JP5537555B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
- Publication number
- JP5537555B2 JP5537555B2 JP2011533948A JP2011533948A JP5537555B2 JP 5537555 B2 JP5537555 B2 JP 5537555B2 JP 2011533948 A JP2011533948 A JP 2011533948A JP 2011533948 A JP2011533948 A JP 2011533948A JP 5537555 B2 JP5537555 B2 JP 5537555B2
- Authority
- JP
- Japan
- Prior art keywords
- insulating film
- semiconductor device
- gate
- gate electrode
- dielectric constant
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000004065 semiconductor Substances 0.000 title claims description 105
- 230000004888 barrier function Effects 0.000 claims description 26
- 150000004767 nitrides Chemical class 0.000 claims description 20
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 5
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 5
- 229910002704 AlGaN Inorganic materials 0.000 claims description 2
- 238000000034 method Methods 0.000 description 18
- 238000004519 manufacturing process Methods 0.000 description 14
- 230000000694 effects Effects 0.000 description 9
- 230000003071 parasitic effect Effects 0.000 description 6
- 238000001020 plasma etching Methods 0.000 description 5
- 230000014509 gene expression Effects 0.000 description 3
- 230000001629 suppression Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000005669 field effect Effects 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/778—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface
- H01L29/7786—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with direct single heterostructure, i.e. with wide bandgap layer formed on top of active layer, e.g. direct single heterostructure MIS-like HEMT
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
- H01L29/42356—Disposition, e.g. buried gate electrode
- H01L29/4236—Disposition, e.g. buried gate electrode within a trench, e.g. trench gate electrode, groove gate electrode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/51—Insulating materials associated therewith
- H01L29/511—Insulating materials associated therewith with a compositional variation, e.g. multilayer structures
- H01L29/513—Insulating materials associated therewith with a compositional variation, e.g. multilayer structures the variation being perpendicular to the channel plane
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66446—Unipolar field-effect transistors with an active layer made of a group 13/15 material, e.g. group 13/15 velocity modulation transistor [VMT], group 13/15 negative resistance FET [NERFET]
- H01L29/66462—Unipolar field-effect transistors with an active layer made of a group 13/15 material, e.g. group 13/15 velocity modulation transistor [VMT], group 13/15 negative resistance FET [NERFET] with a heterojunction interface channel or gate, e.g. HFET, HIGFET, SISFET, HJFET, HEMT
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/20—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds
- H01L29/2003—Nitride compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
- H01L29/42364—Gate electrodes for field effect devices for field-effect transistors with insulated gate characterised by the insulating layer, e.g. thickness or uniformity
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Junction Field-Effect Transistors (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
Description
