TWI470159B - Fluid controller - Google Patents

Description

Fluid controller

The present invention is a three-way, two-head (two-cylinder) type three-way valve, and is a fluid controller that is a component processed by assembling a plurality of valve bodies, a plurality of shafts, and a plurality of pistons.

As a fluid controller, a three-way valve has been known, which includes a plurality of valve bodies, a main body that holds the valve body, a plurality of shafts that move up and down to switch the valve bodies, and a piston that moves the shafts up and down. Assembly of a plurality of parts (Patent Document 1).

In the case of the three-way valve of Patent Document 1, for example, in the case of replacing the valve body, the components constituting the fluid controller are sequentially removed, the valve body is replaced, and the detached parts are gradually assembled in order. In addition, at the time of cleaning, any method of cleaning with a dedicated washing machine or disassembling all parts and cleaning is employed.

Prior technical literature Patent literature

Patent Document 1: JP-A-2000-320700

In the case of the three-way valve of Patent Document 1, in the case of replacing the valve body, there is a problem of laborious work, and there is also a problem of cost or labor for dissolving and cleaning.

An object of the present invention is to provide a fluid controller that improves the maintainability of parts replacement, disassembly cleaning, and the like.

A fluid controller according to the present invention is characterized by comprising: a main body assembly comprising a plurality of valve bodies and an assembly of a plurality of parts holding the main body of the valve body; and an actuating assembly comprising a plurality of pistons and An assembly of a plurality of parts that switch a plurality of shafts of each valve body by moving up and down integrally with the piston; and separately disassembling the pre-assembled main body assembly and the actuating assembly.

The "plural number" is, for example, two, but it may be three or more. In the case of having two valve bodies and pistons, the fluid controller is, for example, in the form of a 2-way valve and a 3-way valve, and the whole is used as a 3-way valve (a 3-hole fluid controller); Limited to this. The fluid controller is sometimes in the form of, for example, a diaphragm valve, and is not limited thereto, and may be in the form of, for example, a bellows valve. A plurality of passages forming a desired shape and openings thereof (holes opening to the side or bottom surface) are provided on the main body.

The actuating structure may be a structure in which the piston is moved upward and moved downward to be compressed air (double-acting), or the energizing member may energize the piston in a direction in which the passage is often opened to compress the air. Normal open to move the piston in the direction of the blocking passage, or to energize the piston in a direction in which the energizing member is often closed, to normally open the piston in a direction in which the compressed air moves toward the open passage ( Normal close). In addition, in addition to moving the piston up and down with compressed air, it is also possible to electromagnetically drive the piston up and down.

A fluid controller in which a plurality of valve bodies and a plurality of pistons are built in is usually composed of a plurality of parts, and is treated as a decomposable assembly (finished product), and is an intermediate assembly "assembly" in the middle of assembly and disassembly. "does not exist. On the other hand, according to the present invention, a fluid controller which is an assembly of a finished product is constituted by a main body assembly and an actuating assembly which are an assembly of an intermediate product. That is, at the time of assembly, the main body assembly and the actuating assembly are respectively assembled, and the main body assembly and the actuating assembly are decomposably coupled, thereby obtaining the fluid controller of the present invention. Therefore, when it is necessary to replace the valve body, after decomposing into the main body assembly and the actuating assembly, it is only necessary to disassemble the main body assembly and replace the valve body. Further, in the same manner, the disassembly and cleaning of the main body unit can be easily performed, and the maintainability of parts replacement, disassembly cleaning, and the like can be improved.

The main body assembly and the actuating assembly may be decomposably combined, for example, by using appropriate bolt means. For example, a connecting clip such as a sanitary clamp or another fixing jig may be used instead of the bolt means. The bolt means may be formed, for example, by a plurality of internal threads provided at a predetermined portion of one of the main body assembly and the actuating assembly, and a plurality of hexagonal socket bolts that are screwed into the internal threads and inserted into the other internal threads, respectively. The time is composed of a plurality of bolts penetrating the main body assembly and the actuating assembly, and a plurality of nuts respectively screwed with the bolts.

