JP5039368B2 - 半導体記憶装置、その製造方法及びその駆動方法 - Google Patents

半導体記憶装置、その製造方法及びその駆動方法 Download PDF

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JP5039368B2
JP5039368B2 JP2006325510A JP2006325510A JP5039368B2 JP 5039368 B2 JP5039368 B2 JP 5039368B2 JP 2006325510 A JP2006325510 A JP 2006325510A JP 2006325510 A JP2006325510 A JP 2006325510A JP 5039368 B2 JP5039368 B2 JP 5039368B2
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type diffusion
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Japanese (ja)
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JP2007189204A5 (enExample
JP2007189204A (ja
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善也 守山
裕二 原田
桂太 高橋
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Panasonic Corp
Panasonic Holdings Corp
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Panasonic Corp
Matsushita Electric Industrial Co Ltd
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  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
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JP2006325510A 2005-12-13 2006-12-01 半導体記憶装置、その製造方法及びその駆動方法 Expired - Fee Related JP5039368B2 (ja)

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JP2006325510A JP5039368B2 (ja) 2005-12-13 2006-12-01 半導体記憶装置、その製造方法及びその駆動方法

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JP2005358969 2005-12-13
JP2005358969 2005-12-13
JP2006325510A JP5039368B2 (ja) 2005-12-13 2006-12-01 半導体記憶装置、その製造方法及びその駆動方法

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JP2007189204A JP2007189204A (ja) 2007-07-26
JP2007189204A5 JP2007189204A5 (enExample) 2009-04-09
JP5039368B2 true JP5039368B2 (ja) 2012-10-03

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9802374B2 (en) 2006-11-03 2017-10-31 Tufts University Biopolymer sensor and method of manufacturing the same
US9969134B2 (en) 2006-11-03 2018-05-15 Trustees Of Tufts College Nanopatterned biopolymer optical device and method of manufacturing the same
US10040834B2 (en) 2006-11-03 2018-08-07 Tufts University Biopolymer optofluidic device and method of manufacturing the same

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5274878B2 (ja) * 2008-04-15 2013-08-28 パナソニック株式会社 半導体装置及びその製造方法
JP5259246B2 (ja) * 2008-05-09 2013-08-07 ルネサスエレクトロニクス株式会社 半導体装置
JP6292041B2 (ja) * 2014-06-11 2018-03-14 富士通セミコンダクター株式会社 半導体装置及びその製造方法
JPWO2023281795A1 (enExample) * 2021-07-09 2023-01-12

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10173157A (ja) * 1996-12-06 1998-06-26 Toshiba Corp 半導体装置
JPH10200077A (ja) * 1997-01-08 1998-07-31 Sony Corp 半導体装置及びその製造方法
JP3528575B2 (ja) * 1998-02-17 2004-05-17 セイコーエプソン株式会社 不揮発性半導体記憶装置及びその製造方法
JP2002164447A (ja) * 2000-11-28 2002-06-07 Sharp Corp 不揮発性半導体メモリの製造方法
EP1385213A4 (en) * 2002-02-21 2008-08-06 Matsushita Electric Industrial Co Ltd SEMICONDUCTOR MEMBER COMPONENT AND METHOD FOR THE PRODUCTION THEREOF
JP4163610B2 (ja) * 2003-12-22 2008-10-08 株式会社東芝 不揮発性半導体記憶装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9802374B2 (en) 2006-11-03 2017-10-31 Tufts University Biopolymer sensor and method of manufacturing the same
US9969134B2 (en) 2006-11-03 2018-05-15 Trustees Of Tufts College Nanopatterned biopolymer optical device and method of manufacturing the same
US10040834B2 (en) 2006-11-03 2018-08-07 Tufts University Biopolymer optofluidic device and method of manufacturing the same
US10280204B2 (en) 2006-11-03 2019-05-07 Tufts University Electroactive biopolymer optical and electro-optical devices and method of manufacturing the same

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