KR100955963B1 - 잉크 젯 프린트 헤드 및 잉크 젯 프린트 헤드의 제조 방법 - Google Patents

잉크 젯 프린트 헤드 및 잉크 젯 프린트 헤드의 제조 방법 Download PDF

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Publication number
KR100955963B1
KR100955963B1 KR1020070102510A KR20070102510A KR100955963B1 KR 100955963 B1 KR100955963 B1 KR 100955963B1 KR 1020070102510 A KR1020070102510 A KR 1020070102510A KR 20070102510 A KR20070102510 A KR 20070102510A KR 100955963 B1 KR100955963 B1 KR 100955963B1
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South Korea
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layer
ink
silicon layer
flow path
silicon
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Expired - Fee Related
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KR1020070102510A
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English (en)
Korean (ko)
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KR20080033111A (ko
Inventor
가즈히로 하야까와
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캐논 가부시끼가이샤
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Publication of KR20080033111A publication Critical patent/KR20080033111A/ko
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14032—Structure of the pressure chamber
    • B41J2/1404—Geometrical characteristics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14072—Electrical connections, e.g. details on electrodes, connecting the chip to the outside...
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/1412—Shape
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14137—Resistor surrounding the nozzle opening
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B41J2/1634—Manufacturing processes machining laser machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/1437—Back shooter
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Geometry (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
KR1020070102510A 2006-10-12 2007-10-11 잉크 젯 프린트 헤드 및 잉크 젯 프린트 헤드의 제조 방법 Expired - Fee Related KR100955963B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JPJP-P-2006-00278785 2006-10-12
JP2006278785 2006-10-12
JP2006278786 2006-10-12
JPJP-P-2006-00278786 2006-10-12

Publications (2)

Publication Number Publication Date
KR20080033111A KR20080033111A (ko) 2008-04-16
KR100955963B1 true KR100955963B1 (ko) 2010-05-04

Family

ID=39302691

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020070102510A Expired - Fee Related KR100955963B1 (ko) 2006-10-12 2007-10-11 잉크 젯 프린트 헤드 및 잉크 젯 프린트 헤드의 제조 방법

Country Status (5)

Country Link
US (1) US8562845B2 (enExample)
JP (1) JP5111047B2 (enExample)
KR (1) KR100955963B1 (enExample)
CN (1) CN101161459B (enExample)
TW (1) TWI333897B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120001986A1 (en) * 2010-07-01 2012-01-05 Samsung Electro-Mechanics Co., Ltd. Nozzle plate and method for manufacturing the nozzle plate, and inkjet printer head with the nozzle plate

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20090058225A (ko) * 2007-12-04 2009-06-09 삼성전자주식회사 잉크젯 프린트헤드 및 그 제조방법
KR20100011652A (ko) * 2008-07-25 2010-02-03 삼성전자주식회사 잉크젯 프린트헤드 및 그 제조방법
JP5335396B2 (ja) * 2008-12-16 2013-11-06 キヤノン株式会社 インクジェット記録ヘッドの製造方法
JP4557081B2 (ja) * 2009-01-21 2010-10-06 ダイキン工業株式会社 食い込み式管接続構造、弁、食い込み式管継手及び冷凍装置
US8012773B2 (en) * 2009-06-11 2011-09-06 Canon Kabushiki Kaisha Method for manufacturing liquid discharge head
GB0919744D0 (en) * 2009-11-11 2009-12-30 Queen Mary & Westfield College Electrospray emitter and method of manufacture
JP5709536B2 (ja) * 2010-01-14 2015-04-30 キヤノン株式会社 シリコン基板の加工方法
JP2011199673A (ja) * 2010-03-19 2011-10-06 Seiko Instruments Inc 水晶基板のエッチング方法、圧電振動片、圧電振動子、発振器、電子機器、および電波時計
CN102770273B (zh) * 2010-03-31 2014-12-24 佳能株式会社 制造液体排出头的方法
WO2012036682A1 (en) * 2010-09-15 2012-03-22 Hewlett-Packard Development Company, L.P. Fluid nozzle array
EP2670598B1 (en) * 2011-01-31 2019-07-03 Hewlett-Packard Development Company, L.P. Fluid ejection assembly and related methods
JP5182392B2 (ja) * 2011-03-31 2013-04-17 ブラザー工業株式会社 記録装置
JP5814963B2 (ja) * 2013-03-08 2015-11-17 東芝テック株式会社 インクジェットヘッド、インクジェット記録装置、およびインクジェットヘッドの製造方法

