JP5070030B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
- Publication number
- JP5070030B2 JP5070030B2 JP2007329586A JP2007329586A JP5070030B2 JP 5070030 B2 JP5070030 B2 JP 5070030B2 JP 2007329586 A JP2007329586 A JP 2007329586A JP 2007329586 A JP2007329586 A JP 2007329586A JP 5070030 B2 JP5070030 B2 JP 5070030B2
- Authority
- JP
- Japan
- Prior art keywords
- terminal
- insulating layer
- layer
- photoelectric conversion
- conductive film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
- H10F30/20—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/58—Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries
- H01L23/60—Protection against electrostatic charges or discharges, e.g. Faraday shields
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/10—Integrated devices
- H10F39/12—Image sensors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/803—Pixels having integrated switching, control, storage or amplification elements
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/95—Circuit arrangements
- H10F77/953—Circuit arrangements for devices having potential barriers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D89/00—Aspects of integrated devices not covered by groups H10D84/00 - H10D88/00
- H10D89/60—Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/10—Integrated devices
- H10F39/12—Image sensors
- H10F39/18—Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Light Receiving Elements (AREA)
- Solid State Image Pick-Up Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007329586A JP5070030B2 (ja) | 2006-12-27 | 2007-12-21 | 半導体装置 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006351877 | 2006-12-27 | ||
| JP2006351877 | 2006-12-27 | ||
| JP2007329586A JP5070030B2 (ja) | 2006-12-27 | 2007-12-21 | 半導体装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2008182214A JP2008182214A (ja) | 2008-08-07 |
| JP2008182214A5 JP2008182214A5 (enExample) | 2011-01-13 |
| JP5070030B2 true JP5070030B2 (ja) | 2012-11-07 |
Family
ID=39582213
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007329586A Expired - Fee Related JP5070030B2 (ja) | 2006-12-27 | 2007-12-21 | 半導体装置 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US7923800B2 (enExample) |
| JP (1) | JP5070030B2 (enExample) |
| KR (1) | KR101369863B1 (enExample) |
| CN (1) | CN101211931B (enExample) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100796592B1 (ko) * | 2005-08-26 | 2008-01-21 | 삼성에스디아이 주식회사 | 박막트랜지스터 및 그 제조 방법 |
| US8207589B2 (en) * | 2007-02-15 | 2012-06-26 | Semiconductor Energy Laboratory Co., Ltd. | Photoelectric conversion device and electronic device, and method for manufacturing photoelectric conversion device |
| JP5212686B2 (ja) | 2007-08-22 | 2013-06-19 | ソニー株式会社 | 半導体レーザアレイの製造方法 |
| US8115160B2 (en) * | 2008-03-14 | 2012-02-14 | Semiconductor Energy Laboratory Co., Ltd. | Protection circuit and photoelectric conversion device |
| JP5388632B2 (ja) | 2008-03-14 | 2014-01-15 | 株式会社半導体エネルギー研究所 | 半導体装置 |
| JP2013093565A (ja) | 2011-10-07 | 2013-05-16 | Semiconductor Energy Lab Co Ltd | 半導体装置 |
| TWI493685B (zh) | 2012-02-10 | 2015-07-21 | E Ink Holdings Inc | 主動陣列基板上之靜電防護結構 |
| EP2651035B1 (en) * | 2012-04-11 | 2017-05-03 | Imec | Low voltage drop unidirectional smart bypass elements |
| JP2015149414A (ja) * | 2014-02-06 | 2015-08-20 | 株式会社東芝 | 半導体装置及び撮像装置 |
