the arc-shaped hole 11 is located on the outer peripheral portion of the valve seat 8. On the other hand, the opening / closing diaphragm 10 is separated from the check diaphragm 9 inside the holding portion, and its outer peripheral portion is in contact with the arc-shaped bottom surface of the bonnet 12 in a state where the check diaphragm 9 is released. .

When the pressure in the upstream flow path 4 and the pressure in the downstream flow path 5 are equal, or the pressure in the downstream flow path 5 is higher than the pressure in the upstream flow path 4, the check diaphragm 9
Is maintained in a state of being pressed against the valve seat 8, that is, a state in which the upstream flow path 4 and the downstream flow path 5 are shut off (see FIGS. 1 and 2). When the pressure of the fluid flowing into the upstream flow path 4 from this state causes the pressure on the upstream flow path 4 to become higher than the pressure on the downstream flow path 5, the central portion of the check diaphragm 9 is pressed by the fluid pressure. The upstream flow path 4 and the downstream flow path 5 are separated from the valve seat 8 and communicate with each other.

The opening / closing diaphragm 10 is pressed by the opening / closing means 13 toward the valve seat 8 or is released from the pressed state. An example will be described.
Reference numeral 3 includes a holding piece 14 and an air cylinder 15. The holding piece 14 is supported inside the bonnet 12 so as to be movable in the axial direction (movable up and down), and is pressed downward by the operation of the air cylinder 15 to move forward, thereby pressing the opening / closing diaphragm 10 to be elastically deformed. Thus, the check diaphragm 9 can be pressed. The holding piece 14 is released from the downwardly pressed state by the operation of the air cylinder 15, contrary to the above,
The opening / closing diaphragm 10 is pushed upward by the elastic restoring force of the opening / closing diaphragm 10 and retreated, and the large-diameter portion 16 is engaged with the step 17 in the bonnet 12 so as to be prevented from coming off. The cylinder 18 of the air cylinder 15 includes a cylinder base 19 and a cylinder cover 20.
9, a female screw 22 formed on the inner periphery of the lower part of the cylindrical portion 21 is provided with a male screw 23 formed on the outer periphery of the cylindrical portion 3 of the valve body 1.
And are connected by screwing. Then, the bottom plate 24 of the cylinder base 19 is connected to the annular projection 2 on the top side of the bonnet 12.
5, the hood 12 is prevented from coming off, and the above-described check diaphragm 9 and opening / closing diaphragm 10 are held in a sandwiched state. A female screw 27 formed on a lower inner periphery of the cylinder cover 16 is screwed and connected to a male screw 26 formed on an upper outer periphery of the cylindrical portion 21 of the cylinder base 19, and a connecting portion between the cylinder base 19 and the cylinder cover 20. An O-ring 28 is interposed in a compressed state, and the two are sealed.

In the cylinder 18, a piston 29 and a piston rod 30 integrally projecting below and above the piston 29 are provided.
And 31 are movably supported in the axial direction. That is, the piston 29 is provided so as to be movable along the inner peripheral surface of the cylinder cover 20, and the piston rod 30 is formed in the cylindrical portion 32 formed at the center of the bottom plate 24 of the cylinder base 19.
The piston rod 31 is movably inserted into a cylindrical portion 33 formed on the cylinder cover 20. O-rings 34, 35, 36 are inserted into annular grooves formed on the outer circumferences of the piston 29 and the piston rods 30, 31, and these O-rings 34, 35, 36 are formed inside the cylinder cover 20, the cylindrical portions 32, 33. It is pressed against the peripheral surface and sealed. Tip (lower end) of piston rod 30
Is in contact with the base end (upper end) of the holding piece 14.
A compression spring 37 is interposed between the piston 29 and the inner surface of the top of the cylinder cover 20, and the compression spring 37 urges the piston 29, the piston rods 30 and 31, and the holding piece 14 toward the valve seat 8. In the present embodiment, the holding piece 14, the piston 29, and the piston rods 30, 31 are used as the opening / closing members of the opening / closing diaphragm 10 as described above.

