JP4723001B2 - 基板処理装置、基板処理方法、および排液カップの洗浄方法 - Google Patents

基板処理装置、基板処理方法、および排液カップの洗浄方法 Download PDF

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Publication number
JP4723001B2
JP4723001B2 JP2008537547A JP2008537547A JP4723001B2 JP 4723001 B2 JP4723001 B2 JP 4723001B2 JP 2008537547 A JP2008537547 A JP 2008537547A JP 2008537547 A JP2008537547 A JP 2008537547A JP 4723001 B2 JP4723001 B2 JP 4723001B2
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Japan
Prior art keywords
substrate
liquid
processing
rinsing
cup
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Expired - Fee Related
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JP2008537547A
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English (en)
Japanese (ja)
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JPWO2008041741A1 (ja
Inventor
宏光 難波
規宏 伊藤
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Tokyo Electron Ltd
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Tokyo Electron Ltd
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Publication of JPWO2008041741A1 publication Critical patent/JPWO2008041741A1/ja
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68728—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a plurality of separate clamping members, e.g. clamping fingers

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning By Liquid Or Steam (AREA)
JP2008537547A 2006-10-05 2007-10-04 基板処理装置、基板処理方法、および排液カップの洗浄方法 Expired - Fee Related JP4723001B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008537547A JP4723001B2 (ja) 2006-10-05 2007-10-04 基板処理装置、基板処理方法、および排液カップの洗浄方法

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2006274304 2006-10-05
JP2006274303 2006-10-05
JP2006274304 2006-10-05
JP2006274303 2006-10-05
PCT/JP2007/069455 WO2008041741A1 (en) 2006-10-05 2007-10-04 Substrate treating apparatus, substrate treating method, and rinsing method for drainage cup
JP2008537547A JP4723001B2 (ja) 2006-10-05 2007-10-04 基板処理装置、基板処理方法、および排液カップの洗浄方法

Publications (2)

Publication Number Publication Date
JPWO2008041741A1 JPWO2008041741A1 (ja) 2010-02-04
JP4723001B2 true JP4723001B2 (ja) 2011-07-13

Family

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JP2008537547A Expired - Fee Related JP4723001B2 (ja) 2006-10-05 2007-10-04 基板処理装置、基板処理方法、および排液カップの洗浄方法

Country Status (5)

Country Link
US (1) US8152933B2 (enExample)
JP (1) JP4723001B2 (enExample)
KR (1) KR100945768B1 (enExample)
TW (1) TW200832587A (enExample)
WO (1) WO2008041741A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9802227B2 (en) 2011-04-27 2017-10-31 SCREEN Holdings Co., Ltd. Method of cleaning substrate processing apparatus

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100979979B1 (ko) * 2006-07-26 2010-09-03 도쿄엘렉트론가부시키가이샤 액처리 장치 및 액처리 방법
JP5390824B2 (ja) * 2008-10-10 2014-01-15 大日本スクリーン製造株式会社 基板処理装置
JP5420222B2 (ja) * 2008-10-10 2014-02-19 大日本スクリーン製造株式会社 基板処理装置
JP5401255B2 (ja) * 2008-11-05 2014-01-29 東京エレクトロン株式会社 洗浄装置、洗浄方法、および記憶媒体
KR101678229B1 (ko) * 2010-03-24 2016-11-21 도쿄엘렉트론가부시키가이샤 액처리 장치, 액처리 방법, 및 그 액처리 방법을 실행시키기 위한 프로그램을 기록한 기록 매체
JP5546472B2 (ja) * 2010-03-24 2014-07-09 東京エレクトロン株式会社 液処理装置、液処理方法及びその液処理方法を実行させるためのプログラムを記録した記録媒体
JP5864232B2 (ja) * 2011-02-01 2016-02-17 東京エレクトロン株式会社 液処理装置および液処理方法
CN103801527B (zh) * 2012-11-13 2015-08-26 沈阳芯源微电子设备有限公司 一种光刻胶收集杯自动清洗系统
JP6250973B2 (ja) * 2013-08-08 2017-12-20 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板処理方法
JP6229933B2 (ja) * 2013-09-27 2017-11-15 株式会社Ｓｃｒｅｅｎホールディングス 処理カップ洗浄方法、基板処理方法および基板処理装置
KR102549285B1 (ko) 2015-11-14 2023-06-28 도쿄엘렉트론가부시키가이샤 묽은 tmah을 사용하여 마이크로전자 기판을 처리하는 방법
JP6845696B2 (ja) * 2016-02-25 2021-03-24 芝浦メカトロニクス株式会社 基板処理装置、基板処理方法及び基板の製造方法
JP6513048B2 (ja) * 2016-03-28 2019-05-15 東京エレクトロン株式会社 液処理装置
JP6722532B2 (ja) * 2016-07-19 2020-07-15 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および処理カップ洗浄方法
JP6836912B2 (ja) 2017-01-17 2021-03-03 東京エレクトロン株式会社 基板処理装置、基板処理方法及びコンピュータ読み取り可能な記録媒体
US11747742B2 (en) * 2017-04-11 2023-09-05 Visera Technologies Company Limited Apparatus and method for removing photoresist layer from alignment mark
JP6983602B2 (ja) * 2017-09-26 2021-12-17 芝浦メカトロニクス株式会社 基板処理装置及び基板処理方法
JP6513774B2 (ja) * 2017-11-24 2019-05-15 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板処理方法
JP6735384B2 (ja) * 2019-04-09 2020-08-05 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板処理方法
JP7438015B2 (ja) * 2020-05-01 2024-02-26 東京エレクトロン株式会社 基板処理装置
JP7752985B2 (ja) * 2021-07-21 2025-10-14 ダイキンファインテック株式会社 基板処理装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000315671A (ja) * 1999-04-30 2000-11-14 Tokyo Electron Ltd 基板処理装置および基板処理方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63136528A (ja) * 1986-11-27 1988-06-08 Mitsubishi Electric Corp 処理液塗布装置
SG76527A1 (en) * 1996-09-24 2000-11-21 Tokyo Electron Ltd Method and apparatus for cleaning treatment
US6207231B1 (en) * 1997-05-07 2001-03-27 Tokyo Electron Limited Coating film forming method and coating apparatus
JP2002368066A (ja) 2001-06-06 2002-12-20 Tokyo Electron Ltd 処理装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000315671A (ja) * 1999-04-30 2000-11-14 Tokyo Electron Ltd 基板処理装置および基板処理方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9802227B2 (en) 2011-04-27 2017-10-31 SCREEN Holdings Co., Ltd. Method of cleaning substrate processing apparatus

Also Published As

Publication number Publication date
TW200832587A (en) 2008-08-01
KR100945768B1 (ko) 2010-03-08
WO2008041741A1 (en) 2008-04-10
JPWO2008041741A1 (ja) 2010-02-04
US20100212701A1 (en) 2010-08-26
TWI354344B (enExample) 2011-12-11
US8152933B2 (en) 2012-04-10
KR20080056165A (ko) 2008-06-20

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