It is preferable that either or both of the main body member and the actuating member are formed of a plurality of layers (for example, two layers, but three or more layers), and the laminates are preferably decomposed and coupled to each other.

For example, a fluid passage is provided to support the main body of the diaphragm as the valve body as a first laminate, and the second laminate in which the diaphragm is fixed via the diaphragm press plate is superposed on the first laminate, and is decomposably coupled The first layered body and the second layered body are preferably formed into a main body component. As a result, the disassembly of the main assembly is easy, and the maintainability of parts replacement, disassembly cleaning, and the like is further improved.

Further, it is preferable that the third laminate of the cylinder chamber in which the piston moves up and down and the fourth laminate in which the guide of the guide shaft are held are laminated, and the third laminate and the fourth laminate are decomposed. Body, thereby forming an actuating assembly. To decompose the laminated bodies to each other, an appropriate bolting means can be used.

In this way, the fluid controller becomes a laminate in which the plurality of layers are decomposably combined, and the necessary components are built in the laminate, and the maintainability of the parts replacement or the disassembly cleaning is further improved.

The diaphragm and the valve seat may be made of resin, but it is preferably made of metal in terms of switch reproducibility when used after decomposition.

A three-way two-head structure in which a two-way valve and a three-way valve are integrated is formed as a three-way two-headed fluid controller in which a two-way valve and a three-way valve are integrated, and may be on the two-way valve side and three. At least one of a flow passage closing compressed air introduction chamber for moving the piston downward and a flow passage opening compressed air introduction chamber for moving the piston upward are provided on the valve side, and a compressed air is introduced The compressed air introduction port for the flow passage lock and the compressed air pipe connection portion for the flow passage opening compressed air introduction chamber may be provided with a flow for moving the piston downward on the two-way valve side and the three-way valve side, respectively. a compressed air introduction chamber for the road lock and a compressed air introduction chamber for opening the flow path for moving the piston upward, and a compressed air pipe connection portion for introducing compressed air into the compressed air introduction chamber for each flow passage lock is provided. The compressed air pipe connection portion on the two-way valve side communicates with the compressed air introduction chamber for opening the flow path on the three-way valve side, and the compressed air pipe connection portion on the three-way valve side and the compressed air introduction chamber on the two-way valve side flow path opening. Connected.

In the above-mentioned configuration, "there is at least one of the above-mentioned configurations" means that the following combinations can be used: 2-way valve side blocking for 3-way valve side closing, 2-way valve side blocking 3-way valve side opening, 2-way valve 3-way valve side closing for 2-way opening, 3-way valve side opening for 2-way valve side opening, 2-way valve side blocking for open, 3-way valve side blocking for open, 2-way valve side blocking and opening 3-way valve side opening, 2-way valve side blocking - 3-way valve side closing, opening, 2-way valve side opening -3 valve side closing, opening and 2-way valve side closing Nine combinations of open-type 3-way valve side locks and open use.

Further, in this specification, the moving direction of the piston (the axial direction of the shaft) is the up and down direction. This direction is a convenient direction. If it is the actual installation, the vertical direction is not only the vertical direction but also the horizontal direction.

A fluid controller according to the present invention comprises: a body assembly comprising a plurality of valve bodies and an assembly of a plurality of parts holding the body of the valve body; and an actuating assembly comprising a plurality of pistons and An assembly of a plurality of parts that are moved up and down integrally with the piston to switch a plurality of shafts of each valve body; and the pre-assembled main body assembly and the actuating assembly are decomposedly coupled; therefore, replacement or disassembly cleaning of the valve body is required When the fluid controller is disassembled into the main body assembly and the actuating assembly, the main body assembly can be disassembled and reassembled in the case of replacing the valve body, and the disassembly and cleaning of the main body assembly can be easily performed. The maintainability of parts replacement, disassembly cleaning, etc. is improved.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following description, the up and down and left and right directions refer to the up and down and left and right of FIG. 1 . Further, the directions orthogonal to these are referred to as front and rear.

A first embodiment of a fluid controller (1) according to the present invention is shown in Figs. 1 to 5 .