Citations (4)

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Publication number Priority date Publication date Assignee Title
JP2001205808A (ja) 1999-11-15 2001-07-31 Seiko Epson Corp インクジェット式記録ヘッド及びその製造方法並びにインクジェット式記録装置
JP2004066537A (ja) * 2002-08-02 2004-03-04 Seiko Epson Corp 液体噴射ヘッドの製造方法
JP2004351931A (ja) * 2003-05-27 2004-12-16 Samsung Electronics Co Ltd インクジェットプリントヘッド及びその製造方法
JP2006224590A (ja) 2005-02-21 2006-08-31 Canon Inc インクジェット記録ヘッドの製造方法

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JP3221474B2 (ja) * 1994-04-05 2001-10-22 セイコーエプソン株式会社 インクジェット式印字ヘッド
KR100311880B1 (ko) 1996-11-11 2001-12-20 미다라이 후지오 관통구멍의제작방법,관통구멍을갖는실리콘기판,이기판을이용한디바이스,잉크제트헤드의제조방법및잉크제트헤드
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JP3494219B2 (ja) * 1999-11-15 2004-02-09 セイコーエプソン株式会社 インクジェット式記録ヘッド
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JP4522086B2 (ja) * 2003-12-15 2010-08-11 キヤノン株式会社 梁、梁の製造方法、梁を備えたインクジェット記録ヘッド、および該インクジェット記録ヘッドの製造方法
CN1325270C (zh) 2003-12-23 2007-07-11 明基电通股份有限公司 扩张流体通道的制作方法
KR100641357B1 (ko) * 2004-08-26 2006-11-01 삼성전자주식회사 잉크젯 프린트 헤드 및 그 제조 방법
JP2006130766A (ja) * 2004-11-05 2006-05-25 Canon Inc 液体吐出ヘッド用基板及びその製造方法
US7255425B2 (en) 2004-12-02 2007-08-14 Taiwan Semiconductor Manufacturing Co., Ltd. Ink-channel wafer integrated with CMOS wafer for inkjet printhead and fabrication method thereof
JP4766658B2 (ja) * 2005-05-10 2011-09-07 キヤノン株式会社 液体吐出ヘッドおよびその製造方法
US7637013B2 (en) * 2005-08-23 2009-12-29 Canon Kabushiki Kaisha Method of manufacturing ink jet recording head

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001205808A (ja) 1999-11-15 2001-07-31 Seiko Epson Corp インクジェット式記録ヘッド及びその製造方法並びにインクジェット式記録装置
JP2004066537A (ja) * 2002-08-02 2004-03-04 Seiko Epson Corp 液体噴射ヘッドの製造方法
JP2004351931A (ja) * 2003-05-27 2004-12-16 Samsung Electronics Co Ltd インクジェットプリントヘッド及びその製造方法
JP2006224590A (ja) 2005-02-21 2006-08-31 Canon Inc インクジェット記録ヘッドの製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120001986A1 (en) * 2010-07-01 2012-01-05 Samsung Electro-Mechanics Co., Ltd. Nozzle plate and method for manufacturing the nozzle plate, and inkjet printer head with the nozzle plate

Also Published As

Publication number Publication date
TWI333897B (en) 2010-12-01
JP5111047B2 (ja) 2012-12-26
CN101161459A (zh) 2008-04-16
KR20080033111A (ko) 2008-04-16
TW200902329A (en) 2009-01-16
US20080088674A1 (en) 2008-04-17
US8562845B2 (en) 2013-10-22
CN101161459B (zh) 2010-06-09
JP2008114589A (ja) 2008-05-22

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