JP4750879B2 - プラズマ発生装置 - Google Patents
プラズマ発生装置 Download PDFInfo
- Publication number
- JP4750879B2 JP4750879B2 JP2009181946A JP2009181946A JP4750879B2 JP 4750879 B2 JP4750879 B2 JP 4750879B2 JP 2009181946 A JP2009181946 A JP 2009181946A JP 2009181946 A JP2009181946 A JP 2009181946A JP 4750879 B2 JP4750879 B2 JP 4750879B2
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- Prior art keywords
- coil
- plasma
- antenna
- current
- chamber
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Plasma Technology (AREA)
- Drying Of Semiconductors (AREA)
- Chemical Vapour Deposition (AREA)
Description
Claims (8)
- 誘導結合型プラズマを発生させるための装置であって、
チャンバ中に電磁界経路を形成するウィンドウと、該チャンバ中にプロセス・ガスを導入するように構成されたプロセス・ガス供給源とを有するプラズマ反応チャンバと、
前記チャンバのウィンドウに近接して配置された同様の形状の2つのアンテナ・セグメントを含む高周波アンテナと、
前記アンテナ・セグメントに結合され、前記アンテナ・セグメント中の高周波電流を共振させるように構成された高周波発生源と、を備え、
前記高周波電流によって誘導された電磁界は、前記ウィンドウを通過し、プロセス・ガスを励起してイオン化し、それにより前記チャンバ内にプラズマを発生させ、また、
前記2つのアンテナ・セグメントが離間し、前記2つのアンテナ・セグメント間の中心線に対して線対称に配置され、
前記2つのアンテナ・セグメントの各々が少なくとも1つの半回転部と少なくとも1つの直線部を含み、前記2つのアンテナ・セグメントの各々の前記直線部が互いに略平行であり、
前記2つのアンテナ・セグメントの入力端部が相互に結合され、また、
前記2つのアンテナ・セグメントの出力端部が相互に結合され、かつ、共通の可変コンデンサを介して接地に終端されていることを特徴とする装置。 - 各アンテナ・セグメントがD字形であり、半円とその直径に略沿った直線とから構成されていることを特徴とする請求項1に記載の装置。
- 前記アンテナ・セグメントの直線が互いに平行であり、前記ウィンドウの中心領域を覆っていることを特徴とする請求項2に記載の装置。
- 前記2つのアンテナ・セグメントの前記直線中の電流が同じ方向に流れることを特徴とする請求項2に記載の装置。
- 前記アンテナ・セグメントが単一の高周波電力源によって電力供給され、単一の整合回路網によって調整されることを特徴とする請求項1に記載の装置。
- 発生したプラズマの密度が、前記アンテナ・セグメントがまたがる領域内で実質的に均一であることを特徴とする請求項1に記載の装置。
- 前記アンテナ・セグメントが、それぞれ、高周波電力を前記チャンバの異なる領域中に結合し、これにより前記チャンバ中に全体的に均一なプラズマが生じることを特徴とする請求項1に記載の装置。
- 前記アンテナ・セグメントが、前記チャンバのウィンドウの外表面に近接して配置されていることを特徴とする請求項1に記載の装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/106,852 | 1998-06-30 | ||
US09/106,852 US6164241A (en) | 1998-06-30 | 1998-06-30 | Multiple coil antenna for inductively-coupled plasma generation systems |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2000557486A Division JP5165821B2 (ja) | 1998-06-30 | 1999-06-18 | 誘導結合型プラズマ発生システム用の複数コイル・アンテナ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010003699A JP2010003699A (ja) | 2010-01-07 |
JP4750879B2 true JP4750879B2 (ja) | 2011-08-17 |
Family
ID=22313609
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2000557486A Expired - Fee Related JP5165821B2 (ja) | 1998-06-30 | 1999-06-18 | 誘導結合型プラズマ発生システム用の複数コイル・アンテナ |
JP2009181946A Expired - Lifetime JP4750879B2 (ja) | 1998-06-30 | 2009-08-04 | プラズマ発生装置 |
JP2011024421A Expired - Fee Related JP5881954B2 (ja) | 1998-06-30 | 2011-02-07 | プラズマ発生装置 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2000557486A Expired - Fee Related JP5165821B2 (ja) | 1998-06-30 | 1999-06-18 | 誘導結合型プラズマ発生システム用の複数コイル・アンテナ |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011024421A Expired - Fee Related JP5881954B2 (ja) | 1998-06-30 | 2011-02-07 | プラズマ発生装置 |
Country Status (8)
Country | Link |
---|---|
US (2) | US6164241A (ja) |
EP (1) | EP1092229B1 (ja) |
JP (3) | JP5165821B2 (ja) |
KR (1) | KR100645469B1 (ja) |
AU (1) | AU4954499A (ja) |
DE (1) | DE69939321D1 (ja) |
TW (1) | TW510149B (ja) |
WO (1) | WO2000000993A1 (ja) |
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EP1092229A1 (en) | 2001-04-18 |
JP2010003699A (ja) | 2010-01-07 |
AU4954499A (en) | 2000-01-17 |
US6463875B1 (en) | 2002-10-15 |
WO2000000993A1 (en) | 2000-01-06 |
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