JP4801078B2 - 半導体装置の製造方法 - Google Patents
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- JP4801078B2 JP4801078B2 JP2007534187A JP2007534187A JP4801078B2 JP 4801078 B2 JP4801078 B2 JP 4801078B2 JP 2007534187 A JP2007534187 A JP 2007534187A JP 2007534187 A JP2007534187 A JP 2007534187A JP 4801078 B2 JP4801078 B2 JP 4801078B2
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- 239000004065 semiconductor Substances 0.000 title claims description 40
- 238000004519 manufacturing process Methods 0.000 title claims description 27
- 239000003990 capacitor Substances 0.000 claims description 75
- 239000013078 crystal Substances 0.000 claims description 66
- 229910052782 aluminium Inorganic materials 0.000 claims description 60
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 60
- 238000000034 method Methods 0.000 claims description 27
- 239000000758 substrate Substances 0.000 claims description 26
- 229910052741 iridium Inorganic materials 0.000 claims description 19
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 claims description 19
- 229910052751 metal Inorganic materials 0.000 claims description 18
- 239000002184 metal Substances 0.000 claims description 18
- 238000000059 patterning Methods 0.000 claims description 10
- 239000010410 layer Substances 0.000 description 51
- 239000010936 titanium Substances 0.000 description 28
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 21
- 239000001301 oxygen Substances 0.000 description 21
- 229910052760 oxygen Inorganic materials 0.000 description 21
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 20
- 238000004544 sputter deposition Methods 0.000 description 20
- 229910052719 titanium Inorganic materials 0.000 description 20
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 19
- 229910052710 silicon Inorganic materials 0.000 description 19
- 239000010703 silicon Substances 0.000 description 19
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 17
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical class O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 14
- 230000010287 polarization Effects 0.000 description 13
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 13
- 239000003963 antioxidant agent Substances 0.000 description 12
- 230000003078 antioxidant effect Effects 0.000 description 12
- 239000012298 atmosphere Substances 0.000 description 12
- 238000000137 annealing Methods 0.000 description 10
- 238000000206 photolithography Methods 0.000 description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 230000004888 barrier function Effects 0.000 description 8
- 230000015654 memory Effects 0.000 description 8
- 229910052814 silicon oxide Inorganic materials 0.000 description 8
- 230000001965 increasing effect Effects 0.000 description 7
- 229910052697 platinum Inorganic materials 0.000 description 7
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 6
- 238000005229 chemical vapour deposition Methods 0.000 description 6
- 239000007789 gas Substances 0.000 description 6
- 239000003292 glue Substances 0.000 description 6
- 230000002269 spontaneous effect Effects 0.000 description 6
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 6
- 229910052721 tungsten Inorganic materials 0.000 description 6
- 239000010937 tungsten Substances 0.000 description 6
- 230000009471 action Effects 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 5
- HTXDPTMKBJXEOW-UHFFFAOYSA-N dioxoiridium Chemical compound O=[Ir]=O HTXDPTMKBJXEOW-UHFFFAOYSA-N 0.000 description 5
- 229910000457 iridium oxide Inorganic materials 0.000 description 5
- 238000002955 isolation Methods 0.000 description 5
- 239000003870 refractory metal Substances 0.000 description 5
- 239000011575 calcium Substances 0.000 description 4
- 239000010955 niobium Substances 0.000 description 4
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 4
- 239000002994 raw material Substances 0.000 description 4
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 3
