JP5145637B2 - 振動型ジャイロセンサ - Google Patents

振動型ジャイロセンサ Download PDF

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Publication number
JP5145637B2
JP5145637B2 JP2005380330A JP2005380330A JP5145637B2 JP 5145637 B2 JP5145637 B2 JP 5145637B2 JP 2005380330 A JP2005380330 A JP 2005380330A JP 2005380330 A JP2005380330 A JP 2005380330A JP 5145637 B2 JP5145637 B2 JP 5145637B2
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JP
Japan
Prior art keywords
vibrator
gyro sensor
type gyro
vibration type
vibration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2005380330A
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English (en)
Japanese (ja)
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JP2007024862A5 (enExample
JP2007024862A (ja
Inventor
輝往 稲熊
和夫 高橋
学 相澤
浩二 鈴木
伸 佐々木
栄治 中塩
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2005380330A priority Critical patent/JP5145637B2/ja
Application filed by Sony Corp filed Critical Sony Corp
Priority to DE200660010125 priority patent/DE602006010125D1/de
Priority to KR20060020356A priority patent/KR20060096359A/ko
Priority to EP20060004372 priority patent/EP1698858B1/en
Priority to US11/368,153 priority patent/US7325452B2/en
Priority to CN2006100739682A priority patent/CN1828224B/zh
Publication of JP2007024862A publication Critical patent/JP2007024862A/ja
Priority to US11/950,725 priority patent/US7578187B2/en
Publication of JP2007024862A5 publication Critical patent/JP2007024862A5/ja
Application granted granted Critical
Publication of JP5145637B2 publication Critical patent/JP5145637B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5663—Manufacturing; Trimming; Mounting; Housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G01C19/5614—Signal processing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5698—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using acoustic waves, e.g. surface acoustic wave gyros
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5726—Signal processing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Manufacturing & Machinery (AREA)
  • Signal Processing (AREA)
  • Acoustics & Sound (AREA)
  • Gyroscopes (AREA)
JP2005380330A 2005-03-04 2005-12-28 振動型ジャイロセンサ Expired - Fee Related JP5145637B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2005380330A JP5145637B2 (ja) 2005-03-04 2005-12-28 振動型ジャイロセンサ
KR20060020356A KR20060096359A (ko) 2005-03-04 2006-03-03 진동형 자이로 센서 및 그 조정 방법
EP20060004372 EP1698858B1 (en) 2005-03-04 2006-03-03 Vibrating gyroscopic sensor and method of adjusting vibrating gyroscopic sensor
US11/368,153 US7325452B2 (en) 2005-03-04 2006-03-03 Vibrating gyroscopic sensor and method of adjusting vibrating gyroscopic sensor
DE200660010125 DE602006010125D1 (de) 2005-03-04 2006-03-03 Vibrationskreiselsensor und Verfahren zur Regelung des Vibrationskreiselsensors
CN2006100739682A CN1828224B (zh) 2005-03-04 2006-03-06 振动陀螺传感器和调节振动陀螺传感器的方法
US11/950,725 US7578187B2 (en) 2005-03-04 2007-12-05 Vibrating gyroscopic sensor and method of adjusting vibrating gyroscopic sensor

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
JP2005106717 2005-03-04
JP2005106717 2005-03-04
JP2005176871 2005-06-16
JP2005176871 2005-06-16
JP2005176870 2005-06-16
JP2005176870 2005-06-16
JP2005380330A JP5145637B2 (ja) 2005-03-04 2005-12-28 振動型ジャイロセンサ

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2011177541A Division JP5146578B2 (ja) 2005-03-04 2011-08-15 振動型ジャイロセンサ

Publications (3)

Publication Number Publication Date
JP2007024862A JP2007024862A (ja) 2007-02-01
JP2007024862A5 JP2007024862A5 (enExample) 2009-02-19
JP5145637B2 true JP5145637B2 (ja) 2013-02-20

Family

ID=36579243

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005380330A Expired - Fee Related JP5145637B2 (ja) 2005-03-04 2005-12-28 振動型ジャイロセンサ

Country Status (6)