An open side of the top of the cylindrical portion 33 of the cylinder cover 20 is an air supply port 38, and the air supply port 38 is connected to a compressed air supply source (not shown).
An air passage 39 communicating with the air supply port 38 is formed in the piston 29 and the piston rods 30 and 31 along the axial direction, and an air passage 40 is formed at a right angle at a closed end portion of the air passage 39. The air passage 40 is open to a chamber 41 between the piston 29 and the cylinder base 19. The chamber 42 of the cylinder 15 in which the compression spring 37 is housed is provided with an air hole 4 formed in the cylinder cover 20.
3 open to the outside.

When the compressed air is not supplied to the air supply port 38, the compression spring 3
7, the piston 29, the piston rod 30,
The opening / closing diaphragm 10 is elastically deformed by the holding piece 14 so that the opening / closing diaphragm 10 and the check diaphragm 9 are attached to the valve seat. 8 (see FIG. 3). Conversely, when compressed air is supplied to the air supply port 38, the compressed air is supplied into the chamber 41 through the air passages 39 and 40, whereby the piston 29 and the piston rods 30 and 31 are compressed. The spring 37 is retracted against the urging force of the spring 37. Accordingly, the holding piece 14 is released from the pressed state as described above, and the holding piece 14 is retracted upward by the restoring elastic force of the opening / closing diaphragm 10 (FIGS. 1 and 2).
reference). In addition, the piston 29, the piston rod 30,
Since the chamber 42 is opened to the outside by the air hole 43 at the time of the retreat 1, the operation is performed smoothly.

The operation of the above configuration will be described below. The fluid control valve having the above-described structure is of a normally closed type, and the piston 29, the piston rods 30, 31 and the holding piece 14 are always advanced downward by the urging force of the compression spring 37, and as shown in FIG. The opening / closing diaphragm 10 and the check diaphragm 9 are brought into pressure contact with the valve seat 8 by 14 to shut off the upstream flow path 4 and the downstream flow path 5. If the upstream flow path 4 and the downstream flow path 5 are within a predetermined pressure difference,
The opening / closing diaphragm 10 and the check diaphragm 9 are held in a state of being pressed against the valve seat 8, and the valve seat 8 is closed.
There is no danger of separation from the upstream flow path 4 and the upstream flow path 4 and the downstream flow path 5 can be maintained in a blocked state.

When compressed air is supplied from the air supply port 38 into the chamber 41 through the air passages 39 and 40 in the shut-off state, the air pressure is applied to the bottom surface of the piston 29 and resists the urging force of the compression spring 37. As shown in FIG.
9. The piston rods 30, 31 are retracted upward to release the holding piece 14 from the pressed state. Along with this, the opening / closing diaphragm 10 retreats the holding piece 14 upward by its own elastic force, and is restored so as to be separated from the check diaphragm 9. In this state, the check diaphragm 9 is pressed against the valve seat 8 by its own elastic force, and the upstream flow path 4 and the downstream flow path 5 are shut off. In this state, when the fluid flows in from the upstream flow path 4 and its pressure becomes higher than the pressure in the downstream flow path 5, the fluid in the upstream flow path 4 is not shown in FIGS. The central part of the check diaphragm 9 is pressed upward by pressure and separated from the valve seat 8, the upstream flow path 4 and the downstream flow path 5 communicate with each other, and the upstream flow path 4 and the downstream flow The fluid flows to the passage 5.

