JP5535490B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
- Publication number
- JP5535490B2 JP5535490B2 JP2009020255A JP2009020255A JP5535490B2 JP 5535490 B2 JP5535490 B2 JP 5535490B2 JP 2009020255 A JP2009020255 A JP 2009020255A JP 2009020255 A JP2009020255 A JP 2009020255A JP 5535490 B2 JP5535490 B2 JP 5535490B2
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor chip
- guard ring
- electrode pad
- outer periphery
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/58—Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries
- H01L23/585—Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries comprising conductive layers or plates or strips or rods or rings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/564—Details not otherwise provided for, e.g. protection against moisture
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
- H01L23/3114—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed the device being a chip scale package, e.g. CSP
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Junction Field-Effect Transistors (AREA)
- Electrodes Of Semiconductors (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009020255A JP5535490B2 (ja) | 2009-01-30 | 2009-01-30 | 半導体装置 |
| US12/690,973 US8461667B2 (en) | 2009-01-30 | 2010-01-21 | Semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009020255A JP5535490B2 (ja) | 2009-01-30 | 2009-01-30 | 半導体装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2010177550A JP2010177550A (ja) | 2010-08-12 |
| JP2010177550A5 JP2010177550A5 (enExample) | 2012-03-15 |
| JP5535490B2 true JP5535490B2 (ja) | 2014-07-02 |
Family
ID=42396991
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009020255A Active JP5535490B2 (ja) | 2009-01-30 | 2009-01-30 | 半導体装置 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US8461667B2 (enExample) |
| JP (1) | JP5535490B2 (enExample) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5535490B2 (ja) * | 2009-01-30 | 2014-07-02 | 住友電工デバイス・イノベーション株式会社 | 半導体装置 |
| IT1397222B1 (it) | 2009-12-30 | 2013-01-04 | St Microelectronics Srl | Metodo per controllare il corretto posizionamento di sonde di test su terminazioni di dispositivi elettronici integrati su semiconduttore e relativo dispositivo elettronico. |
| JP5607096B2 (ja) * | 2012-03-23 | 2014-10-15 | 株式会社東芝 | 窒化物半導体装置 |
| CN102832178A (zh) * | 2012-09-18 | 2012-12-19 | 上海工程技术大学 | 一种用于集成电路芯片的密封环结构 |
| CN103633046B (zh) * | 2013-12-13 | 2017-03-15 | 苏州能讯高能半导体有限公司 | 半导体器件及其制造方法 |
| JP6478395B2 (ja) * | 2015-03-06 | 2019-03-06 | 住友電工デバイス・イノベーション株式会社 | 半導体装置 |
| JP7380310B2 (ja) | 2019-02-28 | 2023-11-15 | 住友電工デバイス・イノベーション株式会社 | 電界効果トランジスタ及び半導体装置 |
| CN116097447A (zh) * | 2020-09-01 | 2023-05-09 | 电力集成公司 | 包括二维电子气区域的管芯密封环 |
| JP7626861B2 (ja) * | 2020-12-31 | 2025-02-04 | 蘇州能訊高能半導体有限公司 | 半導体デバイス及びその作製方法 |
| CN114695545A (zh) * | 2020-12-31 | 2022-07-01 | 苏州能讯高能半导体有限公司 | 一种半导体器件及其制备方法 |
| CN114695512A (zh) * | 2020-12-31 | 2022-07-01 | 苏州能讯高能半导体有限公司 | 一种半导体器件及其制备方法 |
| JP2025036097A (ja) * | 2023-08-31 | 2025-03-14 | キヤノン株式会社 | 発光デバイス |
| CN120379304B (zh) * | 2025-06-26 | 2025-10-24 | 厦门市三安集成电路有限公司 | 一种半导体芯片及制作方法、应用 |
Family Cites Families (44)
| Publication number | Priority date | Publication date | Assignee | Title |
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| US5045913A (en) * | 1990-01-29 | 1991-09-03 | International Business Machines Corp. | Bit stack compatible input/output circuits |
| US5538924A (en) * | 1995-09-05 | 1996-07-23 | Vanguard International Semiconductor Co. | Method of forming a moisture guard ring for integrated circuit applications |
| JP3159237B2 (ja) * | 1996-06-03 | 2001-04-23 | 日本電気株式会社 | 半導体装置およびその製造方法 |
| US5804869A (en) * | 1997-03-31 | 1998-09-08 | Motorola, Inc. | Clamp disposed at edge of a dielectric structure in a semiconductor device and method of forming same |
| US5926697A (en) * | 1997-10-09 | 1999-07-20 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method of forming a moisture guard ring for integrated circuit applications |
| JP3788093B2 (ja) * | 1998-06-11 | 2006-06-21 | セイコーエプソン株式会社 | 液晶パネル用基板、液晶パネル及びそれを用いた電子機器並びに液晶パネル用基板の製造方法 |
| GB2341272B (en) * | 1998-09-03 | 2003-08-20 | Ericsson Telefon Ab L M | High voltage shield |
| US6509617B2 (en) * | 2000-08-23 | 2003-01-21 | Rohm Co., Ltd. | Semiconductor device and fabrication method thereof |
