JP5543357B2 - Duv素子のための緻密で均質なフッ化物膜及びその作製方法 - Google Patents
Duv素子のための緻密で均質なフッ化物膜及びその作製方法 Download PDFInfo
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- JP5543357B2 JP5543357B2 JP2010535959A JP2010535959A JP5543357B2 JP 5543357 B2 JP5543357 B2 JP 5543357B2 JP 2010535959 A JP2010535959 A JP 2010535959A JP 2010535959 A JP2010535959 A JP 2010535959A JP 5543357 B2 JP5543357 B2 JP 5543357B2
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- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 title description 51
- 238000004519 manufacturing process Methods 0.000 title description 4
- 239000000463 material Substances 0.000 claims description 61
- 239000000758 substrate Substances 0.000 claims description 53
- 238000000576 coating method Methods 0.000 claims description 48
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 47
- 230000003287 optical effect Effects 0.000 claims description 46
- 239000011248 coating agent Substances 0.000 claims description 37
- 239000013078 crystal Substances 0.000 claims description 20
- 238000000034 method Methods 0.000 claims description 13
- 229910001512 metal fluoride Inorganic materials 0.000 claims description 11
- 239000000377 silicon dioxide Substances 0.000 claims description 9
- 238000009499 grossing Methods 0.000 claims description 8
- 229910052761 rare earth metal Inorganic materials 0.000 claims description 6
- -1 rare earth metal fluoride Chemical class 0.000 claims description 6
- KLZUFWVZNOTSEM-UHFFFAOYSA-K Aluminum fluoride Inorganic materials F[Al](F)F KLZUFWVZNOTSEM-UHFFFAOYSA-K 0.000 claims description 5
- 238000007789 sealing Methods 0.000 claims description 5
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 claims description 3
- 229910001634 calcium fluoride Inorganic materials 0.000 claims description 3
- 229910052692 Dysprosium Inorganic materials 0.000 claims description 2
- 229910052779 Neodymium Inorganic materials 0.000 claims description 2
- KBQHZAAAGSGFKK-UHFFFAOYSA-N dysprosium atom Chemical compound [Dy] KBQHZAAAGSGFKK-UHFFFAOYSA-N 0.000 claims description 2
- 229910052746 lanthanum Inorganic materials 0.000 claims description 2
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 claims description 2
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 claims description 2
- 229910001635 magnesium fluoride Inorganic materials 0.000 claims description 2
- QEFYFXOXNSNQGX-UHFFFAOYSA-N neodymium atom Chemical compound [Nd] QEFYFXOXNSNQGX-UHFFFAOYSA-N 0.000 claims description 2
- FVRNDBHWWSPNOM-UHFFFAOYSA-L strontium fluoride Chemical compound [F-].[F-].[Sr+2] FVRNDBHWWSPNOM-UHFFFAOYSA-L 0.000 claims description 2
- 229910052727 yttrium Inorganic materials 0.000 claims description 2
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 claims description 2
- IRPGOXJVTQTAAN-UHFFFAOYSA-N 2,2,3,3,3-pentafluoropropanal Chemical compound FC(F)(F)C(F)(F)C=O IRPGOXJVTQTAAN-UHFFFAOYSA-N 0.000 claims 1
- 229910052688 Gadolinium Inorganic materials 0.000 claims 1
- OYLGJCQECKOTOL-UHFFFAOYSA-L barium fluoride Chemical compound [F-].[F-].[Ba+2] OYLGJCQECKOTOL-UHFFFAOYSA-L 0.000 claims 1
- 229910001632 barium fluoride Inorganic materials 0.000 claims 1
- UIWYJDYFSGRHKR-UHFFFAOYSA-N gadolinium atom Chemical compound [Gd] UIWYJDYFSGRHKR-UHFFFAOYSA-N 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 229910001637 strontium fluoride Inorganic materials 0.000 claims 1
- 239000010410 layer Substances 0.000 description 122
- 239000010408 film Substances 0.000 description 52
- 229910005690 GdF 3 Inorganic materials 0.000 description 50
- 229910016569 AlF 3 Inorganic materials 0.000 description 47
- 238000000151 deposition Methods 0.000 description 34