Here, even if the pressure of the downstream flow path 5 becomes higher than the pressure of the upstream flow path 4 due to the backflow of the fluid to the downstream flow path 5 due to some trouble, the fluid is not used for the check. It flows between the check diaphragm 9 and the opening / closing diaphragm 10 through the arc-shaped hole 11 in the outer peripheral portion of the diaphragm 9, and acts on the central portion of the check diaphragm 9 from the opposite side of the upstream flow path 4. Therefore, the non-return diaphragm 9 is held in a closed state in which the non-return diaphragm 9 is pressed against the valve seat 8 by the fluid pressure of the downstream flow path 5. Therefore, it is possible to prevent the fluid from flowing backward from the downstream flow path 5 to the upstream flow path 4.

When the supply of the compressed air to the air cylinder 15 is stopped from the above state and the air supply port 38 for the compressed air is opened to the atmosphere, the piston 29 and the piston rod 30 are pushed by the urging force of the compression spring 37 as described above. , 31 advance downward. Along with this, the holding piece 14 is advanced as shown in FIG. 3 to press the opening / closing diaphragm 10, and the check diaphragm 9 and the opening / closing diaphragm 1 are pressed.
0 can be pressed against the valve seat 8 to keep the upstream flow path 4 and the downstream flow path 5 shut off.

Although the illustrated fluid control valve is of a normally closed type, it may be of a normally open type. In this case, the piston 29 and the piston rods 30 and 31 are retracted upward by a compression spring, and the piston 29 and the piston rods 30 and 31 are advanced downward by the supply of compressed air against the elasticity of the compression spring. What is necessary is just to comprise.

As another example of the non-return diaphragm 9, as shown in FIGS. 5A and 5B, a disk-shaped one can be used. The other configuration of the check diaphragm 9 is the same as that of the check diaphragm 9. By using the check diaphragm 9, the opening and closing diaphragm 10 is separated from the check diaphragm 9 as shown in FIGS. When the fluid flows into the flow path 4 and its pressure becomes higher than the pressure in the downstream flow path 5, the fluid flowing into the upstream flow path 4 presses the central portion of the check diaphragm 9, and the check is stopped. The diaphragm 9 can pass through the valve diaphragm 9 at a distance from the valve seat 8 and flow out to the downstream flow path 5.

In this state, if a fluid flows into the downstream flow path 5 due to a trouble or the like, the pressure in the downstream flow path 5 becomes higher than the pressure in the upstream flow path 4, and the check diaphragm 9
Since the check diaphragm 9 is elastically deformed and pressed against the valve seat 8 by its own elastic force even if the outer peripheral portion is pressed by the fluid in the downstream flow path 5, Although the central portion of the check diaphragm 9 is elastically restored, the central portion is still pressed against the valve seat 8, that is, the upstream channel 4 and the downstream channel 5 are kept in a disconnected state. Therefore, if the pressure difference is within this range, it is possible to prevent the fluid from flowing back from the downstream flow path 5 to the upstream flow path 4.

As still another example of the check diaphragm 9, as shown in FIGS. 6A and 6B, the inner diameter of the valve seat 8 A hole 44 having a diameter substantially equal to or smaller than the inner diameter of the valve seat 8 can be used. The other configuration of the check diaphragm 9 is the same as that of the check diaphragm 9. The non-return diaphragm 9 is used such that the upstream and downstream directions of the flow paths 4 and 5 shown in FIGS. 1 and 2 are reversed. That is, the flow path 5 is used as the upstream side (primary side), and the flow path 4 is used as the downstream side (secondary side). The opening / closing diaphragm 10 is shown in FIG.
As shown in FIG. 2, in a state in which the non-return diaphragm 9 is separated from the non-return diaphragm 9 and released from the pressing, the pressure of the upstream channel 5 becomes higher than the pressure of the downstream channel 4. The fluid that has flowed into the upstream flow path 5 presses the outer peripheral portion of the check diaphragm 9, passes the check diaphragm 9 away from the valve seat 8, and flows out to the downstream flow path 4. it can.

