JP5420171B2 - 台の搬送システム - Google Patents

台の搬送システム Download PDF

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Publication number
JP5420171B2
JP5420171B2 JP2007533057A JP2007533057A JP5420171B2 JP 5420171 B2 JP5420171 B2 JP 5420171B2 JP 2007533057 A JP2007533057 A JP 2007533057A JP 2007533057 A JP2007533057 A JP 2007533057A JP 5420171 B2 JP5420171 B2 JP 5420171B2
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JP
Japan
Prior art keywords
drive
optionally
piezoelectric motor
present
support base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2007533057A
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English (en)
Japanese (ja)
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JP2008514979A5 (https=
JP2008514979A (ja
Inventor
アビタル,アロン
エルハヤニ,ホバブ
ペレド,ガル
カラシコブ,ニール
ガノール,ゼエブ
Original Assignee
ナノモーション エルティーディー.
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Publication of JP2008514979A5 publication Critical patent/JP2008514979A5/ja
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    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04BTRANSMISSION
    • H04B1/00Details of transmission systems, not covered by a single one of groups H04B3/00 - H04B13/00; Details of transmission systems not characterised by the medium used for transmission
    • H04B1/38Transceivers, i.e. devices in which transmitter and receiver form a structural unit and in which at least one part is used for functions of transmitting and receiving
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/003Alignment of optical elements
    • G02B7/005Motorised alignment
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16HGEARING
    • F16H25/00Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20Screw mechanisms
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10Beam splitting or combining systems
    • G02B27/16Beam splitting or combining systems used as aids for focusing
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/60Systems using moiré fringes
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/04Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
    • G02B7/10Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification by relative axial movement of several lenses, e.g. of varifocal objective lens
    • G02B7/102Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification by relative axial movement of several lenses, e.g. of varifocal objective lens controlled by a microcomputer
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/026Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/04Constructional details
    • H02N2/043Mechanical transmission means, e.g. for stroke amplification
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/103Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors by pressing one or more vibrators against the rotor
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/12Constructional details
    • H02N2/123Mechanical transmission means, e.g. for gearing
    • H02N2/126Mechanical transmission means, e.g. for gearing for conversion into linear motion
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/16Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
    • H02N2/163Motors with ring stator
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/20Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/202Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
    • H10N30/2023Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement having polygonal or rectangular shape
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16HGEARING
    • F16H25/00Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20Screw mechanisms
    • F16H2025/2062Arrangements for driving the actuator
    • F16H2025/2075Coaxial drive motors
    • F16H2025/2078Coaxial drive motors the rotor being integrated with the nut or screw body
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00Machine element or mechanism
    • Y10T74/18Mechanical movements
    • Y10T74/18888Reciprocating to or from oscillating

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Signal Processing (AREA)
  • Lens Barrels (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Non-Mechanical Conveyors (AREA)
  • Coupling Device And Connection With Printed Circuit (AREA)
JP2007533057A 2004-09-29 2005-09-29 台の搬送システム Expired - Fee Related JP5420171B2 (ja)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2004283193 2004-09-29
JP2004283061 2004-09-29
JP2004283060 2004-09-29
GBGB0506358.1A GB0506358D0 (en) 2004-09-29 2005-03-30 Assembly
GB0506358.1 2005-03-30
PCT/IL2005/001055 WO2006035447A2 (en) 2004-09-29 2005-09-29 Platform transport systems

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2011093431A Division JP5591754B2 (ja) 2005-03-30 2011-04-19 台の搬送システム

Publications (3)

Publication Number Publication Date
JP2008514979A JP2008514979A (ja) 2008-05-08
JP2008514979A5 JP2008514979A5 (https=) 2008-11-27
JP5420171B2 true JP5420171B2 (ja) 2014-02-19

Family

ID=39871918

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007533057A Expired - Fee Related JP5420171B2 (ja) 2004-09-29 2005-09-29 台の搬送システム

Country Status (7)