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 3
- 229910000086 alane Inorganic materials 0.000 description 3
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical compound [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 description 3
- 229910052791 calcium Inorganic materials 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 229910052746 lanthanum Inorganic materials 0.000 description 3
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 3
- 229910052758 niobium Inorganic materials 0.000 description 3
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 238000005498 polishing Methods 0.000 description 3
- 229910052712 strontium Inorganic materials 0.000 description 3
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 2
- 229910010413 TiO 2 Inorganic materials 0.000 description 2
- 239000002313 adhesive film Substances 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 230000005621 ferroelectricity Effects 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000012495 reaction gas Substances 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- 229910000077 silane Inorganic materials 0.000 description 2
- 229910021332 silicide Inorganic materials 0.000 description 2
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 2
- 238000003980 solgel method Methods 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- GETQZCLCWQTVFV-UHFFFAOYSA-N trimethylamine Chemical compound CN(C)C GETQZCLCWQTVFV-UHFFFAOYSA-N 0.000 description 2
- 239000006200 vaporizer Substances 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 230000003064 anti-oxidating effect Effects 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- HJXBDPDUCXORKZ-UHFFFAOYSA-N diethylalumane Chemical compound CC[AlH]CC HJXBDPDUCXORKZ-UHFFFAOYSA-N 0.000 description 1
- -1 dimethyl hydride Chemical class 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- DAZXVJBJRMWXJP-UHFFFAOYSA-N n,n-dimethylethylamine Chemical compound CCN(C)C DAZXVJBJRMWXJP-UHFFFAOYSA-N 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical group [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000005477 sputtering target Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- MCULRUJILOGHCJ-UHFFFAOYSA-N triisobutylaluminium Chemical compound CC(C)C[Al](CC(C)C)CC(C)C MCULRUJILOGHCJ-UHFFFAOYSA-N 0.000 description 1
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 1
- WQJQOUPTWCFRMM-UHFFFAOYSA-N tungsten disilicide Chemical compound [Si]#[W]#[Si] WQJQOUPTWCFRMM-UHFFFAOYSA-N 0.000 description 1
- 229910021342 tungsten silicide Inorganic materials 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B53/00—Ferroelectric RAM [FeRAM] devices comprising ferroelectric memory capacitors
- H10B53/30—Ferroelectric RAM [FeRAM] devices comprising ferroelectric memory capacitors characterised by the memory core region
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/10—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration
- H01L27/105—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration including field-effect components
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B53/00—Ferroelectric RAM [FeRAM] devices comprising ferroelectric memory capacitors
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Semiconductor Memories (AREA)
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Description
図2〜図7は、本発明の第1実施形態に係る半導体装置の製造途中の断面図である。
このように、Al(111)よりなるアルミニウム結晶層20は、他の結晶に比べて強誘電体膜20と非常に格子整合し易く、格子不整合に伴う欠陥を強誘電体膜20に入り難くすることが可能となる。
図9〜図13は、本発明の第2実施形態に係る半導体装置の製造途中の断面図である。なお、これらの図において、第1実施形態で説明した要素には第1実施形態と同じ符号を付し、以下ではその説明を省略する。
上記した第1、第2実施形態では、キャパシタ誘電体膜22aを単層のPZT膜で構成したが、本発明はこれに限定されない。
Claims (7)
- 半導体基板上に絶縁膜を形成する工程と、
前記絶縁膜上に第1導電膜を形成する工程と、
前記第1導電膜上にアルミニウム結晶膜をドット状に形成する工程と、
前記アルミニウム結晶膜上に、Pb(ZrxTi1-x)O3(但し0≦x≦1)を含む強誘電体膜を形成する工程と、
前記強誘電体膜上に第2導電膜を形成する工程と、
前記第1導電膜、前記強誘電体膜、及び前記第2導電膜をパターニングすることにより、下部電極、キャパシタ誘電体膜、及び上部電極を順に積層してなるキャパシタを形成する工程と、
を有することを特徴とする半導体装置の製造方法。 - 前記アルミニウム結晶層の配向は(111)方向であることを特徴とする請求項1に記載の半導体装置の製造方法。
- 前記アルミニウム結晶層を形成する工程において、該アルミニウム結晶層を5nm以下の厚さに形成することを特徴とする請求項1に記載の半導体装置の製造方法。
