JP4796795B2 - 真空ポンプ装置とそのコントローラ - Google Patents

真空ポンプ装置とそのコントローラ Download PDF

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Publication number
JP4796795B2
JP4796795B2 JP2005221319A JP2005221319A JP4796795B2 JP 4796795 B2 JP4796795 B2 JP 4796795B2 JP 2005221319 A JP2005221319 A JP 2005221319A JP 2005221319 A JP2005221319 A JP 2005221319A JP 4796795 B2 JP4796795 B2 JP 4796795B2
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JP
Japan
Prior art keywords
controller
pump body
fins
pump
heat sink
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2005221319A
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English (en)
Japanese (ja)
Other versions
JP2007032535A5 (enExample
JP2007032535A (ja
Inventor
智 奥寺
剛志 樺澤
祐幸 坂口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Japan Ltd
Original Assignee
Edwards Japan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Japan Ltd filed Critical Edwards Japan Ltd
Priority to JP2005221319A priority Critical patent/JP4796795B2/ja
Priority to PCT/JP2006/313456 priority patent/WO2007013274A1/ja
Publication of JP2007032535A publication Critical patent/JP2007032535A/ja
Publication of JP2007032535A5 publication Critical patent/JP2007032535A5/ja
Application granted granted Critical
Publication of JP4796795B2 publication Critical patent/JP4796795B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F04D25/068—Mechanical details of the pump control unit

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressor (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP2005221319A 2005-07-29 2005-07-29 真空ポンプ装置とそのコントローラ Expired - Lifetime JP4796795B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2005221319A JP4796795B2 (ja) 2005-07-29 2005-07-29 真空ポンプ装置とそのコントローラ
PCT/JP2006/313456 WO2007013274A1 (ja) 2005-07-29 2006-07-06 真空ポンプ装置とそのコントローラ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005221319A JP4796795B2 (ja) 2005-07-29 2005-07-29 真空ポンプ装置とそのコントローラ

Publications (3)

Publication Number Publication Date
JP2007032535A JP2007032535A (ja) 2007-02-08
JP2007032535A5 JP2007032535A5 (enExample) 2008-07-03
JP4796795B2 true JP4796795B2 (ja) 2011-10-19

Family

ID=37683175

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005221319A Expired - Lifetime JP4796795B2 (ja) 2005-07-29 2005-07-29 真空ポンプ装置とそのコントローラ

Country Status (2)

Country Link
JP (1) JP4796795B2 (enExample)
WO (1) WO2007013274A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190113783A (ko) 2017-02-17 2019-10-08 에드워즈 가부시키가이샤 컨트롤러 및 진공 펌프 장치

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5156649B2 (ja) * 2007-02-06 2013-03-06 エドワーズ株式会社 真空ポンプ
JP5104334B2 (ja) * 2008-01-22 2012-12-19 株式会社島津製作所 真空ポンプ
JP2009253231A (ja) 2008-04-10 2009-10-29 Fujitsu Ten Ltd 電子機器
JP2011027031A (ja) * 2009-07-27 2011-02-10 Osaka Vacuum Ltd 分子ポンプ装置
KR101190331B1 (ko) 2012-06-27 2012-10-11 지엠비코리아 주식회사 전동식 워터 펌프
JP2014022680A (ja) * 2012-07-23 2014-02-03 Fanuc Ltd 自然対流のための短縮流路を有するヒートシンクを備えるサーボアンプ
JP6102222B2 (ja) * 2012-11-30 2017-03-29 株式会社島津製作所 真空ポンプ
WO2014198007A1 (zh) * 2013-06-14 2014-12-18 Zhu Longwei 一种水泵控制系统的水冷式散热方法及结构
GB2553321A (en) * 2016-09-01 2018-03-07 Edwards Ltd Pump
JP6884553B2 (ja) * 2016-11-04 2021-06-09 エドワーズ株式会社 真空ポンプ制御装置及び真空ポンプ、並びに真空ポンプ制御装置の組立方法
JP7022265B2 (ja) * 2017-10-25 2022-02-18 株式会社島津製作所 真空ポンプ
JP7087418B2 (ja) * 2018-02-02 2022-06-21 株式会社島津製作所 真空ポンプ
JP7244328B2 (ja) * 2019-03-28 2023-03-22 エドワーズ株式会社 真空ポンプ及び該真空ポンプの制御装置
JP2021025426A (ja) * 2019-07-31 2021-02-22 株式会社川本製作所 ポンプ装置
CN116292293A (zh) * 2023-03-20 2023-06-23 山东鑫海矿业技术装备股份有限公司 一种具有自散热功能的矿用双级泵

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2871108B2 (ja) * 1990-12-28 1999-03-17 株式会社島津製作所 高速回転型真空ポンプ
JPH0618699U (ja) * 1992-08-11 1994-03-11 株式会社川本製作所 ポンプ装置
JPH0888301A (ja) * 1994-09-19 1996-04-02 Mitsubishi Electric Corp 放熱フィン
JP3165857B2 (ja) * 1997-12-10 2001-05-14 株式会社荏原製作所 ターボ分子ポンプ装置
JP2000059060A (ja) * 1998-08-06 2000-02-25 Fuji Electric Co Ltd インバータ
JP2001274699A (ja) * 2000-03-24 2001-10-05 Toshiba Corp 筐体の放熱構造
JP2004183619A (ja) * 2002-12-06 2004-07-02 Shimadzu Corp ターボ分子ポンプ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190113783A (ko) 2017-02-17 2019-10-08 에드워즈 가부시키가이샤 컨트롤러 및 진공 펌프 장치

Also Published As

Publication number Publication date
WO2007013274A1 (ja) 2007-02-01
JP2007032535A (ja) 2007-02-08

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