- 229910004298 SiO 2 Inorganic materials 0.000 description 29
- 229910004261 CaF 2 Inorganic materials 0.000 description 23
- 229910017768 LaF 3 Inorganic materials 0.000 description 14
- 239000000565 sealant Substances 0.000 description 9
- 230000008021 deposition Effects 0.000 description 8
- 239000011247 coating layer Substances 0.000 description 6
- 238000000869 ion-assisted deposition Methods 0.000 description 6
- BYMUNNMMXKDFEZ-UHFFFAOYSA-K trifluorolanthanum Chemical compound F[La](F)F BYMUNNMMXKDFEZ-UHFFFAOYSA-K 0.000 description 6
- 101000643895 Homo sapiens Ubiquitin carboxyl-terminal hydrolase 6 Proteins 0.000 description 5
- 101150097620 TRE1 gene Proteins 0.000 description 5
- 102100021015 Ubiquitin carboxyl-terminal hydrolase 6 Human genes 0.000 description 5
- 238000010549 co-Evaporation Methods 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- 238000001659 ion-beam spectroscopy Methods 0.000 description 5
- 239000010409 thin film Substances 0.000 description 5
- 238000002441 X-ray diffraction Methods 0.000 description 4
- 229910001618 alkaline earth metal fluoride Inorganic materials 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 229910021486 amorphous silicon dioxide Inorganic materials 0.000 description 3
- 238000000089 atomic force micrograph Methods 0.000 description 3
- 238000004630 atomic force microscopy Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 238000011109 contamination Methods 0.000 description 3
- 238000005137 deposition process Methods 0.000 description 3
- 239000011737 fluorine Substances 0.000 description 3
- 229910052731 fluorine Inorganic materials 0.000 description 3
- 230000004907 flux Effects 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- TYIZUJNEZNBXRS-UHFFFAOYSA-K trifluorogadolinium Chemical compound F[Gd](F)F TYIZUJNEZNBXRS-UHFFFAOYSA-K 0.000 description 3
- 102100039939 Growth/differentiation factor 8 Human genes 0.000 description 2
- 101000886562 Homo sapiens Growth/differentiation factor 8 Proteins 0.000 description 2
- 229910002319 LaF3 Inorganic materials 0.000 description 2
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 2
- 230000003667 anti-reflective effect Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 239000002612 dispersion medium Substances 0.000 description 2
- 239000011777 magnesium Substances 0.000 description 2
- 229910052749 magnesium Inorganic materials 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000001393 microlithography Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000012856 packing Methods 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 238000000391 spectroscopic ellipsometry Methods 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- 229910005693 GdF3 Inorganic materials 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 101000929049 Xenopus tropicalis Derriere protein Proteins 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
- 210000004204 blood vessel Anatomy 0.000 description 1
- 210000004556 brain Anatomy 0.000 description 1
- 239000013590 bulk material Substances 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000000572 ellipsometry Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 210000001508 eye Anatomy 0.000 description 1
- 150000002222 fluorine compounds Chemical class 0.000 description 1
- MEANOSLIBWSCIT-UHFFFAOYSA-K gadolinium trichloride Chemical compound Cl[Gd](Cl)Cl MEANOSLIBWSCIT-UHFFFAOYSA-K 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 238000001356 surgical procedure Methods 0.000 description 1
- 238000002207 thermal evaporation Methods 0.000 description 1
- 238000000427 thin-film deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
- G02B1/113—Anti-reflection coatings using inorganic layer materials only