Country Link
US (1) US7876509B2 (https=)
EP (1) EP1800356B1 (https=)
JP (1) JP5420171B2 (https=)
KR (1) KR20070088626A (https=)
AT (1) ATE487240T1 (https=)
GB (1) GB0506358D0 (https=)
WO (1) WO2006035447A2 (https=)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2027611A2 (en) * 2006-03-30 2009-02-25 Nanomotion Ltd. Piezoelectric transmission systems
CN100394238C (zh) * 2006-04-14 2008-06-11 博立码杰通讯(深圳)有限公司 一种一体化光学设备调焦/变焦系统
WO2008090561A2 (en) 2007-01-24 2008-07-31 Nanomotion Ltd. Zoom camera configurations
EP2216837A1 (en) * 2009-02-07 2010-08-11 Physik Instrumente (PI) GmbH & Co. KG Piezoelectric motor
JP5612318B2 (ja) 2010-01-21 2014-10-22 株式会社ニコン レンズ鏡筒及び撮像装置
US8651677B2 (en) * 2010-06-28 2014-02-18 Lexmark International, Inc. Mounting mechanism for a component of an imaging apparatus, and methods of making and using same
CN102590979B (zh) 2012-01-17 2013-10-23 博立码杰通讯(深圳)有限公司 焦距调节装置和光学成像装置
TWI491918B (zh) * 2014-03-24 2015-07-11 信泰光學(深圳)有限公司 光學裝置
JP6303928B2 (ja) * 2014-08-29 2018-04-04 Tdk株式会社 レンズ駆動装置
KR102569718B1 (ko) * 2015-11-09 2023-08-25 삼성전자 주식회사 카메라 장치
EP3568722A4 (en) * 2017-01-13 2021-02-17 Foms Inc. AFOCAL LENS ARRANGEMENT WITH CONTINUOUS ZOOM
KR102142058B1 (ko) * 2017-11-27 2020-08-06 주식회사 리텍 트레파닝 모듈
CN112492130B (zh) * 2019-09-12 2021-10-01 华为技术有限公司 摄像模组及移动终端
CN218601652U (zh) * 2020-03-12 2023-03-10 华为技术有限公司 一种驱动装置、摄像头模组及电子设备
CN117722943B (zh) * 2024-02-05 2024-04-16 中国科学技术大学 一种集成高精度电容位移传感器的压电驱动机械式移相器

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JPH08304686A (ja) * 1995-04-28 1996-11-22 Nikon Corp レンズ駆動装置
US2886717A (en) * 1953-03-14 1959-05-12 Ferranti Ltd Measuring apparatus
DE3412128C1 (de) * 1984-03-31 1985-05-09 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Positionsmesseinrichtung
US4736131A (en) 1985-07-30 1988-04-05 Nec Corporation Linear motor driving device
US4730901A (en) * 1986-01-10 1988-03-15 Canon Kabushiki Kaisha Lens barrel with internal motor focusing
US4836681A (en) * 1986-05-27 1989-06-06 Lockheed Electronics Co., Inc. Fringe pattern phase detection system
CA1331429C (en) * 1988-06-03 1994-08-16 Hiroshi Nomura Zoom lens barrel and camera incorporating such barrel
US4893047A (en) 1988-09-20 1990-01-09 Honda Electronic Co., Ltd. Ultrasonic driving device
JPH02222910A (ja) * 1989-02-23 1990-09-05 Canon Inc レンズ鏡筒
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JPH03155375A (ja) 1989-11-10 1991-07-03 Canon Inc リニアモータ装置
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JP3234872B2 (ja) 1996-10-08 2001-12-04 セイコーインスツルメンツ株式会社 アクチュエータおよびその駆動方法、および、その駆動方法をコンピュータに実行させるためのプログラムを記録したコンピュータ読み取り可能な記録媒体、並びに、そのアクチュエータを用いた小型工作機械
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Also Published As

Publication number Publication date
EP1800356B1 (en) 2010-11-03
US7876509B2 (en) 2011-01-25
US20080259466A1 (en) 2008-10-23
GB0506358D0 (en) 2005-05-04
EP1800356A2 (en) 2007-06-27
ATE487240T1 (de) 2010-11-15
WO2006035447A2 (en) 2006-04-06
JP2008514979A (ja) 2008-05-08
WO2006035447A3 (en) 2006-06-22
KR20070088626A (ko) 2007-08-29

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