KR102198044B1 - High-pressure automatic diaphragm valve - Google Patents

Abstract

Since the pressure to pressurize the valve body is high, high pressure automatic NC diaphragm valves that always have a large load on the valve seat enable storage while maintaining the valve's performance until use and high pressure for long-term storage. For automatic diaphragm valves. In the diaphragm valve for closing the valve by pressing the diaphragm by a piston mechanism inside the actuator installed in the body, a fixed-side locking portion is formed in the casing of the actuator, and a movable-side locking portion is formed at an appropriate position of the piston mechanism. , When the piston mechanism is moved to the release side in the upward direction, the fixed-side locking portion and the movable-side locking portion are matched, and the fixed-side locking portion is movable by a holding member inserted from the outside of the casing. It was set as the structure to catch the side locking part.

Description

High pressure automatic diaphragm valve {HIGH-PRESSURE AUTOMATIC DIAPHRAGM VALVE}

The present invention relates to an automatic NC (normally closed) diaphragm valve for high pressure that enables storage in a state while maintaining the valve performance without impairing the performance of the valve at all during use or until replacement.

In the semiconductor manufacturing process, various special gases such as flammable explosiveness, decomposition explosiveness, corrosiveness and toxicity, such as phosphine, arsine, silane, and the like are used. In general, such a special material gas is filled in a gas cylinder at a high pressure of 100 atm or more at a pressure of several tens of atmospheres, the gas cylinder is installed in a sealed clean room, and is supplied to a semiconductor manufacturing apparatus through a valve arranged in the middle of a pipe, or Exhausted from the device.

In recent years, with the high integration of semiconductor substrates, high-speed and miniaturization of semiconductor devices has been remarkably progressed, and accordingly, a silicon wafer serving as a base is also required to be of high purity and high quality. Remarkably high precision is also required for the flow control precision of a special gas fluid.

In this way, high displacement precision is required for the precision of the valve body movement of the valve as a fluid control device installed in the semiconductor manufacturing process. In particular, the valve seat, which is a member physically directly related to the distance control, is It is necessary to keep it in high quality.

On the other hand, in the semiconductor manufacturing process, the valve is liable to deteriorate due to the influence of a corrosive fluid or the like, and the life is liable to be shortened. When the dead space in which gas inside the valve body inside the valve body tends to stay increases, when a high pressure, high concentration, for example, fluorine gas is introduced into the valve chamber, the temperature in the valve chamber is likely to rise due to adiabatic compression. When the temperature in the valve chamber rises, surface corrosion in the valve chamber or deterioration of the resin material tends to occur. As a result, the product due to surface corrosion adheres to the inside of the valve chamber (especially the valve seat), and the product due to corrosion is the cause, the airtight form is poor, and leakage is liable, so that the quality of the valve is reduced. It will deteriorate. In addition, highly corrosive gases containing halogens such as fluorine gas are liable to cause surface corrosion inside the valve chamber, so the generated corrosives adhere to the valve seat surface and deteriorate the valve seat, impairing the flow control function. It is the main cause of letting go.

In this way, the life of the valve used in the semiconductor manufacturing process is shortened, and in order to maintain the high precision flow rate control capability as described above, it is necessary to frequently replace the valve with a new valve.

Therefore, it is necessary for the manufacturing manager or the user to store the new valve in stock for a long period for replacement.

Here, when the NC (normally closed type) diaphragm valve is used for high-pressure fluid, in order to secure a high sealing characteristic for high-pressure fluid such as corrosive fluid, the valve in the normally closed state is In some cases, the pressing force for pressing the valve body is increased by constantly applying a pressing load to the valve seat by the valve body by an external force.

For example, in the shut-off valve of Patent Document 1, a spring unit is installed in the housing, and the spring force of the spring unit presses the diaphragm against the valve seat in a normal time to block fluid, while pressure air in the pressure chamber. When is introduced, the shut-off diaphragm is separated from the valve seat by resisting the spring force of the spring unit to open the valve seat. In this shut-off valve, each spring unit is constituted by a plurality of springs, and springs adjacent to each other of the spring units are provided in the opposite direction.

Further, it is known that a spring-equipped NC-type diaphragm valve is provided with a means for maintaining a constant valve opening. For example, in the valve of Patent Document 2, a manual operating device capable of manually releasing the flow path of a pneumatically operated controller for the purpose of use and maintaining the degree of opening for a long time. Etc. are disclosed. In Patent Document 3, a forced valve opening device and the like that are provided for use by forcibly opening a normally closed valve are disclosed.

Japanese Patent No. 2749527 Japanese Laid-Open Patent Publication No. Hei 11-311365 Japanese Unexamined Patent Publication No. 2002-195448

In the NC-type diaphragm, as in Patent Document 1, when the diaphragm is pressed in the direction in which the diaphragm is seated by applying an external force such as a spring, the valve seat pressed through the diaphragm by a piston during long-term inventory or storage is always A large load is continuously applied, and a phenomenon in which the valve seat is damaged by the load occurs. In particular, in a valve that drives a valve body with a boosting mechanism, the pressure of the drive source is multiplied by several times, so that such a phenomenon remarkably occurs.

Damage to the valve seat caused in this way directly results in increasing the valve stroke. Therefore, in accordance with the increased valve stroke, the pressure of the valve body of the piston against the valve seat can be reduced. If the pressure of the piston can be reduced, the pressure to maintain airtightness is reduced, and by controlling the displacement of the valve body against a high pressure fluid, the flow control capability of the valve to realize high-precision flow control is sufficiently achieved. It becomes impossible to exert. As a result, the automatic NC diaphragm valve for high-pressure fluid stored for a long period of time cannot exhibit the required flow rate control ability from the start of use as a new product, and there is a problem that the usable period is shortened.

When using such a deteriorated valve with high flow control capability, it is impossible to maintain the quality of semiconductor products that require high precision quality, reducing the yield and deteriorating production efficiency, so solving this problem is very important. It is an assignment.

In this valve, the springs adjacent to each other of the spring unit are installed in the opposite direction, but the reason is not disclosed or suggested, and a strong pressing force applied to the diaphragm and the valve seat can be avoided by employing such a spring mounting structure. There is not.

On the other hand , in Patent Literature 2, a specific structured operation part provided with a fixed part of a specific structure installed on the upper end of the shaft and a cutout that can be inserted into the extension rod of the fixed part. It is provided for use in a state in which a mechanism to be formed is required, and the flow path is forcibly released. Therefore, not only cannot be applied to a high pressure valve, but as a device that opens the valve for the purpose of use, there is no idea or suggestion that maintains performance until use.

In Patent Document 3, the mechanism for opening the valve requires a mechanism consisting of a manual valve opening jig having a specific structure and a constant valve closing having a specific structure corresponding thereto. It is provided for use in the state of being forcibly liberated. Therefore, not only cannot it be applied to a high pressure valve, but there is no idea or suggestion that maintains performance until use.

The present invention has been made to solve the above problems, and the object of the present invention is to use a high pressure automatic NC diaphragm valve in which a large load is always placed on the valve seat, since the pressure to press the valve body is high. It is to provide an automatic NC diaphragm valve for high pressure that enables storage while maintaining the performance of the G valve and can be stored for a long time.