Country Link
US (2) US7325452B2 (enExample)
EP (1) EP1698858B1 (enExample)
JP (1) JP5145637B2 (enExample)
KR (1) KR20060096359A (enExample)
CN (1) CN1828224B (enExample)
DE (1) DE602006010125D1 (enExample)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5145637B2 (ja) * 2005-03-04 2013-02-20 ソニー株式会社 振動型ジャイロセンサ
US7928861B2 (en) * 2006-04-19 2011-04-19 Xact Downhole Telemetry Inc. Telemetry wave detection apparatus and method
JP2008157701A (ja) * 2006-12-22 2008-07-10 Sony Corp 圧電素子、振動型ジャイロセンサ、電子機器及び圧電素子の製造方法
JP5088540B2 (ja) * 2007-05-16 2012-12-05 ソニー株式会社 検出装置、検出方法及び電子機器
TW200913175A (en) * 2007-09-05 2009-03-16 Long-Sun Huang Package structure for micro-sensor
JP4640459B2 (ja) * 2008-07-04 2011-03-02 ソニー株式会社 角速度センサ
JP2010060398A (ja) * 2008-09-03 2010-03-18 Alps Electric Co Ltd ジャイロセンサ及びその製造方法
WO2010067793A1 (ja) 2008-12-09 2010-06-17 株式会社村田製作所 振動ジャイロ素子及びその製造方法
JP5506035B2 (ja) * 2010-02-23 2014-05-28 富士フイルム株式会社 アクチュエータの製造方法
JP5506552B2 (ja) * 2010-06-07 2014-05-28 キヤノン株式会社 振動型アクチュエータの制御装置及び振動型アクチュエータの制御方法
JP5327279B2 (ja) * 2011-06-13 2013-10-30 株式会社デンソー 超音波センサ装置
JP5874995B2 (ja) * 2011-09-06 2016-03-02 株式会社日立ハイテクサイエンス カンチレバーのバネ定数特定方法およびその方法を採用した走査型プローブ顕微鏡
WO2016114173A1 (ja) * 2015-01-13 2016-07-21 株式会社村田製作所 圧電デバイスの製造方法
JP6893179B2 (ja) * 2015-06-11 2021-06-23 ジョージア テック リサーチ コーポレイション 直交同調ための傾斜電極を有するｍｅｍｓ慣性測定装置
JP6764126B2 (ja) * 2016-02-02 2020-09-30 セイコーエプソン株式会社 圧電デバイスの製造方法
FR3052916A1 (fr) * 2016-06-17 2017-12-22 Commissariat Energie Atomique Actionneur electromecanique
JP6819216B2 (ja) * 2016-10-26 2021-01-27 セイコーエプソン株式会社 ジャイロセンサー、ジャイロセンサーの製造方法、電子機器および移動体
JP2019176413A (ja) * 2018-03-29 2019-10-10 セイコーエプソン株式会社 振動素子の周波数調整方法、振動素子の製造方法、振動素子、物理量センサー、慣性計測装置、電子機器および移動体
CN108613686B (zh) * 2018-04-28 2021-10-08 中南大学 一种振动陀螺自动化修调方法
CN110683286A (zh) * 2019-10-11 2020-01-14 青岛大学 一种带式输送机自动绞车式拉紧位移感知与保护装置
KR102483780B1 (ko) * 2020-12-08 2022-12-30 주식회사 한화방산 주파수 변경이 가능한 진동기와 이를 포함하는 관성항법장치용 링 레이저 자이로스코프 구조체
CN116124220B (zh) * 2023-02-23 2025-10-28 吉林大学 基于多模态的高精度多痕量质量-位置同步感测装置及方法

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04315056A (ja) * 1991-04-12 1992-11-06 Tokai Rika Co Ltd 加速度センサ
EP0563761B1 (en) * 1992-03-30 1997-05-21 Murata Manufacturing Co., Ltd. Vibrator with trimmed ledge-line portions
JP3218813B2 (ja) * 1993-02-03 2001-10-15 松下電器産業株式会社 角速度センサおよびその製造方法
US5802684A (en) * 1993-09-14 1998-09-08 Nikon Corporation Process for producing a vibration angular-velocity sensor
JPH07113643A (ja) * 1993-10-15 1995-05-02 Nikon Corp 圧電振動角速度計
JP3326989B2 (ja) * 1994-08-25 2002-09-24 株式会社豊田中央研究所 振動子とその調整方法および角速度センサ
US5765046A (en) 1994-08-31 1998-06-09 Nikon Corporation Piezoelectric vibration angular velocity meter and camera using the same
JPH0989571A (ja) * 1995-09-26 1997-04-04 Alps Electric Co Ltd 振動型ジャイロスコープの調整方法
JP3682664B2 (ja) * 1995-10-27 2005-08-10 Ｎｅｃトーキン株式会社 圧電振動ジャイロ
JPH1019574A (ja) * 1996-06-27 1998-01-23 Nikon Corp 圧電振動角速度計の製造方法
JPH10153430A (ja) * 1996-11-25 1998-06-09 Toyota Motor Corp 角速度検出装置およびその製造方法
US6578420B1 (en) * 1997-01-28 2003-06-17 Microsensors, Inc. Multi-axis micro gyro structure
JPH1194557A (ja) * 1997-09-12 1999-04-09 Murata Mfg Co Ltd 振動ジャイロ
JP2000055666A (ja) * 1998-08-03 2000-02-25 Nippon Soken Inc 角速度センサ及びその製造方法
GB9828478D0 (en) * 1998-12-24 1999-02-17 British Aerospace Method of manufacturing a vibrating structure gyroscope
JP2000292175A (ja) * 1999-04-12 2000-10-20 Denso Corp 角速度センサおよびその製造方法
JP3553418B2 (ja) * 1999-05-25 2004-08-11 シャープ株式会社 振動型ジャイロスコープ、振動型ジャイロスコープの形成方法および調整方法
KR100398364B1 (ko) * 2001-05-24 2003-09-19 삼성전기주식회사 수정진동자의 제조방법 및 그로부터 제조된 수정진동자
US6944931B2 (en) * 2002-08-12 2005-09-20 The Boeing Company Method of producing an integral resonator sensor and case
JP5145637B2 (ja) * 2005-03-04 2013-02-20 ソニー株式会社 振動型ジャイロセンサ

Also Published As

Publication number Publication date
US7325452B2 (en) 2008-02-05
US20060196267A1 (en) 2006-09-07
EP1698858B1 (en) 2009-11-04
US7578187B2 (en) 2009-08-25
DE602006010125D1 (de) 2009-12-17
CN1828224A (zh) 2006-09-06
US20080083278A1 (en) 2008-04-10
KR20060096359A (ko) 2006-09-11
CN1828224B (zh) 2010-07-28
JP2007024862A (ja) 2007-02-01
EP1698858A1 (en) 2006-09-06

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