In this state, even if the pressure of the downstream flow path 4 becomes higher than the pressure of the upstream flow path 5 due to the flow of the fluid into the downstream flow path 4 due to a trouble or the like, the fluid does not flow through the check diaphragm. 9 flows into the space between the check diaphragm 9 and the opening / closing diaphragm 10 through the hole 44 at the central portion of the filter 9 and acts on the outer peripheral surface of the check diaphragm 9 from the side opposite to the upstream flow path 5. The stop diaphragm 9 is the valve seat 8
, That is, in a state where the upstream flow path 5 and the downstream flow path 4 are shut off. Therefore, it is possible to prevent the fluid from flowing backward from the downstream flow path 4 to the upstream flow path 5.

Next, a second embodiment of the present invention will be described. 7 and 8 show a fluid control valve according to a second embodiment of the present invention. FIG. 7 is a longitudinal sectional view showing a state where the flow path can be communicated, and FIG. 8 is a longitudinal sectional view showing a state where the flow path is shut off. It is.

In the first embodiment, the opening / closing means 13 for opening / closing the opening / closing diaphragm 10 is of an automatic type, whereas in this embodiment, it is of a manual type. In the present embodiment, the configuration of the opening / closing means 13 is different from that of the first embodiment, and the other configuration is the same. The following mainly describes different configurations.

A female screw 47 formed on the connection tube 46 of the case 45 is screwed to the male screw 23 of the cylindrical portion 3 of the valve body 1, and a support plate 48 provided inside the intermediate portion of the connection tube 46.
The annular protrusion 25 of the bonnet 12 is pressed by this. A female screw 51 formed on the lower inner periphery of the main body 50 of the case 45 is attached to a male screw 49 formed on the upper outer periphery of the connection cylinder 46.
Is screwed. A female screw 54 formed on the inner circumference of the cover 53 of the case 45 is screwed to a male screw 52 formed on the outer circumference of the upper end of the case body 50. A holder 56 is attached to the hole 55 of the cover 53.

In this embodiment, as a member for opening and closing the opening and closing diaphragm 10, a holding piece 1 for pressing the opening and closing diaphragm 10 or releasing it from the pressed state.
4 and an advancing / retreating member 57 capable of pressing the holding piece 14 or releasing the pressing state, and the advancing / retreating member 57 includes a pressing member 58 and a connecting member 59. Pressing member 5
Reference numeral 8 includes a shaft portion 60 on the distal end side, a large-diameter portion 61 on the intermediate portion, and a connecting portion 62 on the base side. A central hole 63 in the support plate 48 of the connection cylinder 46 has a shaft 6
0 is supported so as to be movable in the axial direction in the inserted state.
Is in contact with the base end surface of the holding piece 14. An O-ring 64 is formed in an annular groove formed on the outer periphery of the shaft portion 60.
The O-ring 64 is pressed against the inner peripheral surface of the hole 63 of the support plate 48 to be sealed. The distal end of the connecting member 59 is rotatably connected to the base connecting portion 62 of the pressing member 58 by a pin 65. Pressing member 58
A compression spring 67 is interposed between a large-diameter portion 61 at an intermediate portion and a spring receiver 66 protruding from the inner periphery of the upper end of the case main body 50. The sheet is pressed toward the sheet 8.

The holder 56 has a hole 68 in which one opposing surface is an arc surface and the opposing surfaces sandwiching the arc surface are substantially parallel planes. The manual lever 69 is formed in a hollow shape, and the outside of the engagement portion 70 on the distal end side is
The engaging portion 70 is rotatably inserted into the hole 68 of the holder 56, and the two are rotated by a rotating shaft 71 at a rotation center portion, which is perpendicular to the flat surface side. It is rotatably connected. The rotation shaft 71 is arranged so that its axis is located on a line passing through the axis of the shaft portion 60 and the axis of the pin 65. The base of the connecting member 59 is inserted inside the engaging portion 70 of the manual lever 69, and the engaging portion 70 of the manual lever 69 is inserted into the base of the connecting member 59.
Is rotatably connected to the eccentric position by a shaft 72 disposed so that the axis is parallel to the rotation shaft 71 at a position shifted laterally from the axis of the manual lever 69.

