JP5451175B2 - 露光装置 - Google Patents
露光装置 Download PDFInfo
- Publication number
- JP5451175B2 JP5451175B2 JP2009119103A JP2009119103A JP5451175B2 JP 5451175 B2 JP5451175 B2 JP 5451175B2 JP 2009119103 A JP2009119103 A JP 2009119103A JP 2009119103 A JP2009119103 A JP 2009119103A JP 5451175 B2 JP5451175 B2 JP 5451175B2
- Authority
- JP
- Japan
- Prior art keywords
- exposure
- light source
- pair
- substrate
- strip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000758 substrate Substances 0.000 claims description 69
- 230000007246 mechanism Effects 0.000 claims description 9
- 239000004065 semiconductor Substances 0.000 claims description 5
- 230000007723 transport mechanism Effects 0.000 claims description 4
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 238000005286 illumination Methods 0.000 claims 1
- 239000000428 dust Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
- H01L21/0274—Photolithographic processes
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2022—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
- H01L21/0334—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane
- H01L21/0337—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane characterised by the process involved to create the mask, e.g. lift-off masks, sidewalls, or to modify the mask, e.g. pre-treatment, post-treatment
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
- H05K3/061—Etching masks
- H05K3/065—Etching masks applied by electrographic, electrophotographic or magnetographic methods
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009119103A JP5451175B2 (ja) | 2009-05-15 | 2009-05-15 | 露光装置 |
TW099112976A TWI485528B (zh) | 2009-05-15 | 2010-04-23 | Exposure device |
KR1020100041828A KR101635962B1 (ko) | 2009-05-15 | 2010-05-04 | 노광 장치 |
CN201010176146.3A CN101887217B (zh) | 2009-05-15 | 2010-05-05 | 曝光装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009119103A JP5451175B2 (ja) | 2009-05-15 | 2009-05-15 | 露光装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010266763A JP2010266763A (ja) | 2010-11-25 |
JP5451175B2 true JP5451175B2 (ja) | 2014-03-26 |
Family
ID=43073184
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009119103A Active JP5451175B2 (ja) | 2009-05-15 | 2009-05-15 | 露光装置 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP5451175B2 (zh) |
KR (1) | KR101635962B1 (zh) |
CN (1) | CN101887217B (zh) |
TW (1) | TWI485528B (zh) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102402131A (zh) * | 2011-11-11 | 2012-04-04 | 深南电路有限公司 | 一种曝光系统 |
US8802333B2 (en) | 2012-03-15 | 2014-08-12 | Taiwan Semiconductor Manufacturing Company, Ltd. | Reflective lithography masks and systems and methods |
DE102012108211A1 (de) * | 2012-09-04 | 2014-03-06 | Kleo Halbleitertechnik Gmbh | Belichtungsanlage |
KR101510156B1 (ko) * | 2014-11-10 | 2015-04-08 | (주)프리테크 | 리드프레임 제조용 노광장치 |
KR20240100486A (ko) * | 2015-09-01 | 2024-07-01 | 가부시키가이샤 니콘 | 물체 유지 장치, 노광 장치, 플랫 패널 디스플레이의 제조 방법, 디바이스 제조 방법, 물체의 유지 방법, 및 노광 방법 |
JP7040981B2 (ja) * | 2018-03-29 | 2022-03-23 | 株式会社オーク製作所 | 露光装置 |
CN112188747B (zh) * | 2020-10-13 | 2021-09-07 | 合肥泽延微电子有限公司 | 一种集成电路板布线用智能定位系统 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59121048A (ja) * | 1982-12-27 | 1984-07-12 | Ibiden Co Ltd | プリント配線基板の製造装置 |
JPH0778630B2 (ja) * | 1986-07-15 | 1995-08-23 | サンエ−技研株式会社 | 露光装置 |
JP2891769B2 (ja) * | 1990-11-30 | 1999-05-17 | ウシオ電機株式会社 | フィルム露光装置 |
JP3559999B2 (ja) * | 1994-07-29 | 2004-09-02 | 株式会社オーク製作所 | マスク整合機構付露光装置およびワークの整合、露光、ならびに搬送方法。 |
JP2000066418A (ja) * | 1998-08-17 | 2000-03-03 | Ono Sokki Co Ltd | 露光装置及び露光方法 |
JP2000114159A (ja) * | 1998-10-07 | 2000-04-21 | Canon Inc | 投影露光装置およびデバイス製造方法 |
JP2003207902A (ja) * | 2002-01-11 | 2003-07-25 | Pentax Corp | 露光装置 |
JP2004094142A (ja) * | 2002-09-04 | 2004-03-25 | Toray Eng Co Ltd | 幅広露光機 |
JP4218418B2 (ja) * | 2003-05-23 | 2009-02-04 | ウシオ電機株式会社 | 帯状ワークの両面投影露光装置 |
JP2005326550A (ja) * | 2004-05-13 | 2005-11-24 | Sanee Giken Kk | 露光装置 |
JP2006098718A (ja) * | 2004-09-29 | 2006-04-13 | Fuji Photo Film Co Ltd | 描画装置 |
JP2006301170A (ja) * | 2005-04-19 | 2006-11-02 | Fujikura Ltd | 露光装置およびその方法 |
JP4861778B2 (ja) * | 2005-09-08 | 2012-01-25 | 富士フイルム株式会社 | パターン露光方法及び装置 |
JP4775076B2 (ja) * | 2006-03-31 | 2011-09-21 | 住友金属鉱山株式会社 | 露光方法及び装置 |
TW200745781A (en) * | 2006-04-24 | 2007-12-16 | Nsk Ltd | Exposure apparatus |
JP2007292933A (ja) * | 2006-04-24 | 2007-11-08 | Nsk Ltd | 露光装置 |
US8264666B2 (en) * | 2009-03-13 | 2012-09-11 | Nikon Corporation | Exposure apparatus, exposure method, and method of manufacturing device |
-
2009
- 2009-05-15 JP JP2009119103A patent/JP5451175B2/ja active Active
-
2010
- 2010-04-23 TW TW099112976A patent/TWI485528B/zh active
- 2010-05-04 KR KR1020100041828A patent/KR101635962B1/ko active IP Right Grant
- 2010-05-05 CN CN201010176146.3A patent/CN101887217B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
CN101887217A (zh) | 2010-11-17 |
TW201107894A (en) | 2011-03-01 |
KR20100123611A (ko) | 2010-11-24 |
KR101635962B1 (ko) | 2016-07-04 |
TWI485528B (zh) | 2015-05-21 |
CN101887217B (zh) | 2014-09-24 |
JP2010266763A (ja) | 2010-11-25 |
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