JP5530564B2 - セリア系研磨材の再生方法 - Google Patents
セリア系研磨材の再生方法 Download PDFInfo
- Publication number
- JP5530564B2 JP5530564B2 JP2013520637A JP2013520637A JP5530564B2 JP 5530564 B2 JP5530564 B2 JP 5530564B2 JP 2013520637 A JP2013520637 A JP 2013520637A JP 2013520637 A JP2013520637 A JP 2013520637A JP 5530564 B2 JP5530564 B2 JP 5530564B2
- Authority
- JP
- Japan
- Prior art keywords
- ceria
- based abrasive
- frit glass
- polishing pad
- organic acid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 title claims description 156
- 229910000422 cerium(IV) oxide Inorganic materials 0.000 title claims description 156
- 238000000034 method Methods 0.000 title claims description 78
- 238000004064 recycling Methods 0.000 title description 7
- 239000011521 glass Substances 0.000 claims description 113
- 238000005498 polishing Methods 0.000 claims description 113
- 239000002699 waste material Substances 0.000 claims description 52
- 150000007524 organic acids Chemical class 0.000 claims description 51
- 238000006243 chemical reaction Methods 0.000 claims description 42
- 239000000243 solution Substances 0.000 claims description 34
- 230000008569 process Effects 0.000 claims description 33
- 238000010306 acid treatment Methods 0.000 claims description 29
- 239000003513 alkali Substances 0.000 claims description 24
- 238000007667 floating Methods 0.000 claims description 19
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 claims description 18
- 239000000463 material Substances 0.000 claims description 18
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 claims description 15
- 230000001172 regenerating effect Effects 0.000 claims description 15
- 238000007873 sieving Methods 0.000 claims description 14
- 238000001035 drying Methods 0.000 claims description 13
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 claims description 12
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 claims description 12
- 238000003756 stirring Methods 0.000 claims description 11
- 239000012670 alkaline solution Substances 0.000 claims description 10
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 claims description 9
- 150000003839 salts Chemical class 0.000 claims description 8
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 7
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 6
- 238000004140 cleaning Methods 0.000 claims description 6
- JVTAAEKCZFNVCJ-UHFFFAOYSA-N lactic acid Chemical compound CC(O)C(O)=O JVTAAEKCZFNVCJ-UHFFFAOYSA-N 0.000 claims description 6
- 230000035939 shock Effects 0.000 claims description 6
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 claims description 5
- 239000002253 acid Substances 0.000 claims description 5
- 235000006408 oxalic acid Nutrition 0.000 claims description 5
- DIZPMCHEQGEION-UHFFFAOYSA-H aluminium sulfate (anhydrous) Chemical compound [Al+3].[Al+3].[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O DIZPMCHEQGEION-UHFFFAOYSA-H 0.000 claims description 4
- 150000001875 compounds Chemical class 0.000 claims description 4
- 229910021578 Iron(III) chloride Inorganic materials 0.000 claims description 3
- 235000011054 acetic acid Nutrition 0.000 claims description 3
- 230000002776 aggregation Effects 0.000 claims description 3
- ANBBXQWFNXMHLD-UHFFFAOYSA-N aluminum;sodium;oxygen(2-) Chemical compound [O-2].[O-2].[Na+].[Al+3] ANBBXQWFNXMHLD-UHFFFAOYSA-N 0.000 claims description 3
- 229910021529 ammonia Inorganic materials 0.000 claims description 3
- 125000004432 carbon atom Chemical group C* 0.000 claims description 3
- 235000015165 citric acid Nutrition 0.000 claims description 3
- 239000011790 ferrous sulphate Substances 0.000 claims description 3
- 235000003891 ferrous sulphate Nutrition 0.000 claims description 3
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 claims description 3
- BAUYGSIQEAFULO-UHFFFAOYSA-L iron(2+) sulfate (anhydrous) Chemical compound [Fe+2].[O-]S([O-])(=O)=O BAUYGSIQEAFULO-UHFFFAOYSA-L 0.000 claims description 3
- 229910000359 iron(II) sulfate Inorganic materials 0.000 claims description 3
- 239000004310 lactic acid Substances 0.000 claims description 3
- 235000014655 lactic acid Nutrition 0.000 claims description 3
- 150000003141 primary amines Chemical class 0.000 claims description 3
- 230000008929 regeneration Effects 0.000 claims description 3
