JP4878028B2 - オキシムエステル光開始剤 - Google Patents

オキシムエステル光開始剤 Download PDF

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Publication number
JP4878028B2
JP4878028B2 JP2007526449A JP2007526449A JP4878028B2 JP 4878028 B2 JP4878028 B2 JP 4878028B2 JP 2007526449 A JP2007526449 A JP 2007526449A JP 2007526449 A JP2007526449 A JP 2007526449A JP 4878028 B2 JP4878028 B2 JP 4878028B2
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JP
Japan
Prior art keywords
meth
acrylate
alkyl
phenyl
acid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2007526449A
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English (en)
Japanese (ja)
Other versions
JP2008509967A5 (enExample
JP2008509967A (ja
Inventor
潤一 田辺
和彦 国本
久稔 倉
英隆 岡
真樹 大和
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BASF Schweiz AG
Original Assignee
Ciba Holding AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ciba Holding AG filed Critical Ciba Holding AG
Publication of JP2008509967A publication Critical patent/JP2008509967A/ja
Publication of JP2008509967A5 publication Critical patent/JP2008509967A5/ja
Application granted granted Critical
Publication of JP4878028B2 publication Critical patent/JP4878028B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • G03F7/031Organic compounds not covered by group G03F7/029
    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07DHETEROCYCLIC COMPOUNDS
    • C07D209/00Heterocyclic compounds containing five-membered rings, condensed with other rings, with one nitrogen atom as the only ring hetero atom
    • C07D209/56Ring systems containing three or more rings
    • C07D209/80[b, c]- or [b, d]-condensed
    • C07D209/82Carbazoles; Hydrogenated carbazoles
    • C07D209/86Carbazoles; Hydrogenated carbazoles with only hydrogen atoms, hydrocarbon or substituted hydrocarbon radicals, directly attached to carbon atoms of the ring system
    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07DHETEROCYCLIC COMPOUNDS
    • C07D413/00Heterocyclic compounds containing two or more hetero rings, at least one ring having nitrogen and oxygen atoms as the only ring hetero atoms
    • C07D413/02Heterocyclic compounds containing two or more hetero rings, at least one ring having nitrogen and oxygen atoms as the only ring hetero atoms containing two hetero rings
    • C07D413/10Heterocyclic compounds containing two or more hetero rings, at least one ring having nitrogen and oxygen atoms as the only ring hetero atoms containing two hetero rings linked by a carbon chain containing aromatic rings
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09BORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
    • C09B55/00Azomethine dyes
    • C09B55/002Monoazomethine dyes
    • C09B55/003Monoazomethine dyes with the -C=N- group attached to an heteroring

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Polymerisation Methods In General (AREA)
  • Materials For Photolithography (AREA)
  • Indole Compounds (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Plural Heterocyclic Compounds (AREA)
  • Inks, Pencil-Leads, Or Crayons (AREA)
  • Medicines That Contain Protein Lipid Enzymes And Other Medicines (AREA)
JP2007526449A 2004-08-18 2005-08-08 オキシムエステル光開始剤 Expired - Fee Related JP4878028B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP04103962.9 2004-08-18
EP04103962 2004-08-18
PCT/EP2005/053894 WO2006018405A1 (en) 2004-08-18 2005-08-08 Oxime ester photoinitiators

Publications (3)

Publication Number Publication Date
JP2008509967A JP2008509967A (ja) 2008-04-03
JP2008509967A5 JP2008509967A5 (enExample) 2008-09-25
JP4878028B2 true JP4878028B2 (ja) 2012-02-15

Family

ID=34929458

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007526449A Expired - Fee Related JP4878028B2 (ja) 2004-08-18 2005-08-08 オキシムエステル光開始剤

Country Status (10)

Country Link
US (1) US7759043B2 (enExample)
EP (1) EP1778636B1 (enExample)
JP (1) JP4878028B2 (enExample)
KR (2) KR101282834B1 (enExample)
CN (1) CN101014569B (enExample)
AT (1) ATE381540T1 (enExample)
CA (1) CA2575046A1 (enExample)
DE (1) DE602005003960T2 (enExample)
TW (1) TWI386393B (enExample)
WO (1) WO2006018405A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101821674B1 (ko) * 2015-10-08 2018-01-24 한국교통대학교산학협력단 트리아진 유도체, 이를 포함하는 광중합 개시제 및 포토레지스트 조성물

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* Cited by examiner, † Cited by third party
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