| CN105304656B (zh) * | 2014-06-23 | 2018-06-22 | 上海箩箕技术有限公司 | 光电传感器 |
| CN104637970B (zh) * | 2015-03-03 | 2018-03-06 | 京东方科技集团股份有限公司 | 阵列基板及其制作方法、x射线平板探测器、摄像系统 |
| CN110649068A (zh) * | 2019-09-02 | 2020-01-03 | 武汉华星光电半导体显示技术有限公司 | 一种阵列基板及其制备方法 |
| CN110895374A (zh) * | 2019-11-26 | 2020-03-20 | 上海天马微电子有限公司 | 显示面板及显示装置 |
| KR20220033596A (ko) * | 2020-09-08 | 2022-03-17 | 삼성디스플레이 주식회사 | 다결정 실리콘층의 제조 방법, 표시 장치 및 이의 제조 방법 |
Family Cites Families (46)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4454418A (en) | 1982-04-26 | 1984-06-12 | Walker Clifford G | Integrated optics transducer |
| JPS61111578A (ja) * | 1984-11-05 | 1986-05-29 | Sumitomo Electric Ind Ltd | 光受信ic |
| JPH0691228B2 (ja) * | 1986-03-28 | 1994-11-14 | キヤノン株式会社 | 半導体装置 |
| JP2667432B2 (ja) * | 1988-03-19 | 1997-10-27 | 株式会社東芝 | 半導体装置及び固体撮像装置 |
| JPH029176A (ja) * | 1988-06-27 | 1990-01-12 | Matsushita Electric Works Ltd | 光電変換装置および半導体装置 |
| JPH05244513A (ja) * | 1992-02-26 | 1993-09-21 | Canon Inc | 光電変換装置及びその駆動方法 |
| JPH06163868A (ja) * | 1992-09-28 | 1994-06-10 | Sanyo Electric Co Ltd | ホトダイオード内蔵半導体装置 |
| JPH06204446A (ja) * | 1993-01-01 | 1994-07-22 | Canon Inc | 光電変換素子 |
| JPH06302798A (ja) * | 1993-04-19 | 1994-10-28 | Olympus Optical Co Ltd | 固体撮像装置 |
| US5654203A (en) | 1993-12-02 | 1997-08-05 | Semiconductor Energy Laboratory, Co., Ltd. | Method for manufacturing a thin film transistor using catalyst elements to promote crystallization |
| JP2797941B2 (ja) * | 1993-12-27 | 1998-09-17 | 日本電気株式会社 | 光電変換素子とその駆動方法 |
| JP2000200892A (ja) * | 1995-12-22 | 2000-07-18 | Sanyo Electric Co Ltd | ホトダイオード内蔵半導体装置 |
| JP4179483B2 (ja) | 1996-02-13 | 2008-11-12 | 株式会社半導体エネルギー研究所 | 表示装置の作製方法 |
| JP2765558B2 (ja) * | 1996-04-17 | 1998-06-18 | 日本電気株式会社 | フィルム・キャリア半導体装置 |
| JP3727416B2 (ja) | 1996-05-31 | 2005-12-14 | 株式会社半導体エネルギー研究所 | 表示装置 |
| JP3444093B2 (ja) | 1996-06-10 | 2003-09-08 | 株式会社デンソー | 光センサ回路 |
| JP3855351B2 (ja) * | 1997-04-10 | 2006-12-06 | 株式会社デンソー | 光センサ |
| JP4294745B2 (ja) | 1997-09-26 | 2009-07-15 | 株式会社半導体エネルギー研究所 | 光電変換装置の作製方法 |
| US20040252867A1 (en) * | 2000-01-05 | 2004-12-16 | Je-Hsiung Lan | Biometric sensor |
| US6358767B2 (en) | 2000-06-08 | 2002-03-19 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing semiconductor device |
| TWI225312B (en) | 2001-02-08 | 2004-12-11 | Semiconductor Energy Lab | Light emitting device |
| US6953735B2 (en) | 2001-12-28 | 2005-10-11 | Semiconductor Energy Laboratory Co., Ltd. | Method for fabricating a semiconductor device by transferring a layer to a support with curvature |
| US6821808B2 (en) * | 2002-08-23 | 2004-11-23 | Micron Technology, Inc. | CMOS APS with stacked avalanche multiplication layer which provides linear and logarithmic photo-conversion characteristics |
| US6982406B2 (en) | 2003-04-03 | 2006-01-03 | Pao Jung Chen | Simple CMOS light-to-current sensor |
| US7253391B2 (en) | 2003-09-19 | 2007-08-07 | Semiconductor Energy Laboratory Co., Ltd. | Optical sensor device and electronic apparatus |
| US7495272B2 (en) | 2003-10-06 | 2009-02-24 | Semiconductor Energy Labortaory Co., Ltd. | Semiconductor device having photo sensor element and amplifier circuit |
| US7695985B2 (en) | 2004-12-24 | 2010-04-13 | Semiconductor Energy Laboratory Co., Ltd | Light exposure apparatus and manufacturing method of semiconductor device using the same |
