JP4767632B2 - 基板の異常検出方法 - Google Patents

基板の異常検出方法 Download PDF

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Publication number
JP4767632B2
JP4767632B2 JP2005256468A JP2005256468A JP4767632B2 JP 4767632 B2 JP4767632 B2 JP 4767632B2 JP 2005256468 A JP2005256468 A JP 2005256468A JP 2005256468 A JP2005256468 A JP 2005256468A JP 4767632 B2 JP4767632 B2 JP 4767632B2
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JP
Japan
Prior art keywords
substrate
chamber
slide
supported
transport
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Expired - Fee Related
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JP2005256468A
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English (en)
Japanese (ja)
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JP2007073599A (ja
Inventor
星児 岡部
英人 末木
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Tokyo Electron Ltd
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Tokyo Electron Ltd
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Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP2005256468A priority Critical patent/JP4767632B2/ja
Priority to KR1020060084744A priority patent/KR100835022B1/ko
Priority to TW095132597A priority patent/TWI417986B/zh
Priority to CN201110201338XA priority patent/CN102270594A/zh
Priority to CNA2006101289601A priority patent/CN1929108A/zh
Publication of JP2007073599A publication Critical patent/JP2007073599A/ja
Application granted granted Critical
Publication of JP4767632B2 publication Critical patent/JP4767632B2/ja
Expired - Fee Related legal-status Critical Current
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Drying Of Semiconductors (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP2005256468A 2005-09-05 2005-09-05 基板の異常検出方法 Expired - Fee Related JP4767632B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2005256468A JP4767632B2 (ja) 2005-09-05 2005-09-05 基板の異常検出方法
KR1020060084744A KR100835022B1 (ko) 2005-09-05 2006-09-04 반송실, 기판 처리장치 및 기판의 이상 검출방법
TW095132597A TWI417986B (zh) 2005-09-05 2006-09-04 An abnormality detection method of a transfer chamber, a substrate processing apparatus, and a substrate
CN201110201338XA CN102270594A (zh) 2005-09-05 2006-09-05 搬送室、基板处理装置和基板异常的检测方法
CNA2006101289601A CN1929108A (zh) 2005-09-05 2006-09-05 搬送室、基板处理装置和基板异常的检测方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005256468A JP4767632B2 (ja) 2005-09-05 2005-09-05 基板の異常検出方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2010270086A Division JP2011055001A (ja) 2010-12-03 2010-12-03 搬送室および基板処理装置

Publications (2)

Publication Number Publication Date
JP2007073599A JP2007073599A (ja) 2007-03-22
JP4767632B2 true JP4767632B2 (ja) 2011-09-07

Family

ID=37859000

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005256468A Expired - Fee Related JP4767632B2 (ja) 2005-09-05 2005-09-05 基板の異常検出方法

Country Status (4)

Country Link
JP (1) JP4767632B2 (ko)
KR (1) KR100835022B1 (ko)
CN (2) CN1929108A (ko)
TW (1) TWI417986B (ko)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007084124A1 (en) * 2006-01-18 2007-07-26 Applied Materials, Inc. Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate
JP5013987B2 (ja) * 2007-06-22 2012-08-29 東京エレクトロン株式会社 基板処理装置および基板搬送装置
JP4778546B2 (ja) * 2007-11-30 2011-09-21 東京エレクトロン株式会社 半導体製造装置における地震被害拡散低減方法及び地震被害拡散低減システム
JP2010016340A (ja) * 2008-07-02 2010-01-21 Advanced Display Process Engineering Co Ltd 基板感知方法、基板処理装置及び基板処理方法
JP5185054B2 (ja) * 2008-10-10 2013-04-17 東京エレクトロン株式会社 基板搬送方法、制御プログラム及び記憶媒体
CN101417747B (zh) * 2008-12-11 2011-11-23 友达光电股份有限公司 传送台机构
CN101633441B (zh) * 2009-08-19 2012-05-23 友达光电股份有限公司 基板处理系统及其基板搬运装置
CN101826478B (zh) * 2010-03-30 2012-06-20 东莞宏威数码机械有限公司 缓冲传输装置
CN102347224B (zh) * 2010-08-02 2015-08-26 北京中科信电子装备有限公司 一种注入机用晶片缺口定位装置
JP2011139074A (ja) * 2011-01-07 2011-07-14 Applied Materials Inc 基板の破損及び移動中の基板のずれを動的に検出するセンサ
JP2012238762A (ja) * 2011-05-12 2012-12-06 Tokyo Electron Ltd 基板搬送装置、これを備える塗布現像装置、及び基板搬送方法
JP5248662B2 (ja) * 2011-07-15 2013-07-31 シャープ株式会社 基板処理装置、および薄膜太陽電池の製造装置
US9151597B2 (en) * 2012-02-13 2015-10-06 First Solar, Inc. In situ substrate detection for a processing system using infrared detection
KR101269856B1 (ko) * 2012-06-04 2013-06-07 엘아이지에이디피 주식회사 평판표시소자 제조장비의 기판 감지장치
CN102854301A (zh) * 2012-08-10 2013-01-02 江阴沐祥节能装饰工程有限公司 一种透明度检测装置
US10289930B2 (en) * 2017-02-09 2019-05-14 Glasstech, Inc. System and associated for online measurement of the optical characteristics of a glass sheet
CN107942553B (zh) * 2018-01-02 2020-05-22 京东方科技集团股份有限公司 一种稳定装置及其工作方法、机械臂、显示面板生产设备
CN110767563B (zh) * 2019-10-25 2022-05-27 上海华力集成电路制造有限公司 检测晶圆完整性的方法、rtp机台
JP7263225B2 (ja) * 2019-12-12 2023-04-24 東京エレクトロン株式会社 搬送するシステム及び方法
KR102297045B1 (ko) * 2020-03-03 2021-09-02 주식회사 로스코 플립 유닛
CN114441556A (zh) * 2021-12-28 2022-05-06 蚌埠中光电科技有限公司 一种用于基板玻璃传输过程在线无损检知报警系统
CN117096067B (zh) * 2023-10-17 2024-03-01 广州市艾佛光通科技有限公司 干法刻蚀机台及干法刻蚀方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002093882A (ja) * 2000-09-20 2002-03-29 Olympus Optical Co Ltd 基板搬送装置及び基板検査システム
JP4060098B2 (ja) * 2002-03-14 2008-03-12 株式会社アルバック 真空処理装置およびゲートバルブ
JP4228634B2 (ja) * 2002-09-03 2009-02-25 東京エレクトロン株式会社 回転駆動機構及び被処理体の搬送装置
KR100510720B1 (ko) * 2002-10-25 2005-08-30 엘지.필립스 엘시디 주식회사 유리기판 파손감지 수단을 구비한 기판 이송장치

Also Published As

Publication number Publication date
CN102270594A (zh) 2011-12-07
KR20070026263A (ko) 2007-03-08
TWI417986B (zh) 2013-12-01
CN1929108A (zh) 2007-03-14
KR100835022B1 (ko) 2008-06-03
JP2007073599A (ja) 2007-03-22
TW200715460A (en) 2007-04-16

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