US10115663B2 - 3D semiconductor device and structure - Google Patents

3D semiconductor device and structure Download PDF

Info

Publication number
US10115663B2
US10115663B2 US15/913,917 US201815913917A US10115663B2 US 10115663 B2 US10115663 B2 US 10115663B2 US 201815913917 A US201815913917 A US 201815913917A US 10115663 B2 US10115663 B2 US 10115663B2
Authority
US
United States
Prior art keywords
layer
transistors
layers
regions
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US15/913,917
Other versions
US20180197812A1 (en
Inventor
Zvi Or-Bach
Brian Cronquist
Deepak Sekar
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Monolithic 3D Inc
Original Assignee
Monolithic 3D Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to US201213730897A priority Critical
Priority to US13/731,108 priority patent/US9871034B1/en
Priority to US13/803,437 priority patent/US9385058B1/en
Priority to US201313864245A priority
Priority to US15/470,872 priority patent/US9941275B2/en
Priority to US15/913,917 priority patent/US10115663B2/en
Application filed by Monolithic 3D Inc filed Critical Monolithic 3D Inc
Assigned to MONOLITHIC 3D INC. reassignment MONOLITHIC 3D INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: CRONQUIST, BRIAN, OR-BACH, ZVI, SEKAR, DEEPAK
Publication of US20180197812A1 publication Critical patent/US20180197812A1/en
Priority claimed from US16/113,860 external-priority patent/US10600657B2/en
Priority claimed from US16/114,211 external-priority patent/US10892169B2/en
Priority claimed from US16/115,519 external-priority patent/US10651054B2/en
Publication of US10115663B2 publication Critical patent/US10115663B2/en
Application granted granted Critical
Priority claimed from US17/061,563 external-priority patent/US10903089B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images