| US6492716B1 (en) * | 2001-04-30 | 2002-12-10 | Zeevo, Inc. | Seal ring structure for IC containing integrated digital/RF/analog circuits and functions |
| US20020167071A1 (en) * | 2001-05-10 | 2002-11-14 | Mu-Chun Wang | Guard ring for protecting integrated circuits |
| KR100535062B1 (ko) * | 2001-06-04 | 2005-12-07 | 마츠시타 덴끼 산교 가부시키가이샤 | 고내압 반도체장치 |
| JP3538170B2 (ja) * | 2001-09-11 | 2004-06-14 | 松下電器産業株式会社 | 半導体装置及びその製造方法 |
| US6683329B2 (en) * | 2002-02-28 | 2004-01-27 | Oki Electric Industry Co., Ltd. | Semiconductor device with slot above guard ring |
| JP4776861B2 (ja) * | 2002-09-26 | 2011-09-21 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
| JP4489345B2 (ja) * | 2002-12-13 | 2010-06-23 | 株式会社ルネサステクノロジ | 半導体装置の製造方法 |
| JP4303547B2 (ja) * | 2003-01-30 | 2009-07-29 | Necエレクトロニクス株式会社 | 半導体装置 |
| JP4502173B2 (ja) * | 2003-02-03 | 2010-07-14 | ルネサスエレクトロニクス株式会社 | 半導体装置及びその製造方法 |
| JP4519411B2 (ja) * | 2003-04-01 | 2010-08-04 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
| US6940131B2 (en) * | 2003-06-30 | 2005-09-06 | Texas Instruments Incorporated | MOS ESD CDM clamp with integral substrate injection guardring and method for fabrication |
| US20050063431A1 (en) * | 2003-09-19 | 2005-03-24 | Gallup Kendra J. | Integrated optics and electronics |
| TWI221655B (en) * | 2003-11-25 | 2004-10-01 | Airoha Tech Corp | Integrated circuit chip |
| TWI227936B (en) * | 2004-01-14 | 2005-02-11 | Taiwan Semiconductor Mfg | Sealed ring for IC protection |
| JP4564362B2 (ja) * | 2004-01-23 | 2010-10-20 | 株式会社東芝 | 半導体装置 |
| JP4757449B2 (ja) * | 2004-01-29 | 2011-08-24 | 三菱電機株式会社 | 半導体装置 |
| US7777338B2 (en) * | 2004-09-13 | 2010-08-17 | Taiwan Semiconductor Manufacturing Co., Ltd. | Seal ring structure for integrated circuit chips |
| US7098521B2 (en) * | 2004-10-01 | 2006-08-29 | International Business Machines Corporation | Reduced guard ring in schottky barrier diode structure |
| JP4366328B2 (ja) | 2005-03-18 | 2009-11-18 | 富士通株式会社 | 半導体装置およびその製造方法 |
| JP4375280B2 (ja) * | 2005-05-16 | 2009-12-02 | ヤマハ株式会社 | 半導体装置の製造方法及び半導体装置 |
| JP4675159B2 (ja) * | 2005-05-26 | 2011-04-20 | パナソニック株式会社 | 半導体装置 |
| US7408206B2 (en) * | 2005-11-21 | 2008-08-05 | International Business Machines Corporation | Method and structure for charge dissipation in integrated circuits |
| JP5048273B2 (ja) * | 2006-05-10 | 2012-10-17 | オンセミコンダクター・トレーディング・リミテッド | 絶縁ゲート型半導体装置 |
| JP5090696B2 (ja) * | 2006-09-12 | 2012-12-05 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
| US7772682B1 (en) * | 2006-10-10 | 2010-08-10 | Rf Micro Devices, Inc. | Moisture protection metal enclosure |
| JP2008227116A (ja) * | 2007-03-13 | 2008-09-25 | Renesas Technology Corp | 半導体装置およびその製造方法 |
| WO2008113067A2 (en) * | 2007-03-15 | 2008-09-18 | Johns Hopkins University | Deep submicron and nano cmos single photon photodetector pixel with event based circuits for readout data-rate reduction |
| JP2008251923A (ja) * | 2007-03-30 | 2008-10-16 | Sanyo Electric Co Ltd | 半導体装置 |
| US7893459B2 (en) * | 2007-04-10 | 2011-02-22 | Taiwan Semiconductor Manufacturing Company, Ltd. | Seal ring structures with reduced moisture-induced reliability degradation |
| US8253523B2 (en) * | 2007-10-12 | 2012-08-28 | Via Technologies, Inc. | Spiral inductor device |
| US8242586B2 (en) * | 2008-09-09 | 2012-08-14 | Mediatek Inc. | Integrated circuit chip with seal ring structure |
| US7667302B1 (en) * | 2008-09-09 | 2010-02-23 | Mediatek Inc. | Integrated circuit chip with seal ring structure |
| US7825487B2 (en) * | 2008-09-30 | 2010-11-02 | Northrop Grumman Systems Corporation | Guard ring structures and method of fabricating thereof |
| US7898056B1 (en) * | 2008-12-09 | 2011-03-01 | Alvand Technology, Inc. | Seal ring for reducing noise coupling within a system-on-a-chip (SoC) |
| JP5535490B2 (ja) * | 2009-01-30 | 2014-07-02 | 住友電工デバイス・イノベーション株式会社 | 半導体装置 |
| JP4945594B2 (ja) * | 2009-03-16 | 2012-06-06 | 株式会社東芝 | 電力用半導体装置 |
-
2009
- 2009-01-30 JP JP2009020255A patent/JP5535490B2/ja active Active
-
2010
- 2010-01-21 US US12/690,973 patent/US8461667B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP2010177550A (ja) | 2010-08-12 |
| US20100193894A1 (en) | 2010-08-05 |
| US8461667B2 (en) | 2013-06-11 |
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