CN1828224B - 振动陀螺传感器和调节振动陀螺传感器的方法 - Google Patents

振动陀螺传感器和调节振动陀螺传感器的方法 Download PDF

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Publication number
CN1828224B
CN1828224B CN2006100739682A CN200610073968A CN1828224B CN 1828224 B CN1828224 B CN 1828224B CN 2006100739682 A CN2006100739682 A CN 2006100739682A CN 200610073968 A CN200610073968 A CN 200610073968A CN 1828224 B CN1828224 B CN 1828224B
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China
Prior art keywords
vibrator
cantilever vibrator
cantilever
laser processing
gyro sensor
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Expired - Fee Related
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CN2006100739682A
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Chinese (zh)
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CN1828224A (zh
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高桥和夫
稻熊辉往
相泽学
领木浩二
佐佐木伸
中盐荣治
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Sony Corp
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Sony Corp
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5663—Manufacturing; Trimming; Mounting; Housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G01C19/5614—Signal processing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5698—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using acoustic waves, e.g. surface acoustic wave gyros
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5726—Signal processing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Manufacturing & Machinery (AREA)
  • Signal Processing (AREA)
  • Acoustics & Sound (AREA)
  • Gyroscopes (AREA)
CN2006100739682A 2005-03-04 2006-03-06 振动陀螺传感器和调节振动陀螺传感器的方法 Expired - Fee Related CN1828224B (zh)

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
JP106717/05 2005-03-04
JP2005106717 2005-03-04
JP2005176871 2005-06-16
JP176870/05 2005-06-16
JP176871/05 2005-06-16
JP2005176870 2005-06-16
JP380330/05 2005-12-28
JP2005380330A JP5145637B2 (ja) 2005-03-04 2005-12-28 振動型ジャイロセンサ

Publications (2)

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CN1828224A CN1828224A (zh) 2006-09-06
CN1828224B true CN1828224B (zh) 2010-07-28

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CN2006100739682A Expired - Fee Related CN1828224B (zh) 2005-03-04 2006-03-06 振动陀螺传感器和调节振动陀螺传感器的方法

Country Status (6)

Country Link
US (2) US7325452B2 (enExample)
EP (1) EP1698858B1 (enExample)
JP (1) JP5145637B2 (enExample)
KR (1) KR20060096359A (enExample)
CN (1) CN1828224B (enExample)
DE (1) DE602006010125D1 (enExample)

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JP5145637B2 (ja) * 2005-03-04 2013-02-20 ソニー株式会社 振動型ジャイロセンサ
US7928861B2 (en) * 2006-04-19 2011-04-19 Xact Downhole Telemetry Inc. Telemetry wave detection apparatus and method
JP2008157701A (ja) * 2006-12-22 2008-07-10 Sony Corp 圧電素子、振動型ジャイロセンサ、電子機器及び圧電素子の製造方法
JP5088540B2 (ja) * 2007-05-16 2012-12-05 ソニー株式会社 検出装置、検出方法及び電子機器
TW200913175A (en) * 2007-09-05 2009-03-16 Long-Sun Huang Package structure for micro-sensor
JP4640459B2 (ja) * 2008-07-04 2011-03-02 ソニー株式会社 角速度センサ
JP2010060398A (ja) * 2008-09-03 2010-03-18 Alps Electric Co Ltd ジャイロセンサ及びその製造方法
WO2010067793A1 (ja) 2008-12-09 2010-06-17 株式会社村田製作所 振動ジャイロ素子及びその製造方法
JP5506035B2 (ja) * 2010-02-23 2014-05-28 富士フイルム株式会社 アクチュエータの製造方法
JP5506552B2 (ja) * 2010-06-07 2014-05-28 キヤノン株式会社 振動型アクチュエータの制御装置及び振動型アクチュエータの制御方法
JP5327279B2 (ja) * 2011-06-13 2013-10-30 株式会社デンソー 超音波センサ装置
JP5874995B2 (ja) * 2011-09-06 2016-03-02 株式会社日立ハイテクサイエンス カンチレバーのバネ定数特定方法およびその方法を採用した走査型プローブ顕微鏡
WO2016114173A1 (ja) * 2015-01-13 2016-07-21 株式会社村田製作所 圧電デバイスの製造方法
JP6893179B2 (ja) * 2015-06-11 2021-06-23 ジョージア テック リサーチ コーポレイション 直交同調ための傾斜電極を有するｍｅｍｓ慣性測定装置
JP6764126B2 (ja) * 2016-02-02 2020-09-30 セイコーエプソン株式会社 圧電デバイスの製造方法
FR3052916A1 (fr) * 2016-06-17 2017-12-22 Commissariat Energie Atomique Actionneur electromecanique
JP6819216B2 (ja) * 2016-10-26 2021-01-27 セイコーエプソン株式会社 ジャイロセンサー、ジャイロセンサーの製造方法、電子機器および移動体
JP2019176413A (ja) * 2018-03-29 2019-10-10 セイコーエプソン株式会社 振動素子の周波数調整方法、振動素子の製造方法、振動素子、物理量センサー、慣性計測装置、電子機器および移動体
CN108613686B (zh) * 2018-04-28 2021-10-08 中南大学 一种振动陀螺自动化修调方法
CN110683286A (zh) * 2019-10-11 2020-01-14 青岛大学 一种带式输送机自动绞车式拉紧位移感知与保护装置
KR102483780B1 (ko) * 2020-12-08 2022-12-30 주식회사 한화방산 주파수 변경이 가능한 진동기와 이를 포함하는 관성항법장치용 링 레이저 자이로스코프 구조체
CN116124220B (zh) * 2023-02-23 2025-10-28 吉林大学 基于多模态的高精度多痕量质量-位置同步感测装置及方法

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US5635642A (en) * 1994-08-25 1997-06-03 Kabushiki Kaisha Toyota Chuo Kenkyusho Vibration-sensing device method of adjusting the same and angular velocity sensor taking advantage of the same
US5765046A (en) * 1994-08-31 1998-06-09 Nikon Corporation Piezoelectric vibration angular velocity meter and camera using the same
US5796000A (en) * 1993-09-14 1998-08-18 Nikon Corporation Vibration angular-velocity sensor and process for producing it
CN1334914A (zh) * 1998-12-24 2002-02-06 Bae系统公共有限公司 制造振动结构陀螺的方法
US6578420B1 (en) * 1997-01-28 2003-06-17 Microsensors, Inc. Multi-axis micro gyro structure

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US5635642A (en) * 1994-08-25 1997-06-03 Kabushiki Kaisha Toyota Chuo Kenkyusho Vibration-sensing device method of adjusting the same and angular velocity sensor taking advantage of the same
US5765046A (en) * 1994-08-31 1998-06-09 Nikon Corporation Piezoelectric vibration angular velocity meter and camera using the same
US6578420B1 (en) * 1997-01-28 2003-06-17 Microsensors, Inc. Multi-axis micro gyro structure
CN1334914A (zh) * 1998-12-24 2002-02-06 Bae系统公共有限公司 制造振动结构陀螺的方法

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说明书第26栏第51行至第27栏第14行以及图32.

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US7325452B2 (en) 2008-02-05
US20060196267A1 (en) 2006-09-07
EP1698858B1 (en) 2009-11-04
US7578187B2 (en) 2009-08-25
JP5145637B2 (ja) 2013-02-20
DE602006010125D1 (de) 2009-12-17
CN1828224A (zh) 2006-09-06
US20080083278A1 (en) 2008-04-10
KR20060096359A (ko) 2006-09-11
JP2007024862A (ja) 2007-02-01
EP1698858A1 (en) 2006-09-06

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