JP5047545B2 - 浮上搬送ユニット - Google Patents

浮上搬送ユニット Download PDF

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Publication number
JP5047545B2
JP5047545B2 JP2006182065A JP2006182065A JP5047545B2 JP 5047545 B2 JP5047545 B2 JP 5047545B2 JP 2006182065 A JP2006182065 A JP 2006182065A JP 2006182065 A JP2006182065 A JP 2006182065A JP 5047545 B2 JP5047545 B2 JP 5047545B2
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JP
Japan
Prior art keywords
chamber
porous plate
groove
groove portion
air
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Expired - Fee Related
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JP2006182065A
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English (en)
Japanese (ja)
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JP2008007319A5 (ko
JP2008007319A (ja
Inventor
穣 佐藤
俊雄 中森
浩右 山口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Convum Ltd
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Myotoku Ltd
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Priority to JP2006182065A priority Critical patent/JP5047545B2/ja
Publication of JP2008007319A publication Critical patent/JP2008007319A/ja
Publication of JP2008007319A5 publication Critical patent/JP2008007319A5/ja
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Publication of JP5047545B2 publication Critical patent/JP5047545B2/ja
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JP2006182065A 2006-06-30 2006-06-30 浮上搬送ユニット Expired - Fee Related JP5047545B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006182065A JP5047545B2 (ja) 2006-06-30 2006-06-30 浮上搬送ユニット

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006182065A JP5047545B2 (ja) 2006-06-30 2006-06-30 浮上搬送ユニット

Publications (3)

Publication Number Publication Date
JP2008007319A JP2008007319A (ja) 2008-01-17
JP2008007319A5 JP2008007319A5 (ko) 2009-08-06
JP5047545B2 true JP5047545B2 (ja) 2012-10-10

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ID=39065848

Family Applications (1)

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JP2006182065A Expired - Fee Related JP5047545B2 (ja) 2006-06-30 2006-06-30 浮上搬送ユニット

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JP (1) JP5047545B2 (ko)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009220956A (ja) * 2008-03-17 2009-10-01 Murata Mach Ltd 浮上搬送装置と浮上搬送方法
JP5176631B2 (ja) * 2008-03-24 2013-04-03 凸版印刷株式会社 基板搬送装置及び基板検査装置
JP5123842B2 (ja) * 2008-12-26 2013-01-23 Ｃｋｄ株式会社 非接触支持装置
KR100928642B1 (ko) 2009-03-03 2009-11-27 이재성 안정성이 뛰어난 비접촉 반송플레이트
KR100946634B1 (ko) * 2009-03-20 2010-03-10 이재성 중량체용 비접촉식 반송플레이트
KR101084638B1 (ko) 2009-06-15 2011-11-17 (주)렉스닉테크놀로지 기판의 부상반송 장치
JP5387156B2 (ja) * 2009-06-17 2014-01-15 凸版印刷株式会社 基板搬送装置及び基板検査装置
KR20130065620A (ko) * 2011-12-09 2013-06-19 가부시키가이샤묘토쿠 부상 반송 유닛
JP2013139338A (ja) * 2011-12-09 2013-07-18 Myotoku Ltd 浮上搬送ユニット
US8888271B2 (en) * 2012-05-04 2014-11-18 Xerox Corporation Air bearing substrate media transport
JP5987528B2 (ja) * 2012-07-30 2016-09-07 株式会社タンケンシールセーコウ 浮上装置
US8851664B2 (en) * 2012-11-06 2014-10-07 Xerox Corporation Maintenance cart for moveable flatbed media marking system
KR101434169B1 (ko) 2014-02-07 2014-09-29 디아이티 주식회사 에어블로윙 타입 기판 부상 및 이송 장치
CN111268424B (zh) * 2019-12-31 2021-04-16 南京理工大学 一种同心双涡旋非接触式真空吸取装置
CN114148760A (zh) * 2021-11-17 2022-03-08 深圳市烽炀科技实业有限公司 一种空气悬浮底盘

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63134549A (ja) * 1986-11-26 1988-06-07 品川白煉瓦株式会社 タイル焼成法およびタイル焼成炉
JPS63273781A (ja) * 1987-05-01 1988-11-10 品川白煉瓦株式会社 被熱物の浮上・輸送焼成法およびその焼成炉
JP4493742B2 (ja) * 1998-10-12 2010-06-30 株式会社渡辺商行 浮上搬送装置用の気体噴出構造
JP2003321117A (ja) * 2002-05-07 2003-11-11 Mineya Mori フラットパネルと保持機器との間の圧力域によってフラットパネルを保持する機器及びロボットハンド
JP2004273574A (ja) * 2003-03-05 2004-09-30 Wakomu Denso:Kk 基板浮上装置および同方法
JP4583882B2 (ja) * 2004-11-05 2010-11-17 シーケーディ株式会社 非接触支持装置
JP4553376B2 (ja) * 2005-07-19 2010-09-29 東京エレクトロン株式会社 浮上式基板搬送処理装置及び浮上式基板搬送処理方法

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Publication number Publication date
JP2008007319A (ja) 2008-01-17

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