When the manual lever 69 rotates about the rotation shaft 71, the rotation of the shaft 7
2 moves eccentrically, and the connecting member 59 and the pressing member 58, that is, the reciprocating member 57, can move up and down a short distance via the shaft 72. When the advance / retreat member 57 advances downward, the holding piece 14 can advance downward to press the opening / closing diaphragm 10.
Conversely, when the advancing / retreating member 57 moves backward, the pressed state of the holding piece 14 can be released. When the reciprocating member 57 is retracted upward or advanced downward, the axis of the shaft 72 at the eccentric position is deviated in any direction from a line connecting the axis of the pin 65 and the axis of the rotating shaft 71 to maintain a stable state. It is supposed to be.

A female screw 73 is formed inside the base side of the manual lever 69, and a screw 74 for locking the manual lever 69 and the advance / retreat member 57 is screwed into the female screw 73 so as to be able to advance and retreat. The proximal end of the connecting member 59 of the reciprocating member 57 is formed in an arc shape, and an engagement recess 75 for opening and an engagement recess 76 for pressing are cut out in two places of the arc portion. Then, by advancing the lock screw 74 at the retracted position (open position) above the reciprocating member 57, the engaging projection 77 at the tip thereof is engaged with the opening engaging concave portion 75 of the connecting member 59, and When the lock screw 74 is retracted, the engagement projection 77 at the tip thereof is disengaged from the release engagement concave portion 75 and the locked state is released. By advancing the lock screw 74 at the downwardly advanced position (pressing position) of the reciprocating member 57, the engaging projection 77 at the tip thereof is engaged with the engaging recess 76 for pressing of the connecting member 59, and in this state. When the lock screw 74 is locked and retracted, the engagement projection 77 at the tip thereof is disengaged from the engagement recess 75 for pressing, and the locked state is released.

The operation of the above configuration will be described below. As shown in FIG. 8, the advancing / retreating member 57 and the holding piece 14 are advanced downward, the opening / closing diaphragm 10 and the check diaphragm 9 are pressed against the valve seat 8, and the upstream side flow path 4 and the downstream side flow path 5, the locking screw 74 is first rotated to retract upward, and the engaging projection 77 at the tip thereof is connected to the connecting member 59.
From the engaging recess 76 for pressing. Next, FIG.
As shown in FIG. 7, the manual lever 69 and the like are rotated about the rotation shaft 71 with respect to the holder 56. With the rotation of the manual lever 69 and the like, the advance / retreat member 57 is pulled up (retracted) via the shaft 72 at the eccentric position against the urging force of the compression spring 67. As a result, the opening / closing diaphragm 10 is released from the pressing force of the holding piece 14, is separated from the check diaphragm 9 by its own restoring force, and releases the pressed state of the check diaphragm 9.

In this state, the axis of the shaft 72 is slightly shifted laterally from a line passing through the axis of the pin 65 and the axis of the rotating shaft 71, so that the manual lever 69 is temporarily maintained in a stable state.
It may be activated by careless contact. Then, the lock screw 74 is advanced to the inside of the manual lever 69, and the engaging projection 77 at the tip thereof is
5, the manual lever 69, the reciprocating member 5
7 can be locked in the open position of the opening and closing diaphragm 10 so as not to operate.

Therefore, similarly to the first embodiment, the check diaphragm 9 is pressed by the fluid pressure to be separated from the valve seat 8 so that the fluid flows from the upstream flow path 4 to the downstream flow path 5. When the pressure in the downstream flow path 5 increases, the reverse flow of the fluid can be prevented by the check diaphragm 9.