In order to achieve the above object, the invention according to claim 1 is a diaphragm valve in which a diaphragm is pressed against a valve seat installed in a body to close the valve, wherein the diaphragm is pressed by a piston mechanism in an actuator installed in the body. Alternatively, when the pressure is released and a fixed-side locking portion is formed in the casing of the actuator, and a movable-side locking portion is formed in an appropriate position of the piston mechanism, and the piston mechanism is moved to the release side in the upward direction, the fixed side The locking part and the movable-side locking part are matched, and the fixed-side locking part and the movable-side locking part are caught by a holding member inserted from the outer side of the casing, thereby enabling long-term storage without applying a load to the valve seat. It is a high-pressure automatic diaphragm valve characterized in that when the valve is used, the holding member is separated from the outer side of the casing to enable the valve to be used.

In the invention according to claim 2, the piston mechanism supplies air to move the piston upwardly to deform and move the diaphragm upward by magnetic force, and at the same time, when fully closed, the booster mechanism It is a high-pressure automatic diaphragm valve according to claim 1, which has a structure in which a load is applied to the lower side by means of an elastic force of a spring through the cylinder, and prevents the piston mechanism from being lowered by the holding member when the piston is moved upward.

The invention according to claim 3, wherein air is supplied to the piston mechanism, and the piston is moved to a top dead center to match the position of the locking groove, which is the movable-side locking part, to the locking hole, which is the fixed-side locking part, and A high-pressure automatic diaphragm valve according to claim 1 or 2 in which a retaining pin, which is a retaining member, is inserted from the outside, and the retaining pin is pulled out from the outside when in use to enable a valve.

In the invention according to claim 4, the position of the movable-side locking portion, the semicircular locking groove or the locking hole, is matched to the two locking holes, which are fixed-side locking parts, and a retaining pin, which is a holding member, is inserted from the outside into the matching locking hole In this case, it is the high-pressure automatic diaphragm valve according to claim 1 or 2 in which the holding pin is removed from the outside to enable the valve to be used.

The invention according to claim 5 is a diaphragm valve in which a diaphragm is pressed against a valve seat installed in a body to close the valve, wherein the diaphragm is pressed or released by a piston mechanism in an actuator installed on the body. At the same time, when a lifting body that moves up and down in association with the reciprocating movement of the piston in the vertical direction is installed in the piston mechanism, and the lifting body is moved from the outside of the actuator casing to the release side in the upward direction, the bottom surface side of the lifting body By installing a retaining member so that it can be inserted into the gap created in the gap, and by placing the retaining member on the bottom of the lifting body when moving to the release side of the lifting body, it enables long-term storage without placing a load on the valve seat, and when using the valve. It is an automatic diaphragm valve for high pressure in which the holding member is removed from the outside of the casing to enable the valve to be used.

In the invention according to claim 6, the piston is moved downward by supplying air to the piston mechanism, and the diaphragm is deformed and moved upward by magnetic force, and at the same time, when fully closed, by the elastic force of the spring. When the piston is moved upward, the lifting body is moved downward through the boosting mechanism to apply a load. When the piston is moved downward, the lifting member of the piston mechanism is prevented from descending. It is an automatic diaphragm valve for high pressure.

In the invention according to claim 7, when air is supplied to the piston mechanism and the piston is moved to the bottom dead center, between the bottom surface of the elevator body and the fixed side abutting surface that abuts when the bottom surface is fully closed through the boosting mechanism. For high pressure use of the valve by forming a gap and inserting a retaining pin, which is a retaining member, from the insertion hole formed in the casing, and in use, grabbing the bend formed at the outer end of the retaining pin and pulling it out from the outside of the casing. It is an automatic diaphragm valve.

The invention according to claim 8 is a high-pressure automatic diaphragm valve in which two springs are provided in the piston so that the piston is elastically repelled upward, and the winding directions of these springs are reversed.

Therefore, according to the present invention, while the high pressure NC valve is stored for a long period of time, it is provided with a structure that can be easily prevented from being pressurized by a high pressure piston to the valve seat and can be easily released. It can be stored for a long time while maintaining its performance until the use of the NC valve for use, and at the same time, the user can inventory and manage the stored parts without worrying about performance degradation due to storage. Since can be released, in the event of a valve failure, the user has the effect of being able to immediately replace the stored valve and make it usable.

1 is a cross-sectional view showing a first embodiment of an automatic diaphragm valve for high pressure of the present invention.
FIG. 2 is a cross-sectional view showing a valve closed state in FIG. 1.
3 is a cross-sectional view showing a second embodiment of the high-pressure automatic diaphragm valve of the present invention.
4 is a plan view of FIG. 3.
5 is a cross-sectional view showing a third embodiment of the high-pressure automatic diaphragm valve of the present invention.
6 is a plan view in FIG. 5.
Fig. 7 is a partially cut-away cross-sectional view showing a main part of the fourth embodiment of the high-pressure automatic diaphragm valve of the present invention.
8 is a plan view of FIG. 7.
9 is a partially cut-away cross-sectional view showing a main part of a fifth embodiment of the automatic diaphragm valve for high pressure of the present invention.
10 is a plan view in FIG. 9.
11 is a cross-sectional view showing a sixth embodiment of the high-pressure automatic diaphragm valve of the present invention.
12 is a cross-sectional view showing a valve closed state of the diaphragm valve of FIG. 11.
13 is a cross-sectional view taken along line A-A of FIG. 11.
14 is a schematic plan view showing the mounting state of the holding member.

Hereinafter, an embodiment of the high-pressure automatic diaphragm valve in the present invention will be described in detail with reference to the drawings. As an automatic diaphragm valve for high pressure of the present invention in this embodiment, Figs. 1 and 2 show a first embodiment, Figs. 3 and 4 show a second embodiment, and Figs. 5 and 6 show a third embodiment. Respectively.

In the first embodiment of the present invention shown in Figs. 1 and 2, the actuator for a valve (hereinafter referred to as an actuator) 1a is a casing 2a and a base body 3 fitted to the casing 2a. A fixed disk surface (8) comprising a body (4) having a body (4), and a tapered surface (6) having a tapered surface (5) and a tapered surface formed on the fixing disk (7). ), and a boosting mechanism 10 having a ball 9 as a moving member. In addition, the actuator 1a is provided with a valve-driving output shaft portion 11 and a disk 12, and the actuator 1a enables the diaphragm 13 to be pressed.

The actuator 1a is a structure in which the thrust member 16 closes the diaphragm 13 by the elastic force of the spring 15 mounted on the rear surface of the piston 14, and the thrust force of the spring 15 It is configured as a normally closed type pneumatic actuator having a structure that expands and outputs the power to the output shaft 11 by the boosting mechanism 10.

The boosting mechanism 10 is a mechanism for increasing the force by which the spring 15 presses the diaphragm 13 through the thrust member 16. In this boosting mechanism 10, a plurality of balls 9 are provided in the ball mounting portion 17 on the surface of the disk 12, which is installed inside the tapered surface 6 and installed above the output shaft 11 The balls 9 are arranged and configured by being sandwiched between the fixed disk surface 8 and the tapered surface 6. The casing 2a and the base body 3 are screwed in a sealed state and integrated as the actuator 1a. The balls 9 are made of, for example, a steel ball, and a plurality of balls are arranged inside the boosting mechanism 10. The number of balls 9 may be appropriate, but it is preferable to provide at least 3 or more, for example, about 8 to 12. In this case, the output shaft portion 11 and the fixed disk 7 are in a stable state.

