JP4979488B2 - 液体吐出ヘッド及び記録装置 - Google Patents
液体吐出ヘッド及び記録装置 Download PDFInfo
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- JP4979488B2 JP4979488B2 JP2007178286A JP2007178286A JP4979488B2 JP 4979488 B2 JP4979488 B2 JP 4979488B2 JP 2007178286 A JP2007178286 A JP 2007178286A JP 2007178286 A JP2007178286 A JP 2007178286A JP 4979488 B2 JP4979488 B2 JP 4979488B2
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- 239000007788 liquid Substances 0.000 title claims description 276
- 238000004891 communication Methods 0.000 claims description 78
- 238000007599 discharging Methods 0.000 claims description 11
- 239000000758 substrate Substances 0.000 description 137
- 238000000059 patterning Methods 0.000 description 39
- 238000000034 method Methods 0.000 description 22
- 239000010931 gold Substances 0.000 description 16
- 238000003486 chemical etching Methods 0.000 description 13
- 238000004519 manufacturing process Methods 0.000 description 13
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 11
- 229910052814 silicon oxide Inorganic materials 0.000 description 11
- 229910004298 SiO 2 Inorganic materials 0.000 description 10
- 238000006243 chemical reaction Methods 0.000 description 9
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 9
- 229910052737 gold Inorganic materials 0.000 description 8
- 229910052581 Si3N4 Inorganic materials 0.000 description 7
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 7
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 6
- 229910000040 hydrogen fluoride Inorganic materials 0.000 description 6
- 238000000992 sputter etching Methods 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 4
- 229910052697 platinum Inorganic materials 0.000 description 3
- 238000011084 recovery Methods 0.000 description 3
- 238000002048 anodisation reaction Methods 0.000 description 2
- 230000008602 contraction Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005868 electrolysis reaction Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 238000007743 anodising Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14419—Manifold
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14459—Matrix arrangement of the pressure chambers
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Description
第1の実施形態について、図1から図5を参照して説明する。
次に、第2の実施形態について、図6及び図7を参照して説明する。
次に、第3の実施形態について、図8から図10を参照して説明する。本実施形態は、第1及び第2の実施形態に比較して構成する基板の個数が1つ少なく、3つの基板を貼り合わせることで、液体吐出ヘッドが構成されている。したがって、第1及び第2の実施形態よりも、製造方法が更に容易になる。
Si+2HF+2h+ → SiF2+2H+ ・・・(式1)
式1の反応後、次の4段階の反応を経て、最終的にはH2SiF6となり、フッ化水素溶液中に溶解する。:
2SiF2 → Si*+SiF4 ・・・(式2)
SiF4+2HF → H2SiF6 ・・・(式3)
Si*+2H2O → SiO2+2H2 ・・・(式4)
SiO2+6HF → H2SiF6+2H2O ・・・(式5)
ただし、(式1)におけるh+は、正孔(ホール)を表し、(式2)及び(式4)におけるSi*は、非晶質シリコンを表している。
次に、第4の実施形態について、図10を参照して説明する。図10は、本実施形態の液体吐出ヘッドの分解斜視図を示している。図10に示すように、本実施形態は、オリフィス連通路17が、断面略三角形状に形成されたオリフィス連通路柱状部11によって流路が構成されている。また、断面略三角形状のオリフィス連通路柱状部11の一辺は、断面略V字状の共通液室連通路突き出し部10のV字がなす凹部に対向するように配置されている。