In the state shown in FIG. 7, first, the lock screw 74 of the manual lever 69 is rotated in the reverse direction to retreat upward, and the engaging projection 77 at the tip thereof is engaged with the release engaging recess 75 of the connecting member 59. Remove from Next, in this state, as shown in FIG. 8, the manual lever 69 and the like are rotated about the rotation shaft 71 in the opposite direction with respect to the holder 56. With the rotation of the manual lever 69 and the like, the advance / retreat member 57 is pushed down (moved forward) together with the urging force of the compression spring 67 via the shaft 72 at the eccentric position. As a result, the opening / closing diaphragm 10 is pressed by the holding piece 14 to press the check diaphragm 9 against the valve seat 8.

In this state, the axis of the shaft 72 is shifted laterally from a line passing through the axis of the pin 65 and the axis of the rotary shaft 71,
Although the manual lever 69 is maintained in a stable state for the time being, there is a possibility that the manual lever 69 may be activated due to careless contact. Therefore, the lock screw 74 is advanced to the inside of the manual lever 69, and the engagement projection 77 at the tip of the lock screw 74 is engaged with the engagement recess 76 for pressing of the connecting member 59, so that the manual lever 69 and the advance / retreat member 57 It can be locked at the closed position of the opening / closing diaphragm 10 and the check diaphragm 9 so as not to operate.
Therefore, similarly to the first embodiment, it is possible to keep the upstream flow path 4 and the downstream flow path 5 in a shut off state.

In the second embodiment, similarly to the first embodiment, when the check diaphragm 9 shown in FIGS. 6A and 6B is used, the flow path 5 Is used as the upstream side (primary side), and the flow path 4 is used as the downstream side (secondary side). Further, the non-return diaphragm 9 is not limited to the shape and the like in the above-described embodiment, but may adopt various shapes and the like. The opening / closing means 13 is not limited to the above-described embodiment, as well as being of an automatic type or a manual type, and various types can be adopted. Furthermore, the fluid control valve of the present invention can also be used when opening / closing and checking the flow paths 4 and 5 from a vacuum state in the flow paths 4 and 5. In addition, the present invention
Various design changes can be made without departing from the basic technical concept.

[0046]

As described above, according to the present invention, an opening / closing diaphragm and a check diaphragm are provided, and the check diaphragm is pressed against the valve seat by the opening / closing diaphragm pressed by the opening / closing means. The upstream flow path and the downstream flow path can be shut off, and the opening / closing diaphragm is released by the opening / closing means, elastically restored to release the check diaphragm from the pressed state, so that the upstream flow path can be shut off. The inflow fluid pressure pushes the non-return diaphragm away from the valve seat, allowing the upstream flow path and the downstream flow path to communicate with each other, allowing the outflow to flow. When the pressure becomes higher than the pressure in the flow path, the check diaphragm can be held in pressure contact with the valve seat to prevent the fluid from flowing back from the downstream flow path to the upstream flow path. That. In this way, the flow path length can be shortened by combining the opening and closing function of the flow path and the check function in one place. Therefore, the entire fluid control device,
Alternatively, the size of the entire fluid piping system can be reduced, and the fluid replacement characteristics and the flow path resistance can be improved. In addition, since the on-off valve and the check valve are configured as a single unit, the number of assembly steps in the fluid control device or the fluid piping path can be reduced. Therefore, the efficiency of the assembly operation can be improved. Further, the opening / closing function and the check function can be combined with a simple configuration in which one component, that is, a check diaphragm is added to the conventional on-off valve. Therefore, cost reduction can be achieved.

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional view showing a fluid control valve according to a first embodiment of the present invention, in a state where a flow path can be communicated.

FIG. 2 is an enlarged view of part II of FIG. 1 showing the fluid control valve.

FIG. 3 is an enlarged view showing the same fluid control valve as in FIG. 2 in a state where a flow path is shut off.

FIGS. 4A and 4B are a plan view and a central cross-sectional view, respectively, showing an example of a check diaphragm used in the fluid control valve.

