JP5372264B2 - 酸化アニール処理装置及び酸化アニール処理を用いた薄膜トランジスタの製造方法 - Google Patents

酸化アニール処理装置及び酸化アニール処理を用いた薄膜トランジスタの製造方法 Download PDF

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JP5372264B2
JP5372264B2 JP2012541737A JP2012541737A JP5372264B2 JP 5372264 B2 JP5372264 B2 JP 5372264B2 JP 2012541737 A JP2012541737 A JP 2012541737A JP 2012541737 A JP2012541737 A JP 2012541737A JP 5372264 B2 JP5372264 B2 JP 5372264B2
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oxygen
substrate
oxidation annealing
gas
oxide semiconductor
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JPWO2012060079A1 (ja
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純史 太田
真人 橋本
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Sharp Corp
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Sharp Corp
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/34—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies not provided for in groups H01L21/0405, H01L21/0445, H01L21/06, H01L21/16 and H01L21/18 with or without impurities, e.g. doping materials
    • H01L21/46—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/428
    • H01L21/477—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67115—Apparatus for thermal treatment mainly by radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
    • H01L21/67178—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers vertical arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/6719—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the processing chambers, e.g. modular processing chambers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
    • H01L29/7869—Thin film transistors, i.e. transistors with a channel being at least partly a thin film having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Thin Film Transistor (AREA)
JP2012541737A 2010-11-05 2011-10-28 酸化アニール処理装置及び酸化アニール処理を用いた薄膜トランジスタの製造方法 Expired - Fee Related JP5372264B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012541737A JP5372264B2 (ja) 2010-11-05 2011-10-28 酸化アニール処理装置及び酸化アニール処理を用いた薄膜トランジスタの製造方法

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2010248647 2010-11-05
JP2010248647 2010-11-05
PCT/JP2011/006065 WO2012060079A1 (ja) 2010-11-05 2011-10-28 酸化アニール処理装置及び酸化アニール処理を用いた薄膜トランジスタの製造方法
JP2012541737A JP5372264B2 (ja) 2010-11-05 2011-10-28 酸化アニール処理装置及び酸化アニール処理を用いた薄膜トランジスタの製造方法

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JP5372264B2 true JP5372264B2 (ja) 2013-12-18
JPWO2012060079A1 JPWO2012060079A1 (ja) 2014-05-12

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US (1) US9076742B2 (ko)
EP (1) EP2637201A4 (ko)
JP (1) JP5372264B2 (ko)
KR (1) KR101609429B1 (ko)
CN (1) CN103201828B (ko)
WO (1) WO2012060079A1 (ko)

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BR112014008177A2 (pt) * 2012-02-16 2017-04-11 Saint Gobain caixa de processo, arranjos, e métodos para processar substratos revestidos
CN103855054B (zh) * 2012-11-30 2018-08-17 盛美半导体设备（上海）有限公司 工艺腔室
CN103632983B (zh) * 2013-11-22 2017-11-21 上海申和热磁电子有限公司 用于铜片预氧化的陶瓷支架
EP3153595B1 (en) * 2014-06-06 2020-04-29 Nippon Steel & Sumikin Texeng. Co., Ltd. Far infrared radiation multistage heating furnace for steel plates for hot pressing
TW201639063A (zh) * 2015-01-22 2016-11-01 應用材料股份有限公司 批量加熱和冷卻腔室或負載鎖定裝置
CN108022863B (zh) * 2017-11-30 2020-07-28 上海大学 一种水蒸气氧化退火系统
CN108611483A (zh) * 2018-04-24 2018-10-02 广州才是科技有限公司 一种远红外线能量源设备及制作抗菌抑菌不锈钢材料的方法

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JPH06267840A (ja) * 1993-03-11 1994-09-22 Dainippon Screen Mfg Co Ltd 熱処理装置
JPH06302486A (ja) * 1993-02-16 1994-10-28 Nippondenso Co Ltd ２つの材料の直接接合方法及び材料直接接合装置
JP2001035799A (ja) * 1999-07-22 2001-02-09 Tokyo Electron Ltd 枚葉式熱処理装置
JP2002353226A (ja) * 2001-03-16 2002-12-06 Semiconductor Energy Lab Co Ltd 熱処理装置及び熱処理方法
JP2006165532A (ja) * 2004-11-10 2006-06-22 Canon Inc 非晶質酸化物を利用した半導体デバイス
JP2008098375A (ja) * 2006-10-11 2008-04-24 Seiko Epson Corp 半導体装置の製造方法、電子機器の製造方法および半導体製造装置
JP2010238770A (ja) * 2009-03-30 2010-10-21 Nippon Mining & Metals Co Ltd 酸化物薄膜及びその製造方法
JP2012049211A (ja) * 2010-08-25 2012-03-08 Fujifilm Corp 酸化物半導体薄膜の製造方法および酸化物半導体薄膜、薄膜トランジスタの製造方法および薄膜トランジスタ、並びに薄膜トランジスタを備えた装置

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JP3066387U (ja) 1999-08-05 2000-02-18 昭和鉄工株式会社 多段型ガラス基板焼成炉
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JP4453021B2 (ja) * 2005-04-01 2010-04-21 セイコーエプソン株式会社 半導体装置の製造方法及び半導体製造装置
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JPH06302486A (ja) * 1993-02-16 1994-10-28 Nippondenso Co Ltd ２つの材料の直接接合方法及び材料直接接合装置
JPH06267840A (ja) * 1993-03-11 1994-09-22 Dainippon Screen Mfg Co Ltd 熱処理装置
JP2001035799A (ja) * 1999-07-22 2001-02-09 Tokyo Electron Ltd 枚葉式熱処理装置
JP2002353226A (ja) * 2001-03-16 2002-12-06 Semiconductor Energy Lab Co Ltd 熱処理装置及び熱処理方法
JP2006165532A (ja) * 2004-11-10 2006-06-22 Canon Inc 非晶質酸化物を利用した半導体デバイス
JP2008098375A (ja) * 2006-10-11 2008-04-24 Seiko Epson Corp 半導体装置の製造方法、電子機器の製造方法および半導体製造装置
JP2010238770A (ja) * 2009-03-30 2010-10-21 Nippon Mining & Metals Co Ltd 酸化物薄膜及びその製造方法
JP2012049211A (ja) * 2010-08-25 2012-03-08 Fujifilm Corp 酸化物半導体薄膜の製造方法および酸化物半導体薄膜、薄膜トランジスタの製造方法および薄膜トランジスタ、並びに薄膜トランジスタを備えた装置

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Publication number Publication date
US9076742B2 (en) 2015-07-07
US20130280925A1 (en) 2013-10-24
EP2637201A4 (en) 2014-03-26
KR101609429B1 (ko) 2016-04-05
EP2637201A1 (en) 2013-09-11
CN103201828A (zh) 2013-07-10
CN103201828B (zh) 2016-06-29
JPWO2012060079A1 (ja) 2014-05-12
WO2012060079A1 (ja) 2012-05-10
KR20130100178A (ko) 2013-09-09

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