JP4744958B2 - 半導体素子及びその製造方法 - Google Patents
半導体素子及びその製造方法 Download PDFInfo
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- JP4744958B2 JP4744958B2 JP2005204575A JP2005204575A JP4744958B2 JP 4744958 B2 JP4744958 B2 JP 4744958B2 JP 2005204575 A JP2005204575 A JP 2005204575A JP 2005204575 A JP2005204575 A JP 2005204575A JP 4744958 B2 JP4744958 B2 JP 4744958B2
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- 239000004065 semiconductor Substances 0.000 title claims description 97
- 238000004519 manufacturing process Methods 0.000 title claims description 18
- 239000012535 impurity Substances 0.000 claims description 14
- 238000009792 diffusion process Methods 0.000 claims description 11
- 230000007423 decrease Effects 0.000 claims description 6
- 238000005468 ion implantation Methods 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 4
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 239000000126 substance Substances 0.000 claims 1
- 239000010410 layer Substances 0.000 description 116
- 230000015556 catabolic process Effects 0.000 description 8
- 239000013078 crystal Substances 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000007792 addition Methods 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/7813—Vertical DMOS transistors, i.e. VDMOS transistors with trench gate electrode, e.g. UMOS transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0607—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration
- H01L29/0611—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices
- H01L29/0615—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE]
- H01L29/063—Reduced surface field [RESURF] pn-junction structures
- H01L29/0634—Multiple reduced surface field (multi-RESURF) structures, e.g. double RESURF, charge compensation, cool, superjunction (SJ), 3D-RESURF, composite buffer (CB) structures
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
- H01L29/42356—Disposition, e.g. buried gate electrode
- H01L29/4236—Disposition, e.g. buried gate electrode within a trench, e.g. trench gate electrode, groove gate electrode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66674—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/66712—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/66727—Vertical DMOS transistors, i.e. VDMOS transistors with a step of recessing the source electrode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66674—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/66712—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/66734—Vertical DMOS transistors, i.e. VDMOS transistors with a step of recessing the gate electrode, e.g. to form a trench gate electrode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0684—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape, relative sizes or dispositions of the semiconductor regions or junctions between the regions
- H01L29/0692—Surface layout
- H01L29/0696—Surface layout of cellular field-effect devices, e.g. multicellular DMOS transistors or IGBTs
Description
Claims (4)
- 第1導電型の第1半導体層と、
前記第1半導体層上に第1導電型の第1半導体ピラー層と第2導電型の第2半導体ピラー層とを周期的に交互に配置してなるピラー層と、
前記第1半導体層に電気的に接続された第1の主電極と、
前記ピラー層の表面に形成された第2導電型の半導体ベース層と、
前記半導体ベース層の表面に形成された第1導電型の第2半導体層と、