- G02B1/115—Multilayers
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
- G02B5/0816—Multilayer mirrors, i.e. having two or more reflecting layers
- G02B5/0825—Multilayer mirrors, i.e. having two or more reflecting layers the reflecting layers comprising dielectric materials only
- G02B5/0833—Multilayer mirrors, i.e. having two or more reflecting layers the reflecting layers comprising dielectric materials only comprising inorganic materials only
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
- G02B5/0891—Ultraviolet [UV] mirrors
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/283—Interference filters designed for the ultraviolet
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/285—Interference filters comprising deposited thin solid films
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- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Inorganic Chemistry (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Surface Treatment Of Optical Elements (AREA)
- Physical Vapour Deposition (AREA)
Description
光学素子を提供する工程、及び
光学素子を、
(a)高屈折率希土類金属フッ化物及び低屈折率金属フッ化物を含む少なくとも1つの均質な共デポジション層、及び
(b)共デポジション層の上面に被着された低屈折率金属フッ化物材料のL層からなる少なくとも1つのコーティングスタックを有するようにコーティングする工程、
を含み、
共デポジション層及びL層はそれぞれ、互いに独立に、5nm〜70nmの範囲にある厚さを有し、共デポジション層及びL層は合わせてスタックをなす。
50 共デポジション層(AlF3 、GdF3層(L、H層))
70 表面シーラント層
100 SiO2またはCaF2の基板
Claims (10)
- コーテッド光学素子において、前記光学素子が、
基板、及び、
(i)該基板上に被着された高屈折率希土類金属フッ化物材料及び低屈折率金属フッ化物材料を含む少なくとも1つの均質な共デポジション層、及び(ii)前記共デポジション層の上面に被着された低屈折率金属フッ化物材料のL層からなるL層/共デポジション層の対を複数対、
有してなり、
前記共デポジション層が5nm〜70nmの範囲にある厚さを有し、前記L層が5nm〜70nmの範囲にある厚さを有し、
少なくとも1つの界面平滑化層が、前記複数対のうち少なくとも1つの対のL層と共デポジション層の間に挿入される、
ことを特徴とするコーテッド光学素子。 - 前記高屈折率希土類金属フッ化物の金属が、ネオジム、ランタン、ジスプロシウム、イットリウム及びガドリニウムからなる群から選ばれることを特徴とする請求項1に記載のコーテッド光学素子。
- 前記低屈折率金属フッ化物が、フッ化アルミニウム、フッ化カルシウム、フッ化マグネシウム、フッ化バリウム及びフッ化ストロンチウムからなる群から選ばれることを特徴とする請求項1または2に記載のコーテッド光学素子。
- 前記基板が、シリカ基板、石英ガラス基板、高純度石英ガラス基板及びフッ化カルシウム単結晶基板からなる群から選ばれることを特徴とする請求項1から3のいずれか1項に記載のコーテッド光学素子。
- 前記コーテッド光学素子の上面の最終層として施される封止層をさらに有し、前記封止層が、シリカ、石英ガラス、高純度石英ガラス及びフッ素ドープ石英ガラスからなる群から選ばれ、5〜70nmの範囲にある厚さを有することを特徴とする請求項1から4のいずれか1項に記載のコーテッド光学素子。
- 前記平滑化層が、シリカ、石英ガラス、高純度石英ガラス及びフッ素ドープ石英ガラスからなる群から選ばれる、
ことを特徴とする請求項1から5のいずれか1項に記載のコーテッド光学素子。 - 前記共デポジション層が2〜30重量%の低屈折率金属フッ化物及び70〜98重量%の高屈折率材料を含むことを特徴とする請求項1から6のいずれか1項に記載のコーテッド光学素子。
- 光学素子をコーティングする方法において、前記方法が、
光学素子を提供する工程、及び
前記光学素子を複数のコーティングスタックでコーティングする工程であって、当該コーティングスタックが、
(a)高屈折率希土類金属フッ化物及び低屈折率金属フッ化物を含む少なくとも1つの均質な共デポジション層、及び
(b)前記共デポジション層の上面に被着された低屈折率金属フッ化物材料のL層、
を含む工程、
を含み、
前記共デポジション層及び前記L層はそれぞれ、互いに独立に、5nm〜70nmの範囲にある厚さを有し、
少なくとも1つの界面平滑化層が、前記スタックのうち少なくとも1つのスタックのL層と共デポジション層の間に挿入されることを特徴とする方法。 - 前記方法が最終スタックの上面に封止層を施す工程をさらに含むことを特徴とする請求項8に記載の方法。
- 前記界面平滑化層が、シリカ、石英ガラス、高純度石英ガラス及びフッ素ドープ石英ガラスからなる群から選ばれる、
ことを特徴とする請求項8または9に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US478407P | 2007-11-30 | 2007-11-30 | |
US61/004,784 | 2007-11-30 | ||
PCT/US2008/012912 WO2009070227A1 (en) | 2007-11-30 | 2008-11-19 | Dense homogeneous fluoride films for duv elements and method of preparing same |
Publications (2)
Publication Number | Publication Date |
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JP2011505592A JP2011505592A (ja) | 2011-02-24 |
JP5543357B2 true JP5543357B2 (ja) | 2014-07-09 |
Family
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Application Number | Title | Priority Date | Filing Date |
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JP2010535959A Active JP5543357B2 (ja) | 2007-11-30 | 2008-11-19 | Duv素子のための緻密で均質なフッ化物膜及びその作製方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US8169705B2 (ja) |
EP (1) | EP2215502B1 (ja) |
JP (1) | JP5543357B2 (ja) |
CN (1) | CN101925837B (ja) |
WO (1) | WO2009070227A1 (ja) |
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