JP5466756B2 - プラズマエッチング方法、半導体デバイスの製造方法、及びプラズマエッチング装置 - Google Patents
プラズマエッチング方法、半導体デバイスの製造方法、及びプラズマエッチング装置 Download PDFInfo
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- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
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- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
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- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31105—Etching inorganic layers
- H01L21/31111—Etching inorganic layers by chemical means
- H01L21/31116—Etching inorganic layers by chemical means by dry-etching
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
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- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/6653—Unipolar field-effect transistors with an insulated gate, i.e. MISFET using the removal of at least part of spacer, e.g. disposable spacer
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
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- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66568—Lateral single gate silicon transistors
- H01L29/66575—Lateral single gate silicon transistors where the source and drain or source and drain extensions are self-aligned to the sides of the gate
- H01L29/6659—Lateral single gate silicon transistors where the source and drain or source and drain extensions are self-aligned to the sides of the gate with both lightly doped source and drain extensions and source and drain self-aligned to the sides of the gate, e.g. lightly doped drain [LDD] MOSFET, double diffused drain [DDD] MOSFET
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
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- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66787—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a gate at the side of the channel
- H01L29/66795—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a gate at the side of the channel with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7833—Field effect transistors with field effect produced by an insulated gate with lightly doped drain or source extension, e.g. LDD MOSFET's; DDD MOSFET's
Description
2…誘電体窓
4…RLSA(マイクロ波導入部)
7…シャワーヘッド(処理ガス供給部)
10…載置台
16…バイアス用高周波電源(バイアス印加部)
23…ガス導入管(処理ガス供給部)
29…圧力調整弁
30…真空ポンプ(ガス排気部)
36…制御部
41…シリコン基板(基板)
44…ゲート電極
45…シリコン酸化膜
45a…オフセットスペーサ
48…シリコン窒化膜
49a…スペーサ(サイドウォールスペーサ)
Claims (6)
- 処理容器内に処理ガスを供給しながら前記処理ガスを排気して前記処理容器内の圧力を所定値に設定し、処理ガスに外部エネルギを供給してプラズマを生成し、前記処理容器内の基板が載置される載置台に印加するバイアスを所定値に設定することによって、シリコン窒化膜をシリコン及び/又はシリコン酸化膜に対して選択的にエッチングするプラズマエッチング方法において、
前記処理ガスは、プラズマ励起用ガス、CHxFyガス、並びにO2、CO2、COの群から選ばれる少なくとも一つの酸化性ガスを含み、
前記CHxFyガスに対する前記酸化性ガスの流量比を、前記酸化性ガスとしてO2又はCO2を用いた場合には4/9以上8/9以下に設定し、前記酸化性ガスとしてCOを用いた場合には8/9以上16/9以下に設定し、前記酸化性ガスとしてO2、CO2及びCOの少なくとも二つを混合した混合ガスを用いた場合にはO2に換算して4/9以上8/9以下に設定することを特徴とするプラズマエッチング方法。
ただし、前記CHxFyガスにおいてX及びYは1以上の整数。 - 前記外部エネルギとして、前記処理容器の上部の誘電体窓を介して前記処理容器内にマイクロ波を導入し、
前記処理容器内の基板が載置される載置台に基板1cm2あたり、30W/(15×15×πcm2)以下のRF(radio frequency)を印加することを特徴とする請求項1に記載のプラズマエッチング方法。 - 前記処置容器内の圧力を13.3Pa以下(100mTorr以下)に設定することを特徴とする請求項1又は2に記載のプラズマエッチング方法。
- 前記プラズマエッチング方法は、ゲート電極の側壁にシリコン窒化膜からなるスペーサを形成するためのものであることを特徴とする請求項1ないし3のいずれかに記載のプラズマエッチング方法。
- 処理容器内に処理ガスを供給しながら前記処理ガスを排気して前記処理容器内の圧力を所定値に設定し、処理ガスに外部エネルギを供給してプラズマを生成し、前記処理容器内の基板が載置される載置台に印加するバイアスを所定値に設定することによって、シリコン窒化膜をシリコン及び/又はシリコン酸化膜に対して選択的にエッチングする半導体デバイスの製造方法において、
前記処理ガスは、プラズマ励起用ガス、CHxFyガス、並びにO2、CO2、COの群から選ばれる少なくとも一つの酸化性ガスを含み、
前記酸化性ガスの前記CHxFyガスに対する前記酸化性ガスの流量比を、前記酸化性ガスとしてO2又はCO2を用いた場合には4/9以上8/9以下に設定し、前記酸化性ガスとしてCOを用いた場合には8/9以上16/9以下に設定し、前記酸化性ガスとしてO2、CO2及びCOの少なくとも二つを混合した混合ガスを用いた場合にはO2に換算して4/9以上8/9以下に設定することを特徴とする半導体デバイスの製造方法。
ただし、前記CHxFyガスにおいてX及びYは1以上の整数。 - シリコン窒化膜をシリコン及び/又はシリコン酸化膜に対して選択的にエッチングするプラズマエッチング装置であって、