FIGS. 5 (a) and 5 (b) are a plan view and a central sectional view showing another example of the check diaphragm used for the fluid control valve, respectively.

FIGS. 6A and 6B are a plan view and a center sectional view showing still another example of a check diaphragm used in the fluid control valve, respectively.

FIG. 7 is a longitudinal sectional view showing a fluid control valve according to a second embodiment of the present invention, in a state where a flow path can be communicated.

FIG. 8 is a vertical sectional view showing the same fluid control valve and in a state where a flow path is blocked.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Valve main body 4 Inflow channel 5 Outflow channel 8 Valve seat 9 Check diaphragm 10 Opening / closing diaphragm 13 Opening / closing means 14 Pressing piece 15 Air cylinder 29 Piston 30 Piston rod 31 Piston rod 57 Advance / retreat member 69 Manual lever

Claims (8)

[Claims] A first flow path having an upstream side and a downstream side flow path of the fluid, and having at the center one of openings for communicating the upstream side flow path and the downstream side flow path; A valve body having the other at the side and having a valve seat around the end of the opening at the center, and the upstream flow path and the downstream flow being pressed against the valve seat by its own elastic force. Can be cut off from the road,
By the pressure of the upstream flow path being higher than the pressure of the downstream flow path, the upstream flow path and the downstream flow path can be elastically deformed and separated from the valve seat to communicate with each other. When the pressure in the downstream flow path is higher than the pressure in the upstream flow path, a check diaphragm provided so as to be able to be maintained in a shut-off state in pressure contact with the valve seat is pressed. Thereby, it is possible to hold the upstream flow path and the downstream flow path in a closed state by elastically deforming the check diaphragm and pressing the check diaphragm against the valve seat,
By being released from the pressing state, an opening / closing diaphragm provided so that the check diaphragm can be released from the pressing state by its own restoring elasticity, and pressing the opening / closing diaphragm toward the valve seat side. Or a switching valve for releasing from a pressed state. 2. An opening / closing means is connected to a valve body, is provided with a cylinder member to which fluid is supplied or discharged, and is provided so as to be expandable and contractable with respect to the cylinder member, and presses or opens or closes a diaphragm for opening and closing. The fluid control valve according to claim 1, further comprising: an opening / closing member for releasing the opening / closing member; and a spring for urging the opening / closing member in a direction opposite to a pressure direction of a fluid supplied into the cylinder member. 3. A holding piece that allows the opening / closing member to press the opening / closing diaphragm or release the pressing diaphragm,
3. A piston according to claim 2, further comprising: a piston movably provided in the cylinder member along the axial direction; and a piston rod provided integrally with the piston and capable of pressing the holding piece or releasing the holding piece. Fluid control valve. 4. An opening / closing means provided in a case connected to the valve main body, and in the case and in the valve main body so as to be able to advance and retreat, for pressing the opening / closing diaphragm or releasing the opening / closing diaphragm from the pressed state. A spring for urging the opening / closing member in the pressing direction of the opening / closing diaphragm, and a rotatable support for the case, and a direction against the urging direction of the opening / closing member along with the rotation, 2. The fluid control valve according to claim 1, further comprising: a manual lever connected to the opening / closing member so as to move the spring in a biasing direction of the spring. 5. A holding piece, wherein the opening / closing member presses the opening / closing diaphragm or releases the pressing state from the pressed state.
5. The fluid control valve according to claim 4, further comprising an advance / retreat member that is provided so as to be able to advance and retreat with rotation of the manual lever, and that can press the holding piece or release the pressing state. 6. The fluid control valve according to claim 1, wherein the check diaphragm is formed on the disk so as to have holes at a plurality of positions located on the outer peripheral side of the valve seat. 7. The fluid control valve according to claim 1, wherein the check diaphragm is formed in a disk shape. 8. The fluid control valve according to claim 1, wherein the check diaphragm is formed at the center of the disk so as to have a hole located on the inner peripheral side of the valve seat.