JP5235214B2 - プラズマディスプレイパネルの製造方法、成膜装置 - Google Patents

プラズマディスプレイパネルの製造方法、成膜装置 Download PDF

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Publication number
JP5235214B2
JP5235214B2 JP2010517878A JP2010517878A JP5235214B2 JP 5235214 B2 JP5235214 B2 JP 5235214B2 JP 2010517878 A JP2010517878 A JP 2010517878A JP 2010517878 A JP2010517878 A JP 2010517878A JP 5235214 B2 JP5235214 B2 JP 5235214B2
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Prior art keywords
metal oxide
film
vacuum chamber
panel
protective film
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Japanese (ja)
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JPWO2009154130A1 (ja
Inventor
栄一 飯島
宗人 箱守
倉内　　利春
礼寛 横山
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Ulvac Inc
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Ulvac Inc
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/081—Oxides of aluminium, magnesium or beryllium
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/20—Manufacture of screens on or from which an image or pattern is formed, picked up, converted or stored; Applying coatings to the vessel

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Gas-Filled Discharge Tubes (AREA)
  • Physical Vapour Deposition (AREA)
JP2010517878A 2008-06-16 2009-06-11 プラズマディスプレイパネルの製造方法、成膜装置 Active JP5235214B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010517878A JP5235214B2 (ja) 2008-06-16 2009-06-11 プラズマディスプレイパネルの製造方法、成膜装置

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2008157119 2008-06-16
JP2008157119 2008-06-16
PCT/JP2009/060680 WO2009154130A1 (ja) 2008-06-16 2009-06-11 プラズマディスプレイパネルの製造方法、成膜装置
JP2010517878A JP5235214B2 (ja) 2008-06-16 2009-06-11 プラズマディスプレイパネルの製造方法、成膜装置

Publications (2)

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JPWO2009154130A1 JPWO2009154130A1 (ja) 2011-12-01
JP5235214B2 true JP5235214B2 (ja) 2013-07-10

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JP2010517878A Active JP5235214B2 (ja) 2008-06-16 2009-06-11 プラズマディスプレイパネルの製造方法、成膜装置

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Country Link
JP (1) JP5235214B2 (ko)
KR (1) KR101128744B1 (ko)
CN (1) CN102067266B (ko)
WO (1) WO2009154130A1 (ko)

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62107060A (ja) * 1985-10-31 1987-05-18 Shimadzu Corp 電子ビ−ム蒸着装置
JP2000260750A (ja) * 1999-03-08 2000-09-22 Denshi Kagaku Kk 昇温脱離ガス分析装置
JP2000290062A (ja) * 1999-04-05 2000-10-17 Mitsubishi Materials Corp ＭｇＯ蒸着材及びその製造方法
JP2000297367A (ja) * 1999-04-12 2000-10-24 Canon Inc 金属酸化物薄膜の成膜方法
JP2001026867A (ja) * 1999-07-16 2001-01-30 Teijin Ltd 透明導電積層体の製造方法
JP2002194539A (ja) * 2000-12-26 2002-07-10 Matsushita Electric Ind Co Ltd 薄膜形成方法及び装置
JP2006172859A (ja) * 2004-12-15 2006-06-29 Matsushita Electric Ind Co Ltd プラズマディスプレイパネルおよびその製造方法
JP2007051326A (ja) * 2005-08-17 2007-03-01 Ulvac Japan Ltd 電子ビーム蒸着装置、当該装置を用いて行う基板の表面への蒸着被膜の形成方法、ピアス式電子銃、および、ピアス式電子銃のビーム状態のモニタ方法
JP2007107092A (ja) * 2005-09-13 2007-04-26 Matsushita Electric Ind Co Ltd 保護膜形成方法および保護膜形成装置
JP2007119831A (ja) * 2005-10-27 2007-05-17 Ulvac Japan Ltd 成膜装置、パネルの製造方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2663909B2 (ja) * 1995-04-11 1997-10-15 日本電気株式会社 プラズマディスプレイパネルの製造方法
JP3836184B2 (ja) * 1996-05-01 2006-10-18 中外炉工業株式会社 酸化マグネシウム膜の製造方法
JPH10106441A (ja) * 1996-10-02 1998-04-24 Fujitsu Ltd プラズマディスプレイパネル

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62107060A (ja) * 1985-10-31 1987-05-18 Shimadzu Corp 電子ビ−ム蒸着装置
JP2000260750A (ja) * 1999-03-08 2000-09-22 Denshi Kagaku Kk 昇温脱離ガス分析装置
JP2000290062A (ja) * 1999-04-05 2000-10-17 Mitsubishi Materials Corp ＭｇＯ蒸着材及びその製造方法
JP2000297367A (ja) * 1999-04-12 2000-10-24 Canon Inc 金属酸化物薄膜の成膜方法
JP2001026867A (ja) * 1999-07-16 2001-01-30 Teijin Ltd 透明導電積層体の製造方法
JP2002194539A (ja) * 2000-12-26 2002-07-10 Matsushita Electric Ind Co Ltd 薄膜形成方法及び装置
JP2006172859A (ja) * 2004-12-15 2006-06-29 Matsushita Electric Ind Co Ltd プラズマディスプレイパネルおよびその製造方法
JP2007051326A (ja) * 2005-08-17 2007-03-01 Ulvac Japan Ltd 電子ビーム蒸着装置、当該装置を用いて行う基板の表面への蒸着被膜の形成方法、ピアス式電子銃、および、ピアス式電子銃のビーム状態のモニタ方法
JP2007107092A (ja) * 2005-09-13 2007-04-26 Matsushita Electric Ind Co Ltd 保護膜形成方法および保護膜形成装置
JP2007119831A (ja) * 2005-10-27 2007-05-17 Ulvac Japan Ltd 成膜装置、パネルの製造方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JPN7009003198; Ｓｕｎｇ　Ｈｅｅ　Ｈｏｎｇ，　ｅｔ　ａｌ．: 'Ｃｈａｒａｃｔｅｒｉｓｔｉｃｓ　ｏｆ　ＭｇＯ　Ｐｒｏｔｅｃｔｉｖｅ　Ｌａｙｅｒ　ｗｉｔｈ　Ｄｅｐｏｓｉｔｉｏｎ　Ｒａｔｅ　ｉｎ　ＡＣ-ＰＤＰｓ' Ｐｒｏｃｅｅｄｉｎｇｓ　ｏｆ　Ｔｈｅ　１４ｔｈ　Ｉｎｔｅｒｎａｔｉｏｎａｌ　Ｄｉｓｐｌａｙ　Ｗｏｒｋｓｈｏｐｓ Ｖｏｌｕｍｅ　１, 20071205, Ｐａｇｅ　１９５-１９８, Ｓｏｃｉｅｔｙ　ｆｏｒ　Ｉｎｆｏｒｍａｔｉｏｎ　Ｄｉｓｐｌａｙ *

Also Published As

Publication number Publication date
CN102067266A (zh) 2011-05-18
JPWO2009154130A1 (ja) 2011-12-01
KR101128744B1 (ko) 2012-03-27
KR20110009240A (ko) 2011-01-27
CN102067266B (zh) 2013-02-06
WO2009154130A1 (ja) 2009-12-23

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