The fluid controller (1) is a three-way valve having a three-way two-head (cylinder) structure in which a two-way valve on the left side and a three-way valve on the right side are integrated, and includes a main body unit (2) including An assembly of a plurality of left and right valve bodies (12) (13) and a plurality of parts (11) (12) (13) (14) (15) (16) (17) holding the body (11) of the valve body; And an actuating assembly (3) comprising two left and right pistons (31) (32) and two left and right shafts (33) for switching the valve bodies (12) (13) by moving up and down integrally with the piston (34) an assembly of a plurality of parts (31) (32) (33) (34) (35) (38) (39) (40) (41); The pre-assembled main assembly (2) and the actuating assembly (3) are combined.

The main body (11) is formed in a rectangular parallelepiped shape, and has a first hole (18) on its right side surface, a second hole (19) on its left side surface, and a third hole (see FIG. 2) on its front side (see FIG. 2). 20). Further, left and right circular recesses (21) (22) opening upward are provided on the upper surface of the main body (11).

The first hole (18) and the second hole (19) are a first inlet passage (23) that leads from the first hole (18) to the peripheral portion of the left circular recess (21) through the opening (23a), and The third hole (20) is connected from the third hole (20) to the right circular recess from the central portion of the left circular recess (21) to the first outlet passage (24) of the second hole (19). The second inlet passage (the opening (23b) shown in FIG. 5) of the peripheral portion of (22) and the middle portion of the first inlet passage (23) from the central portion of the right circular recess (22) 2 The exit passage (25) is connected to the first hole (18) and the second hole (19). An annular valve seat (26) is provided on the peripheral edge portion of the opening of the first outlet passage (24), and the same annular shape is also provided at the peripheral edge portion of the opening of the second outlet passage (25) of the right circular recess (22). Seat (27).

In addition to the body (11) described above, the body assembly (2) further has a diaphragm (valve body) (12) (13) embedded in each of the circular recesses (21) (22) for the annular valve seat ( 26) (27) pressing or leaving to switch each outlet passage (24) (25); diaphragm pressure plate (15) (16), which holds the diaphragm (12) (13) in a circular recess (21) (22) And a cuboid bonnet (14) having a recess that is embedded in the upper portion of the diaphragm platen (15) (16) and opens downward.

In addition to the left and right pistons (31) (32) and the left and right shafts (33) (34), the actuating assembly (3) further includes a rectangular parallelepiped actuating cover (35) which is formed to be movable up and down The left and right cylinder chambers (36) (37) that move the left and right pistons (31) and (32) downward, and the left and right cylindrical guides (38) (39) guide the shafts (33) (34); and a rectangular block-shaped actuating cover (40) that is immovably held by the guides (38) (39).

Each piston (31) (32) is slidably disposed in each cylinder chamber (36) (37) via an O-ring, with the upper surface of each piston (31) (32) and the top wall of the actuation cover (35) The lower side is a compressed air introduction chamber (36a) (37a) for flow path blocking, and a compressed air for opening the flow path between the lower surface of each piston (31) (32) and the upper surface of each of the guides (38) (39) Introduce chamber (36b) (37b).

The top wall of the actuating cover (35) is provided with a flow path closing compressed air pipe connecting portion (42) (43) that opens to each of the flow path closing compressed air introduction chambers (37a), and the actuating cover is provided The peripheral wall of the (35) (see Fig. 3) is provided with a flow path opening compressed air pipe connecting portion (44) (45) that opens to each of the flow path opening compressed air introduction chambers (36b) (37b). Here, in the cross-sectional view shown in Fig. 1, in order to display the compressed air introduction chamber (36b) (37b) that is opened to the flow path, the flow path opening compressed air pipe connection portion (44) (45) is shown by a broken line. .

Each of the shafts (33) (34) extends downward from a central portion of the lower surface of each of the pistons (31) and (32), and a lower end portion thereof projects downward from a lower surface of the cylindrical guide (38) (39) to abut against The central portion of the diaphragm (12) (13).

The cylindrical guide (38) (39) includes a large diameter portion (38a) (39a) which is disposed in the cylinder chamber (36) (37) via an O-ring and is provided in the actuator cover (40). The upper recess is blocked; and the small diameter portion (38b) (39b) extends downward from the lower surface of the large diameter portion (38a) (39a) to be inserted through the through hole provided in the actuator cover (40) , blocked by a recess placed on the bonnet (14).

In Fig. 1, each of the shafts (33) (34) is opened above the outlet passage (24) (25) by the elastic force of each diaphragm (12) (13) in a state where no compressed air is introduced. Each of the pistons (31) (32) abuts against the upper surface of the cylinder chamber (36) (37). In this state, the compressed air introduction chambers (36b) (37b) for exhausting the respective flow passages are exhausted, and the compressed air is introduced into the compressed air for blocking the respective passages from the compressed air piping connecting portions (42) (43) for closing the respective flow passages. The chamber (36a) (37a) is introduced, whereby the pistons (31) (32) move downward, and with this movement, the shafts (33) (34) are moved to be blocked by the respective diaphragms (12) (13). Below the exit path (24) (25). Therefore, in the three-way valve on the right side, the compressed air is introduced into the flow passage lock compressed air introduction chamber (37a) from the flow path lock compressed air pipe connection portion (43), and the two-way valve on the left side is from the flow path. The open compressed air pipe connecting portion (44) introduces compressed air into the flow passage opening compressed air introduction chamber (36b), thereby opening the left two-way valve and closing the right three-way valve. In the two-way valve on the left side, compressed air is introduced into the flow passage lock compressed air introduction chamber (36a) from the flow path lock compressed air pipe connection portion (42), and the right three-way valve is opened from the flow path. The compressed air pipe connecting portion (45) introduces compressed air into the flow passage opening compressed air introduction chamber (37b), whereby the left two-way valve can be closed and the right three-way valve can be opened.

The main body (11) and the bonnet (14) are stacked on each other to be combined with the main body bolting means (17). As shown in FIG. 2 and FIG. 5, the main body bonding bolt means (17) is provided on the main body (11). a total of six internal threads (28), a total of six bolt insertion holes (29) through the bonnet (14), and a spigot (14 side inserted through each bolt insertion hole (29) and respectively The six hexagonal socket bolts (30) are integrated into the internal threads (28). In this way, the main body assembly (2) is detachably coupled as the first laminate by the main body coupling bolt means (17). The main body (11) and the bonnet (14) as the second laminate have two diaphragms (12) (13) and two diaphragm pressure plates (15) (16) built therein.

Similarly, the actuating cover (35) and the actuating cover (40) are stacked on each other to be combined by the actuating coupling bolt means (41). As shown in FIG. 3, the actuating coupling bolt means (41) is The total of four internal threads (not shown) provided on the actuating cover (35), the total of four bolt insertion holes (46) through the actuating cover (40), and the side insertion from the actuating cover (40) Each of the bolt insertion holes (46) is screwed into a total of four hexagonal socket head bolts (47) in each internal thread. In this way, the actuating unit (3) is detachably coupled to the actuating cover (35) as the third layered body by the actuating coupling bolt means (41) and the actuating cover as the fourth layered body ( 40), and built therein two pistons (31) (32), two shafts (33) (34) and two cylindrical guides (38) (39 and so on.

As shown in FIG. 4 and the like, the assembly combining the main body assembly (2) and the actuating assembly (3) is coupled to each other by a bolt means (4) by an actuating cover (40) provided on the actuating assembly (3). Two internal threads (51), two bolt insertion holes (52) penetrating through the main body (11) of the main body assembly (2) and the bonnet (14), and bolt insertion holes through the side of the main assembly (2) (52) and screwed into two hexagonal socket bolts (53) in each internal thread (51).

In this way, the fluid controller (1) is decomposed into a laminate of a plurality of layers (shown as two layers) by means of suitable bonding means (illustrated as a combination of components by means of bolts) (4). (11) (14) (35) (40) The pre-assembled main assembly (2) and the actuating assembly (3). Therefore, according to the fluid controller (1), when the diaphragm (valve body) (12) (13) needs to be replaced, the bolt assembly (4) is combined with each other by disassembling the components, and the main assembly (2) is promoted. After the movable assembly (3), as shown in FIG. 5, the main body assembly (2) can be disassembled, and the diaphragm (12) (13) can be replaced, and the disassembly and cleaning of the main assembly (3) can be easily performed as well. The maintainability of replacement or disassembly cleaning is improved.

The diaphragm (12) (13) and the annular valve seat (26) (27) are made of metal, thereby ensuring the switch reproducibility when the fluid controller (1) is decomposed and reused.

The fluid controller (1) is not limited to the above-described embodiment, and the configuration thereof may be variously changed. For example, a multi-connection structure in which the number of holes (the number of valve bodies or the like) is three or more may be formed. Further, the configuration of the actuator of the fluid controller (1) may be all double-acting (as shown in the above embodiment, the pistons (31) (32) are moved up and down by compressed air), but Some or all of the components may be normally closed by changing the shape of the piston or changing the structure to move up and down (the piston (31) (32) moves upward, and is opened by the flow path. Compressed air is introduced into the flow passage opening compressed air introduction chamber (36b) (37b) by the compressed air pipe connecting portion (44) (45), and the piston (31) (32) is moved downward by the compression screw. An energizing member such as a spring is replaced by a compressed air inlet connecting portion (42) (43) for introducing a compressed air into the flow passage locking compressed air introduction chamber (36a) (37a) or a normally open (a mode). Normal open) (the movement of the piston (31) (32) downwards is performed by the compressed air inlet connecting portion (42) (43) for closing the flow passage (compressed air) (37a) (37a) The introduction of compressed air is performed, and the upward movement of the piston (31) (32) is performed by an energizing member such as a compression coil spring. A compressed air flow path from the open pipe connection portion (44) (45) form an open air introducing compressed air introduced into the chamber (36b) (37b) carried out into the flow path).

Further, according to the first embodiment, the compressed air pipe connecting portions (42) (43) (43) (44) are all four, and the compressed air pipe connecting portions (42) are opened and closed by mutual association. (43) (43) (44) The compressed air introduced can be switched between the 2-way valve is open, the 3-way valve is closed, the 2-way valve is closed, and the 3-way valve is open, but it can also be as shown in Fig. 6. As shown in Fig. 7, the compressed air pipe connecting portion (68) (69) is reduced to two, and the required compressed air passage (71) (72) is added to the compressed air pipe connecting portion ( 68) When the compressed air is introduced, the 2-way valve is opened and the 3-way valve is closed. When compressed air is introduced from the other compressed air piping connection (69), the 2-way valve is closed and the 3-way valve is closed. The state of being open. In the following description, the same components as those in FIG. 1 are denoted by the same reference numerals, and detailed description thereof will be omitted.

In FIG. 6 and FIG. 7, the fluid controller (1) of the second embodiment is a three-way two-way (cylinder) structure in which a two-way valve on the left side and a three-way valve on the right side are integrated. The main body assembly (2) includes a plurality of left and right valve bodies (12) (13) and a plurality of parts (11) (12) (13) (14) that hold the body (11) of the valve body ( 15) The assembly of (16) (17); and an actuating assembly (3) comprising two left and right pistons (61) (62) and switching the valve bodies (12) by moving up and down integrally with the piston (13) an assembly of a plurality of parts (61) (62) (63) (64) (65) (38) (39) (40) (41) of the left and right shafts (63) (64); The pre-assembled body assembly (2) and the actuating assembly (3) are decomposably coupled by means of bolts (4) by means of a combination of components.

Each piston (61) (62) is slidably disposed in each cylinder chamber (66) (67) via an O-ring, with the upper surface of each piston (61) (62) and the top wall of the actuation cover (65) The lower side is a compressed air introduction chamber (66a) for flow path blocking, and the flow path is opened for compression between the lower surface of each piston (61) (62) and the upper surface of each of the guides (38) (39). Air introduction chamber (66b) (67b).