- 238000011069 regeneration method Methods 0.000 claims description 3
- 150000003335 secondary amines Chemical class 0.000 claims description 3
- 229910001388 sodium aluminate Inorganic materials 0.000 claims description 3
- 150000003512 tertiary amines Chemical class 0.000 claims description 3
- 238000005054 agglomeration Methods 0.000 claims description 2
- 229910052742 iron Inorganic materials 0.000 claims description 2
- 235000011124 aluminium ammonium sulphate Nutrition 0.000 claims 1
- LCQXXBOSCBRNNT-UHFFFAOYSA-K ammonium aluminium sulfate Chemical compound [NH4+].[Al+3].[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O LCQXXBOSCBRNNT-UHFFFAOYSA-K 0.000 claims 1
- 239000003795 chemical substances by application Substances 0.000 claims 1
- 238000000527 sonication Methods 0.000 claims 1
- 229910021653 sulphate ion Inorganic materials 0.000 claims 1
- 239000003082 abrasive agent Substances 0.000 description 29
- 239000000047 product Substances 0.000 description 26
- 239000002245 particle Substances 0.000 description 22
- 239000002002 slurry Substances 0.000 description 21
- 230000005484 gravity Effects 0.000 description 12
- 238000009826 distribution Methods 0.000 description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 9
- 230000000694 effects Effects 0.000 description 8
- 238000009210 therapy by ultrasound Methods 0.000 description 8
- 230000002378 acidificating effect Effects 0.000 description 7
- 238000002441 X-ray diffraction Methods 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 5
- 238000001914 filtration Methods 0.000 description 5
- 238000004080 punching Methods 0.000 description 5
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 4
- 238000002844 melting Methods 0.000 description 4
- 230000008018 melting Effects 0.000 description 4
- 239000000843 powder Substances 0.000 description 4
- 238000005488 sandblasting Methods 0.000 description 4
- 238000010334 sieve classification Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 238000003912 environmental pollution Methods 0.000 description 3
- RUTXIHLAWFEWGM-UHFFFAOYSA-H iron(3+) sulfate Chemical compound [Fe+3].[Fe+3].[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O RUTXIHLAWFEWGM-UHFFFAOYSA-H 0.000 description 3
- 229910000360 iron(III) sulfate Inorganic materials 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000011148 porous material Substances 0.000 description 3
- 238000010298 pulverizing process Methods 0.000 description 3
- 239000010802 sludge Substances 0.000 description 3
- WZUKKIPWIPZMAS-UHFFFAOYSA-K Ammonium alum Chemical compound [NH4+].O.O.O.O.O.O.O.O.O.O.O.O.[Al+3].[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O WZUKKIPWIPZMAS-UHFFFAOYSA-K 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 239000006227 byproduct Substances 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000008394 flocculating agent Substances 0.000 description 2
- 230000008676 import Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 235000005985 organic acids Nutrition 0.000 description 2
- 238000000746 purification Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 239000007790 solid phase Substances 0.000 description 2
- FZIPCQLKPTZZIM-UHFFFAOYSA-N 2-oxidanylpropane-1,2,3-tricarboxylic acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O.OC(=O)CC(O)(C(O)=O)CC(O)=O FZIPCQLKPTZZIM-UHFFFAOYSA-N 0.000 description 1
- VTLYFUHAOXGGBS-UHFFFAOYSA-N Fe3+ Chemical compound [Fe+3] VTLYFUHAOXGGBS-UHFFFAOYSA-N 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 239000003929 acidic solution Substances 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 150000004703 alkoxides Chemical class 0.000 description 1
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical class [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 description 1