The fixed disk 7 is fixed to the upper part of the actuator 1a via the shaft 19. At this time, the fixing disk 7 is disposed so as to face the output shaft portion 11 by screwing the male screw portion 20 formed on the shaft 19 and the female screw portion 21 formed on the cover 22. With this screw mounting structure, the shaft 19 can be moved up and down to adjust its position, and the position of the fixed disk 7 can be adjusted.

Inside the shaft 19, an intake/exhaust port 23 for communicating the outside of the actuator 1a and between the thrust member 16 and the base body 3 is formed. Compressed air can be supplied into the air operation chamber 25 between the piston 14 and the cylinder 24 from the outside of the actuator 1a through this intake and exhaust port 23. In addition, the air in the air operation chamber is also exhausted from the intake and exhaust ports 23.

The thrust member 16 is formed in a substantially cylindrical shape, and this one thrust member 16 is accommodated in the casing 2a so as to reciprocate, and an O-ring 27 is attached to the inner and outer circumferential sides. The thrust member 16 is one stage in this example, but may be multiple stages.

The output shaft portion 11 is installed above the diaphragm piece 29, and the diaphragm piece 29 is installed to directly contact and drive the diaphragm 13 of the valve 30 mounted on the actuator 1a. have. A disk 12 is provided on the side of the output shaft portion 11 facing the fixed disk 7, and a ball mounting portion 17 is formed on the surface of the disk 12. A shaft portion 31 is formed in the lower portion of the output shaft portion 11, and the shaft portion 31 is inserted into the mounting hole 32 formed in the base body 3, whereby the output shaft portion 11 ) The whole can be driven with respect to the base body (3). A coil spring 33 is attached between the output shaft portion 11 and the base body 3. The output shaft portion 11 is urged upwardly in FIG. 1 by a coil spring 33. An O-ring 34 is attached to the outer periphery of the shaft part 31, and the space between the shaft part 31 and the base body 3 is sealed by the O-ring 34.

In the base body 3, as described above, a mounting hole 32 into which the shaft portion 31 of the output shaft portion 11 can be inserted is formed, and by the mounting hole 32, the output shaft portion 11 is vertically Is guided by. A male threaded portion 35 is formed on the outer periphery of the casing side of the base body 3, and the male threaded portion 35 is sealed and sealed through the female threaded portion 36 and the sealing member 37 formed in the casing 2a. It is screwed and joined. A male screw 38 is formed on the valve mounting side of the base body 3, and the actuator 1a is attached and detached from the valve 30 through the male screw 38.

The valve 30 is a diaphragm valve, and the structure shown in FIGS. 1, 2, 3, and 5 is an example. This valve 30 includes a valve case 41 having a primary side flow path 39, a secondary side flow path 40, a diaphragm 13, a valve seat 42, a diaphragm piece 29, and a bonnet 43. Have. The diaphragm 13 is installed at a predetermined position of the valve case 41, and a diaphragm piece 29 as a pressure member for pressurization is mounted on its upper part by a bonnet 43 so as to be able to be driven. . On the connection side of the valve 30 to the actuator 1a, a male screw 38 and a female screw 44 that can be screwed are formed, and by screwing the female screw 44 and the male screw 38, there is a boosting mechanism 10 inside. The actuator (1a) and the valve (30) incorporating) can be attached and detached.

The diaphragm piece 29 is driven by the output of the output shaft 11 of the actuator 1a in the axial direction. By driving the diaphragm piece 29, the diaphragm 13 is brought close to and spaced apart from the valve seat 42, and the primary side flow path 39 and the secondary side flow path 40 can be opened and closed. In the high-pressure valve, the force by which the diaphragm piece 29 presses the valve seat 42 ranges from about 2000 N to about 10000 N depending on the size of the valve.

In this example, at an appropriate position on the outer circumferential surface of the driving force member 16, a locking groove 45a having a semicircular cross-section as the movable locking portion 45 is formed, and the actuator 1a is The casing 2a has a locking hole 46a as the fixing-side locking part 46, so that the positions of the locking groove 45a and the locking hole 46a coincide when the driving force member 16 is in the locking position. Installed. 1 shows a state in which two fixing-side locking portions 46 are provided and one holding pin 47a is inserted in any one place, but two may be inserted on both sides for more stabilization. Further, after forming a plurality of the locking holes 46a in the casing 2a, a plurality of retaining pins 47a may be inserted to hold the propulsion member 16.

Further, the movable-side locking portion 45 can also be a locking hole 45a (not shown). The locking hole 45a is a hole formed on the outer circumferential surface of the driving force member 16 in the centripetal direction of the cylindrical actuator 1a, and is provided in the casing 2a of the actuator 1a. ), the locking hole 46a is installed so that the positions of the locking hole 45a and the locking hole 46a coincide when the driving force member 16 is in the locking position. In this case, although not shown, the propulsion member 16 is provided with an appropriate rotation preventing means for preventing the positions of the locking hole 46a and the locking hole 45a from being shifted in the circumferential direction by the action of the force in the rotational direction to rotate. It is desirable to install.

In this example, the locking groove 45a is formed as a groove cut off the outer circumferential surface of the driving force member 16, and the distal end 56 of the holding pin 47a as the holding member 47 is , Through the locking hole (46a), it can be fitted to the locking groove (45a) detachably (着脫) possible. In addition, the locking hole 45a is formed as a hole cut in the centripetal direction of the cylindrical actuator 1a on the outer circumferential side surface of the driving force member 16, and the distal end of the holding pin 47a as the holding member 47 ( 56) can be fitted detachably into the locking hole 45a by penetrating through the locking hole portion 46a.

The position of the locking groove 45a or the locking hole 45a formed in the driving force member 16 may be a position that does not interfere with the driving of the driving force member 16 or the function of the valve, and positions other than the driving force member 16 Even, depending on the implementation, it can take any position.

The locking position of the thrust member 16 can take any position as long as the thrust member 16 presses the valve seat 42 via the diaphragm 13. However, it is preferable that the locking position is a top dead center, which is the maximum displacement position of the piston.

The position of the locking hole 46a as the fixed-side locking part 46 is on the outer peripheral side of the casing 2a with respect to the position corresponding to the position of the locking groove 45a at the locking position of the thrust member 16 described above. It is installed on the side.

The retaining pin 47a includes a handle portion 55 held by an operator by hand, and a tip portion 56 inserted into the locking hole portion 46a of the casing 2a, which is the fixed-side locking portion 46.

Next, based on Figs. 1 and 2, in the first embodiment, the retaining pin 47a is inserted and the movable side engaging portion 45 of the piston 14 is fixed to the casing 2a. An operation of engaging the locking part 46 and an operation of releasing the locking will be described.