本実施の形態の半導体装置は、III−V族窒化物半導体からなる半導体層と、半導体層に形成された溝部と、少なくとも溝部の底面上に形成され、第1の絶縁膜と第1の絶縁膜よりも高誘電率の第2の絶縁膜との積層膜であるゲート絶縁膜と、ゲート絶縁膜上に形成されたゲート電極と、ゲート電極を挟んで、半導体層上に形成されるソース電極およびドレイン電極と、を有している。そして、第2の絶縁膜が、ゲート電極下にのみ選択的に形成されている。さらに、溝部以外の半導体層表面と、ゲート絶縁膜との間に、第3の絶縁膜が形成されている。
第1の絶縁膜19および第2の絶縁膜20の厚さ、及び、リセス深さに関して、上記関係式を満たすことにより、高周波動作に適したな窒化物半導体装置が得られる。
図8は、本実施の形態の本実施の形態の窒化物系半導体装置の構成を示す断面図である。本実施の形態の半導体装置は、ゲート電極22と、ソース電極24およびドレイン電極26との間の領域に、第1の絶縁膜19が存在するが、第3の絶縁膜28が存在しないこと以外は第1の実施の形態と同様である。したがって、第1の実施の形態と重複する内容については、記載を省略する。
図9は、本実施の形態の本実施の形態の窒化物系半導体装置の構成を示す断面図である。本実施の形態の半導体装置は、ゲート電極22と、ソース電極24およびドレイン電極26との間の領域に、第1の絶縁膜19が存在すること以外は第1の実施の形態と同様である。したがって、第1の実施の形態と重複する内容については、記載を省略する。
図10は、本実施の形態の本実施の形態の窒化物系半導体装置の構成を示す断面図である。本実施の形態の半導体装置は、リセス構造の溝部16の底面のみに、高誘電率の第2の絶縁膜20が存在すること以外は第1の実施の形態と同様である。したがって、第1の実施の形態と重複する内容については、記載を省略する。
図11は、本実施の形態の窒化物系半導体装置の構成を示す断面図である。本実施の形態の半導体装置は、リセス構造の溝部16の底面のみに、高誘電率の第2の絶縁膜20が存在し、かつ、第1の絶縁膜19とゲート電極22との間に空間が存在する点で、第1の実施の形態と異なっている。第1の実施の形態と重複する内容については、記載を省略する。
図12は、本実施の形態の窒化物系半導体装置の構成を示す断面図である。本実施の形態の半導体装置は、リセス構造の溝部16の底面のみに、高誘電率の第2の絶縁膜20が存在し、かつ、溝部16の側部で第1の絶縁膜19とゲート電極22との間、および、第1の絶縁膜20と第2の絶縁膜20との間に空間が存在する点で、第1の実施の形態と異なっている。第1の実施の形態と重複する内容については、記載を省略する。
図13は、本実施の形態の窒化物系半導体装置の構成を示す断面図である。本実施の形態の半導体装置は、リセス構造の溝部16の側面に、第1の絶縁膜19と高誘電率の第2の絶縁膜20とが形成されていない点で、第1の実施の形態と異なっている。第1の実施の形態と重複する内容については、記載を省略する。
12 動作層
14 障壁層
16 溝部
18 ゲート絶縁膜
19 第1の絶縁膜
20 第2の絶縁膜
22 ゲート電極
24 ソース電極
26 ドレイン電極
28 第3の絶縁膜
Claims (4)
- III−V族窒化物半導体からなる半導体層と、
前記半導体層に形成された溝部と、
少なくとも前記溝部の底面上に形成され、第1の絶縁膜と前記第1の絶縁膜よりも高誘電率の第2の絶縁膜との積層膜であるゲート絶縁膜と、
前記ゲート絶縁膜上に形成されたゲート電極と、
前記ゲート電極を挟んで、前記半導体層上に形成されるソース電極およびドレイン電極と、を有し、
前記第2の絶縁膜が、前記ゲート電極下にのみ選択的に形成され、
前記溝部以外の前記半導体層表面と、前記第2の絶縁膜との間に、第3の絶縁膜が形成されていることを特徴とする半導体装置。 - 前記第1の絶縁膜が窒化珪素で形成されていることを特徴とする請求項1記載の半導体装置。
- 前記半導体層はGaNからなる動作層と、前記動作層上に形成されたAlGaN、GaN、InAlNのいずれか、または、その組み合わせにより構成される障壁層との積層構造を有することを特徴とする請求項2記載の半導体装置。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2009/004981 WO2011039800A1 (ja) | 2009-09-29 | 2009-09-29 | 半導体装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2011039800A1 JPWO2011039800A1 (ja) | 2013-02-21 |
JP5537555B2 true JP5537555B2 (ja) | 2014-07-02 |
Family
ID=43825658
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011533948A Active JP5537555B2 (ja) | 2009-09-29 | 2009-09-29 | 半導体装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US9276099B2 (ja) |
JP (1) | JP5537555B2 (ja) |
WO (1) | WO2011039800A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9620599B2 (en) | 2015-02-04 | 2017-04-11 | Kabushiki Kaisha Toshiba | GaN-based semiconductor transistor |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101652403B1 (ko) * | 2010-08-13 | 2016-08-31 | 삼성전자주식회사 | 전력 전자소자 및 그 제조방법 |
US9070758B2 (en) * | 2011-06-20 | 2015-06-30 | Imec | CMOS compatible method for manufacturing a HEMT device and the HEMT device thereof |
US20130105817A1 (en) * | 2011-10-26 | 2013-05-02 | Triquint Semiconductor, Inc. | High electron mobility transistor structure and method |
JP2013149686A (ja) * | 2012-01-17 | 2013-08-01 | Elpida Memory Inc | 半導体装置 |
US8933507B2 (en) * | 2012-07-10 | 2015-01-13 | Taiwan Semiconductor Manufacturing Co., Ltd. | Metal/polysilicon gate trench power mosfet |
US8890264B2 (en) | 2012-09-26 | 2014-11-18 | Intel Corporation | Non-planar III-V field effect transistors with conformal metal gate electrode and nitrogen doping of gate dielectric interface |
US8823059B2 (en) | 2012-09-27 | 2014-09-02 | Intel Corporation | Non-planar semiconductor device having group III-V material active region with multi-dielectric gate stack |
