JP4715652B2 - 圧電振動片 - Google Patents

圧電振動片 Download PDF

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Publication number
JP4715652B2
JP4715652B2 JP2006181525A JP2006181525A JP4715652B2 JP 4715652 B2 JP4715652 B2 JP 4715652B2 JP 2006181525 A JP2006181525 A JP 2006181525A JP 2006181525 A JP2006181525 A JP 2006181525A JP 4715652 B2 JP4715652 B2 JP 4715652B2
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JP
Japan
Prior art keywords
electrode
piezoelectric
vibrating
thin film
vibrating piece
Prior art date
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Expired - Fee Related
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JP2006181525A
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English (en)
Japanese (ja)
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JP2008011348A5 (fr
JP2008011348A (ja
Inventor
隆 山崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
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Seiko Epson Corp
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Publication date
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Priority to JP2006181525A priority Critical patent/JP4715652B2/ja
Publication of JP2008011348A publication Critical patent/JP2008011348A/ja
Publication of JP2008011348A5 publication Critical patent/JP2008011348A5/ja
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Expired - Fee Related legal-status Critical Current
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  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2006181525A 2006-06-30 2006-06-30 圧電振動片 Expired - Fee Related JP4715652B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006181525A JP4715652B2 (ja) 2006-06-30 2006-06-30 圧電振動片

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006181525A JP4715652B2 (ja) 2006-06-30 2006-06-30 圧電振動片

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2010098563A Division JP2010206821A (ja) 2010-04-22 2010-04-22 圧電振動片

Publications (3)

Publication Number Publication Date
JP2008011348A JP2008011348A (ja) 2008-01-17
JP2008011348A5 JP2008011348A5 (fr) 2009-07-16
JP4715652B2 true JP4715652B2 (ja) 2011-07-06

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ID=39069118

Family Applications (1)

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JP2006181525A Expired - Fee Related JP4715652B2 (ja) 2006-06-30 2006-06-30 圧電振動片

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JP (1) JP4715652B2 (fr)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5316748B2 (ja) * 2008-03-28 2013-10-16 セイコーエプソン株式会社 振動片の製造方法
TW201032470A (en) 2008-10-24 2010-09-01 Seiko Epson Corp Bending vibration piece, bending vibrator, and piezoelectric device
JP5381149B2 (ja) * 2009-02-20 2014-01-08 セイコーエプソン株式会社 振動片および振動子
JP2010226609A (ja) * 2009-03-25 2010-10-07 Seiko Epson Corp 振動片および振動子
JP2011004035A (ja) 2009-06-17 2011-01-06 Seiko Epson Corp 屈曲振動片および屈曲振動片の製造方法
JP2011082945A (ja) 2009-09-08 2011-04-21 Seiko Epson Corp 屈曲振動片、屈曲振動子、および電子デバイス
JP2012147347A (ja) * 2011-01-14 2012-08-02 Seiko Epson Corp 振動片、振動子、発振器及び電子機器
JP5685962B2 (ja) 2011-02-02 2015-03-18 セイコーエプソン株式会社 振動片、振動子、発振器及び電子機器
US8581669B2 (en) 2011-02-02 2013-11-12 Seiko Epson Corporation Vibrator element, vibrator, oscillator, and electronic apparatus
JP5923862B2 (ja) * 2011-03-18 2016-05-25 セイコーエプソン株式会社 振動片、振動子、発振器及び電子機器
JP6482169B2 (ja) 2013-07-19 2019-03-13 セイコーエプソン株式会社 振動片、振動子、発振器、電子機器及び移動体
JP6435596B2 (ja) * 2013-08-09 2018-12-12 セイコーエプソン株式会社 振動素子、振動デバイス、電子機器、および移動体

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5330893A (en) * 1976-09-03 1978-03-23 Seiko Instr & Electronics Ltd Tuning fork type crystal vibrator
JPS5343490A (en) * 1976-10-01 1978-04-19 Seiko Instr & Electronics Ltd Tuning fork type crystal vibrator
JPS53116797A (en) * 1976-10-22 1978-10-12 Seiko Instr & Electronics Ltd Tuning fork crystal vibrator
JPS56136016A (en) * 1980-03-26 1981-10-23 Seiko Instr & Electronics Ltd Tuning fork type piezoelectric oscillator
JP2001221638A (ja) * 2000-02-07 2001-08-17 Seiko Epson Corp 振動子及び角速度検出装置
JP2001235331A (ja) * 2000-02-22 2001-08-31 Seiko Epson Corp 角速度検出装置
JP2003227719A (ja) * 2001-11-27 2003-08-15 Matsushita Electric Ind Co Ltd 薄膜微小機械式共振子、薄膜微小機械式共振子ジャイロ、この薄膜微小機械式共振子ジャイロを用いたナビゲーションシステム及び自動車
JP2004061486A (ja) * 2002-06-04 2004-02-26 Murata Mfg Co Ltd 音叉形振動子およびそれを用いた振動ジャイロおよびそれを用いた電子装置および音叉形振動子の製造方法
JP2005172542A (ja) * 2003-12-10 2005-06-30 Murata Mfg Co Ltd 音叉型振動子、音叉型振動子の製造方法、および角速度センサ
JP2005345416A (ja) * 2004-06-07 2005-12-15 Murata Mfg Co Ltd 角速度センサ

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5330893A (en) * 1976-09-03 1978-03-23 Seiko Instr & Electronics Ltd Tuning fork type crystal vibrator
JPS5343490A (en) * 1976-10-01 1978-04-19 Seiko Instr & Electronics Ltd Tuning fork type crystal vibrator
JPS53116797A (en) * 1976-10-22 1978-10-12 Seiko Instr & Electronics Ltd Tuning fork crystal vibrator
JPS56136016A (en) * 1980-03-26 1981-10-23 Seiko Instr & