WO2015020209A1 - High-pressure automatic diaphragm valve - Google Patents
High-pressure automatic diaphragm valve Download PDFInfo
- Publication number
- WO2015020209A1 WO2015020209A1 PCT/JP2014/071079 JP2014071079W WO2015020209A1 WO 2015020209 A1 WO2015020209 A1 WO 2015020209A1 JP 2014071079 W JP2014071079 W JP 2014071079W WO 2015020209 A1 WO2015020209 A1 WO 2015020209A1
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- WIPO (PCT)
- Prior art keywords
- valve
- piston
- diaphragm
- locking
- casing
- Prior art date
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
- F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
- F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
- F16K7/17—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being actuated by fluid pressure
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
- F16K31/1221—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston one side of the piston being spring-loaded
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/16—Actuating devices; Operating means; Releasing devices actuated by fluid with a mechanism, other than pulling-or pushing-rod, between fluid motor and closure member
- F16K31/163—Actuating devices; Operating means; Releasing devices actuated by fluid with a mechanism, other than pulling-or pushing-rod, between fluid motor and closure member the fluid acting on a piston
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K35/00—Means to prevent accidental or unauthorised actuation
- F16K35/06—Means to prevent accidental or unauthorised actuation using a removable actuating or locking member, e.g. a key
Definitions
- the present invention relates to a high-pressure automatic NC (normally closed) diaphragm valve that can be stored while maintaining the valve performance without damaging the valve performance at all until use or replacement.
- NC normally closed
- various special gases such as flammable explosive, decomposition explosive, corrosive, and toxic, such as phosphine, arsine, and silane are used.
- such special material gas is filled in a gas cylinder at a high pressure of several tens of atmospheres to 100 atmospheres or more, and the gas cylinder is installed in a sealed clean room, and a semiconductor is provided through a valve disposed in the middle of the piping. It is supplied to the manufacturing apparatus or exhausted from the apparatus.
- the silicon wafer used as a base is also required to have high purity and high quality.
- the flow control accuracy of various special gas fluids as described above is required to be extremely high.
- the valve body of the valve as a fluid control device provided in the semiconductor manufacturing process requires high displacement accuracy
- the valve is a member that is physically directly related to the distance control. It is necessary to maintain a high quality seat.
- the valve is likely to deteriorate due to the influence of a corrosive fluid or the like, and the life is likely to be shortened.
- high-pressure, high-concentration, for example, fluorine gas is introduced into the valve chamber, the temperature in the valve chamber is likely to rise due to adiabatic compression.
- surface corrosion in the valve chamber and deterioration of the resin material tend to occur.
- highly corrosive gas containing halogen such as fluorine gas is likely to cause surface corrosion inside the valve valve chamber, so that the generated corrosives adhere to the valve seat surface and deteriorate the valve seat. Is the main cause of damage.
- the valve used in the semiconductor manufacturing process has a short life, and in order to maintain the high-precision flow control capability as described above, the valve must be frequently replaced with a new valve.
- NC normally closed type diaphragm valves
- an external force such as a spring is further applied to the normally closed valves.
- a pressing load applied to the valve seat by the valve body may be constantly applied to increase the pressing force for urging the valve body.
- each spring unit is constituted by a plurality of springs, and the springs adjacent to each other are provided in opposite directions.
- an NC type diaphragm valve provided with a spring which is provided with means for keeping the valve opening constant.
- the valve of Patent Document 2 discloses a manual operation device that can manually release the flow path of the pneumatically operated controller for the purpose of use and can maintain the degree of opening for a long time.
- Patent Document 3 discloses a forced valve opening device that uses a normally closed valve for forced opening.
- valve body pressing force of the piston against the valve seat is weakened according to the increased valve stroke. If the piston pressing force is weakened, the pressing force to maintain the airtightness will be reduced, and the valve flow control will realize high-precision flow control by controlling the displacement of the valve body against the high pressure fluid. The ability cannot be fully demonstrated. As a result, the automatic NC diaphragm valve for high-pressure fluid stored for a long time has a problem that it cannot exhibit the required flow rate control capability from the start of use as a new product, and the usable period is shortened.
- the springs adjacent to each other in the spring unit are provided in opposite directions, but the reason for this is not disclosed or suggested, and a strong attachment to the diaphragm and valve seat is achieved by using such a spring mounting structure. It is not possible to avoid the pressing force.
- Patent Document 2 there is a need for a mechanism including a fixed part having a specific structure provided at the upper end of the shaft and an operation part having a specific structure provided with a notch that can be inserted into an extending rod of the fixed part. In addition, it is used in a state where the flow path is forcibly released. Therefore, it is not only applicable to a high-pressure valve, but is a device that opens for the purpose of use, and there is no idea or suggestion to maintain performance until use.
- Patent Document 3 a mechanism for opening the valve requires a mechanism consisting of a manual valve opening jig having a specific structure and a normally closed valve having a specific structure corresponding thereto, and, similarly to Patent Document 2, It is used in a state where the flow path is forcibly released. Therefore, it cannot be applied to a high-pressure valve, and there is no idea or suggestion to maintain performance until use.
- the present invention has been made to solve the above-described problems, and the object of the present invention is to provide a high-pressure automatic NC diaphragm in which a large load is always applied to the valve seat due to a high pressing force for urging the valve body.
- An object of the present invention is to provide a high-pressure automatic NC diaphragm valve that can be stored while maintaining the performance of the valve until it is used, and can be stored for a long time.
- the invention according to claim 1 is a diaphragm valve that presses a diaphragm against a valve seat provided in the body and closes the diaphragm, and the diaphragm is moved by a piston mechanism in an actuator provided in the body. While pressing or releasing the pressure, a fixed side locking portion is provided in the casing of the actuator, and a movable side locking portion is provided at an appropriate position of the piston mechanism, and the piston mechanism is moved to the upward release side.
- the fixed-side locking portion and the movable-side locking portion are engaged with each other by a holding member inserted from the outside of the casing so that the locking positions of the fixed-side locking portion and the movable-side locking portion coincide with each other. It can be stored for a long time without applying a load to the valve seat, and the valve can be used by removing the holding member from the outside of the casing when using the valve.
- a high-pressure automatic diaphragm valve characterized in that the.
- the piston mechanism supplies air and moves the piston upward to deform and move the diaphragm upward by itself, and when fully closed, the piston mechanism springs through the booster mechanism.
- the holding mechanism prevents the piston mechanism from being lowered by the holding member when the piston is moved upward.
- the air is supplied to the piston mechanism, the piston is moved to the top dead center, and the locking groove which is the movable side locking portion is inserted into the locking hole which is the fixed side locking portion.
- the high pressure according to claim 1 or 2 wherein the positions of the two are matched, a holding pin that is a holding member is inserted into both of the matched holes from the outside, and the valve can be used by extracting the holding pin from the outside during use. It is an automatic diaphragm valve.
- the positions of the semicircular locking grooves or the locking holes as the movable side locking portions are made to coincide with the two locking holes as the fixed side locking portions, and the locking holes are aligned.
- the high-pressure automatic diaphragm valve according to claim 1 or 2 wherein a holding pin which is a holding member is inserted into the blind hole portion from outside and the valve can be used by using the holding pin extracted from the outside during use.
- the invention according to claim 5 is a diaphragm valve that presses the diaphragm against a valve seat seat provided in the body and closes the valve, and presses or releases the diaphragm by a piston mechanism in an actuator provided in the body,
- the piston mechanism is provided with a lifting body that moves up and down in conjunction with the reciprocation of the piston in the vertical direction, and the bottom side of this lifting body when the lifting body is moved upward from the outside of the actuator casing.
- the holding member can be inserted into the gap generated in the valve, and the holding member is locked to the bottom surface of the lifting body when the lifting body is moved to the release side, enabling long-term storage without applying a load to the valve seat.
- This is a high-pressure automatic diaphragm valve that can be used by extracting the holding member from the outside of the casing.
- air is supplied to the piston mechanism to move the piston downward, the diaphragm is deformed upward by itself, and the piston is lifted by the elastic force of the spring when fully closed.
- the lifting mechanism of the piston mechanism is lowered by the holding member when the piston is moved downward. It is an automatic diaphragm valve for high pressure that is prevented.
- the invention according to claim 7 is a fixed-side contact in which the bottom surface of the lifting body and the bottom surface come into contact with each other through the booster mechanism when air is supplied to the piston mechanism and the piston is moved to the bottom dead center.
- a gap is provided between the holding pin and a holding pin, which is a holding member, from an insertion hole formed in the casing, and the bent portion formed at the outer end of the holding pin is picked from the outside of the casing when used. It is an automatic diaphragm valve for high pressure that can be extracted and used.
- the invention according to claim 8 is a high-pressure automatic diaphragm valve in which two springs are provided in the piston so that the piston can be repelled upward, and the winding directions of the springs are opposite to each other.
- the high pressure NC valve is stored for a long period of time, it is possible to easily prevent the pressure applied to the valve seat by the piston with a high biasing force and to provide a structure that can be easily released.
- the high-pressure NC valve can be stored for a long time while maintaining its performance until it is used, and the user can manage the inventory of stored parts without worrying about performance deterioration due to storage, so it is easy to use Since the prevention structure can be released, in the unlikely event that the valve breaks down, the user can immediately replace the stored valve so that it can be used.
- FIG. 10 is a plan view of FIG. 9. It is sectional drawing which showed 6th Embodiment of the automatic diaphragm valve for high pressures of this invention. It is sectional drawing which showed the valve closed state of the diaphragm valve of FIG.
- FIG. 12 is a cross-sectional view taken along the line AA in FIG. It is the schematic plan view which showed the mounting state of the holding member.
- FIG. 1 and FIG. 2 show the first embodiment
- FIG. 3 and FIG. 4 show the second embodiment
- FIG. 5 and FIG. 6 show the third embodiment of the high-pressure automatic diaphragm valve of the present invention in this embodiment. Show.
- a valve actuator (hereinafter referred to as an actuator) 1a includes a body 4 having a casing 2a and a base body 3 for covering the casing 2a.
- a booster mechanism having a tapered surface portion 6 formed with a tapered surface portion 5, a fixed disk surface 8 formed of a tapered surface formed on the fixed disk 7, and a ball 9 as a moving member. 10 is provided.
- the actuator 1a is provided with a valve drive output shaft portion 11 and a disc 12, and the diaphragm 13 can be pressed by the actuator 1a.
- the actuator 1 a has a structure in which the thrust member 16 closes the diaphragm 13 by the elastic force of the spring 15 attached to the back surface of the piston 14, and the thrust of the spring 15 is expanded to the output shaft portion 11 by the booster mechanism 10. It is configured as a normally closed type pneumatic actuator with a structure that outputs in the same manner.
- the booster mechanism 10 is a mechanism for expanding the force with which the spring 15 presses the diaphragm 13 via the thrust member 16.
- a plurality of balls 9 are disposed on a ball mounting portion 17 on the surface of the disk 12 provided on the inside of the tapered surface portion surface 6 and provided on the upper portion of the output shaft portion 11.
- the ball 9 is sandwiched between the fixed disk surface 8 and the tapered surface portion 6.
- the casing 2a and the base body 3 are screwed in a sealed state and integrated as an actuator 1a.
- the balls 9 are made of, for example, steel balls, and a plurality of balls 9 are arranged inside the booster mechanism 10.
- the number of balls 9 may be an appropriate number, but it is preferable to provide at least 3 balls, for example, about 8 to 12 balls. In this case, the output shaft portion 11 and the fixed disk 7 are in a stable state.
- the fixed disk 7 is fixed to the upper part of the actuator 1 a through the shaft 19. At that time, the fixed disk 7 is disposed so as to face the output shaft portion 11 by screwing the male screw portion 20 formed on the shaft 19 and the female screw portion 21 formed on the cover 22. With this screwing structure, the shaft 19 can be moved up and down to adjust its position, and the position of the fixed disk 7 can be adjusted.
- an intake / exhaust port 23 that communicates between the outside of the actuator 1 a and the thrust member 16 and the base body 3 is formed. Compressed air can be supplied into the air operation chamber 25 between the piston 14 and the cylinder 24 from the outside of the actuator 1 a via the intake / exhaust port 23. Further, the air in the air operation chamber is also exhausted from the intake / exhaust port 23.
- the thrust member 16 is formed in a substantially cylindrical shape, and this one thrust member 16 is accommodated in the casing 2a so as to be reciprocally movable, and an O-ring 27 is mounted on the inner and outer peripheral sides.
- the thrust member 16 has one stage in this example, but may have a plurality of stages.
- the output shaft portion 11 is disposed on the upper portion of the diaphragm piece 29, and the diaphragm piece 29 is provided to directly contact and drive the diaphragm 13 of the valve 30 attached to the actuator 1a.
- a disk 12 is provided on the opposite side of the output shaft portion 11 to the fixed disk 7, and a ball mounting portion 17 is formed on the surface of the disk 12.
- a shaft portion 31 is formed in the lower portion of the output shaft portion 11, and this shaft portion 31 is inserted into a mounting hole 32 formed in the base body 3, whereby the output shaft portion 11 as a whole is connected to the base body 3. And can be driven freely.
- a coil spring 33 is mounted between the output shaft portion 11 and the base body 3.
- the output shaft portion 11 is elastically biased upward by a coil spring 33 in FIG.
- An O-ring 34 is attached to the outer periphery of the shaft portion 31, and the space between the shaft portion 31 and the base body 3 is sealed by the O-ring 34.
- the base body 3 has the mounting hole 32 into which the shaft portion 31 of the output shaft portion 11 can be inserted, and the output shaft portion 11 is guided in the vertical direction by the mounting hole 32.
- a male screw part 35 is formed on the casing side outer periphery of the base body 3, and this male screw part 35 is screwed and joined via a female screw part 36 formed in the casing 2 a and a seal member 37 so as to be hermetically sealed.
- a male screw 38 is formed on the valve mounting side of the base body 3, and the actuator 1 a is attached to and detached from the valve 30 through the male screw 38.
- the valve 30 is a diaphragm valve, and the structures shown in FIGS. 1, 2, 3, and 5 are examples.
- the valve 30 includes a valve box 41 having a primary flow path 39 and a secondary flow path 40, a diaphragm 13, a valve seat 42, a diaphragm piece 29, and a bonnet 43.
- the diaphragm 13 is disposed at a predetermined position of the valve box 41, and a diaphragm piece 29 as a pressing member for pressing is attached to the upper portion of the diaphragm 13 by a bonnet 43 so as to be driven.
- a female screw 44 that can be screwed with the male screw 38 is formed on the connection side of the valve 30 with the actuator 1a, and the female screw 44 and the male screw 38 are screwed together so that the booster mechanism 10 is provided inside.
- the incorporated actuator 1a and the valve 30 can be attached and detached.
- the diaphragm piece 29 is driven by the output in the axial direction of the output shaft portion 11 of the actuator 1a. By driving the diaphragm piece 29, the diaphragm 13 comes into contact with and separates from the valve seat 42, and the primary flow path 39 and the secondary flow path 40 can be opened and closed.
- the force with which the diaphragm piece 29 presses the valve seat 42 ranges from about 2000N to about 10,000N depending on the size of the valve.
- a locking groove 45a having a semicircular cross section is provided as a movable side locking portion 45 at an appropriate position on the outer peripheral side surface of the thrust member 16, and a fixed side locking is provided in the casing 2a of the actuator 1a.
- a locking hole 46a is provided as the portion 46 so that the positions of the locking groove 45a and the locking hole 46a coincide when the thrust member 16 is in the locking position.
- FIG. 1 shows a state in which two fixed-side locking portions 46 are provided and one holding pin 47a is inserted into any one of them, two are provided on both sides for more stability. It can also be inserted. Further, the thrust member 16 may be held by inserting a plurality of holding pins 47a after providing the locking hole portions 46a at a plurality of locations in the casing 2a.
- the movable side locking portion 45 can be a locking hole 45a (not shown).
- the locking hole 45a is a hole formed in the outer circumferential side surface of the thrust member 16 in the centripetal direction of the cylindrical actuator 1a.
- the casing 2a of the actuator 1a has a locking hole 46a as a fixed-side locking portion 46.
- the thrust member 16 is appropriately applied to prevent the positions of the locking hole portion 46a and the locking hole 45a from being shifted in the circumferential direction due to the rotation in the rotational direction. It is desirable to provide an anti-rotation means.
- the locking groove 45a is formed as a groove cut out around the outer peripheral side surface of the thrust member 16, and the tip 56 of the holding pin 47a as the holding member 47 penetrates the locking hole 46a.
- the engaging groove 45a can be detachably engaged.
- the locking hole 45a is formed in the outer peripheral side surface of the thrust member 16 as a hole cut in the centripetal direction of the cylindrical actuator 1a, and the distal end portion 56 of the holding pin 47a as the holding member 47 is formed in the locking hole.
- the portion 46a can be detachably fitted into the locking hole 45a.
- the position of the locking groove 45a or the locking hole 45a provided in the thrust member 16 may be a position that does not hinder the driving of the thrust member 16 or the function of the valve. It can be taken at any position depending on the situation.
- the locking position of the thrust member 16 can be at any position other than the position where the thrust member 16 presses the valve seat 42 via the diaphragm 13.
- the locking position is preferably the top dead center which is the maximum displacement position of the piston.
- the position of the locking hole 46a as the fixed-side locking portion 46 is provided on the outer peripheral side surface of the casing 2a with respect to a position that coincides with the position of the locking groove 45a in the locking position of the thrust member 16 described above.
- the holding pin 47a includes a handle portion 55 that is gripped by an operator and a tip portion 56 that is inserted into the locking hole portion 46a of the casing 2a that is the fixed side locking portion 46.
- an air drive source including an air operation chamber 25 and an intake / exhaust port 23 is provided.
- the intake / exhaust port 23 formed in the shaft 19 When compressed air is supplied from the intake / exhaust port 23 formed in the shaft 19, the supplied compressed air flows into the air operation chamber 25 through the branch port 48, thereby increasing the air pressure inside the air operation chamber 25. Then, the urging force of the spring 15 is overcome and the piston 14 is pushed upward to release the pressing of the diaphragm 13.
- the thrust member 16 Since the thrust member 16 is structured to be driven in conjunction with the piston 14, the thrust member 16 also moves upward in conjunction with the upward movement on the release side of the piston 14, and is movable side locked.
- the locking groove 45a which is the portion 45 and the locking hole portion 46a which is the fixed side locking portion 46 are stopped at the locking position where they coincide. As described above, this locking position is the position of the top dead center of the thrust member 16, and is preferably this position.
- the diaphragm piece 29 When the diaphragm piece 29 is separated from the diaphragm 13, the diaphragm 13 is deformed and moved upward by its own reaction force, and becomes an old shape separated from the valve seat 42.
- This shape is a shape when the diaphragm 13 is attached to the inside of the valve chamber and no external force is applied.
- the separation distance between the diaphragm 13 and the valve seat 42 is about 0.3 mm to 0.4 mm in this example.
- FIG. 1 shows a state in which the holding pin 47a is inserted in this manner and the thrust member 16 is locked at the locking position.
- the air supplied to the air operation chamber 25 is exhausted. Contrary to the case of the air supply described above, air is exhausted from the intake / exhaust port 23 through the branch port 48 formed in the shaft 19 through the inside of the shaft 19. When the air is exhausted, the air pressure inside the air operation chamber 25 disappears, and the urging force in the direction of pressing the diaphragm 13 by the spring 15 acts on the thrust member 16, but the thrust member 16 is inserted by the holding pin 47a described above. Is locked to the casing 2 a, so that the diaphragm 13 is prevented from pressing the valve seat 42.
- the holding pin 47a may be removed from the outside in order to unlock the thrust member 16.
- the handle 55 of the holding pin 47a is grasped by hand and pulled out from the casing 2a, the thrust member 16 is unlocked from the casing 2a.
- the piston 14 When the locking is released, the piston 14 is urged and driven in the direction of pressing the diaphragm 13 by the urging force of the spring 15, and the thrust member 16 is also driven in conjunction with the urged force.
- the output shaft portion 11 is also driven, and the diaphragm piece 29 presses the diaphragm 13 and is pressure-bonded to the valve seat 42, so that the valve is closed as shown in FIG. In this way, the use of the valve 30 is started.
- FIG. 3 shows a second embodiment of the present invention.
- the same parts as those in the first embodiment are denoted by the same reference numerals, and description thereof is omitted in the following embodiments.
- a locking groove 45a having a semicircular cross section is provided as a movable side locking portion 45 at an appropriate position on the outer peripheral side surface of the thrust member 16, and a fixed side locking is provided in the casing 2a of the actuator 1a.
- the portion 46 two locking hole portions 46b are provided at a pair of mutually opposing positions, and two sets of the pair are provided.
- the fixed side locking portion 46 has two sets of locking hole portions 46b, and one holding pin 47b is inserted into any one set, and the other locking hole portion.
- the locking groove 45a is formed as a groove cut around the outer peripheral side surface of the thrust member 16, and the distal end portion 56 of the holding pin 47b as the holding member 47 has a pair of locking holes 46b. One of these is penetrated, it approachs along the latching groove 45a, engaging with the thrust member 16, and it penetrates and protrudes from the other latching hole part 46b.
- the contact area between the holding pin 47b and the thrust member 16 is larger than the contact area in the first embodiment, as shown in FIG. Further, since the holding pin 47b is held in a state of penetrating through the casing 2 and the two locking holes 46b, the thrust pin 16 of the thrust member 16 is compared with the locking of the thrust member 16 in the first embodiment.
- the holding can be made more stable and strong.
- the locking groove 45a is formed as a groove cut out around the outer peripheral side surface of the thrust member 16, and the distal end portion 56 of the holding pin 47b as the holding member 47 is a set of locking hole portions. 46b can be detachably engaged with the locking groove 45a.
- the position of the locking groove 45a provided in the thrust member 16 may be a position that does not hinder the driving of the thrust member 16 and the function of the valve, and any position other than the thrust member 16 may be used depending on the implementation. Can be taken in position.
- the locking position of the thrust member 16 can be at any position other than the position where the thrust member 16 presses the valve seat 42 via the diaphragm 13.
- the locking position is preferably the top dead center which is the maximum displacement position of the piston.
- the position of the locking hole 46b as the fixed-side locking portion 46 is provided on the outer peripheral side surface of the casing 2a with respect to a position that coincides with the position of the locking groove 45a in the locking position of the thrust member 16 described above.
- FIG. 5 shows a third embodiment of the present invention. Also in this example, the same parts as those in the first embodiment are denoted by the same reference numerals, and description thereof is omitted in the following embodiments.
- the thrust member 16 there is a hole that is linearly opened or penetrated in a direction other than the centripetal direction of the cylindrical actuator 1a as the movable side locking portion 45.
- a locking hole 45c is provided, and the casing 2a of the actuator 1a has a locking hole portion 46c as the fixed-side locking portion 46.
- the locking hole 45c is provided at one location.
- two holes are provided at a pair of opposing positions.
- the tip 56 of the holding pin 47c can be detachably fitted to the holding pin 47c through the locking hole 46c.
- the stop hole 45c is a through-hole
- the distal end portion 56 of the holding pin 47c can be detachably fitted to the holding pin 47c through one of the set of locking hole portions 46c.
- the tip 56 may be further penetrated from the other of the locking holes 46c and protrude outward, or the new holding pin tip 56 may be inserted through the other of the locking holes 46c without penetrating.
- the holding pin 47c may be detachably fitted to the locking hole 45c.
- two or more locking holes 45c may be provided, and a plurality of the locking hole portions 46c and a plurality of holding pins 47c may be used correspondingly.
- the thrust member 16 is prevented from being displaced in the circumferential direction by rotating in the rotational direction by applying a force in the rotational direction. It is desirable to provide suitable anti-rotation means for this purpose.
- the contact area between the holding pin 47c and the thrust member 16 is larger than the contact area in the second embodiment. Since it is large, the thrust member 16 can be held more stably and firmly as compared with the locking of the thrust member 16 in the second embodiment. In particular, when the tip of the holding pin 47c passes through the thrust member 16, the effect is great.
- the position of the locking hole 45c provided in the thrust member 16 may be a position that does not hinder the drive of the thrust member 16 and the function of the valve, and any position other than the thrust member 16 may be used depending on the implementation. Can be taken in position.
- the locking position of the thrust member 16 can be at any position other than the position where the thrust member 16 presses the valve seat 42 via the diaphragm 13.
- the locking position is preferably the top dead center which is the maximum displacement position of the piston.
- the position of the locking hole portion 46c as the fixed-side locking portion 46 is the outer peripheral side surface of the casing 2a with respect to the position that coincides with the position of the opening portion 50 of the locking hole 45c at the locking position of the thrust member 16 described above. Is provided.
- FIGS. 9 and 10 show the fifth embodiment.
- These embodiments are high-pressure automatic diaphragm valves in which the present invention is applied to an actuator 1b having a structure different from that of the above-described embodiment.
- FIG. 7 shows a fourth embodiment of the present invention.
- the left side of the central vertical line in FIG. 7 shows a state where the holding pin is inserted and the piston is locked, and the right side of the central vertical line shows a state where the holding pin is pulled out and the locking of the piston is released.
- the actuator 1b has a spring 15 that energizes a piston 14 that is provided in the casing 2b and that drives the actuator 1b, and energizes the piston 14 in a downward direction that presses a diaphragm that is a valve body, as in the above embodiment. Yes.
- two engagement holes 45d are provided at appropriate positions of the piston 14 as a movable-side engagement portion 45 at a pair of opposing positions, and the casing 2b of the actuator 1b has a fixed-side engagement.
- the locking holes 46d are provided at two positions opposite to each other as the portions 46, and the thrust member 16 is in the locking position, the positions of the locking holes 45d and the locking holes 46d coincide.
- FIG. 7 there are two fixed side locking portions 46 in this example, and one holding pin 47d, which is a holding member 47, is inserted into one of them, but the locking of the piston 14 is more stable. For this reason, two holding pins 47d may be inserted into both fixed-side locking portions 46.
- FIG. 8 shows a state in which two holding pins 47d are thus inserted and the piston 14 is locked at the locking position. Further, in order to unlock the piston 14, the holding pin 47d may be removed from the outside. When the handle 55 of the holding pin 47d is grasped by hand and pulled out from the casing 2b, the locking of the piston 14 to the casing 2b is released.
- the position of the locking hole 45d provided in the piston 14 may be any position that does not hinder the driving of the piston 14 and the function of the valve. be able to.
- the engagement position of the piston 14 can be set at any position other than the position where the piston 14 presses the valve seat through the diaphragm.
- the locking position is preferably the top dead center which is the maximum displacement position of the piston.
- the position of the locking hole 46d as the fixed-side locking portion 46 is on the outer peripheral side surface of the casing 2b with respect to the position that coincides with the position of the opening 50 of the locking hole 45d at the locking position of the piston 14 described above. Provided.
- the piston 14 is locked by the two holding pins, so that the thrust member 16 is held by the one holding pin 47a as compared with the first embodiment.
- maintenance pin is disperse
- the two holding pins 47d are provided, even if one of the holding pins 47 is unexpectedly removed, the other one holding pin can keep the piston 14 locked.
- FIG. 9 shows a fifth embodiment.
- the left side from the central vertical line shows a state where the holding pin 54 is inserted and the piston 52 is locked, and the right side from the central vertical line shows a state where the holding pin 54 is pulled out and the locking of the piston 52 is released.
- the same parts as those in the fourth embodiment are denoted by the same reference numerals, and description thereof is omitted.
- a locking groove 45e in which the outer peripheral side surface of the piston 14 is cut out in a semicircular shape as a movable side locking portion 45 is provided at an appropriate position of the piston 14, and is fixed to the casing 2b of the actuator 1b.
- the side locking portion 46 two locking holes 46e are provided at a pair of opposing positions, and two pairs of the locking holes 46e are provided.
- the locking groove 45e is provided so that the positions of the locking holes 46e coincide.
- two sets of fixed side locking portions 46 are provided in this example, and one holding pin 47e, which is a holding member 47, is inserted into one of them, but the locking of the piston 14 is further stabilized. For this reason, two holding pins 47e may be inserted into both fixed-side locking portions 46.
- FIG. 10 shows a state in which two holding pins 47e are thus inserted and the piston 14 is locked at the locking position. Further, in order to unlock the piston 14, the holding pin 47e may be removed from the outside. When the handle 55 of the holding pin 47e is grasped by hand and pulled out from the casing 2b, the locking of the piston 14 to the casing 2b is released.
- the position of the locking hole 45e provided in the piston 14 may be a position that does not hinder the driving of the piston 14 or the function of the valve. be able to.
- the engagement position of the piston 14 can be set at any position other than the position where the piston 14 presses the valve seat through the diaphragm.
- the locking position is preferably the top dead center which is the maximum displacement position of the piston.
- the position of the locking hole 46e as the fixed-side locking portion 46 is provided on the outer peripheral side surface of the casing 2b with respect to a position that coincides with the position of the locking groove 45e in the locking position of the piston 14 described above.
- the piston 14 is locked by the two holding pins, so the second and third holding the thrust member 16 by the one holding pins 47 b and 47 c.
- the piston 14 and the casing 2b can be locked for a longer period without damaging the shape.
- the two holding pins 47e are provided, even if one of the holding pins 47e is unexpectedly removed, the other one holding pin can keep the piston 14 locked.
- FIGS. 11 (a) and 12 (a) are longitudinal sectional views and diagrams of the diaphragm valve in this embodiment.
- 11 (b) and FIG. 12 (b) are partially omitted vertical central sectional views of the actuator in FIGS. 11 (a) and 12 (a).
- the valve actuator 60 in this embodiment has a piston mechanism 61 and a booster mechanism 62 inside.
- the piston mechanism 61 includes a casing 70 formed in a substantially cylindrical shape and a substantially cylindrical piston 71 that can be inserted into the casing 70.
- the piston 71 is inserted into the casing 70 via an O-ring 72.
- the piston 71 is provided so as to be able to reciprocate while sliding in the casing 70 by intake / exhaust from the intake / exhaust port 23 provided in the upper portion of the casing 70.
- An opening 73 is provided in the lower portion of the casing 70, and a female screw 74 and an annular locking step 75 are formed in the opening 73.
- the casing 70 is provided with a case 76 and a base 77 through the opening 73 so as to be mountable. Further, a cap 78 is attached to the base 77, and a valve body 79 is attached through the cap 78.
- the booster mechanism 62 has a piston 71, a lifting body 80, a cam 81, a spring 82, a roller 83, and an output shaft portion 84, and an upper portion of the lifting body 80, the cam 81, the spring 82, and the output shaft portion 84 is for mounting.
- an elevating body 80 is provided so as to be movable up and down in the case 76.
- the roller 83 is attached to the piston 71 and, as will be described later, is provided so as to operate the cam 81 in conjunction with the reciprocating motion of the piston 71 using the so-called lever principle.
- the diaphragm valve has a structure in which the diaphragm 13 is pressed against the valve seat 42 by the diaphragm piece 29 in accordance with the operation of the piston mechanism 61.
- the case 76 is formed in a substantially disk shape, and is locked to the locking step 75 while being placed on the upper surface of the base 77 from the opening 73 of the casing 70. In such a state, it can be attached to the casing 70.
- a linear groove 90 for mounting the elevating body 80 and the cam 81 is formed, and communication holes 91 are formed at the bottoms on both ends in the length direction of the groove 90. It is provided through the outer peripheral surface.
- the communication hole 91 is provided with a holding member 93 made of a holding pin through the insertion hole 92 formed through the casing 70 so that the holding member 93 can be inserted.
- the holding pin 93 is provided in such a length that the bottom surface 80a of the elevating body 80 can contact when inserted into the insertion hole 92, and as shown in FIG. A bent portion 94 that can be picked is formed.
- a through hole 95 into which the upper end portion of the output shaft portion 84 can be inserted is formed at the center of the groove portion 90 of the case 76, and two communication holes 96 are formed in the vicinity of both sides of the groove portion 90 in a direction orthogonal to the groove portion 90. It is formed in communication with the outer peripheral surface.
- a pin member 97 is inserted into each communication hole 96, and both ends of the pin member 97 are positioned by stop pins 98 fitted in a direction intersecting with each communication hole 96 from the upper surface side of the case 76. Inserted in a retaining state.
- a bottomed hole 99 into which the spring 82 can be inserted is formed at two positions opposite to the groove portion 90 in the diameter direction of the case 76, and one side portion of the spring 82 is inserted into these free hole 99.
- the elevating body 80 is provided in a substantially rectangular shape by a metal such as alloy tool steel, for example, and is inserted at the center position of the groove 90.
- the bottom surface side of the lifting / lowering body 80 is formed in a mountain shape with the center being the top portion 80 b, and the tip of the output shaft portion 84 inserted through the through hole 95 is in contact with the top portion 80 b.
- the elevating body 80 is attached so as to move up and down in conjunction with the reciprocation of the piston mechanism 61 in the vertical direction, and is provided so as to move the output shaft portion 84 up and down by this up and down movement.
- the cam 81 is formed in an approximately L shape, and the mounting hole 100 is attached to the case 76 and the roller 83 is locked to the other end of the mounting hole 100. Possible locking pieces 101 are provided.
- the two cams 81, 81 are attached to the center of the case 76 so as to be inserted into the groove portion 90 from above the elevating body 80, and the pin member 97 is inserted into the attachment hole 100 so as to come out into the groove portion 90.
- the pin member 97 is provided so as to be rotatable with respect to the case 76.
- On the lift body 80 side of the cam 81 there is provided a locking recess 102 that locks the corner portions at both upper ends of the lifting body 80. By locking the locking recess 102 and the lifting body 80, The elevating body 80 moves up and down while its range is regulated according to the rotation.
- the spring 82 has one side inserted into the free hole 99 of the case 76 as described above, while the other end of the spring 82 is shown in FIGS. 11 (b) and 12 (b). Thus, it abuts on the bottom surface side of the piston 71 formed in a substantially cylindrical shape.
- the springs 82 are arranged at two locations in the piston 71 and are provided so as to repel the piston 71 upward in the drawing when compressed air is exhausted from the piston mechanism 61.
- Each of the springs 82 and 82 is provided in a right-handed or left-handed manner, and thus the winding directions of the springs 82 and 82 are opposite to each other.
- the rollers 83 shown in FIG. 14 are provided at two positions in the horizontal direction at the locking positions with the cams 81 in the piston 71 of FIG. 11 so as to move up and down integrally with the piston 71 as the piston 71 reciprocates. It has become.
- the roller 83 is engaged with the locking piece 101 of the cam 81 while being rotatably attached to the piston 71, and when the roller 83 moves, the frictional resistance with the cam 81 when the piston 71 reciprocates is reduced. Less.
- the output shaft portion 84 is provided between the elevating body 80 and the diaphragm piece 29 and is elastically biased upward in FIG. 11 by the coil spring 33.
- the output shaft portion 84 is also integrated with the elevating movement. It can be moved up and down.
- the diaphragm piece 29 is also moved upward and the diaphragm 13 is opened, while the lifting body 80 is lowered.
- the coil spring 33 is elastically moved along the outer peripheral surface of the roller 83 by the downward movement of the roller 83.
- the two cams 81, 81 thus rotated are rotated in the outward direction, that is, in a direction to ease the pressing of the lifting body 80, and the lifting body 80 moves upward.
- the output shaft portion 84 and the diaphragm piece 29 move upward, and the diaphragm 13 is deformed and moved upward by itself.
- the elevating body 80 when the elevating body 80 is moved upward via the booster mechanism 62 by the downward movement of the piston, the elevating body bottom surface 80a side and the case 76 where the bottom surface 80a abuts when fully closed.
- a gap G is formed between the fixed contact surface 105 and the fixed contact surface 105.
- the gap G becomes maximum when the piston 71 is moved to the bottom dead center, and in this state, the holding pin 93 can be inserted from the insertion hole 92 from the outside of the casing 70.
- the holding pin 93 By inserting the holding pin 93 from the insertion hole 92 in this state, the holding pin 93 can be locked to the lift body bottom surface 80a when the lift body 80 moves to the release side.
- the elevating body bottom surface 80a is inclined toward the center, the holding pin 93 is guided by this inclination and can be easily inserted.
- the bent portion 94 at the outer end of the holding pin 93 may be grasped and extracted from the outside of the casing 70. As shown in FIG.
- the valve 80 is closed, the elevating body 80 moves downward.
- the diaphragm 13 is operated via the booster mechanism 62. Even when fine flow control is performed, a predetermined flow path can be secured.
- the actuator of this embodiment causes the lifting body 80 to move up when air is supplied and the piston 71 is moved downward.
- the valve is opened, and on the other hand, when the air is exhausted and the piston 71 is moved upward, the elevating body 80 is pressed downward by the spring force of the spring 82 so that the valve is closed. Yes.
- the base 77 is formed in a substantially disk shape having the same diameter as that of the case 76, a male screw 106 that is screwed to the female screw 74 is formed on the upper outer peripheral side, and a cap 78 is mounted on the upper inner peripheral side.
- An internal recess 107 is formed on the lower side following the internal thread 107 and the internal thread 107.
- the base 77 is screwed to the female screw 74 through the screw 106 from the opening 73 side of the casing 70 in which the case 76 is fitted.
- the base 77 is positioned and fixed by the locking step 75 in the casing 70 by the base 77. Is done.
- the male screw 106 formed on the outermost periphery of the base 77 and the female screw 74 having an enlarged diameter formed in the casing opening 73 are screwed together to increase the tightening force.
- the occurrence of rattling is prevented, the case 76 does not move when the actuator is operated, and no vibration or noise is generated, and the piston 71 slides smoothly.
- Female screw portions 110 are formed evenly at 120 ° intervals at three locations on the outer periphery of the lower portion of the base 77, and set screws 111 are screwed onto the female screw portions 110.
- the cap 78 is formed in a substantially cylindrical shape, and a male screw 112 that can be screwed to the female screw 107 of the base and an annular convex portion 113 that can be fitted into the annular concave portion 108 are formed on the cap 78.
- a male screw portion 115 that is screwed into a female screw portion 114 formed in the valve body 79 is formed in the lower portion.
- An insertion hole portion 116 for inserting the output shaft portion 84 is provided in the center of the cap 78.
- the male screw 112 of the cap 78 and the female screw 107 of the base 77 are formed to have a large diameter.
- sufficient strength can be ensured even when the thrust during actuator operation is applied to the male screw 112 and the female screw 107, and stable operation is possible.
- the cap 78 is fixed from the outer peripheral side of the base 77 by three set screws 111, and can be easily fixed to the base 77 by these set screws 111, and is attached while firmly centering at three locations.
- the cap 78 is not glazed against the base 77 after tightening. Further, since the set screw 111 is tightened from the side surface of the base 77, even when the diaphragm valve is attached to the pipe or the like, the pipe and the valve body 79 and the like are not obstructed. After adjusting the screwed state of the cap 78 and adjusting the stroke, these can be easily fixed by the set screw 111.
- the booster mechanism 62 in the diaphragm valve of this embodiment has a structure that operates by locking the elevating body 80 and the cam 81, and the elevating body 80 does not move up and down with sliding, but at the sliding portion. Since the holding pin 93 is not locked to a certain piston 71, a load is not applied to the piston 71, and there is no possibility that scratches or burrs are generated on the outer surface of the piston 71 or the inner surface of the casing 70. Therefore, when the piston 71 slides, the O-ring 72 is not damaged or malfunctions due to scratches or burrs caused by the holding pins 93. As a result, the casing 70 can be formed of a soft material such as aluminum to reduce the overall weight. In this case as well, the holding pins 93 do not cause scratches or burrs.
- the booster mechanism 62 is a mechanism that strongly presses the elevating body 80 using the lever principle using a cam, the diaphragm 13 is strongly pressed against the valve seat 42 and also in the case of high-pressure fluid. Make sure to prevent leakage.
- the piston 71 is provided with two springs 82 that spring upward, and the winding directions of the springs 82 are opposite to each other.
- the rotation of the piston 71 is prevented. Therefore, mutual interference due to rubbing between the cam 81 and the groove portion 90 is suppressed, and even when the stroke of the piston 71 is large, the rotation of the piston 71 due to kinking when the spring 82 is compressed is prevented. The risk of malfunctions and reduced life due to rubbing is also avoided. Furthermore, since the piston 71 operation is accurate, the diaphragm valve can be controlled to be opened with high accuracy.
- the lifting body 80 may be anything that can open and close the valve without sliding inside as the piston 71 moves up and down by air supply, and the diaphragm valve has a holding pin 93 on the bottom face 80a of the lifting body. Any one can be used as long as it can be stopped from the outside and the downward movement of the diaphragm piece 29 can be restricted to prevent the diaphragm 13 from being worn or deteriorated. Therefore, the elevating body 80 does not necessarily need to be separate from the output shaft portion 84 and the diaphragm piece 29, and these may be provided integrally.
- the holding pin 93 is inserted through the insertion hole 92 formed in the casing 70.
- the holding pin 93 can be inserted into the gap G generated on the bottom surface 80a of the lifting body to hold the lifting body 80 in the valve open state.
- the insertion portion may be provided in a groove shape or the like, while the holding member may be provided in a plate shape or other shapes.