In the upper portion of each of the shafts (63) (64), a flow path is provided in which the lower end opens to the flow passage opening compressed air introduction chamber (66b) (67b) and the upper end opens to the upper end surface of each of the shafts (63) (64). Open compressed air passage (71) (72).

A compression air pipe connection portion (68) (69) is provided on the left and right sides of the actuation cover (65). These compressed air pipe connecting portions (68) (69) also serve as a flow path closing compressed air introducing chamber (66a) (67a) and a flow path opening compressed air introducing chamber (66b) (67b). That is, the compressed air pipe connecting portion (68) on the left side passes through the main passage (73) to the flow path opening compressed air passage (71) on the two-way valve side, and is passed through the inverted L-shaped extension passage (75). The compressed air introduction chamber (67a) for blocking the flow path on the three-way valve side, and the compressed air piping connection portion (69) on the right side is connected to the compressed air passage for opening the flow path on the three-way valve side via the main passage (74) (72) And the compressed air introduction chamber (66a) for the flow path blocking on the 2-way valve side is passed through the inverted L-shaped extension passage (76).

Further, each of the extension passages (75) (76) is not in the same cross section as the compressed air piping connection portion (68) (69), but is shown in Fig. 7 before and after (upper and lower in Fig. 7). Off, but in Figure 6, for the sake of convenience, it is shown on the same figure.

In Fig. 6, in the state where compressed air is not introduced, the respective shafts (63) (64) are opened above the outlet passage (24) (25) by the elastic force of each diaphragm (12) (13). The upper surface of each piston (61) (62) abuts against the upper surface of the cylinder chamber (66) (67). In this state, compressed air is introduced from the compressed air pipe connection portion (68) on the left side, and the compressed air is introduced into the 2-way valve via the main passage (73) and the flow passage opening compressed air passage (71) on the 2-way valve side. The side flow path opening compressed air introduction chamber (66b) is introduced into the flow path blocking compressed air introduction chamber (67a) on the three-way valve side via the extension passage (75). As a result, the piston (61) on the 2-way valve side moves upward, and the piston (62) on the 3-way valve side moves downward. Therefore, the passage (24) on the 2-way valve side is in the open state, and the passage (25) on the 3-way valve side is closed.

In the state of Fig. 6, compressed air is introduced from the compressed air pipe connection portion (69) on the right side, and the compressed air is introduced through the main passage (74) and the flow passage opening compressed air passage (72) on the three-way valve side. The flow passage opening on the valve side is opened in the compressed air introduction chamber (67b), and is introduced into the flow passage lock compressed air introduction chamber (66a) on the two-way valve side via the extension passage (76). As a result, the piston (61) on the 2-way valve side moves downward, and the piston (62) on the 3-way valve side moves upward. Therefore, the passage (24) on the 2-way valve side is closed, and the passage (25) on the 3-way valve side is opened.

In the fluid controller of the second embodiment, as in the fluid controller of the first embodiment, the maintainability of parts replacement, disassembly cleaning, and the like is improved, and the 2-way valve can be simultaneously opened or closed in one operation and 3 The valve is closed or opened, so that its switching control can be easily and surely performed.

Industrial use possibility

According to the fluid controller of the present invention, for example, as a three-way valve, it can be used in various applications in order to switch the fluid passage, and the maintainability of parts replacement, disassembly cleaning, and the like is improved, so that the treatment is easy and the use is expanded.

1. . . Fluid controller

2. . . Body component

3. . . Actuating component

4. . . Components are combined with each other by bolts

11. . . Main body (1st layer)

12, 13. . . Diaphragm

14. . . Bonnet (2nd layer)

15,16. . . Diaphragm pressure plate

17. . . Main body combined with bolts

twenty three. . . First inlet passage (fluid passage)

twenty four. . . First exit passage (fluid passage)

25. . . Second exit passage (fluid passage)

31, 32. . . piston

33, 34. . . Shaft

35. . . Actuation cover (3rd layer)

