JP5215244B2 - 半導体装置 - Google Patents

半導体装置 Download PDF

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Publication number
JP5215244B2
JP5215244B2 JP2009145430A JP2009145430A JP5215244B2 JP 5215244 B2 JP5215244 B2 JP 5215244B2 JP 2009145430 A JP2009145430 A JP 2009145430A JP 2009145430 A JP2009145430 A JP 2009145430A JP 5215244 B2 JP5215244 B2 JP 5215244B2
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Prior art keywords
semiconductor chip
semiconductor chips
semiconductor
conductive
stacked body
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Expired - Fee Related
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JP2009145430A
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Japanese (ja)
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JP2011003715A (ja
JP2011003715A5 (enExample
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昭仁 高野
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Shinko Electric Industries Co Ltd
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Shinko Electric Industries Co Ltd
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Priority to JP2009145430A priority Critical patent/JP5215244B2/ja
Priority to US12/768,938 priority patent/US8058717B2/en
Publication of JP2011003715A publication Critical patent/JP2011003715A/ja
Publication of JP2011003715A5 publication Critical patent/JP2011003715A5/ja
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    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/20Parameters
    • H01L2924/207Diameter ranges
    • H01L2924/20751Diameter ranges larger or equal to 10 microns less than 20 microns
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/20Parameters
    • H01L2924/207Diameter ranges
    • H01L2924/20752Diameter ranges larger or equal to 20 microns less than 30 microns
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30Technical effects
    • H01L2924/301Electrical effects
    • H01L2924/30105Capacitance
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30Technical effects
    • H01L2924/301Electrical effects
    • H01L2924/30107Inductance

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