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
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- Fluid-Driven Valves (AREA)
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Abstract
Description
ピストン機構61は、略円筒状に形成されたケーシング70と、このケーシング70に挿着可能な略円筒状のピストン71とを有し、ケーシング70内にOリング72を介してピストン71が挿着され、ケーシング70上部に設けられた吸排気口23からの吸排気によってピストン71がケーシング70内を摺動しながら往復動自在に設けられる。ケーシング70の下部には開口部73が設けられ、この開口部73にはめねじ74、環状の係止段部75が形成される。ケーシング70には、開口部73よりケース76、ベース77が装着可能に設けられる。さらに、ベース77にはキャップ78が取付けられ、このキャップ78を介してバルブボデー79が装着される。 The
The
ケース76の直径方向における溝部90との直交位置には、スプリング82を挿入可能な有底穴99が対向して2ヶ所に形成され、これらの遊底穴99にスプリング82の一側部が挿入される。 A through
A bottomed
各スプリング82、82は、右巻き、左巻きに設けられ、このように相互の巻方向が逆向きに形成されている。 In FIG. 14, the
Each of the
ベース77の下部外周の3ヶ所には、雌螺子部110が120°間隔で均等に形成され、この雌螺子部110に止めネジ111が螺着される。 The
2a,2b ケーシング
4 ボデー
10 倍力機構
13 ダイヤフラム
14 ピストン
15、82 スプリング
16 推力部材
42 弁座シート
45 可動側係止部
45a,45b,45e 係止溝
45c,45d 係止孔
46 固定側係止部
46a,46b,46c,46d,46e 係止穴部
47 保持部材
47a,47b,47c,47d,47e 保持ピン
80 昇降体
80a 昇降体底面
93 保持ピン(保持部材)
94 折曲部
G 隙間 DESCRIPTION OF
94 Bent part G Gap
Claims (8)
- ボデー内に設けた弁座シートにダイヤフラムを押圧して弁閉するダイヤフラムバルブにおいて、前記ボデーに設けたアクチュエータ内のピストン機構で前記ダイヤフラムを押圧し又は押圧を解除すると共に、前記アクチュエータのケーシングに固定側係止部を設け、かつ前記ピストン機構の適宜位置に可動側係止部を設け、前記ピストン機構を上方向の解除側に動かしたときに、前記固定側係止部と前記可動側係止部の係止位置を一致させ、かつ前記ケーシングの外方より挿通した保持部材で前記固定側係止部と前記可動側係止部を係止させて前記弁座シートに負荷を掛けずに長期保存を可能とし、バルブ使用時には、前記保持部材を前記ケーシングの外方より取り外してバルブを使用可能としたことを特徴とする高圧用自動ダイヤフラムバルブ。 In a diaphragm valve that presses the diaphragm against a valve seat seat provided in the body and closes the valve, the piston mechanism in the actuator provided in the body presses the diaphragm or releases the pressure, and is fixed to the actuator casing. A side locking portion is provided, and a movable side locking portion is provided at an appropriate position of the piston mechanism. When the piston mechanism is moved to the upward release side, the fixed side locking portion and the movable side locking portion are The locking position of the part is matched, and the fixed side locking part and the movable side locking part are locked by a holding member inserted from the outside of the casing, so that the valve seat seat is not loaded for a long time. A high-pressure automatic diaphragm characterized in that it can be stored and the valve can be used by removing the holding member from the outside of the casing when the valve is used. Lube.
- 前記ピストン機構は、エアーを供給してピストンを上方向に動かして前記ダイヤフラムを自力にて上方向に変形移動すると共に、全閉時に、倍力機構を介してスプリングの弾発力で下方に負荷を与える構造を有し、ピストンを上方に動かしたときに、前記保持部材でピストン機構が下がるのを防止した請求項1に記載の高圧用自動ダイヤフラムバルブ。 The piston mechanism supplies air and moves the piston upward to deform and move the diaphragm upward by itself. When fully closed, the piston mechanism is loaded downward by the spring force of the spring. 2. The high-pressure automatic diaphragm valve according to claim 1, wherein the holding mechanism prevents the piston mechanism from lowering when the piston is moved upward.
- 前記ピストン機構にエアーを供給し、ピストンを上死点へ移動させて前記固定側係止部である係止穴部に前記可動側係止部である係止溝の位置を一致させ、一致した双方の穴に外方より保持部材である保持ピンを差し込み、使用時には当該保持ピンを外方より抜き出してバルブを使用可能とした請求項1又は2に記載の高圧用自動ダイヤフラムバルブ。 Air is supplied to the piston mechanism, the piston is moved to the top dead center, and the position of the locking groove which is the movable side locking portion is matched with the locking hole which is the fixed side locking portion. The high-pressure automatic diaphragm valve according to claim 1 or 2, wherein a holding pin which is a holding member is inserted into both holes from the outside, and the valve can be used by extracting the holding pin from the outside during use.
- 前記固定側係止部である2つの係止穴部に前記可動側係止部である半円形係止溝又は係止孔の位置を一致させ、一致させた係止穴部に外方より保持部材である保持ピンを差し込み、使用時には当該保持ピンを外方より抜き出してバルブを使用可能とした請求項1又は2に記載の高圧用自動ダイヤフラムバルブ。 The position of the semicircular locking groove or the locking hole as the movable side locking portion is matched with the two locking holes as the fixed side locking portion, and the matching locking hole is held from the outside. The automatic diaphragm valve for high pressure according to claim 1 or 2, wherein a holding pin which is a member is inserted, and the holding pin is pulled out from the outside at the time of use so that the valve can be used.
- ボデー内に設けた弁座シートにダイヤフラムを押圧して弁閉するダイヤフラムバルブにおいて、前記ボデーに設けたアクチュエータ内のピストン機構で前記ダイヤフラムを押圧し又は押圧を解除すると共に、前記ピストン機構にピストンの上下方向の往復動に連動して上下移動する昇降体を設け、かつ前記アクチュエータのケーシングの外方より、前記昇降体を上方向の解除側に動かしたときにこの昇降体の底面側に生じる隙間に保持部材を挿入可能に設け、前記昇降体の解除側への移動時に前記昇降体底面に前記保持部材を係止させ、前記弁座シートに負荷を掛けずに長期保存を可能とし、バルブ使用時には、前記保持部材を前記ケーシングの外方より取り外してバルブを使用可能としたことを特徴とする高圧用自動ダイヤフラムバルブ。 In the diaphragm valve that presses the diaphragm against the valve seat provided in the body and closes the valve, the piston mechanism in the actuator provided in the body presses or releases the diaphragm, and the piston mechanism A lifting body that moves up and down in conjunction with reciprocation in the vertical direction, and a gap generated on the bottom surface side of the lifting body when the lifting body is moved upward from the outside of the casing of the actuator. The holding member can be inserted into the lifting member, the holding member is locked to the bottom surface of the lifting body when the lifting body is moved to the release side, and the valve seat can be stored for a long time without applying a load. Sometimes, the holding member is removed from the outside of the casing so that the valve can be used. High-pressure automatic diaphragm valve
- 前記ピストン機構にエアーを供給して前記ピストンを下方向に動かし、かつ前記ダイヤフラムを自力にて上方向に変形移動すると共に、全閉時に、スプリングの弾発力により前記ピストンを上方向に動かしたときに倍力機構を介して前記昇降体を下方向に移動させて負荷を与える構造を有し、ピストンを下方に動かしたときに、前記保持部材でピストン機構の昇降体が下がるのを防止した請求項5に記載の高圧用自動ダイヤフラムバルブ。 Air is supplied to the piston mechanism to move the piston downward, and the diaphragm is deformed upward by its own force, and when fully closed, the piston is moved upward by the spring force of the spring. Sometimes it has a structure that applies a load by moving the lifting body downward via a booster mechanism, and when the piston is moved downward, the holding member prevents the lifting body of the piston mechanism from being lowered The high-pressure automatic diaphragm valve according to claim 5.