前記第2半導体層及び前記半導体ベース層に電気的に接続された第2の主電極と、
前記半導体ベース層を貫通し前記第1半導体ピラー層に到達する深さに形成されたトレンチ内に形成されたトレンチゲート型の制御電極と
を備え、
前記制御電極は、前記第2の主電極側から前記第1の主電極側に向かうに従って幅が狭くなるテーパ状に形成され、その先端が前記第1半導体ピラー層の略中央に存在し、
前記制御電極は、前記第2半導体ピラー層となる第2導電型の半導体層を前記第1半導体層の上に形成し、この第2導電型の半導体層に等間隔にトレンチを形成した後、この第2導電型の半導体層の上に、このトレンチを埋めない程度に前記第1半導体ピラー層となる第1導電型の半導体層を結晶成長させることにより、前記トレンチ内に形成される前記第1導電型の半導体層のテーパ状の傾斜部分に絶縁膜を介して導電性物質を埋め込むことにより形成される
ことを特徴とする半導体素子。 - 前記半導体ベース層及び前記第2半導体層は、前記制御電極の間に存在する前記半導体層に対し第2導電型のイオン注入、及び第1導電型のイオン注入を行った後、熱拡散を行うことにより形成されることを特徴とする請求項1記載の半導体素子。
- 前記第2の主電極は、前記第2半導体層を貫通して前記半導体ベース層に達するトレンチに埋め込み形成され、前記第2半導体層とは略垂直な面において接触するように形成された請求項1記載の半導体素子。
- 第1導電型の第1半導体層を形成した後、この第1半導体層の上に第2導電型の半導体層を形成するステップと、
前記第2導電型の半導体層に略等間隔にトレンチを形成するステップと、
前記トレンチの内部を含む前記第2導電型の半導体層上に、前記トレンチにテーパ状の傾斜部分が残存する程度に第1導電型の半導体層を結晶成長させることにより前記第1導電型の半導体層による第1半導体ピラー層及び前記第2導電型の半導体層による第2半導体ピラー層が交互に形成されてなるピラー層を形成するステップと、
前記傾斜部分を含む前記第1導電型の半導体層上に絶縁膜を形成する工程と、
前記傾斜部分内に前記絶縁膜を介して制御電極となる導電層を形成する工程と、
前記導電層の間に存在する前記半導体層に第2導電型の不純物をイオン注入した後、第1導電型の不純物をイオン注入する工程と、
前記不純物を熱拡散させて前記ピラー層上であって前記導電層の間の位置に第2導電型の半導体ベース層及び第1導電型の第2半導体層を形成する工程と、
を備えたことを特徴とする半導体素子の製造方法。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005204575A JP4744958B2 (ja) | 2005-07-13 | 2005-07-13 | 半導体素子及びその製造方法 |
US11/485,284 US7479678B2 (en) | 2005-07-13 | 2006-07-13 | Semiconductor element and method of manufacturing the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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JP2005204575A JP4744958B2 (ja) | 2005-07-13 | 2005-07-13 | 半導体素子及びその製造方法 |
Publications (2)
Publication Number | Publication Date |
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JP2007027266A JP2007027266A (ja) | 2007-02-01 |
JP4744958B2 true JP4744958B2 (ja) | 2011-08-10 |
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JP2005204575A Expired - Fee Related JP4744958B2 (ja) | 2005-07-13 | 2005-07-13 | 半導体素子及びその製造方法 |
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US (1) | US7479678B2 (ja) |
JP (1) | JP4744958B2 (ja) |
Families Citing this family (28)
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JP2007012977A (ja) * | 2005-07-01 | 2007-01-18 | Toshiba Corp | 半導体装置 |
JP2008124346A (ja) * | 2006-11-14 | 2008-05-29 | Toshiba Corp | 電力用半導体素子 |
EP2093802B1 (en) * | 2006-12-04 | 2015-11-11 | Sanken Electric Co., Ltd. | Insulating-gate fet and its manufacturing method |
JP4314278B2 (ja) * | 2007-01-22 | 2009-08-12 | エルピーダメモリ株式会社 | 半導体装置及びその製造方法 |
JP4938531B2 (ja) * | 2007-04-09 | 2012-05-23 | 株式会社豊田中央研究所 | 半導体装置 |
CN103762243B (zh) * | 2007-09-21 | 2017-07-28 | 飞兆半导体公司 | 功率器件 |
WO2009142233A1 (ja) * | 2008-05-20 | 2009-11-26 | ローム株式会社 | 半導体装置 |
JP5526496B2 (ja) * | 2008-06-02 | 2014-06-18 | サンケン電気株式会社 | 電界効果半導体装置及びその製造方法 |
US20120273916A1 (en) | 2011-04-27 | 2012-11-01 | Yedinak Joseph A | Superjunction Structures for Power Devices and Methods of Manufacture |
JP5452003B2 (ja) | 2008-09-23 | 2014-03-26 | 三菱電機株式会社 | 半導体チップの製造方法および半導体モジュールの製造方法 |
US7800170B1 (en) * | 2009-07-31 | 2010-09-21 | Alpha & Omega Semiconductor, Inc. | Power MOSFET device with tungsten spacer in contact hole and method |
US9653597B2 (en) | 2010-05-20 | 2017-05-16 | Infineon Technologies Americas Corp. | Method for fabricating a shallow and narrow trench FET and related structures |