内部が減圧可能な処理容器と、前記処理容器の内部に設けられる載置台と、前記処理容器に処理ガスを供給する処理ガス供給部と、前記処理容器内の前記処理ガスを排気するガス排気部と、プラズマを生成するために前記処理ガスに外部エネルギを供給するエネルギ供給部と、前記載置台にRF(radio frequency)を印加するバイアス印加部と、前記処理ガスの流量、前記処理容器内の圧力、及び前記載置台に印加されるバイアスを制御する制御部と、を備え、
前記処理ガスは、プラズマ励起用ガス、CHxFyガス、並びにO2、CO2、COの群から選ばれる少なくとも一つの酸化性ガスを含み、
前記制御部は、前記酸化性ガスの前記CHxFyガスに対する前記酸化性ガスの流量比を、前記酸化性ガスとしてO2又はCO2を用いた場合には4/9以上8/9以下に制御し、前記酸化性ガスとしてCOを用いた場合には8/9以上8/9以下に制御し、前記酸化性ガスとしてO2、CO2及びCOの少なくとも二つを混合した混合ガスを用いた場合にはO2に換算して4/9以上8/9以下に制御することを特徴とするプラズマエッチング装置。
ただし、前記CHxFyガスにおいてX及びYは1以上の整数。
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Families Citing this family (38)
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---|---|---|---|---|
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KR102044763B1 (ko) | 2018-08-22 | 2019-11-15 | 무진전자 주식회사 | 고 선택적 실리콘 산화물 제거를 위한 건식 세정 방법 |
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Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1998016950A1 (fr) * | 1996-10-11 | 1998-04-23 | Tokyo Electron Limited | Procede de decapage au plasma |
JPH11214355A (ja) * | 1998-01-20 | 1999-08-06 | Nec Corp | 異方性ドライエッチング方法 |
JP2003229418A (ja) * | 2001-11-30 | 2003-08-15 | Tokyo Electron Ltd | エッチング方法 |
JP2008078209A (ja) * | 2006-09-19 | 2008-04-03 | Hitachi High-Technologies Corp | エッチング処理方法 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4412885A (en) * | 1982-11-03 | 1983-11-01 | Applied Materials, Inc. | Materials and methods for plasma etching of aluminum and aluminum alloys |
JPH06104190A (ja) | 1992-09-17 | 1994-04-15 | Sumitomo Metal Ind Ltd | プラズマプロセス装置 |
JPH06163471A (ja) * | 1992-11-16 | 1994-06-10 | Nippon Steel Corp | 半導体製造方法 |
JPH06168920A (ja) | 1992-11-30 | 1994-06-14 | Sumitomo Metal Ind Ltd | 薄膜の除去方法 |
TW487983B (en) | 1996-04-26 | 2002-05-21 | Hitachi Ltd | Manufacturing method for semiconductor device |
US6635185B2 (en) * | 1997-12-31 | 2003-10-21 | Alliedsignal Inc. | Method of etching and cleaning using fluorinated carbonyl compounds |
JP3764594B2 (ja) * | 1998-10-12 | 2006-04-12 | 株式会社日立製作所 | プラズマ処理方法 |
US6730587B1 (en) * | 2000-12-07 | 2004-05-04 | Advanced Micro Devices, Inc. | Titanium barrier for nickel silicidation of a gate electrode |
JP2002289841A (ja) | 2001-03-27 | 2002-10-04 | Matsushita Electric Ind Co Ltd | 半導体装置及びその製造方法 |
KR20030027505A (ko) | 2001-09-28 | 2003-04-07 | 삼성전자주식회사 | 배기 구조가 개선된 반도체 처리장치 |
US6900104B1 (en) * | 2004-02-27 | 2005-05-31 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method of forming offset spacer manufacturing for critical dimension precision |
JP4933728B2 (ja) * | 2004-12-02 | 2012-05-16 | 株式会社アルバック | トンネル接合素子のエッチング加工方法 |
JP2008243942A (ja) * | 2007-03-26 | 2008-10-09 | Renesas Technology Corp | 半導体装置の製造方法及び半導体装置 |
JP5147318B2 (ja) * | 2007-07-17 | 2013-02-20 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法 |
JP2009194032A (ja) * | 2008-02-12 | 2009-08-27 | Tokyo Electron Ltd | プラズマ測定方法及びプラズマ測定装置並びに記憶媒体 |
JP2009302181A (ja) * | 2008-06-11 | 2009-12-24 | Tokyo Electron Ltd | プラズマエッチング処理方法およびプラズマエッチング処理装置 |
-
2011
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Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1998016950A1 (fr) * | 1996-10-11 | 1998-04-23 | Tokyo Electron Limited | Procede de decapage au plasma |
JPH11214355A (ja) * | 1998-01-20 | 1999-08-06 | Nec Corp | 異方性ドライエッチング方法 |
JP2003229418A (ja) * | 2001-11-30 | 2003-08-15 | Tokyo Electron Ltd | エッチング方法 |
JP2008078209A (ja) * | 2006-09-19 | 2008-04-03 | Hitachi High-Technologies Corp | エッチング処理方法 |
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TWI492297B (zh) | 2015-07-11 |
JP5706946B2 (ja) | 2015-04-22 |
KR101430093B1 (ko) | 2014-09-22 |
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TW201201275A (en) | 2012-01-01 |
JP2014060413A (ja) | 2014-04-03 |
US9324572B2 (en) | 2016-04-26 |
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