US8796751B2 (en) | 2012-11-20 | 2014-08-05 | Micron Technology, Inc. | Transistors, memory cells and semiconductor constructions |
US9564330B2 (en) * | 2013-08-01 | 2017-02-07 | Taiwan Semiconductor Manufacturing Co., Ltd. | Normally-off enhancement-mode MISFET |
US9331154B2 (en) * | 2013-08-21 | 2016-05-03 | Epistar Corporation | High electron mobility transistor |
JP6233088B2 (ja) * | 2014-02-21 | 2017-11-22 | パナソニック株式会社 | 電界効果トランジスタ |
JP6609926B2 (ja) * | 2015-01-21 | 2019-11-27 | 富士通株式会社 | 化合物半導体装置及びその製造方法 |
JP6591169B2 (ja) | 2015-02-04 | 2019-10-16 | 株式会社東芝 | 半導体装置及びその製造方法 |
JP6659283B2 (ja) * | 2015-09-14 | 2020-03-04 | 株式会社東芝 | 半導体装置 |
JP6176677B2 (ja) * | 2015-10-16 | 2017-08-09 | ローム株式会社 | 窒化物半導体装置 |
US10068976B2 (en) * | 2016-07-21 | 2018-09-04 | Taiwan Semiconductor Manufacturing Co., Ltd. | Enhancement mode field-effect transistor with a gate dielectric layer recessed on a composite barrier layer for high static performance |
CN109690784A (zh) * | 2016-08-22 | 2019-04-26 | 香港科技大学 | 具有栅极-电介质/半导体界面保护层的金属绝缘体半导体晶体管 |
TWI604605B (zh) * | 2016-12-15 | 2017-11-01 | 國立交通大學 | 半導體裝置及其製造方法 |
US11670699B2 (en) | 2016-12-15 | 2023-06-06 | National Yang Ming Chiao Tung University | Semiconductor device and method of manufacturing the same |
CN109755301B (zh) * | 2019-01-15 | 2024-05-31 | 中山大学 | 一种高质量栅界面的GaN MISFET器件及其制备方法 |
Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002324813A (ja) * | 2001-02-21 | 2002-11-08 | Nippon Telegr & Teleph Corp <Ntt> | ヘテロ構造電界効果トランジスタ |
JP2006222414A (ja) * | 2005-01-14 | 2006-08-24 | Matsushita Electric Ind Co Ltd | 半導体装置 |
WO2007016477A2 (en) * | 2005-07-29 | 2007-02-08 | International Rectifier Corporation | Normally off iii-nitride semiconductor device having a programmable gate |
JP2007067240A (ja) * | 2005-08-31 | 2007-03-15 | Toshiba Corp | 窒化物系半導体装置 |
JP2007081346A (ja) * | 2005-09-16 | 2007-03-29 | Fujitsu Ltd | 窒化物半導体電界効果トランジスタ |
JP2008103617A (ja) * | 2006-10-20 | 2008-05-01 | Toshiba Corp | 窒化物系半導体装置 |
JP2008205392A (ja) * | 2007-02-22 | 2008-09-04 | Fujitsu Ltd | 半導体装置及びその製造方法 |
JP2008270794A (ja) * | 2007-03-29 | 2008-11-06 | Matsushita Electric Ind Co Ltd | 半導体装置及びその製造方法 |
JP2008288405A (ja) * | 2007-05-18 | 2008-11-27 | Nippon Telegr & Teleph Corp <Ntt> | ヘテロ構造電界効果トランジスタ |
JP2008306058A (ja) * | 2007-06-08 | 2008-12-18 | Sanken Electric Co Ltd | 半導体装置 |
JP2009004743A (ja) * | 2007-05-18 | 2009-01-08 | Sanken Electric Co Ltd | 電界効果半導体装置 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2267784B1 (en) * | 2001-07-24 | 2020-04-29 | Cree, Inc. | INSULATING GATE AlGaN/GaN HEMT |
US7439555B2 (en) * | 2003-12-05 | 2008-10-21 | International Rectifier Corporation | III-nitride semiconductor device with trench structure |
US7217960B2 (en) | 2005-01-14 | 2007-05-15 | Matsushita Electric Industrial Co., Ltd. | Semiconductor device |
US20070018199A1 (en) * | 2005-07-20 | 2007-01-25 | Cree, Inc. | Nitride-based transistors and fabrication methods with an etch stop layer |
US8399911B2 (en) * | 2006-06-07 | 2013-03-19 | Imec | Enhancement mode field effect device and the method of production thereof |
JP5217157B2 (ja) | 2006-12-04 | 2013-06-19 | 日本電気株式会社 | 電界効果トランジスタおよびその製造方法 |
US20080203433A1 (en) * | 2007-02-27 | 2008-08-28 | Sanken Electric Co., Ltd. | High electron mobility transistor and method of forming the same |