- 前記ピストン機構にエアーを供給し、ピストンを下死点へ移動させたときに前記倍力機構を介して前記昇降体の底面とこの底面が全閉時に当接する固定側当接面との間に隙間を設け、この隙間に前記ケーシングに形成した挿入孔から保持部材である保持ピンを差し込み、使用時には当該保持ピンの外端に形成した折曲部を摘んで前記ケーシングの外方より抜き出してバルブを使用可能とした請求項5又は6に記載の高圧用自動ダイヤフラムバルブ。 When air is supplied to the piston mechanism and the piston is moved to the bottom dead center, the bottom surface of the lifting body and the fixed-side contact surface with which the bottom surface abuts when fully closed via the booster mechanism. A gap is provided, and a holding pin, which is a holding member, is inserted into the gap from an insertion hole formed in the casing, and in use, a bent portion formed on the outer end of the holding pin is picked and extracted from the outside of the casing. The automatic diaphragm valve for high pressure according to claim 5 or 6, wherein said can be used.
- 前記スプリングは、前記ピストン内に2ヶ所設けて当該ピストンを上方向に弾発可能に設け、これらスプリングの相互の巻方向を逆向きとした請求項6又は7に記載の高圧用自動ダイヤフラムバルブ。 8. The high-pressure automatic diaphragm valve according to claim 6 or 7, wherein the spring is provided in two locations in the piston so that the piston can be repelled upward, and the winding directions of the springs are opposite to each other.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
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JP2015530986A JP6261593B2 (en) | 2013-08-08 | 2014-08-08 | Automatic diaphragm valve for high pressure |
KR1020157028293A KR102198044B1 (en) | 2013-08-08 | 2014-08-08 | High-pressure automatic diaphragm valve |
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Application Number | Priority Date | Filing Date | Title |
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JP2013-164655 | 2013-08-08 | ||
JP2013164655 | 2013-08-08 |
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WO2015020209A1 true WO2015020209A1 (en) | 2015-02-12 |
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PCT/JP2014/071079 WO2015020209A1 (en) | 2013-08-08 | 2014-08-08 | High-pressure automatic diaphragm valve |
Country Status (3)
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JP (1) | JP6261593B2 (en) |
KR (2) | KR20150018361A (en) |
WO (1) | WO2015020209A1 (en) |
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JP2017044322A (en) * | 2015-08-28 | 2017-03-02 | 株式会社フジキン | valve |
CN109555874A (en) * | 2017-09-26 | 2019-04-02 | 株式会社开滋Sct | The assemble method and its assembled configuration and diaphragm valve of diaphragm valve |
JP2019521300A (en) * | 2016-07-12 | 2019-07-25 | パーカー・ハニフィン・コーポレーション | Lockout tagout device and valve |
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KR101634969B1 (en) * | 2015-10-23 | 2016-07-04 | 주식회사 유니락 | actuator having an emergency control |
KR102682673B1 (en) * | 2023-06-21 | 2024-07-08 | 화성밸브 주식회사 | ball-valve open and close device using spiral cam groove and ball |
KR102682672B1 (en) * | 2023-06-21 | 2024-07-08 | 화성밸브 주식회사 | gas feeding pipe of open and close device using ball-valve |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08247307A (en) * | 1995-03-13 | 1996-09-27 | Fujikin:Kk | Controller |
JP2002195443A (en) * | 2000-12-28 | 2002-07-10 | Kitz Sct:Kk | Fluid control valve |
JP2005140319A (en) * | 2003-10-15 | 2005-06-02 | Ckd Corp | Malfunction preventive manual valve |
JP2007528478A (en) * | 2004-03-10 | 2007-10-11 | スワゲロック カンパニー | Fluidic device actuator with manual override |
JP2010255663A (en) * | 2009-04-21 | 2010-11-11 | Ckd Corp | Manual valve with lock mechanism |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2606456Y2 (en) * | 1992-09-07 | 2000-11-06 | 日本酸素株式会社 | Container valve with remote opening and closing device |
CH689332A5 (en) * | 1993-09-20 | 1999-02-26 | Fischer Georg Rohrleitung | Shut-off valve with an actuator. |
JPH09210243A (en) * | 1996-02-06 | 1997-08-12 | Neriki:Kk | Valve with opening/closing display function |
JP4089842B2 (en) | 1998-04-25 | 2008-05-28 | 株式会社フジキン | Pneumatically operated controller manual operating device and pneumatically operated controller equipped with this operating device |
JP3609023B2 (en) | 2000-12-27 | 2005-01-12 | 藤倉ゴム工業株式会社 | Normally closed forced opening device |
-
2014
- 2014-05-14 KR KR1020140057899A patent/KR20150018361A/en unknown
- 2014-08-08 JP JP2015530986A patent/JP6261593B2/en active Active
- 2014-08-08 KR KR1020157028293A patent/KR102198044B1/en active IP Right Grant
- 2014-08-08 WO PCT/JP2014/071079 patent/WO2015020209A1/en active Application Filing
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08247307A (en) * | 1995-03-13 | 1996-09-27 | Fujikin:Kk | Controller |
JP2002195443A (en) * | 2000-12-28 | 2002-07-10 | Kitz Sct:Kk | Fluid control valve |
JP2005140319A (en) * | 2003-10-15 | 2005-06-02 | Ckd Corp | Malfunction preventive manual valve |
JP2007528478A (en) * | 2004-03-10 | 2007-10-11 | スワゲロック カンパニー | Fluidic device actuator with manual override |
JP2010255663A (en) * | 2009-04-21 | 2010-11-11 | Ckd Corp | Manual valve with lock mechanism |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017044322A (en) * | 2015-08-28 | 2017-03-02 | 株式会社フジキン | valve |
JP2019521300A (en) * | 2016-07-12 | 2019-07-25 | パーカー・ハニフィン・コーポレーション | Lockout tagout device and valve |
CN109555874A (en) * | 2017-09-26 | 2019-04-02 | 株式会社开滋Sct | The assemble method and its assembled configuration and diaphragm valve of diaphragm valve |
Also Published As
Publication number | Publication date |
---|---|
KR20160040134A (en) | 2016-04-12 |
JP6261593B2 (en) | 2018-01-17 |
KR102198044B1 (en) | 2021-01-04 |
JPWO2015020209A1 (en) | 2017-03-02 |
KR20150018361A (en) | 2015-02-23 |
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