US8786010B2 (en) | 2011-04-27 | 2014-07-22 | Fairchild Semiconductor Corporation | Superjunction structures for power devices and methods of manufacture |
US8836028B2 (en) | 2011-04-27 | 2014-09-16 | Fairchild Semiconductor Corporation | Superjunction structures for power devices and methods of manufacture |
US8673700B2 (en) | 2011-04-27 | 2014-03-18 | Fairchild Semiconductor Corporation | Superjunction structures for power devices and methods of manufacture |
US8772868B2 (en) | 2011-04-27 | 2014-07-08 | Fairchild Semiconductor Corporation | Superjunction structures for power devices and methods of manufacture |
US20120286402A1 (en) * | 2011-05-12 | 2012-11-15 | Chin-Te Kuo | Protuberant structure and method for making the same |
KR20130014850A (ko) * | 2011-08-01 | 2013-02-12 | 삼성전자주식회사 | 파워소자의 제조방법 |
CN103035677B (zh) * | 2011-09-30 | 2015-08-19 | 上海华虹宏力半导体制造有限公司 | 超级结结构、超级结mos晶体管及其制造方法 |
JP2014060299A (ja) * | 2012-09-18 | 2014-04-03 | Toshiba Corp | 半導体装置 |
KR101360070B1 (ko) * | 2012-12-27 | 2014-02-12 | 현대자동차 주식회사 | 반도체 소자 및 그 제조 방법 |
KR20140085141A (ko) * | 2012-12-27 | 2014-07-07 | 현대자동차주식회사 | 반도체 소자 및 그 제조 방법 |
DE102013112887B4 (de) * | 2013-11-21 | 2020-07-09 | Infineon Technologies Ag | Halbleitervorrichtung und Verfahren zum Herstellen einer Halbleitervorrichtung |
JP6233436B2 (ja) * | 2016-03-22 | 2017-11-22 | 住友電気工業株式会社 | 炭化珪素半導体装置の製造方法 |
DE102017212871A1 (de) * | 2017-07-26 | 2019-01-31 | Robert Bosch Gmbh | Verfahren zum Herstellen einer vertikalen Feldeffekttransistorstruktur und entsprechende vertikale Feldeffekttransistorstruktur |
CN109119487B (zh) * | 2018-08-22 | 2021-09-24 | 电子科技大学 | 一种超势垒二极管器件 |
JP7278902B2 (ja) * | 2019-08-07 | 2023-05-22 | 株式会社東芝 | 半導体装置、インバータ回路、駆動装置、車両、及び、昇降機 |
JP7319501B2 (ja) * | 2019-10-09 | 2023-08-02 | 株式会社東芝 | 基板の製造方法、半導体装置の製造方法、基板及び半導体装置 |
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JP4774580B2 (ja) | 1999-08-23 | 2011-09-14 | 富士電機株式会社 | 超接合半導体素子 |
JP2001332726A (ja) * | 2000-05-22 | 2001-11-30 | Hitachi Ltd | 縦形電界効果半導体装置及びその製造方法 |
JP4764987B2 (ja) * | 2000-09-05 | 2011-09-07 | 富士電機株式会社 | 超接合半導体素子 |
JP3899231B2 (ja) | 2000-12-18 | 2007-03-28 | 株式会社豊田中央研究所 | 半導体装置 |
US6787872B2 (en) * | 2001-06-26 | 2004-09-07 | International Rectifier Corporation | Lateral conduction superjunction semiconductor device |
US20030073289A1 (en) * | 2001-10-11 | 2003-04-17 | Koninklijke Philips Electronics N.V. | Trench-gate semiconductor devices and their manufacture |
JP3973395B2 (ja) | 2001-10-16 | 2007-09-12 | 株式会社豊田中央研究所 | 半導体装置とその製造方法 |
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JP4892172B2 (ja) * | 2003-08-04 | 2012-03-07 | ルネサスエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
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JP2005142336A (ja) * | 2003-11-06 | 2005-06-02 | Fuji Electric Holdings Co Ltd | 半導体素子の製造方法 |
-
2005
- 2005-07-13 JP JP2005204575A patent/JP4744958B2/ja not_active Expired - Fee Related
-
2006
- 2006-07-13 US US11/485,284 patent/US7479678B2/en not_active Expired - Fee Related
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US7479678B2 (en) | 2009-01-20 |
JP2007027266A (ja) | 2007-02-01 |
US20070018243A1 (en) | 2007-01-25 |
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