2 基板2
3 基板3
4 基板4
10 共通液室連通路突き出し部
11 オリフィス連通路柱状部
16 個別液室
17 オリフィス連通路
18(18a,18b,18c) 共通液室連通路
19 共通液室
20 供給口
21 吐出口
Claims (6)
- 液体を吐出する吐出口と、
該吐出口に連通された個別液室と、
該個別液室に設けられ、液体を吐出させるエネルギを発生する吐出エネルギ発生手段と、
複数の前記個別液室に液体を供給するための共通液室と、
前記個別液室と前記共通液室とを連通する連通路と、を備える液体吐出ヘッドであって、
前記共通液室内に、突出方向に交差する面において略V字状をなして突出した突き出し部が形成され、該突き出し部の内部に、前記連通路の一部が形成される共に、該突き出し部の前記突出方向の端面に、前記連通路と前記共通液室とを連通する供給口が形成され、
液体を吐出する使用状態での鉛直方向において、少なくとも互いに隣接する前記連通路は、該連通路と前記共通液室との連通位置が異なることを特徴とする液体吐出ヘッド。 - 前記吐出口と前記個別液室とを連通するオリフィス連通路が、前記共通液室内に柱状に形成された柱状部に設けられている、請求項1に記載の液体吐出ヘッド。
- 液体を吐出する使用状態において、前記柱状部の前記鉛直方向に直交する断面は略V字形状である、請求項2に記載の液体吐出ヘッド。
- 液体を吐出する使用状態において、前記柱状部の前記鉛直方向に直交する断面は三角形状である、請求項2に記載の液体吐出ヘッド。
- 前記個別液室には、複数の前記連通路がそれぞれ設けられている、請求項1ないし請求項4いずれか1項に記載の液体吐出ヘッド。
- 請求項1ないし請求項5のいずれか1項に記載の液体吐出ヘッドを備え、被記録材に記録を行う記録装置。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007178286A JP4979488B2 (ja) | 2007-07-06 | 2007-07-06 | 液体吐出ヘッド及び記録装置 |
US12/167,652 US7802875B2 (en) | 2007-07-06 | 2008-07-03 | Liquid ejection head and recording apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007178286A JP4979488B2 (ja) | 2007-07-06 | 2007-07-06 | 液体吐出ヘッド及び記録装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2009012367A JP2009012367A (ja) | 2009-01-22 |
JP2009012367A5 JP2009012367A5 (ja) | 2010-08-19 |
JP4979488B2 true JP4979488B2 (ja) | 2012-07-18 |
Family
ID=40264494
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007178286A Active JP4979488B2 (ja) | 2007-07-06 | 2007-07-06 | 液体吐出ヘッド及び記録装置 |
Country Status (2)
Country | Link |
---|---|
US (1) | US7802875B2 (ja) |
JP (1) | JP4979488B2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7318398B2 (ja) * | 2019-07-31 | 2023-08-01 | セイコーエプソン株式会社 | 液体吐出ヘッドおよび液体吐出装置 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0968825B1 (en) * | 1998-06-30 | 2005-09-14 | Canon Kabushiki Kaisha | Line head for ink-jet printer |
JP2000158645A (ja) | 1998-11-25 | 2000-06-13 | Matsushita Electric Ind Co Ltd | インクジェットヘッド |
JP2001334661A (ja) | 2000-03-21 | 2001-12-04 | Nec Corp | インクジェットヘッド |
DE60128506T2 (de) | 2000-03-21 | 2008-01-31 | Fuji Xerox Co., Ltd. | Tintenstrahlkopf |
JP3666386B2 (ja) | 2000-11-30 | 2005-06-29 | ブラザー工業株式会社 | インクジェットプリンタヘッド |
KR100438836B1 (ko) * | 2001-12-18 | 2004-07-05 | 삼성전자주식회사 | 압전 방식의 잉크젯 프린트 헤드 및 그 제조방법 |
JP2005125696A (ja) * | 2003-10-27 | 2005-05-19 | Canon Inc | インクジェット記録ヘッド |
US7585061B2 (en) * | 2004-08-27 | 2009-09-08 | Fujifilm Corporation | Ejection head and image forming apparatus |
JP2008265289A (ja) | 2007-03-26 | 2008-11-06 | Canon Inc | 液体吐出ヘッド及び液体吐出装置 |
-
2007
- 2007-07-06 JP JP2007178286A patent/JP4979488B2/ja active Active
-
2008
- 2008-07-03 US US12/167,652 patent/US7802875B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US7802875B2 (en) | 2010-09-28 |
JP2009012367A (ja) | 2009-01-22 |
US20090021562A1 (en) | 2009-01-22 |
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