JP4984408B2 - 磁気センサおよびその製法 - Google Patents

磁気センサおよびその製法 Download PDF

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Publication number
JP4984408B2
JP4984408B2 JP2005077010A JP2005077010A JP4984408B2 JP 4984408 B2 JP4984408 B2 JP 4984408B2 JP 2005077010 A JP2005077010 A JP 2005077010A JP 2005077010 A JP2005077010 A JP 2005077010A JP 4984408 B2 JP4984408 B2 JP 4984408B2
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JP
Japan
Prior art keywords
film
giant magnetoresistive
thick film
magnetoresistive element
magnetic sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2005077010A
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English (en)
Japanese (ja)
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JP2006261400A (ja
Inventor
秀樹 佐藤
寛 内藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yamaha Corp
Original Assignee
Yamaha Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yamaha Corp filed Critical Yamaha Corp
Priority to JP2005077010A priority Critical patent/JP4984408B2/ja
Priority to AT06729152T priority patent/ATE512370T1/de
Priority to TW095108810A priority patent/TWI313078B/zh
Priority to EP06729152A priority patent/EP1860450B1/en
Priority to CN200680008164.2A priority patent/CN101142494B/zh
Priority to PCT/JP2006/305131 priority patent/WO2006098367A1/ja
Priority to US10/584,666 priority patent/US8178361B2/en
Priority to RU2007134110/28A priority patent/RU2007134110A/ru
Priority to CA002601130A priority patent/CA2601130A1/en
Priority to US11/908,549 priority patent/US20090027048A1/en
Priority to PCT/JP2006/305399 priority patent/WO2006098431A1/ja
Priority to CN200680008060.1A priority patent/CN101203769B/zh
Priority to BRPI0608019-7A priority patent/BRPI0608019A2/pt
Priority to TW097125332A priority patent/TWI361503B/zh
Priority to EP06729388A priority patent/EP1860451B1/en
Priority to KR1020077020878A priority patent/KR100950615B1/ko
Priority to TW097125334A priority patent/TWI360243B/zh
Priority to TW095109283A priority patent/TWI307977B/zh
Publication of JP2006261400A publication Critical patent/JP2006261400A/ja
Priority to US13/459,644 priority patent/US9054028B2/en
Priority to US13/517,526 priority patent/US20120268113A1/en
Application granted granted Critical
Publication of JP4984408B2 publication Critical patent/JP4984408B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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  • Hall/Mr Elements (AREA)
JP2005077010A 2005-03-17 2005-03-17 磁気センサおよびその製法 Expired - Fee Related JP4984408B2 (ja)

Priority Applications (20)

Application Number Priority Date Filing Date Title
JP2005077010A JP4984408B2 (ja) 2005-03-17 2005-03-17 磁気センサおよびその製法
TW095108810A TWI313078B (en) 2005-03-17 2006-03-15 Magnetic sensor and manufacturing method therefor
EP06729152A EP1860450B1 (en) 2005-03-17 2006-03-15 Magnetic sensor and manufacturing method thereof
CN200680008164.2A CN101142494B (zh) 2005-03-17 2006-03-15 磁传感器及其制造方法
PCT/JP2006/305131 WO2006098367A1 (ja) 2005-03-17 2006-03-15 磁気センサ及びその製造方法
US10/584,666 US8178361B2 (en) 2005-03-17 2006-03-15 Magnetic sensor and manufacturing method therefor
AT06729152T ATE512370T1 (de) 2005-03-17 2006-03-15 Magnetsensor und herstellungsverfahren dafür
TW097125334A TWI360243B (en) 2005-03-17 2006-03-17 Three-axis magnetic sensor and manufacturing metho
US11/908,549 US20090027048A1 (en) 2005-03-17 2006-03-17 Three-Axis Magnetic Sensor and Method for Manufacturing the Same
PCT/JP2006/305399 WO2006098431A1 (ja) 2005-03-17 2006-03-17 三軸磁気センサおよびその製造方法
RU2007134110/28A RU2007134110A (ru) 2005-03-17 2006-03-17 Трехосевой магнитный датчик и способ его изготовления
BRPI0608019-7A BRPI0608019A2 (pt) 2005-03-17 2006-03-17 sensor magnético e método para manufaturar um sensor magnético
TW097125332A TWI361503B (en) 2005-03-17 2006-03-17 Three-axis magnetic sensor and manufacturing method therefor
EP06729388A EP1860451B1 (en) 2005-03-17 2006-03-17 3-axis magnetic sensor and manufacturing method thereof
KR1020077020878A KR100950615B1 (ko) 2005-03-17 2006-03-17 3축 자기 센서 및 그 제조 방법
CA002601130A CA2601130A1 (en) 2005-03-17 2006-03-17 Three-axis magnetic sensor and method for manufacturing the same
TW095109283A TWI307977B (en) 2005-03-17 2006-03-17 Three-axis magnetic sensor and manufacturing method therefor
CN200680008060.1A CN101203769B (zh) 2005-03-17 2006-03-17 三轴磁传感器及其制造方法
US13/459,644 US9054028B2 (en) 2005-03-17 2012-04-30 Magnetic sensor and manufacturing method therefor
US13/517,526 US20120268113A1 (en) 2005-03-17 2012-06-13 Three-axis magnetic sensor and method for manufacturing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005077010A JP4984408B2 (ja) 2005-03-17 2005-03-17 磁気センサおよびその製法