| US7492028B2 (en) * | 2005-02-18 | 2009-02-17 | Semiconductor Energy Laboratory Co., Ltd. | Photoelectric conversion device and manufacturing method of the same, and a semiconductor device |
| JP4697524B2 (ja) | 2005-03-30 | 2011-06-08 | ソニー株式会社 | アクティブマトリクス型液晶表示装置 |
| US7537976B2 (en) | 2005-05-20 | 2009-05-26 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of thin film transistor |
| DE602006001686D1 (de) | 2005-05-23 | 2008-08-21 | Semiconductor Energy Lab | Photoelektrische Umwandleranordnung und Verfahren zu ihrer Herstellung |
| US7767516B2 (en) | 2005-05-31 | 2010-08-03 | Semiconductor Energy Laboratory Co., Ltd | Semiconductor device, manufacturing method thereof, and manufacturing method of antenna |
| WO2007013534A1 (en) | 2005-07-27 | 2007-02-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
| US7635863B2 (en) | 2005-10-18 | 2009-12-22 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic apparatus having the display device |
| DE602007013478D1 (de) | 2006-02-08 | 2011-05-12 | Semiconductor Energy Lab | RFID-Vorrichtung |
| KR101315282B1 (ko) | 2006-04-27 | 2013-10-08 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 이를 사용한 전자기기 |
| EP1857907B1 (en) | 2006-04-28 | 2009-08-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
| EP1863091A3 (en) | 2006-05-30 | 2012-11-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device using the same |
| US7791012B2 (en) | 2006-09-29 | 2010-09-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising photoelectric conversion element and high-potential and low-potential electrodes |
| KR101447044B1 (ko) | 2006-10-31 | 2014-10-06 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체장치 |
| US7759629B2 (en) | 2007-03-20 | 2010-07-20 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing a semiconductor device |
| WO2008123119A1 (en) | 2007-03-26 | 2008-10-16 | Semiconductor Energy Laboratory Co., Ltd. | Photoelectric conversion device and electronic device provided with the photoelectric conversion device |
| WO2009014155A1 (en) | 2007-07-25 | 2009-01-29 | Semiconductor Energy Laboratory Co., Ltd. | Photoelectric conversion device and electronic device having the same |
| US8053717B2 (en) | 2008-05-22 | 2011-11-08 | Semiconductor Energy Laboratory Co., Ltd. | Photoelectric conversion device having a reference voltage generation circuit with a resistor and a second diode element and electronic device having the same |
| JP5518381B2 (ja) | 2008-07-10 | 2014-06-11 | 株式会社半導体エネルギー研究所 | カラーセンサ及び当該カラーセンサを具備する電子機器 |
| US8106346B2 (en) | 2008-09-04 | 2012-01-31 | Semiconductor Energy Laboratory Co., Ltd. | Photodetector |
-
2007
- 2007-12-18 US US12/000,824 patent/US7923800B2/en not_active Expired - Fee Related
- 2007-12-21 JP JP2007329586A patent/JP5070030B2/ja not_active Expired - Fee Related
- 2007-12-24 KR KR1020070136110A patent/KR101369863B1/ko not_active Expired - Fee Related
- 2007-12-27 CN CN2007101608495A patent/CN101211931B/zh not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN101211931B (zh) | 2011-04-13 |
| JP2008182214A (ja) | 2008-08-07 |
| CN101211931A (zh) | 2008-07-02 |
| KR20080061291A (ko) | 2008-07-02 |
| KR101369863B1 (ko) | 2014-03-05 |
| US7923800B2 (en) | 2011-04-12 |
| US20080156368A1 (en) | 2008-07-03 |
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