In this example, as an example of the drive source of the thrust member 16, an air drive source comprising an air operation chamber 25 and an intake/exhaust port 23 is provided. When compressed air is supplied from the intake and exhaust ports 23 formed in the shaft 19, the supplied compressed air flows into the air operation chamber 25 through the branch opening 48, whereby the air operation chamber ( 25) The internal air pressure rises and is superior to the pressing force by the spring 15, and the piston 14 is pushed up in the upward direction to release the pressure of the diaphragm 13.

Since the propulsion member 16 has a structure to be driven in conjunction with the piston 14, the propulsion member 16 also moves upward and moves in conjunction with the upward movement of the piston 14 on the release side. The locking groove 45a, which is the side locking part 45, and the locking hole 46a, which is the fixed-side locking part 46, are stopped at the same locking position. As described above, this locking position is the position of the top dead center of the propulsion member 16, and is preferably this position.

When the thrust member 16 moves upward, the downward pressure pressing the diaphragm 13 against the disk 12 through the balls 9 of the thrust member 16 disappears, and the coil spring 33 The disk 12 is pressed in the upward direction by the upward pressing force by. Therefore, in conjunction with the upward movement of the thrust member 16, the output shaft 11 integral with the disk 12 also moves upward, so that the pressing pressure to the diaphragm 13 by the diaphragm piece 29 Disappears.

When the diaphragm piece 29 is spaced apart from the diaphragm 13, the diaphragm 13 deforms and moves upward by its own reaction force, and becomes the shape of a ball spaced apart from the valve seat 42. This shape is a shape when the diaphragm 13 is mounted inside the valve chamber and no external force is acting on it. When the diaphragm 13 is in this shape, the separation distance between the diaphragm 13 and the valve seat 42 is about 0.3 mm to 0.4 mm in this example.

In this way, when the driving force member 16 is stopped at the locking position and the valve is opened, the locking groove 45a formed in the driving force member 16 as the movable-side locking portion 45, and the fixed-side locking portion 46 The positions of the locking holes 46a formed in the casing 2a are aligned with each other. In this state, the distal end 56 of the retaining pin 47a, which is a retaining member, is inserted from the outer side of the casing 2a in the centripetal direction of the cylindrical actuator 1a, penetrates the engaging hole 46a, and the engaging groove 45a By engaging with each other, the driving force member 16 as the movable member and the casing 2a as the fixed member can be engaged with each other. Fig. 1 shows a state in which the holding pin 47a is inserted in this way, and the driving force member 16 is caught in the locking position.

After the thrust member 16 is engaged, the air supplied to the air operation chamber 25 is exhausted. The air exhaust from the air operation chamber 25 is exhausted from the intake/exhaust port 23 through the inside of the shaft 19 from the branch port 48 formed in the shaft 19, contrary to the case of air supply described above. When the air is exhausted, the air pressure inside the air operation chamber 25 disappears, and the pressing force in the direction of pressing the diaphragm 13 by the spring 15 acts on the propulsion member 16, but the aforementioned retaining pin 47a Since the thrust member 16 is caught in the casing 2a by insertion of ), the diaphragm 13 is prevented from pressing the valve seat 42.

Subsequently, in this example in which the holding pin 47a is inserted and the driving force member 16 is hooked as described above, in order to release the locking of the driving force member 16, the holding pin 47a is separated from the outside. You can do it. When the handle portion 55 of the holding pin 47a is grabbed by hand and removed from the casing 2a, the locking force member 16 is released from the casing 2a.

In this case, as described above, before the holding pin 47a is pulled out to release the locking force member, a predetermined amount of air is supplied to the air operation chamber 25 in advance to give air pressure and the pressing force by the spring 15 is weakened. By doing so, it is also possible to reliably pull out the holding pin 47a from the outside.

When the locking is released, the piston 14 is pressed and driven in the direction of pressing the diaphragm 13 by the pressing force of the spring 15, and the driving force member 16 is also driven in connection therewith, and the ball 9 is driven. Through this, the output shaft portion 11 for driving the valve is also driven, and the diaphragm piece 29 presses the diaphragm 13 to be pressed against the valve seat 42, and the valve is in a closed state shown in FIG. 2. In this way, the use of the valve 30 is started.

In the case of the present example, since the handle portion 55 of the holding pin 47a protrudes in a vertical direction with respect to the surface of the casing 2a, it is easy to perform a pull-out or insertion operation by the operator's hand.

3 shows a second embodiment of the present invention. In the second embodiment, the same parts as in the first embodiment are denoted by the same reference numerals, and descriptions of the following embodiments are omitted.

In this example, at an appropriate position on the outer circumferential surface of the driving force member 16, a locking groove 45a having a semicircular cross section as the movable-side locking portion 45 is formed, and the casing 2a of the actuator 1a Here, as the fixed-side locking portions 46, two locking hole portions 46b are formed in a pair of opposite positions, and two sets of the pair are formed. When the driving force member 16 is in the locking position, the positions of the locking grooves 45a and the locking holes 46b of the two sets match. In Figs. 3 and 4, the fixing-side locking portion 46 has two locking hole portions 46b installed at four locations, and one holding pin 47b is inserted into one of the locking hole portions 46b on the other side. ), but for more stabilization, two can be inserted into both jaws and penetrated.

In this example, the locking groove 45a is formed as a groove cut out around the outer peripheral side surface of the driving force member 16, and the distal end 56 of the holding pin 47b as the holding member 47 is a pair of It penetrates one side of the locking hole portion 46b of, and enters while engaging with the driving force member 16 along the locking groove 45a, and protrudes through the locking hole 46b on the other side. According to this example, the contact area between the holding pin 47b and the thrust member 16 is larger than the contact area in the first embodiment, as shown in FIG. 4. In addition, since the retaining pin 47b is held in a state penetrating through the casing 2 and the two locking holes 46b, compared to the locking of the driving force member 16 in the first embodiment, the driving force The holding of the member 16 can be made more stable and solid.

In this example, the locking groove 45a is formed as a groove cut out around the outer circumferential side surface of the driving force member 16, and the distal end 56 of the holding pin 47b as the holding member 47 is a set of Through both sides of the locking hole 46b, it can be detachably engaged with the locking groove 45a.

The position of the locking groove 45a formed in the driving force member 16 may be a position that does not interfere with the driving of the driving force member 16 or the function of the valve, and even at positions other than the driving force member 16, depending on implementation, It can take any position.

The locking position of the thrust member 16 can take any position as long as the thrust member 16 presses the valve seat through the diaphragm 13. However, it is preferable that the locking position is a top dead center, which is the maximum displacement position of the piston.

The position of the locking hole 46b as the fixed-side locking part 46 is on the outer peripheral side of the casing 2a with respect to the position corresponding to the position of the locking groove 45a at the locking position of the thrust member 16 described above. Formed on cotton.

In this example, an operation of inserting the retaining pin 47b to engage the movable-side locking portion 45 of the propulsion member 16 to the fixed-side locking portion 46 of the casing 2a and the operation of releasing the locking are: It is the same as in the first embodiment described above.

5 shows a third embodiment of the present invention. Also in this example, the same parts as in the first embodiment are denoted by the same reference numerals, and descriptions of the following embodiments are omitted.

In this example, at an appropriate position on the outer circumferential side of the thrust member 16, as the movable-side locking portion 45, a hole drilled in a straight line in a direction other than the centripetal direction of the cylindrical actuator 1a (45c) is formed, and in the casing (2a) of the actuator (1a), a locking hole (46c) as a locking-side locking part (46) is provided, and in the case of a hole through which the locking hole (45c) is drilled, one place, the locking. In the case of a hole through which the hole 45c is penetrated, a pair of holes are formed in two opposite positions. When the driving force member 16 is brought into the locking position, the opening 50 of the locking hole 45c and the position of the locking hole 46c of the one or one set coincide. In Figs. 5 and 6, one locking hole 45c, which is a through hole, is provided to form a set of locking hole 46c, and one holding pin 47c is inserted to insert the driving force member 16 and the casing. It shows the state which penetrates 2a).

In the case where the locking hole 45c is a hole, the tip portion 56 of the holding pin 47c penetrates the locking hole 46c and can be fitted detachably with the holding pin 47c. When the locking hole 45c is a through hole, the tip 56 of the holding pin 47c penetrates one of the set of locking holes 46c and is detachably fitted with the holding pin 47c. It is possible. In this case, the distal end 56 may be further penetrated from the other side of the locking hole 46c to protrude outward, and the distal end 56 of the new retaining pin may be passed through the other side of the locking hole 46c without penetrating, The retaining pin 47c may be fitted detachably with the locking hole 45c.

In addition, two or more of the locking holes 45c may be formed, and a plurality of the locking holes 46c may be formed in correspondence therewith, and a plurality of retaining pins 47c may be used.

In addition, in this example, the propulsion member 16 is not shown, but a proper rotation to prevent the position of the locking hole 46c and the locking hole 45c from being shifted in the circumferential direction by the action of the force in the rotational direction to rotate. It is desirable to provide preventive means.

In this example, since the distal end 56 of the retaining pin 47c is inserted or penetrated into the engaging hole 45c of the thrust member 16, the contact area between the retaining pin 47c and the thrust member 16 is second Since the contact area in the embodiment is larger than the contact area in the second embodiment, the holding of the propulsion member 16 can be made more stable and robust compared to the engagement of the propulsion member 16 in the second embodiment. In particular, when the tip end of the retaining pin 47c penetrates the thrust member 16, the effect is large.

The position of the locking hole 45c formed in the driving force member 16 may be a position that does not interfere with the driving of the driving force member 16 or the function of the valve. Even at a position other than the driving force member 16, depending on implementation, It can take any position.

The propelling force member 16 engaging position can take an arbitrary position as long as the propelling force member 16 presses the valve seat 42 via the diaphragm 13. However, it is preferable that the locking position is a top dead center, which is the maximum displacement position of the piston.

The position of the locking hole portion 46c as the fixed-side locking portion 46 is the casing (with respect to a position corresponding to the position of the opening portion 50 of the locking hole 45c at the locking position of the driving force member 16 described above) It is installed on the outer peripheral side of 2a).

In this example, the operation of inserting the retaining pin 47c to fasten the movable-side locking portion 45 of the thrust member 16 to the fixed-side locking portion 46 of the casing 2a, and the operation of releasing the locking, It is the same as in the first embodiment described above.

7 and 8 show a fourth embodiment, and Figs. 9 and 10 show a fifth embodiment. These embodiments are embodiments of an automatic diaphragm valve for high pressure in which the present invention is applied to an actuator 1b having a structure different from that of the above embodiment.

7 shows a fourth embodiment of the present invention. The left side of the center vertical line in FIG. 7 shows a state in which the retaining pin is inserted and the piston is engaged, and the right side of the center vertical line shows the state in which the retaining pin is pulled out and the piston is released.

The actuator 1b has a spring 15 installed in the casing 2b to pressurize the piston 14 to be driven, and, as in the above embodiment, presses the piston 14 in a downward direction to press the valve chain diaphragm. Are doing.

In this example, in the appropriate position of the piston 14, two locking holes 45d as the movable-side locking portions 45 are formed in a pair of opposite positions, and the casing 2b of the actuator 1b In the fixing side locking part 46, when the locking hole 46d is formed in a pair of opposite positions, and when the driving force member 16 is in the locking position, the locking hole 45d and the locking Install so that the position of the study (46d) matches. In FIG. 7, two fixed-side locking portions 46 are provided in this example, and one holding pin 47d, which is a holding member 47, is inserted into one of the fixing-side locking portions 46, but the piston 14 is not locked. In order to be more stable, two retaining pins 47d may be inserted into the fixing-side locking portions 46 on both sides.

In this example, as in the first embodiment described above, when the position of the piston 14 is in the locking position, the distal end 56 of the retaining pin 47d, which is a retaining member, is cylindrically positioned outside the casing 2b. By inserting in the centripetal direction of the actuator 1b, passing through the locking hole 46d and fitting into the locking hole 45d, the piston 14 as the movable member and the casing 2b as the fixing member can be caught together. do. Fig. 8 shows a state in which two retaining pins 47d are inserted in this way, and the piston 14 is caught in the locking position. Further, in order to release the locking of the piston 14, the retaining pin 47d may be removed from the outside. When the handle portion 55 of the retaining pin 47d is grabbed by hand and removed from the casing 2b, the locking of the piston 14 to the casing 2b is released.

The position of the locking hole 45d formed in the piston 14 may be a position that does not interfere with the driving of the piston 14 or the function of the valve. Even at a position other than the piston 14, depending on implementation, an arbitrary position Can take.

The locking position of the piston 14 can be any position, as long as the piston 14 presses the valve seat through the diaphragm. However, it is preferable that the locking position is a top dead center, which is the maximum displacement position of the piston.

The position of the locking hole 46d as the fixed-side locking part 46 is the casing 2b with respect to a position corresponding to the position of the opening 50 of the locking hole 45d at the locking position of the piston 14 described above. It is installed on the outer peripheral side of ).

According to this example, since the piston 14 is held by two retaining pins as shown in FIG. 8, the same as in the case of the first embodiment in which one retaining pin 47a and the thrust member 16 are held. In comparison, since the pressing force of the piston applied to the retaining pin can be dispersed and maintained in a good balance, the shape of the piston 14 or the casing 2b can be more stably held for a long time without damage. In addition, since two retaining pins 47d are provided, even if one of the retaining pins is accidentally deviated from one side, the piston 14 can be retained with one retaining pin on the other side.

9 shows a fifth embodiment. The left side of the center vertical line shows the state in which the retaining pin 54 is inserted and the piston 52 is engaged, and the right side of the center vertical line shows the state in which the retaining pin 54 is pulled out and the piston 52 is released. In this example, the same parts as those in the fourth embodiment are denoted by the same reference numerals, and explanations are omitted.

In this example, at an appropriate position of the piston 14, as the movable-side locking portion 45, a locking groove 45e in which the outer peripheral side surface of the piston 14 is cut in a semicircular shape is formed, and the actuator 1b In the casing 2b, two locking hole portions 46e are provided as a fixed-side locking portion 46 in a pair of opposing positions, and two pairs of the locking hole portions 46e are formed, and the piston 14 is moved to the locking position. When it is, the position of the locking groove 45e and the locking hole 46e are formed to match. In Fig. 9, two sets of fixing-side locking portions 46 are provided in this example, and one holding pin 47e, which is a holding member 47, is inserted into one of the fixing-side locking portions 46, but the piston 14 is not locked. In order to be more stable, two retaining pins 47e may be inserted into the fixed-side locking portions 46 on both sides.

In this example as well as in the second embodiment described above, when the position of the piston 14 is in the locking position, the distal end 56 of the retaining pin 47e as a retaining member is inserted into the casing 2b, By passing through the locking hole 46e and engaging the locking groove 45e, the piston 14 as the movable member and the casing 2b as the fixing member can be engaged with each other. Fig. 10 shows a state in which two retaining pins 47e are inserted in this way, and the piston 14 is caught in the locking position. Further, in order to release the locking of the piston 14, the retaining pin 47e may be removed from the outside. When the handle portion 55 of the retaining pin 47e is grabbed by hand and removed from the casing 2b, the locking of the piston 14 to the casing 2b is released.

The position of the locking hole 45e formed in the piston 14 may be a position that does not interfere with the driving of the piston 14 or the function of the valve, and even at a position other than the piston 14, depending on implementation, an arbitrary position Can take.

The locking position of the piston 14 can be any position, as long as the piston 14 presses the valve seat through the diaphragm. However, it is preferable that the locking position is a top dead center, which is the maximum displacement position of the piston.

The position of the locking hole 46e as the fixed-side locking part 46 is the outer peripheral surface of the casing 2b with respect to the position corresponding to the position of the locking groove 45e at the locking position of the piston 14 described above. Is installed in

According to this embodiment, as shown in Fig. 10, the piston 14 is held by two retaining pins, so the second and third implementations of holding the thrust member 16 with one retaining pin 47b, 47c Compared with the case of the shape, since the pressing force of the piston applied to the holding pin can be dispersed and maintained in a good balance, the shape of the piston 14 or the casing 2b is more stable and long-term without damage. You can take it. In addition, since two retaining pins 47e are provided, even if one of the retaining pins is accidentally deviated from one side, the other retaining pin can keep the piston 14 engaged.

11 and 12 show a sixth embodiment of the high pressure automatic diaphragm valve of the present invention, and Figs. 11A and 12A are longitudinal sectional views of the diaphragm valve in this embodiment. 11(b) and 12(b) are vertical central cross-sectional views of the actuators in FIGS. 11(a) and 12(a), partially omitted.

The actuator 60 for valves in this embodiment has a piston mechanism 61 and a boosting mechanism 62 inside.

The piston mechanism 61 has a casing 70 formed in a substantially cylindrical shape, and a substantially cylindrical piston 71 that can be inserted into the casing 70, and an O-ring 72 is placed in the casing 70. Through the piston 71 is inserted, the piston 71 is installed so as to reciprocate while sliding in the casing 70 by intake and exhaust from the intake and exhaust ports 23 installed on the casing 70. An opening 73 is formed in the lower portion of the casing 70, and a female screw 74 and an annular locking step 75 are formed in the opening 73. The casing 70 is provided so that the case 76 and the base 77 can be attached through the opening 73. Further, a cap 78 is mounted on the base 77, and the valve body 79 is mounted through the cap 78.

The boosting mechanism 62 has a piston 71, a lifting body 80, a cam 81, a spring 82, a roller 83, an output shaft portion 84, and a lifting body 80, a cam 81 ), the spring 82, and the upper portion of the output shaft portion 84 are mounted on the mounting case 76, and the lifting body 80 is installed so as to move up and down in the case 76. The roller 83 is mounted on the piston 71 and, as will be described later, is installed to operate the cam 81 in conjunction with the reciprocating movement of the piston 71 while using the so-called lever principle. Through such a boosting mechanism 62, the diaphragm valve is configured to close the valve by pressing the diaphragm 13 against the valve seat 42 by the diaphragm piece 29 according to the operation of the piston mechanism 61. Has been.

In the boosting mechanism 62, as shown in Fig. 13, the case 76 is formed in a substantially disk shape, and is mounted on the upper surface of the base 77 rather than the opening 73 of the casing 70, and the engaging step It is installed so as to be able to be attached to the casing 70 in the state of being attached to the part 75. In the radial direction of the disk-shaped case 76, a straight groove portion 90 for mounting the lifting body 80 and the cam 81 is formed, and the bottom portion at both ends of the groove portion 90 in the longitudinal direction In this, the communication hole 91 penetrates through the outer circumferential surface and is provided.

As shown in Fig. 14, in the communication hole 91, a holding member 93 made of a holding pin is inserted so as to be inserted through an insertion hole 92 formed through the casing 70. The retaining pin 93 is provided with a length that allows the bottom surface 80a of the lifting body 80 to contact when inserted into the insertion hole 92, and as shown in FIG. 11(a), the retaining pin ( A bent portion 94 that can be held by a finger is formed on the outer end side of 93).

In the center of the groove portion 90 of the case 76, a through hole 95 capable of inserting the upper end of the output shaft portion 84 is formed, and near both sides of the groove portion 90, the groove portion 90 Two communication holes 96 are formed in communication with the outer circumferential surface in a direction orthogonal to and. A pin member 97 is inserted into each communication hole 96, and the pin member 97 is a stop pin inserted in a direction crossing each communication hole 96 from the upper surface side of the case 76 Both ends are positioned by 98, and are inserted and mounted in the communication hole 96 in a state of preventing separation.

At a position perpendicular to the groove portion 90 in the radial direction of the case 76, a bottomed hole 99 into which the spring 82 can be inserted is formed in two opposite positions, and the bottomed hole 99 One side of the spring 82 is inserted.

The elevating body 80 is provided in a substantially rectangular shape by metal such as alloy tool steel, and is inserted into the central position of the groove portion 90. In Fig. 11, the bottom surface side of the lifting body 80 is formed in a mountain shape with the center as a top portion 80b, and an output shaft portion 84 inserted through the through hole 95 in the top portion 80b. The tip of the is touching. As will be described later, the lifting body 80 is mounted so as to move vertically in conjunction with the reciprocating movement of the piston mechanism 61 in the vertical direction, and is provided so as to move the output shaft portion 84 vertically by this vertical movement.

In Figures 11 (a) and 12 (a), the cam 81 is formed in an approximately L-shape, the mounting hole 100 on the mounting side to the case 76, the mounting hole 100 A locking piece 101 capable of engaging the roller 83 is installed on the other end side of the. The two cams 81 and 81 are mounted symmetrically to the center of the case 76 so as to be inserted into the groove 90 from the top of the lifting body 80, and the pin member in the mounting hole 100 97 is inserted into the groove portion 90 to prevent separation, and is provided so as to be rotatable with respect to the case 76 by the pin member 97. On the side of the elevating body 80 of the cam 81, a locking concave portion 102 is formed in which the corner portions of the upper both ends of the elevating member 80 are caught, and the locking concave portion 102 and the elevating member 80 are formed. Due to the locking, the range is regulated according to the rotation of the cam 81, and the lifting body 80 is moved up and down.

