JP5500771B2 - 半導体装置及びマイクロプロセッサ - Google Patents
半導体装置及びマイクロプロセッサ Download PDFInfo
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- JP5500771B2 JP5500771B2 JP2007289247A JP2007289247A JP5500771B2 JP 5500771 B2 JP5500771 B2 JP 5500771B2 JP 2007289247 A JP2007289247 A JP 2007289247A JP 2007289247 A JP2007289247 A JP 2007289247A JP 5500771 B2 JP5500771 B2 JP 5500771B2
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- 239000004065 semiconductor Substances 0.000 title claims description 134
- 229910052751 metal Inorganic materials 0.000 claims description 35
- 239000002184 metal Substances 0.000 claims description 35
- 230000015572 biosynthetic process Effects 0.000 claims description 31
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 30
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 28
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 28
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 26
- 150000004767 nitrides Chemical class 0.000 claims description 13
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- 239000010408 film Substances 0.000 description 53
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- 239000010703 silicon Substances 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 239000011229 interlayer Substances 0.000 description 7
- 229910052786 argon Inorganic materials 0.000 description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 6
- 239000013078 crystal Substances 0.000 description 6
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- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 5
- 241000293849 Cordylanthus Species 0.000 description 5
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 5
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 5
- 229910021417 amorphous silicon Inorganic materials 0.000 description 5
- 230000004888 barrier function Effects 0.000 description 5
- 229910052796 boron Inorganic materials 0.000 description 5
- 238000005229 chemical vapour deposition Methods 0.000 description 5
- 229910052743 krypton Inorganic materials 0.000 description 5
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- GQPLMRYTRLFLPF-UHFFFAOYSA-N Nitrous Oxide Chemical compound [O-][N+]#N GQPLMRYTRLFLPF-UHFFFAOYSA-N 0.000 description 4
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- 239000011733 molybdenum Substances 0.000 description 4
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- -1 oxygen radicals Chemical class 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- 229910052721 tungsten Inorganic materials 0.000 description 4
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- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 3
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- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 3
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- 229910052724 xenon Inorganic materials 0.000 description 3
- 229910000838 Al alloy Inorganic materials 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 102100040844 Dual specificity protein kinase CLK2 Human genes 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 2
- 101000749291 Homo sapiens Dual specificity protein kinase CLK2 Proteins 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N ZrO2 Inorganic materials O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- MXSJNBRAMXILSE-UHFFFAOYSA-N [Si].[P].[B] Chemical compound [Si].[P].[B] MXSJNBRAMXILSE-UHFFFAOYSA-N 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- SJKRCWUQJZIWQB-UHFFFAOYSA-N azane;chromium Chemical compound N.[Cr] SJKRCWUQJZIWQB-UHFFFAOYSA-N 0.000 description 2
- GPBUGPUPKAGMDK-UHFFFAOYSA-N azanylidynemolybdenum Chemical compound [Mo]#N GPBUGPUPKAGMDK-UHFFFAOYSA-N 0.000 description 2
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- 229910052799 carbon Inorganic materials 0.000 description 2
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- 238000005566 electron beam evaporation Methods 0.000 description 2
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- 229910052733 gallium Inorganic materials 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- 229910000449 hafnium oxide Inorganic materials 0.000 description 2
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 2
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- 230000001590 oxidative effect Effects 0.000 description 2
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 2
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
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- 238000004151 rapid thermal annealing Methods 0.000 description 2
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- 229910052715 tantalum Inorganic materials 0.000 description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 2
