KR100928642B1 - 안정성이 뛰어난 비접촉 반송플레이트 - Google Patents
안정성이 뛰어난 비접촉 반송플레이트 Download PDFInfo
- Publication number
- KR100928642B1 KR100928642B1 KR1020090018027A KR20090018027A KR100928642B1 KR 100928642 B1 KR100928642 B1 KR 100928642B1 KR 1020090018027 A KR1020090018027 A KR 1020090018027A KR 20090018027 A KR20090018027 A KR 20090018027A KR 100928642 B1 KR100928642 B1 KR 100928642B1
- Authority
- KR
- South Korea
- Prior art keywords
- plate
- air
- upper plate
- charging groove
- conveying plate
- Prior art date
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
- B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
- B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
- B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/04—Arrangements of vacuum systems or suction cups
- B65G2249/045—Details of suction cups suction cups
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Fluid Mechanics (AREA)
- Optics & Photonics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
Claims (3)
- 상판(110)의 상측으로 에어가 분출되어 피반송체를 부상시키는 비접촉식 반송플레이트에 있어서,상기 상판(110)의 중앙에는 길이방향으로 관통공(114)이 형성되고, 상기 관통공(114)의 양측 상판(110)상에는 다수의 차징홈(112)이 폭방향으로 관통되게 형성되되, 상기 차징홈(112)은 상기 관통공(114)을 기점으로 양측에 지그재그 형상으로 형성됨을 특징으로 하는 안정성이 뛰어난 비접촉식 반송플레이트.
- 삭제
- 삭제
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020090018027A KR100928642B1 (ko) | 2009-03-03 | 2009-03-03 | 안정성이 뛰어난 비접촉 반송플레이트 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020090018027A KR100928642B1 (ko) | 2009-03-03 | 2009-03-03 | 안정성이 뛰어난 비접촉 반송플레이트 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR100928642B1 true KR100928642B1 (ko) | 2009-11-27 |
Family
ID=41605459
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020090018027A KR100928642B1 (ko) | 2009-03-03 | 2009-03-03 | 안정성이 뛰어난 비접촉 반송플레이트 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR100928642B1 (ko) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004509046A (ja) * | 2000-09-14 | 2004-03-25 | カール−ツァイス−スティフツング | 非接触方式で平板ガラスを姿勢維持し搬送するための方法及び装置 |
JP2004179580A (ja) | 2002-11-29 | 2004-06-24 | Daiichi Shisetsu Kogyo Kk | 板状部材の搬送装置 |
JP2008007319A (ja) | 2006-06-30 | 2008-01-17 | Myotoku Ltd | 浮上搬送ユニット |
KR100834117B1 (ko) * | 2007-02-16 | 2008-06-02 | 세메스 주식회사 | 기판 지지유닛, 그리고 상기 기판 지지유닛을 구비하는기판처리장치 및 방법 |
-
2009
- 2009-03-03 KR KR1020090018027A patent/KR100928642B1/ko active IP Right Grant
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004509046A (ja) * | 2000-09-14 | 2004-03-25 | カール−ツァイス−スティフツング | 非接触方式で平板ガラスを姿勢維持し搬送するための方法及び装置 |
JP2004179580A (ja) | 2002-11-29 | 2004-06-24 | Daiichi Shisetsu Kogyo Kk | 板状部材の搬送装置 |
JP2008007319A (ja) | 2006-06-30 | 2008-01-17 | Myotoku Ltd | 浮上搬送ユニット |
KR100834117B1 (ko) * | 2007-02-16 | 2008-06-02 | 세메스 주식회사 | 기판 지지유닛, 그리고 상기 기판 지지유닛을 구비하는기판처리장치 및 방법 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4896112B2 (ja) | 基板搬送装置 | |
KR20070016576A (ko) | 기판 클램핑 장치, 이송장치 및 그 검사장치 | |
TWI316503B (en) | Substrate transferring apparatus | |
KR101208262B1 (ko) | 글래스 검사 장치 | |
TWI386354B (zh) | 基板搬送裝置 | |
JP5943799B2 (ja) | ガラス基板の搬送装置、および、ガラス基板の製造方法 | |
JP2008224371A (ja) | インライン自動検査装置及びインライン自動検査システム | |
KR100892088B1 (ko) | 에어 플로팅을 이용한 비접촉식 필름 검사장치 | |
KR100928642B1 (ko) | 안정성이 뛰어난 비접촉 반송플레이트 | |
JP5269328B2 (ja) | インライン自動検査装置及びインライン自動検査システム | |
KR101631537B1 (ko) | 결함 검출 능력을 향상시킨 인라인 스테이지 | |
KR100682089B1 (ko) | 벨트 컨베이어의 손상 검출장치 | |
KR101138727B1 (ko) | 기판 클램핑 장치, 이송장치 및 그 검사장치 | |
KR101384092B1 (ko) | 기판 이송장치 및 이것을 포함하는 기판 검사장비 | |
US8827260B2 (en) | Apparatus for detecting a foreign substance on an interleaving paper to be inserted between glass substrates | |
KR100916932B1 (ko) | 대전방지용 레이전트 도막층의 틈새를 이용한 비접촉식 반송플레이트 | |
JP5618209B2 (ja) | ガラス板の端面撮像装置およびその撮像方法 | |
KR101281127B1 (ko) | 비접촉 평판 이송장치 | |
KR20160085740A (ko) | 결함 검출 능력을 향상시킨 인라인 스테이지 | |
KR20110117473A (ko) | 기판고정장치 | |
JP2014093441A (ja) | ウエハ搬送装置およびそれを備えたウエハ検査装置 | |
JP6026603B2 (ja) | ガラス基板の搬送装置、および、ガラス基板の製造方法 | |
KR100946634B1 (ko) | 중량체용 비접촉식 반송플레이트 | |
KR101150397B1 (ko) | 기판검사장치 | |
KR100971288B1 (ko) | 어레이 테스트 장비 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
A302 | Request for accelerated examination | ||
E902 | Notification of reason for refusal | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
FPAY | Annual fee payment |
Payment date: 20120831 Year of fee payment: 4 |
|
FPAY | Annual fee payment |
Payment date: 20130830 Year of fee payment: 5 |
|
FPAY | Annual fee payment |
Payment date: 20140829 Year of fee payment: 6 |
|
FPAY | Annual fee payment |
Payment date: 20160912 Year of fee payment: 8 |
|
FPAY | Annual fee payment |
Payment date: 20170921 Year of fee payment: 9 |
|
FPAY | Annual fee payment |
Payment date: 20180928 Year of fee payment: 10 |
|
FPAY | Annual fee payment |
Payment date: 20190910 Year of fee payment: 11 |