JP4993677B2 - 磁気記録媒体の製造方法 - Google Patents
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Classifications
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
- G11B5/66—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers
- G11B5/674—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers having differing macroscopic or microscopic structures, e.g. differing crystalline lattices, varying atomic structures or differing roughnesses
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
- G11B5/66—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers
- G11B5/676—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers having magnetic layers separated by a nonmagnetic layer, e.g. antiferromagnetic layer, Cu layer or coupling layer
- G11B5/678—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers having magnetic layers separated by a nonmagnetic layer, e.g. antiferromagnetic layer, Cu layer or coupling layer having three or more magnetic layers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
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- Manufacturing Of Magnetic Record Carriers (AREA)
- Magnetic Record Carriers (AREA)
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Description
真空引きを行った成膜装置を用いて、DCマグネトロンスパッタリング法にて、Ar雰囲気中で、アルミノシリケートガラスの基板12上に、付着層14、及び軟磁性層16を順次成膜する。このとき、付着層14は、厚さ10nmのCrTi層となるように、CrTiターゲットを用いて成膜する。また、軟磁性層16は、全厚50nmのアモルファスCoTaZr(Co:88at%、Ta:7at%、Zr:5at%)層となるように、CoTaZrターゲットを用いて成膜する。軟磁性層16は、磁区制御のために、厚さ0.9nmのRu層を挟む二層構造とする。
連続膜層24の代わりに、軟磁性層16と同じ材料で形成された軟磁性層32を4nm形成して、エクスチェンジ・スプリング媒体の磁気記録媒体10を作成する。イオンビーム照射工程では、25keVのエネルギーで加速した燐イオン(P+)のイオンビーム42を用いる。このイオンビーム照射において、イオン照射量は、4×1015/cm2とする。上記以外は、実施例1と同様にして、実施例2に係る磁気記録媒体10を作成する。
連続膜層24の代わりに、軟磁性層34として、粒界にSiO2を含むNiFe層(NiFe−SiO2層)を3nm形成して、エクスチェンジ・カップルド・コンポジット媒体の磁気記録媒体10を作成する。イオンビーム照射工程では、20keVのエネルギーで加速した硼素イオン(B+)のイオンビーム42を用いる。このイオンビーム照射において、イオン照射量は、4×1015/cm2とする。上記以外は、実施例1と同様にして、実施例3に係る磁気記録媒体10を作成する。
カップリング制御層22及び連続膜層24を形成しない以外は実施例1と同様にして、比較例1に係る磁気記録媒体を作成する。比較例1に係る磁気記録媒体は、図3(a)に関連して説明したグラニュラ媒体である。
分離領域202を形成しない以外は実施例1と同様にして、比較例2に係る磁気記録媒体を作成する。比較例2に係る磁気記録媒体は、図3(b)に関連して説明した従来型CGC媒体である。
比較例1に係る磁気記録媒体は、図3(a)を用いて説明したように、記録された信号の熱安定性が不十分である。また、比較例2に係る磁気記録媒体は、図3(b)を用いて説明したように、記録された信号のグレー領域がトラックの幅方向に広がり、トラックエッジノイズが大きくなる。そのため、これらの場合、例えば1平方インチ辺り200Gビットを超える記録密度を実現することは困難である。
Claims (6)
- 磁気記録媒体の製造方法であって、
磁気記録層を形成する記録層形成工程と、
前記磁気記録媒体のトラック間の領域にイオンビームを照射することにより、前記トラック間を磁気的に分離する分離領域を形成するイオンビーム照射工程と
を備え、
前記磁気記録媒体は、CGC媒体であり、
前記磁気記録層は、
グラニュラ構造の層である第1磁性層と、
前記第1磁性層の上に形成される多層膜の第2磁性層と
を有し、
前記イオンビーム照射工程は、少なくとも前記磁気記録層が形成された後に、前記トラック間の領域にイオンビームを照射し、
かつ、
前記イオンビーム照射工程は、前記第2磁性層に対して前記イオンビームを照射して、前記第1磁性層及び前記第2磁性層のうちの、実質的に前記第2磁性層のみに前記分離領域を形成することを特徴とする磁気記録媒体の製造方法。 - 前記第2磁性層は、組成が異なる複数種類の金属膜が積層された多層膜であり、
前記イオンビーム照射工程は、前記イオンビームによって、前記第2磁性層における前記複数種類の金属膜のそれぞれに含まれる金属の合金を形成することにより、前記分離領域を形成することを特徴とする請求項1に記載の磁気記録媒体の製造方法。 - 前記磁気記録媒体は、垂直磁気記録に用いられる磁気記録媒体であり、
前記第1磁性層は、垂直磁気異方性を示す磁性結晶粒子と、前記磁性結晶粒子の粒界において前記磁性結晶粒子間を磁気的に分離する非磁性物質とを有し、
前記第2磁性層は、前記磁性結晶粒子と交換結合した、前記磁性結晶粒子の粒界よりも粒界の幅が小さい磁性粒子を有することを特徴とする請求項1又は2に記載の磁気記録媒体の製造方法。 - 前記磁気記録媒体は、垂直磁気記録に用いられる磁気記録媒体であり、前記第1磁性層及び前記第2磁性層が形成される基板を備え、
前記第1磁性層は、垂直磁気異方性を示す磁性結晶粒子と、前記磁性結晶粒子の粒界において前記磁性結晶粒子間を磁気的に分離する非磁性物質とを有し、
前記第2磁性層は、前記磁性結晶粒子と交換結合しており、かつ、前記基板の主表面と平行な方向において、前記第1磁性層の前記磁性結晶粒子間の結合力よりも互いに強く交換結合している磁性粒子を有することを特徴とする請求項1から3のいずれかに記載の磁気記録媒体の製造方法。 - 前記第1磁性層は、前記磁性結晶粒子の粒界に酸化物である前記非磁性物質が偏析したグラニュラ構造の層であり、
前記第2磁性層は、Co化合物の層とPd層又はPt層とを交互に積層した積層膜であることを特徴とする請求項1から4のいずれかに記載の磁気記録媒体の製造方法。 - 前記磁気記録層において、前記分離領域が形成されている領域での飽和磁場は、前記分離領域が形成されていない領域での飽和磁場よりも大きいことを特徴とする請求項1から5のいずれかに記載の磁気記録媒体の製造方法。
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JP2006262810A JP4993677B2 (ja) | 2006-09-27 | 2006-09-27 | 磁気記録媒体の製造方法 |
US11/862,410 US9005699B2 (en) | 2006-09-27 | 2007-09-27 | Method for manufacturing magnetic recording medium |
SG200708935-2A SG141397A1 (en) | 2006-09-27 | 2007-09-27 | Method for manufacturing magnetic recording medium |
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