In Fig. 14, the spring 82 has one side inserted into the bottomed hole 99 of the case 76, as described above, while the other end of the spring 82 is shown in Fig. 11(b). ), as shown in Fig. 12(b), abuts against the bottom surface side of the piston 71 formed in a substantially cylindrical shape. Thereby, the spring 82 is disposed at two places in the piston 71, and is provided so as to urge the piston 71 upward in the figure when the compressed air is exhausted from the piston mechanism 61.

Each of the springs 82 and 82 is provided with a right-hand winding and a left-hand winding, and thus mutual winding directions are formed in opposite directions.

The rollers 83 shown in FIG. 14 are installed in two horizontal directions at the engaging positions with the cam 81 in the piston 71 of FIG. 11, and according to the reciprocating movement of the piston 71, the piston 71 It moves up and down integrally. When the roller 83 is rotatably mounted with respect to the piston 71, the locking piece 101 of the cam 81 is caught, and when the roller 83 is moved, when the piston 71 is reciprocated. The frictional resistance with the cam 81 is reduced.

The output shaft portion 84 is provided between the lifting body 80 and the diaphragm piece 29, and is elastically pressed upward in FIG. 11 by a coil spring 33. Thereby, when the above-described lifting body 80 is pressed toward the cam 81 from the downward direction, and the lifting body 80 is lifted and moved by the rotational motion of the cam 81, the output shaft portion ( 84) is also installed to be able to move up and down. At this time, when the output shaft portion 84 is moved upward due to the raising operation of the lifting body 80, the diaphragm piece 29 also moves upward so that the diaphragm 13 is in the valve open state. When the lifting body 80 moves downward and the output shaft portion 84 moves downward, the diaphragm 13 is deformed into the valve open state by the downward movement of the diaphragm piece 29. At this time, since the bottom surface (80a) side of the lifting body (80) is formed in a mountain shape, the output shaft portion (84) is moved up and down while being careful by the bottom surface (80a) side, and the diaphragm When 13 is pressed evenly, it is uniformly sealed to the valve seat 42. Thereby, the sealing characteristic at the time of valve closing is improved.

In the boosting mechanism 62 of FIG. 11, when compressed air is supplied to the piston mechanism 61 to move the piston 71 downward, the outer peripheral surface of the roller 83 is moved downward by the roller 83 The two cams 81, 81, which are urged by the coil spring 33 along the way, rotate in an outward direction, that is, in a direction to relieve the pressure of the lifting body 80, and the lifting body 80 Move upward. As a result, the output shaft portion 84 and the diaphragm piece 29 move upward, and the diaphragm 13 deforms and moves upward by magnetic force.

As shown in Fig. 11, when the lifting body 80 is moved upwardly through the boosting mechanism 62 by the downward movement of the piston, the lifting body bottom surface 80a side and the bottom surface 80a A gap G is formed between the fixed side abutting surface 105 of the case 76 abutting when) is fully closed. This clearance G becomes maximum when the piston 71 is moved to the bottom dead center, and in this state, the retaining pin 93 can be inserted from the insertion hole 92 from the outside of the casing 70. By inserting the retaining pin 93 from the insertion hole 92 in this state, it becomes possible to attach the retaining pin 93 to the bottom surface 80a of the lifting body when moving to the release side of the lifting body 80. . At this time, since the bottom surface 80a of the elevator body is inclined toward the center, the holding pin 93 is guided by this inclination, and can be easily inserted.

As described above, in the closed state of the diaphragm valve, the output shaft portion 84 and the diaphragm piece 29 are fastened by the holding pin 93 when the lifting body 80 is moved to the release side. ) Is moved upward and the diaphragm 13 is deformed upward by magnetic force, so that the non-contact state of the diaphragm 13 and the valve seat 42 can be maintained. Therefore, even when the supply of air is stopped after the retaining pin 93 is inserted, the gap G is secured, thereby preventing the diaphragm 13 from contacting the valve seat 42. Therefore, abrasion or deterioration of the diaphragm 13 is prevented, and long-term storage without applying a load to the valve seat 42 is possible.

On the other hand, when using the diaphragm valve, it is sufficient to hold the bent portion 94 of the outer end of the retaining pin 93 and pull it out from the outside of the casing 70. As shown in FIG. 12, the retaining pin 93 When the lock is released, the lifting body 80 moves downward, and when the valve is normally closed, it is an automatic NC type diaphragm valve for high pressure to prevent leakage of corrosive fluids, etc. Even when (13) is operated and fine flow control is performed, a predetermined flow path can be secured.

Since the boosting mechanism 62 using the lifting body 80 is provided in this way, in the actuator of this embodiment, when the piston 71 is moved downward by supplying air, the lifting body 80 is lifted. It is installed in a structure in which the valve is closed by pressing the elevator body 80 downward by the elastic force of the spring 82 when the valve is opened and the piston 71 is moved upward by exhausting air. Has been.

In addition, the base 77 is formed in a substantially disk shape of the same diameter as the case 76, a female screw 74 and a male screw 106 for screwing are formed on the upper outer circumference side, and the cap 78 is formed on the upper inner circumference side. Following the mounting screw 107 and the screw 107, an annular recess 108 is formed on the lower side. The base 77 is screw-mounted to the female screw 74 through the male screw 106 from the opening 73 side of the casing 70 in which the case 76 is inserted, and the case 76 ) Is positioned and fixed by the engaging step portion 75 in the casing 70. At this time, the male screw 106 formed on the outermost periphery of the base 77 and the enlarged female screw 74 formed in the casing opening 73 are screwed together to increase the fastening force, Thereby, the occurrence of rattle is prevented, the case 76 moves during manufacture of the actuator and does not generate vibration or abnormal sound, so that the sliding movement of the piston 71 is smooth.

In three places on the lower outer periphery of the base 77, the shaped threaded portions 110 are formed equally at intervals of 120°, and the set screws 111 are screwed to the shaped threaded portions 110.

The cap 78 is formed in a substantially cylindrical shape, and at the top, a male screw 112 that can be screwed to the male screw 107 of the base, and an annular convex portion that can be fitted to the annular recess 108 following the male screw 112 113 is formed, and the lower portion of the cap 78 is formed with a male threaded portion 115 that is screwed to the female threaded portion 114 formed in the valve body 79. In the center of the cap 78, an insertion hole 116 for inserting the output shaft portion 84 is formed.

In this case, it is preferable that the male screw 112 of the cap 78 and the shaped screw 107 of the base 77 are formed in a large diameter. When formed in this way, even when the driving force during actuator operation is applied to the male screw 112 and the shape screw 107, sufficient strength can be ensured, and stable operation becomes possible.

The cap 78 is fixed from the outer circumferential side of the base 77 by three set screws 111, and can be easily fixed to the base 77 by means of these set screws 111, and is rigid in three places. The cap 78 is not shaken with respect to the base 77 after fastening by being mounted while being deeply extended. In addition, since the set screw 111 is fastened from the lateral direction of the base 77, even when the diaphragm valve is attached to a pipe or the like, the pipe or the valve body 79 does not interfere, and the base 77 After the stroke adjustment is performed by adjusting the screwing state of the cap 78 to the base, they can be easily fixed by means of a set screw 111.