- WNROFYMDJYEPJX-UHFFFAOYSA-K aluminium hydroxide Chemical compound [OH-].[OH-].[OH-].[Al+3] WNROFYMDJYEPJX-UHFFFAOYSA-K 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 238000000498 ball milling Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 239000000701 coagulant Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 238000004108 freeze drying Methods 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000007602 hot air drying Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- 150000002505 iron Chemical class 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 150000007522 mineralic acids Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 238000003921 particle size analysis Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000000053 physical method Methods 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000001878 scanning electron micrograph Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000001694 spray drying Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000001291 vacuum drying Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 238000004876 x-ray fluorescence Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1454—Abrasive powders, suspensions and pastes for polishing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020100074846A KR101225746B1 (ko) | 2010-08-03 | 2010-08-03 | 세리아계 연마재의 재생방법 |
| KR10-2010-0074846 | 2010-08-03 | ||
| PCT/KR2011/004612 WO2012018175A2 (ko) | 2010-08-03 | 2011-06-24 | 세리아계 연마재의 재생방법 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2013536091A JP2013536091A (ja) | 2013-09-19 |
| JP5530564B2 true JP5530564B2 (ja) | 2014-06-25 |
Family
ID=45559891
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013520637A Expired - Fee Related JP5530564B2 (ja) | 2010-08-03 | 2011-06-24 | セリア系研磨材の再生方法 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5530564B2 (ko) |
| KR (1) | KR101225746B1 (ko) |
| CN (1) | CN103079764B (ko) |
| WO (1) | WO2012018175A2 (ko) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101411926B1 (ko) * | 2012-06-05 | 2014-06-26 | 주식회사 랜코 | 세리아계 연마재 폐기물을 재활용한 산화세륨의 제조방법 |
| CN104619433B (zh) * | 2012-09-13 | 2016-08-24 | 株式会社Lg化学 | 含氧化铈废磨料的再生方法 |
| WO2014042430A1 (ko) * | 2012-09-13 | 2014-03-20 | 주식회사 엘지화학 | 세리아 함유 폐연마재의 재생 방법 |
| WO2014042431A1 (ko) * | 2012-09-14 | 2014-03-20 | 주식회사 엘지화학 | 세리아 함유 폐연마재의 재생 방법 |
| WO2014042494A1 (ko) * | 2012-09-17 | 2014-03-20 | 주식회사 엘지화학 | 세리아 함유 폐연마재의 재생 방법 |
| CN104619806A (zh) * | 2012-09-17 | 2015-05-13 | 株式会社Lg化学 | 含氧化铈废磨料的再生方法 |
| CN102936461B (zh) * | 2012-11-14 | 2014-07-30 | 内蒙古科技大学 | 一种富铈稀土抛光粉及其制备方法 |
| WO2014168113A1 (ja) * | 2013-04-09 | 2014-10-16 | Ｄｏｗａエコシステム株式会社 | 再生酸化セリウム系研磨剤粒子の製造方法および再生粒子 |
| KR101486439B1 (ko) * | 2013-04-15 | 2015-01-27 | 한국세라믹기술원 | 세리아계 연마재 폐기물을 재활용한 탄산세륨의 제조방법 |
| JP5967246B2 (ja) * | 2015-04-03 | 2016-08-10 | 信越化学工業株式会社 | 酸化セリウムの回収方法 |
| US11505717B2 (en) | 2017-06-01 | 2022-11-22 | Jgc Catalysts And Chemicals Ltd. | Nanobubble-containing inorganic oxide fine particle and abrasive containing same |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10216554A (ja) * | 1997-02-13 | 1998-08-18 | Hitachi Ltd | 研磨方法 |
| JP2000109793A (ja) | 1998-10-02 | 2000-04-18 | Daido Steel Co Ltd | 研磨剤の再生方法 |
| JP3072151U (ja) * | 2000-03-30 | 2000-10-06 | 三倉物産株式会社 | 無機研磨剤廃液の再生処理装置 |
| JP2003019669A (ja) * | 2001-07-09 | 2003-01-21 | Asahi Glass Co Ltd | 研磨材スラリーのフィルタリング方法 |
| JP2003205460A (ja) * | 2002-01-15 | 2003-07-22 | Speedfam Co Ltd | 酸化セリウム系研磨剤再生方法 |
| JP2004211013A (ja) * | 2003-01-08 | 2004-07-29 | Mitsui Chemicals Inc | 研磨材及びその製造方法 |
| JP4294396B2 (ja) * | 2003-06-27 | 2009-07-08 | 三井金属鉱業株式会社 | セリウム系研摩材のリサイクル方法 |
| CN1194060C (zh) * | 2003-07-24 | 2005-03-23 | 南开大学 | 再生稀土抛光粉的制备方法 |
| JP4729428B2 (ja) * | 2006-04-07 | 2011-07-20 | Ａｇｃセイミケミカル株式会社 | セリウム系研磨剤の再生方法 |
| JP2008034827A (ja) * | 2006-06-26 | 2008-02-14 | Nippon Valqua Ind Ltd | 化学的機械研磨材のリサイクル方法及びその装置 |
| KR101450865B1 (ko) * | 2006-10-24 | 2014-10-14 | 동우 화인켐 주식회사 | 디스플레이용 유리패널의 연마를 위한 폐연마재의 재생방법 |
| JP4580433B2 (ja) | 2008-04-14 | 2010-11-10 | 野村マイクロ・サイエンス株式会社 | 研磨用スラリーの再生方法 |
| WO2011099197A1 (ja) * | 2010-02-15 | 2011-08-18 | 三井金属鉱業株式会社 | セリウム系研摩材の再生方法 |
-
2010
- 2010-08-03 KR KR1020100074846A patent/KR101225746B1/ko active IP Right Grant
-
2011
- 2011-06-24 CN CN201180037945.5A patent/CN103079764B/zh not_active Expired - Fee Related
- 2011-06-24 WO PCT/KR2011/004612 patent/WO2012018175A2/ko active Application Filing
- 2011-06-24 JP JP2013520637A patent/JP5530564B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| KR101225746B1 (ko) | 2013-02-15 |
| CN103079764A (zh) | 2013-05-01 |
| WO2012018175A2 (ko) | 2012-02-09 |
| WO2012018175A3 (ko) | 2012-04-12 |
| KR20120021478A (ko) | 2012-03-09 |
| CN103079764B (zh) | 2015-07-15 |
| JP2013536091A (ja) | 2013-09-19 |
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