- 前記強誘電体膜を形成する工程において、MOCVD(Metal Organic CVD)法により該強誘電体膜を形成することを特徴とする請求項1に記載の半導体装置の製造方法。
- 前記第1導電膜を形成する工程において、該第1導電膜としてイリジウム膜を形成することを特徴とする請求項1に記載の半導体装置の製造方法。
- 半導体基板上に絶縁膜を形成する工程と、
前記絶縁膜上に第1導電膜を形成する工程と、
前記第1導電膜をパターニングして下部電極にする工程と、
前記下部電極の側面と上面とにアルミニウム結晶膜をドット状に形成する工程と、
前記アルミニウム結晶膜上と前記絶縁膜上とに、Pb(ZrxTi1-x)O3(但し0≦x≦1)を含む強誘電体膜を形成する工程と、
前記強誘電体膜上に第2導電膜を形成する工程と、
前記強誘電体膜をパターニングして前記下部電極の側面と上面にキャパシタ誘電体膜として残す工程と、
前記第2導電膜をパターニングして前記下部電極の上方と側方とに上部電極として残し、前記上部電極、前記キャパシタ誘電体膜、及び前記下部電極でキャパシタを構成する工程と、
を有することを特徴とする半導体装置の製造方法。 - 前記アルミニウム結晶層の配向は(111)方向であることを特徴とする請求項6に記載の半導体装置の製造方法。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2005/015985 WO2007029282A1 (ja) | 2005-09-01 | 2005-09-01 | 半導体装置とその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2007029282A1 JPWO2007029282A1 (ja) | 2009-03-26 |
JP4801078B2 true JP4801078B2 (ja) | 2011-10-26 |
Family
ID=37835421
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2007534187A Expired - Fee Related JP4801078B2 (ja) | 2005-09-01 | 2005-09-01 | 半導体装置の製造方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US8263419B2 (ja) |
JP (1) | JP4801078B2 (ja) |
KR (1) | KR100960284B1 (ja) |
CN (1) | CN100576515C (ja) |
WO (1) | WO2007029282A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009105388A (ja) * | 2007-10-05 | 2009-05-14 | Toshiba Corp | 半導体装置及びその製造方法 |
JP6286169B2 (ja) * | 2013-09-26 | 2018-02-28 | 新光電気工業株式会社 | 配線基板及びその製造方法 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03262174A (ja) * | 1990-03-13 | 1991-11-21 | Nikko Kyodo Co Ltd | 酸化物薄膜デバイス |
JPH06196648A (ja) * | 1992-12-25 | 1994-07-15 | Fuji Xerox Co Ltd | 配向性強誘電体薄膜素子 |
JPH0738004A (ja) * | 1993-07-22 | 1995-02-07 | Sharp Corp | 強誘電体メモリ素子 |
JPH08335676A (ja) * | 1995-06-09 | 1996-12-17 | Rohm Co Ltd | 複合酸化物の結晶性薄膜の製造方法 |
JP2000109362A (ja) * | 1998-10-06 | 2000-04-18 | Yamaha Corp | 強誘電体材料、その製造方法及び強誘電体メモリ |
JP2003324101A (ja) * | 2002-04-30 | 2003-11-14 | Fujitsu Ltd | 半導体装置の製造方法 |
JP2004153031A (ja) * | 2002-10-30 | 2004-05-27 | Fujitsu Ltd | 半導体装置の製造方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5635199A (en) * | 1995-10-27 | 1997-06-03 | Nestec Ltd. | Support of pediatric patients |
JPH09282943A (ja) | 1996-04-19 | 1997-10-31 | Sharp Corp | 強誘電体結晶薄膜の製造方法及び強誘電体キャパシタ |
JPH1012832A (ja) | 1996-06-21 | 1998-01-16 | Texas Instr Japan Ltd | 強誘電体キャパシタの作製方法及び強誘電体メモリ装置の製造方法 |
JPH11297966A (ja) | 1998-02-13 | 1999-10-29 | Murata Mfg Co Ltd | 強誘電体薄膜素子及びその製造方法 |
JP3109485B2 (ja) | 1998-08-03 | 2000-11-13 | 日本電気株式会社 | 金属酸化物誘電体膜の気相成長方法 |
KR100433465B1 (ko) | 1998-08-03 | 2004-05-31 | 닛본 덴끼 가부시끼가이샤 | 금속산화물유전체막의 기상성장방법 및 금속산화물유전체재료의 기상성장을 위한 장치 |
-
2005
- 2005-09-01 JP JP2007534187A patent/JP4801078B2/ja not_active Expired - Fee Related
- 2005-09-01 WO PCT/JP2005/015985 patent/WO2007029282A1/ja active Application Filing
- 2005-09-01 KR KR1020087004260A patent/KR100960284B1/ko active IP Right Grant
- 2005-09-01 CN CN200580051451A patent/CN100576515C/zh not_active Expired - Fee Related
-
2008
- 2008-03-03 US US12/041,274 patent/US8263419B2/en not_active Expired - Fee Related
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03262174A (ja) * | 1990-03-13 | 1991-11-21 | Nikko Kyodo Co Ltd | 酸化物薄膜デバイス |
JPH06196648A (ja) * | 1992-12-25 | 1994-07-15 | Fuji Xerox Co Ltd | 配向性強誘電体薄膜素子 |
JPH0738004A (ja) * | 1993-07-22 | 1995-02-07 | Sharp Corp | 強誘電体メモリ素子 |
JPH08335676A (ja) * | 1995-06-09 | 1996-12-17 | Rohm Co Ltd | 複合酸化物の結晶性薄膜の製造方法 |
JP2000109362A (ja) * | 1998-10-06 | 2000-04-18 | Yamaha Corp | 強誘電体材料、その製造方法及び強誘電体メモリ |
JP2003324101A (ja) * | 2002-04-30 | 2003-11-14 | Fujitsu Ltd | 半導体装置の製造方法 |
JP2004153031A (ja) * | 2002-10-30 | 2004-05-27 | Fujitsu Ltd | 半導体装置の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
CN101253621A (zh) | 2008-08-27 |
KR20080026220A (ko) | 2008-03-24 |
JPWO2007029282A1 (ja) | 2009-03-26 |
US8263419B2 (en) | 2012-09-11 |
KR100960284B1 (ko) | 2010-06-07 |
CN100576515C (zh) | 2009-12-30 |
WO2007029282A1 (ja) | 2007-03-15 |
US20080149977A1 (en) | 2008-06-26 |
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