36, 37. . . Cylinder room

36a, 37a. . . Road lock with compressed air introduction chamber

36b, 37b. . . Road open compressed air introduction room

38, 39. . . Guide

40. . . Actuating hood (4th layer)

42, 43. . . Compressed air piping connection for flow path blocking

61, 62. . . piston

63, 64. . . Shaft

65. . . Actuation cover (3rd layer)

66, 67. . . Cylinder room

66a, 67a. . . Compressed air introduction chamber for flow path blocking

66b, 67b. . . Compressed air introduction chamber for open flow

68, 69. . . Compressed air piping connection

Fig. 1 is a front sectional view showing a first embodiment of a fluid controller according to the present invention.

2 is a perspective view showing a main body assembly of a fluid controller in accordance with the present invention.

3 is a perspective view showing an actuating assembly of a fluid controller in accordance with the present invention.

4 is an exploded perspective view of a fluid controller in accordance with the present invention.

Figure 5 is an exploded perspective view of the main assembly of the fluid controller in accordance with the present invention.

Figure 6 is a front cross-sectional view showing a second embodiment of a fluid controller according to the present invention.

Figure 7 is the same plan view.

1. . . Fluid controller

2. . . Body component

3. . . Actuating component

4. . . Components are combined with each other by bolts

11. . . main body

14. . . Bonnet

19. . . 2nd hole

20. . . Third hole

33. . . Shaft

34. . . Shaft

35. . . Actuating cover

38. . . Guide

39. . . Guide

40. . . Actuating hood

41. . . Actuating bolting

44. . . Flow path opening compressed air piping connection

45. . . Flow path opening compressed air piping connection

46. . . Bolt insertion hole

47. . . Hexagon socket head bolt

51. . . internal thread

52. . . Bolt insertion hole

53. . . Hexagon socket head bolt

Claims (5)

A fluid controller, comprising: a body assembly, which is an assembly of a plurality of parts, comprising a plurality of valve bodies and a body for holding the valve body; and an actuating assembly, which is an assembly of a plurality of parts, a plurality of pistons and a plurality of shafts for opening and closing the valve body by moving up and down integrally with the piston; respectively, the pre-assembled main body assembly and the actuating assembly are combined in a decomposable manner; and the main assembly and the actuating assembly are respectively The two or both are formed by a plurality of laminates. The fluid controller according to claim 1, wherein the fluid passage is provided and the main body of the diaphragm as the valve body is supported as the first laminate, and the first laminate is superposed on the first laminate to fix the diaphragm via the diaphragm platen. The second layered body is formed by combining the first layered body and the second layered body in a decomposable manner. The fluid controller of claim 1, wherein the third laminate formed by the cylinder chamber in which the piston moves up and down and the fourth laminate in which the guide of the guide shaft is held are laminated, by being decomposable The method combines the third laminate with the fourth laminate to form an actuation assembly. The fluid controller according to any one of claims 1 to 3, wherein a 2-way 2-head structure in which a 2-way valve and a 3-way valve are integrated is formed, and is provided on the 2-way valve side and the 3-way valve side, respectively. At least one of a compressed air introduction chamber for blocking a flow path for moving the piston downward and a compressed air introduction chamber for opening a flow path for moving the piston upward, and for introducing compressed air into the flow path for closing a compressed air introduction chamber and a compressed air pipe connection portion of the compressed air introduction chamber for opening the flow path. The fluid controller according to any one of claims 1 to 3, wherein a 2-way 2-head structure in which a 2-way valve and a 3-way valve are integrated is formed, and is provided on the 2-way valve side and the 3-way valve side, respectively. a compressed air introduction chamber for closing the flow path for moving the piston downward, and a compressed air introduction chamber for opening the flow path for moving the piston upward, and each of the compressed air introduction chambers for introducing compressed air into each of the flow passages is introduced The compressed air pipe connection portion of the chamber, the compressed air pipe connection portion on the two-way valve side communicates with the compressed air introduction chamber for opening the flow path on the three-way valve side, and the compressed air pipe connection portion on the three-way valve side and the two-way valve side The flow path is opened by the compressed air introduction chamber.