Publications (2)

Publication Number Publication Date
JP2006261400A JP2006261400A (ja) 2006-09-28
JP4984408B2 true JP4984408B2 (ja) 2012-07-25

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Family Applications (1)

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JP2005077010A Expired - Fee Related JP4984408B2 (ja) 2005-03-17 2005-03-17 磁気センサおよびその製法

Country Status (2)

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JP (1) JP4984408B2 (zh)
CN (2) CN101142494B (zh)

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JP4961736B2 (ja) * 2005-12-05 2012-06-27 ヤマハ株式会社 磁気センサの製造方法
JP4790448B2 (ja) * 2006-03-03 2011-10-12 株式会社リコー 磁気抵抗効果素子及びその形成方法
JP4946591B2 (ja) * 2007-04-19 2012-06-06 ヤマハ株式会社 磁気センサ
JP2008270471A (ja) * 2007-04-19 2008-11-06 Yamaha Corp 磁気センサ及びその製造方法
JP2008309567A (ja) * 2007-06-13 2008-12-25 Yamaha Corp 磁気センサ及びその製造方法
JP5292726B2 (ja) 2007-06-13 2013-09-18 ヤマハ株式会社 磁気センサ及びその製造方法
JP2008309634A (ja) * 2007-06-14 2008-12-25 Yamaha Corp 磁気センサ
JP2008309633A (ja) * 2007-06-14 2008-12-25 Yamaha Corp 磁気センサ
US8390283B2 (en) 2009-09-25 2013-03-05 Everspin Technologies, Inc. Three axis magnetic field sensor
ITTO20090973A1 (it) * 2009-12-10 2011-06-11 St Microelectronics Srl Magnetometro triassiale integrato di materiale semiconduttore realizzato in tecnologia mems
FR2955942B1 (fr) * 2010-01-29 2013-01-04 Centre Nat Rech Scient Magnetometre integre et son procede de fabrication
US8518734B2 (en) 2010-03-31 2013-08-27 Everspin Technologies, Inc. Process integration of a single chip three axis magnetic field sensor
IT1403421B1 (it) * 2010-12-23 2013-10-17 St Microelectronics Srl Sensore magnetoresistivo integrato, in particolare sensore magnetoresistivo triassiale e suo procedimento di fabbricazione
US8207757B1 (en) * 2011-02-07 2012-06-26 GlobalFoundries, Inc. Nonvolatile CMOS-compatible logic circuits and related operating methods
US9024632B2 (en) * 2011-05-30 2015-05-05 Denso Corporation Magnetic sensor with a plurality of heater portions to fix the direction of magnetization of a pinned magnetic layer
CN102385043B (zh) * 2011-08-30 2013-08-21 江苏多维科技有限公司 Mtj三轴磁场传感器及其封装方法
CN104244856B (zh) * 2011-12-23 2017-03-29 维西克斯血管公司 重建身体通道的组织或身体通路附近的组织的方法及设备
TWI431301B (zh) 2012-03-05 2014-03-21 Ind Tech Res Inst 應用穿隧式磁電阻器之磁場感測方法及磁場感測裝置
CN103376425A (zh) * 2012-04-23 2013-10-30 美新半导体（无锡）有限公司 三轴磁传感器
JP5664706B2 (ja) * 2012-07-05 2015-02-04 株式会社デンソー 磁気センサ
WO2014059110A1 (en) * 2012-10-12 2014-04-17 Memsic, Inc. Monolithic three-axis magnetic field sensor
CN103885004A (zh) * 2012-12-21 2014-06-25 磁感科技香港有限公司 一种磁传感装置及其磁感应方法、制备工艺