The boosting mechanism 62 in the diaphragm valve of this embodiment is a structure that is operated by engagement between the lifting body 80 and the cam 81, and the lifting body 80 does not lift and descend along the sliding movement. Since the retaining pin 93 is not attached to the moving part, the piston 71 does not apply a load to the piston 71, so there is no fear of scars or burrs on the outer surface of the piston 71 or the inner surface of the casing 70. . Therefore, during the sliding movement of the piston 71, the O-ring 72 is not damaged or malfunction due to scars or burrs caused by the retaining pin 93. Accordingly, it is possible to further reduce the overall weight by forming the casing 70 from a soft material such as aluminum, and even in this case, scratches or burrs are not caused by the retaining pin 93.

In the boosting mechanism 62 of Fig. 12, when the compressed air of the piston mechanism 61 is exhausted, the piston 71 moves upward by the elastic force of the spring 82, and the roller 83 moves upward. By moving to, the two cams 81 and 81 rotate in the inward direction, that is, rotate in the direction in which the lifting body 80 is moved downward and a load is applied. By the movement of the lifting body 80, the output shaft portion 84 and the diaphragm piece 29 move downward, and the diaphragm 13 seats on the valve seat 42 by the diaphragm piece 29 to close the valve. State. At this time, since the boosting mechanism 62 is a mechanism that strongly presses the lifting body 80 using the principle of a lever using a cam, the diaphragm 13 is strongly pressurized against the valve seat 42, even in the case of high-pressure fluid. Make sure to prevent leakage.

The piston 71 is provided with springs 82 that repulse upwardly in two places, and the winding directions of these springs 82 are provided in the opposite direction, so that when the spring 82 is compressed, it is wound right. The rotation of the piston 71 is prevented by the combined resistance between the and left winding. Therefore, interference with each other due to friction between the cam 81 and the groove 90 is suppressed, and even when the stroke of the piston 71 is large, rotation of the piston 71 due to distortion during compression of the spring 82 is prevented. As a result, the risk of operation failure or reduction in life due to friction between the cam 81 and the groove 90 is also avoided. In addition, since the operation of the piston 71 is performed accurately, it is possible to control the opening of the diaphragm valve with high precision.

In addition, the lifting body 80 may be one that can open and close the valve without sliding from the inside according to the vertical movement of the piston 71 operated by the supply of air, and the diaphragm valve is the elevator bottom surface 80a Anything capable of preventing the diaphragm 13 from abrasion or deterioration can be prevented by locking the retaining pin 93 from the outside to restrict the downward movement of the diaphragm piece 29. Therefore, the lifting body 80 does not necessarily have to be separate from the output shaft portion 84 or the diaphragm piece 29, and they may be provided integrally.

Further, in this embodiment, the retaining pin 93 is inserted through the insertion hole 92 formed in the casing 70, but it is inserted into the gap G formed in the floor surface 80a of the elevator body 80. As long as) can be held in the valve open state, the insertion portion may be formed in a groove shape or the like, while the holding member may be formed in a plate shape or other shape.

1a, 1b; Actuator
2a, 2b; Casing
4; Bodybuilder
10; A booster
13; Diaphragm
14; piston
15, 82; spring
16; Lack of momentum
42; Valve seat
45; Movable side locking part
45a, 45b, 45e; Jamming groove
45c, 45d; Jam hole
46; Fixed side locking part
46a, 46b, 46c, 46d, 46e; Jammed part
47; Retention absence
47a, 47b, 47c, 47d, 47e; Retaining pin
80; Lift
80a; Elevator floor
93; Retaining pin (holding member)
94; Bend
G; Gap

Claims (8)

In the diaphragm valve for closing the valve by pressing the diaphragm against a valve seat installed in a body,
The diaphragm is pressed or released by a piston mechanism in the actuator installed on the body, and at the same time, a fixed-side locking portion is formed in the casing of the actuator, and a movable-side locking portion is positioned at an appropriate position of the piston mechanism. And, when the piston mechanism is moved to the release side in the upward direction, the locking position of the fixed-side locking part and the movable-side locking part are matched, and the holding member inserted from the outside of the casing makes the By engaging the fixed-side locking part and the movable-side locking part, long-term storage is possible without applying a load to the valve seat, and when using the valve, the holding member can be separated from the outside of the casing to use the valve. And
The piston mechanism has a piston and a casing,
High pressure automatic diaphragm valve. The method of claim 1,
The piston mechanism supplies air to move the piston in an upward direction to deform and move the diaphragm upward by magnetic force, and at the same time, when fully closed, a booster having a spring ) Has a structure in which a load is applied to the lower side by the elastic force of the spring through a mechanism, and when the piston is moved upward, the piston mechanism is prevented from being lowered by the holding member, and the boosting mechanism is the piston mechanism High pressure automatic diaphragm valve mounted on the casing of the car. The method according to claim 1 or 2,
Air is supplied to the piston mechanism, and the piston is moved to the top dead center to match the position of the locking groove, which is the movable-side locking part, to the locking hole, which is the fixed-side locking part, and holding the retaining member from the outside in both of the matching holes. An automatic diaphragm valve for high pressure in which a pin is inserted and the holding pin is removed from the outside when in use to enable the valve to be used. The method according to claim 1 or 2,
Match the position of the movable-side locking part, the semicircular locking groove or the locking hole, to the two locking holes, which are the fixed-side locking parts, and insert the holding pin as a holding member from the outside into the matching locking hole. Automatic diaphragm valve for high pressure, which is pulled out from and made the valve available. In the diaphragm valve for closing the valve by pressing the diaphragm to a valve seat installed in the body,
The diaphragm is pressurized or released by a piston mechanism in the actuator installed on the body, and an elevating body that moves up and down in association with the reciprocating movement of the piston in the vertical direction is provided in the piston mechanism. From the outside of the casing, when the lifting body is moved to the release side in the upward direction, a retaining member can be inserted into the gap formed on the bottom surface side of the lifting body, and when the lifting body is moved to the release side, the lifting body By placing the holding member on the bottom surface, long-term storage is possible without applying a load to the valve seat, and when using a valve, the holding member is separated from the outside of the casing to enable the valve to be used,
High pressure automatic diaphragm valve. The method of claim 5,
Air was supplied to the piston mechanism to move the piston downward, and the diaphragm was deformed upward by magnetic force, and at the same time, the piston was moved upward by the elastic force of the spring when fully closed. In this case, it has a structure in which a load is applied by moving the lifting body downward through a boosting mechanism provided with the spring, and when the piston is moved downward, the lifting body of the piston mechanism descends by the holding member. And the boosting mechanism is mounted on the casing of the piston mechanism. The method of claim 6,
When air is supplied to the piston mechanism and the piston is moved to the bottom dead center, a gap is formed between the bottom surface of the lifting body and the fixed side abutting surface that abuts when the bottom surface is fully closed through the boosting mechanism, and the An automatic diaphragm valve for high pressure, in which a retaining pin, which is a retaining member, is inserted into the gap from the insertion hole formed in the casing, and when in use, the bend formed at the outer end of the retaining pin is pulled out from the outside of the casing to enable the valve to be used. . The method of claim 6,
The spring is provided in two places in the piston, the piston is elastically installed in an upward direction, and the winding direction of the springs is reversed, a high pressure automatic diaphragm valve.

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