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 2
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 description 2
- 239000004408 titanium dioxide Substances 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- NXHILIPIEUBEPD-UHFFFAOYSA-H tungsten hexafluoride Chemical compound F[W](F)(F)(F)(F)F NXHILIPIEUBEPD-UHFFFAOYSA-H 0.000 description 2
- 102100040862 Dual specificity protein kinase CLK1 Human genes 0.000 description 1
- 101000749294 Homo sapiens Dual specificity protein kinase CLK1 Proteins 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 1
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003985 ceramic capacitor Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
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- 238000005499 laser crystallization Methods 0.000 description 1
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- 230000003071 parasitic effect Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
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- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
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- 241000894007 species Species 0.000 description 1
- 230000007847 structural defect Effects 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78696—Thin film transistors, i.e. transistors with a channel being at least partly a thin film characterised by the structure of the channel, e.g. multichannel, transverse or longitudinal shape, length or width, doping structure, or the overlap or alignment between the channel and the gate, the source or the drain, or the contacting structure of the channel
Description
11 窒化シリコン層
12 下地絶縁層
13 酸化シリコン層
14 半導体層
15 窒化シリコン層
16 ゲート絶縁層
17 第2不純物領域
18 第1不純物領域
19 素子分離絶縁層
20 絶縁層
22 側壁絶縁層
24 第1ゲート電極層
25 ゲート電極
26 第2ゲート電極層
27 絶縁層
28 サイドウオール絶縁層
30 パッシベーション層
32 層間絶縁層
33 コンタクトホール
34 バリアメタル
36 コンタクトプラグ
38 配線
40 パッシベーション層
41 絶縁層
50 マイクロプロセッサ
51 演算回路
52 演算回路制御部
53 命令解析部
54 割り込み制御部
55 タイミング制御部
56 レジスタ
57 レジスタ制御部
58 バスインターフェース
59 読み出し専用メモリ
60 メモリインターフェース
80 アンテナ
82 誘電体板
84 ガス供給部
86 排気口
88 支持台
90 温度制御部
92 マイクロ波供給部
94 プラズマ
101 基板
102 ソース領域
103 ドレイン領域
104 チャネル形成領域
105 ゲート絶縁層
106 ソース電極
107 ドレイン電極
108 ゲート電極
110 半導体装置
112 アンテナ
114 変調回路
116 復調回路
118 整流回路
120 定電圧回路
122 容量部
124 発振回路
126 リセット回路
128 共振回路
130 アナログ回路部
132 デジタル回路部
134 RFインターフェース
136 制御レジスタ
138 クロックコントローラ
140 インターフェース
142 中央処理ユニット
144 ランダムアクセスメモリ
146 読み出し専用メモリ
150 電源管理回路
Claims (4)
- 絶縁層上の半導体層と、
前記半導体層上のゲート絶縁層と、
前記ゲート絶縁層上のゲート電極と、を有し、
前記半導体層の厚さは、10nm乃至25nmであり、
前記ゲート絶縁層の厚さは、2nm乃至20nmであり、
前記半導体層はチャネル形成領域を有し、前記チャネル形成領域のチャネル長は、100nm以上1000nm未満であり、
前記半導体層の端部は、45度乃至95度(但し、90度を除く)のテーパー角を有し、
前記半導体層の端部及び前記絶縁層と接している窒化シリコン層を有し、
前記絶縁層は、前記半導体層と重なる第1の領域と、第2の領域と、前記第1の領域と第2の領域との間の第3の領域とを有し、
前記第2の領域の膜厚は、前記第1の領域の膜厚よりも小さく、
前記第3の領域はテーパー角を有し、
前記窒化シリコン層は、前記半導体層の端部、前記第2の領域、及び前記第3の領域と連続的に接するように設けられていることを特徴とする半導体装置。 - 請求項1において、
前記ゲート絶縁層は、酸化シリコン層、又は酸化シリコン層と窒化シリコン層との積層を有することを特徴とする半導体装置。 - 請求項1又は2において、
前記ゲート電極は、金属窒化物を含む第1層と、金属を含む第2層とを有することを特徴とする半導体装置。 - 請求項1乃至3のいずれか一項に記載の半導体装置を用いることを特徴とするマイクロプロセッサ。
Priority Applications (1)
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JP2007289247A JP5500771B2 (ja) | 2006-12-05 | 2007-11-07 | 半導体装置及びマイクロプロセッサ |
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JP2006327718 | 2006-12-05 | ||
JP2006327718 | 2006-12-05 | ||
JP2007289247A JP5500771B2 (ja) | 2006-12-05 | 2007-11-07 | 半導体装置及びマイクロプロセッサ |
Publications (3)
Publication Number | Publication Date |
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JP2008166724A JP2008166724A (ja) | 2008-07-17 |
JP2008166724A5 JP2008166724A5 (ja) | 2010-10-28 |
JP5500771B2 true JP5500771B2 (ja) | 2014-05-21 |
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JP2007289247A Active JP5500771B2 (ja) | 2006-12-05 | 2007-11-07 | 半導体装置及びマイクロプロセッサ |
Country Status (3)
Country | Link |
---|---|
US (1) | US8853782B2 (ja) |
JP (1) | JP5500771B2 (ja) |
KR (1) | KR101420600B1 (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
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KR20120099450A (ko) * | 2009-11-27 | 2012-09-10 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
US8797303B2 (en) * | 2011-03-21 | 2014-08-05 | Qualcomm Mems Technologies, Inc. | Amorphous oxide semiconductor thin film transistor fabrication method |
US9379254B2 (en) | 2011-11-18 | 2016-06-28 | Qualcomm Mems Technologies, Inc. | Amorphous oxide semiconductor thin film transistor fabrication method |
CN104167449B (zh) * | 2014-08-05 | 2017-09-22 | 京东方科技集团股份有限公司 | 薄膜晶体管及其制备方法、阵列基板和显示装置 |
CN104538429B (zh) * | 2014-12-26 | 2019-07-02 | 深圳市华星光电技术有限公司 | Amoled背板的制作方法及其结构 |
JP6814965B2 (ja) | 2017-03-06 | 2021-01-20 | パナソニックIpマネジメント株式会社 | 半導体エピタキシャルウェハ、半導体素子、および半導体素子の製造方法 |
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US8853782B2 (en) | 2014-10-07 |
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