CN103885005B (zh) * 2012-12-21 2018-11-02 上海矽睿科技有限公司 磁传感装置及其磁感应方法
CN103116144B (zh) * 2013-01-22 2015-01-14 中国人民解放军国防科学技术大学 一种采用磁变轨结构的z向磁场传感器
CN103116143B (zh) * 2013-01-22 2015-01-14 中国人民解放军国防科学技术大学 一体式高精度三轴磁传感器
CN104122513A (zh) * 2013-04-24 2014-10-29 上海矽睿科技有限公司 高密度磁传感装置及其磁感应方法、制备工艺
CN104183696A (zh) * 2013-05-20 2014-12-03 上海矽睿科技有限公司 一种磁传感装置的制备工艺
CN104375098B (zh) * 2013-08-15 2018-11-02 上海矽睿科技有限公司 磁传感装置及该装置的制备工艺
CN104422907B (zh) * 2013-08-29 2017-09-29 上海矽睿科技有限公司 一种磁传感装置及其制备方法
CN104422908A (zh) * 2013-09-06 2015-03-18 上海矽睿科技有限公司 一种磁传感装置的制备工艺
CN104459575B (zh) * 2013-09-12 2018-01-05 上海矽睿科技有限公司 一种磁传感装置及该磁传感装置的制备工艺
CN104515957B (zh) * 2013-09-27 2017-05-31 上海矽睿科技有限公司 磁传感装置及其制备方法
CN103528575B (zh) * 2013-10-18 2017-07-11 上海华虹宏力半导体制造有限公司 三维amrmems三轴磁力计结构以及磁力计
JP2016534842A (ja) * 2013-10-25 2016-11-10 ボストン サイエンティフィック サイムド，インコーポレイテッドＢｏｓｔｏｎ Ｓｃｉｅｎｔｉｆｉｃ Ｓｃｉｍｅｄ，Ｉｎｃ． 除神経フレックス回路における埋め込み熱電対
CN104793153B (zh) * 2014-01-21 2018-02-02 上海矽睿科技有限公司 磁传感装置的制备方法
CN104793154A (zh) * 2014-01-21 2015-07-22 上海矽睿科技有限公司 磁传感装置及其制备工艺
CN103995239B (zh) * 2014-05-09 2016-10-05 北京航空航天大学 一种磁场梯度参数测量新方法
JP6036938B1 (ja) * 2015-08-05 2016-11-30 愛知製鋼株式会社 磁気検出装置
EP3385739B1 (en) 2015-12-03 2021-10-06 Alps Alpine Co., Ltd. Magnetic detection device
CN107290695A (zh) * 2016-04-01 2017-10-24 德昌电机(深圳)有限公司 一种磁传感器
CN110573895B (zh) * 2017-04-25 2022-04-29 柯尼卡美能达株式会社 磁传感器
JP6828676B2 (ja) * 2017-12-27 2021-02-10 Tdk株式会社 磁気センサ
JP6538226B1 (ja) * 2018-03-23 2019-07-03 Tdk株式会社 磁気センサ
JP6886222B2 (ja) * 2019-03-19 2021-06-16 Tdk株式会社 磁気センサ
JP6954326B2 (ja) * 2019-06-05 2021-10-27 Tdk株式会社 位置検出装置
CN110927637A (zh) * 2019-11-30 2020-03-27 北京航空航天大学青岛研究院 一种三轴mtj磁场传感器及其制备方法
JP7107330B2 (ja) * 2020-03-27 2022-07-27 Tdk株式会社 磁気センサおよびその製造方法
CN118003493A (zh) * 2024-03-27 2024-05-10 广东思谷智能技术有限公司 一种基于磁传感的金刚线断线检测方法

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JP2579995B2 (ja) * 1988-03-31 1997-02-12 株式会社東芝 磁気センサー
JPH11305055A (ja) * 1998-04-22 1999-11-05 Sharp Corp 光導波路の製造方法及び光導波路製造のためのマスタ原板の製造方法
JP4085859B2 (ja) * 2002-03-27 2008-05-14 ヤマハ株式会社 磁気センサおよびその製造方法
JP4050631B2 (ja) * 2003-02-21 2008-02-20 株式会社ルネサステクノロジ 電子デバイスの製造方法
JP2004356338A (ja) * 2003-05-28 2004-12-16 Res Inst Electric Magnetic Alloys 薄膜磁気センサ及びその製造方法
JP4013853B2 (ja) * 2003-07-18 2007-11-28 ヤマハ株式会社 磁気センサ

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CN101142494A (zh) 2008-03-12
CN101142494B (zh) 2013-07-10
CN101203769A (zh) 2008-06-18
CN101203769B (zh) 2012-12-26
JP2006261400A (ja) 2006-09-28

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