JP2008270521A (ja) | 2007-04-20 | 2008-11-06 | Matsushita Electric Ind Co Ltd | 電界効果トランジスタ |
JP2010098047A (ja) * | 2008-10-15 | 2010-04-30 | Sanken Electric Co Ltd | 窒化物半導体装置 |
-
2009
- 2009-09-29 WO PCT/JP2009/004981 patent/WO2011039800A1/ja active Application Filing
- 2009-09-29 JP JP2011533948A patent/JP5537555B2/ja active Active
-
2012
- 2012-03-09 US US13/415,926 patent/US9276099B2/en active Active
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002324813A (ja) * | 2001-02-21 | 2002-11-08 | Nippon Telegr & Teleph Corp <Ntt> | ヘテロ構造電界効果トランジスタ |
JP2006222414A (ja) * | 2005-01-14 | 2006-08-24 | Matsushita Electric Ind Co Ltd | 半導体装置 |
WO2007016477A2 (en) * | 2005-07-29 | 2007-02-08 | International Rectifier Corporation | Normally off iii-nitride semiconductor device having a programmable gate |
JP2007067240A (ja) * | 2005-08-31 | 2007-03-15 | Toshiba Corp | 窒化物系半導体装置 |
JP2007081346A (ja) * | 2005-09-16 | 2007-03-29 | Fujitsu Ltd | 窒化物半導体電界効果トランジスタ |
JP2008103617A (ja) * | 2006-10-20 | 2008-05-01 | Toshiba Corp | 窒化物系半導体装置 |
JP2008205392A (ja) * | 2007-02-22 | 2008-09-04 | Fujitsu Ltd | 半導体装置及びその製造方法 |
JP2008270794A (ja) * | 2007-03-29 | 2008-11-06 | Matsushita Electric Ind Co Ltd | 半導体装置及びその製造方法 |
JP2008288405A (ja) * | 2007-05-18 | 2008-11-27 | Nippon Telegr & Teleph Corp <Ntt> | ヘテロ構造電界効果トランジスタ |
JP2009004743A (ja) * | 2007-05-18 | 2009-01-08 | Sanken Electric Co Ltd | 電界効果半導体装置 |
JP2008306058A (ja) * | 2007-06-08 | 2008-12-18 | Sanken Electric Co Ltd | 半導体装置 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9620599B2 (en) | 2015-02-04 | 2017-04-11 | Kabushiki Kaisha Toshiba | GaN-based semiconductor transistor |
Also Published As
Publication number | Publication date |
---|---|
JPWO2011039800A1 (ja) | 2013-02-21 |
US20120161153A1 (en) | 2012-06-28 |
WO2011039800A1 (ja) | 2011-04-07 |
US9276099B2 (en) | 2016-03-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5537555B2 (ja) | 半導体装置 | |
JP4845872B2 (ja) | Mis構造を有する半導体装置及びその製造方法 | |
JP5776217B2 (ja) | 化合物半導体装置 | |
JP5134378B2 (ja) | 電界効果トランジスタ | |
JP5386829B2 (ja) | 半導体装置 | |
JP5348364B2 (ja) | ヘテロ接合型電界効果半導体装置 | |
JP5487613B2 (ja) | 化合物半導体装置及びその製造方法 | |
JP6642883B2 (ja) | 窒化物半導体装置およびその製造方法 | |
JP6393758B2 (ja) | 低減された出力キャパシタンスを有するGaNデバイスおよびこれを作製するためのプロセス | |
JP2008112868A (ja) | 半導体装置およびその製造方法 | |
JP6496149B2 (ja) | 半導体装置および半導体装置の製造方法 | |
JP2014078537A (ja) | 横型半導体装置 | |
JP2011124509A (ja) | 半導体装置 | |
JP5717677B2 (ja) | 半導体装置およびその製造方法 | |
JP2011176195A (ja) | 窒化物半導体装置 | |
JP2010267936A (ja) | 窒化物半導体装置および窒化物半導体装置製造方法 | |
JP2014078561A (ja) | 窒化物半導体ショットキバリアダイオード | |
JP2019087740A (ja) | 半導体装置 | |
JP2019207945A (ja) | 半導体装置の製造方法 | |
US9214528B2 (en) | Method to fabricate self-aligned isolation in gallium nitride devices and integrated circuits | |
JP2014229767A (ja) | ヘテロ接合電界効果型トランジスタ及びその製造方法 | |
CN116344586A (zh) | 折叠沟道氮化镓基场效应晶体管及其制备方法 | |
JP5596636B2 (ja) | 電界効果トランジスタ | |
JP2012004573A (ja) | 電界効果トランジスタ | |
JP7512326B2 (ja) | 半導体装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20131001 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20131129 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20140401 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20140425 |
|
R151 | Written notification of patent or utility model registration |
Ref document number: 5537555 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R151 |