JP5111047B2 - インクジェット記録ヘッドおよびインクジェット記録ヘッドの製造方法。 - Google Patents

インクジェット記録ヘッドおよびインクジェット記録ヘッドの製造方法。 Download PDF

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Publication number
JP5111047B2
JP5111047B2 JP2007266703A JP2007266703A JP5111047B2 JP 5111047 B2 JP5111047 B2 JP 5111047B2 JP 2007266703 A JP2007266703 A JP 2007266703A JP 2007266703 A JP2007266703 A JP 2007266703A JP 5111047 B2 JP5111047 B2 JP 5111047B2
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JP
Japan
Prior art keywords
silicon layer
layer
recording head
ink
jet recording
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2007266703A
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English (en)
Japanese (ja)
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JP2008114589A (ja
JP2008114589A5 (enExample
Inventor
和宏 早川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
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Canon Inc
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Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2007266703A priority Critical patent/JP5111047B2/ja
Publication of JP2008114589A publication Critical patent/JP2008114589A/ja
Publication of JP2008114589A5 publication Critical patent/JP2008114589A5/ja
Application granted granted Critical
Publication of JP5111047B2 publication Critical patent/JP5111047B2/ja
Expired - Fee Related legal-status Critical Current
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14032—Structure of the pressure chamber
    • B41J2/1404—Geometrical characteristics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14072—Electrical connections, e.g. details on electrodes, connecting the chip to the outside...
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/1412—Shape
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14137—Resistor surrounding the nozzle opening
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B41J2/1634—Manufacturing processes machining laser machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/1437—Back shooter
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Optics & Photonics (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2007266703A 2006-10-12 2007-10-12 インクジェット記録ヘッドおよびインクジェット記録ヘッドの製造方法。 Expired - Fee Related JP5111047B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007266703A JP5111047B2 (ja) 2006-10-12 2007-10-12 インクジェット記録ヘッドおよびインクジェット記録ヘッドの製造方法。

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2006278786 2006-10-12
JP2006278786 2006-10-12
JP2006278785 2006-10-12
JP2006278785 2006-10-12
JP2007266703A JP5111047B2 (ja) 2006-10-12 2007-10-12 インクジェット記録ヘッドおよびインクジェット記録ヘッドの製造方法。

Publications (3)

Publication Number Publication Date
JP2008114589A JP2008114589A (ja) 2008-05-22
JP2008114589A5 JP2008114589A5 (enExample) 2010-11-11
JP5111047B2 true JP5111047B2 (ja) 2012-12-26

Family

ID=39302691

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007266703A Expired - Fee Related JP5111047B2 (ja) 2006-10-12 2007-10-12 インクジェット記録ヘッドおよびインクジェット記録ヘッドの製造方法。

Country Status (5)

Country Link
US (1) US8562845B2 (enExample)
JP (1) JP5111047B2 (enExample)
KR (1) KR100955963B1 (enExample)
CN (1) CN101161459B (enExample)
TW (1) TWI333897B (enExample)

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KR20090058225A (ko) * 2007-12-04 2009-06-09 삼성전자주식회사 잉크젯 프린트헤드 및 그 제조방법
KR20100011652A (ko) * 2008-07-25 2010-02-03 삼성전자주식회사 잉크젯 프린트헤드 및 그 제조방법
JP5335396B2 (ja) * 2008-12-16 2013-11-06 キヤノン株式会社 インクジェット記録ヘッドの製造方法
JP4557081B2 (ja) * 2009-01-21 2010-10-06 ダイキン工業株式会社 食い込み式管接続構造、弁、食い込み式管継手及び冷凍装置
US8012773B2 (en) * 2009-06-11 2011-09-06 Canon Kabushiki Kaisha Method for manufacturing liquid discharge head
GB0919744D0 (en) * 2009-11-11 2009-12-30 Queen Mary & Westfield College Electrospray emitter and method of manufacture
JP5709536B2 (ja) * 2010-01-14 2015-04-30 キヤノン株式会社 シリコン基板の加工方法
JP2011199673A (ja) * 2010-03-19 2011-10-06 Seiko Instruments Inc 水晶基板のエッチング方法、圧電振動片、圧電振動子、発振器、電子機器、および電波時計
WO2011121972A1 (en) 2010-03-31 2011-10-06 Canon Kabushiki Kaisha Liquid discharge head manufacturing method
KR20120002688A (ko) * 2010-07-01 2012-01-09 삼성전기주식회사 노즐 플레이트 및 그 제조 방법, 그리고 상기 노즐 플레이트를 구비하는 잉크젯 프린터 헤드
WO2012036682A1 (en) * 2010-09-15 2012-03-22 Hewlett-Packard Development Company, L.P. Fluid nozzle array
JP5615450B2 (ja) * 2011-01-31 2014-10-29 ヒューレット−パッカード デベロップメント カンパニー エル．ピー．Ｈｅｗｌｅｔｔ‐Ｐａｃｋａｒｄ Ｄｅｖｅｌｏｐｍｅｎｔ Ｃｏｍｐａｎｙ， Ｌ．Ｐ． 流体吐出アセンブリ及び関連方法
JP5182392B2 (ja) 2011-03-31 2013-04-17 ブラザー工業株式会社 記録装置
JP5814963B2 (ja) * 2013-03-08 2015-11-17 東芝テック株式会社 インクジェットヘッド、インクジェット記録装置、およびインクジェットヘッドの製造方法

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US7637013B2 (en) * 2005-08-23 2009-12-29 Canon Kabushiki Kaisha Method of manufacturing ink jet recording head

Also Published As

Publication number Publication date
TW200902329A (en) 2009-01-16
TWI333897B (en) 2010-12-01
KR20080033111A (ko) 2008-04-16
CN101161459A (zh) 2008-04-16
JP2008114589A (ja) 2008-05-22
US20080088674A1 (en) 2008-04-17
KR100955963B1 (ko) 2010-05-04
CN101161459B (zh) 2010-06-09
US8562845B2 (en) 2013-10-22

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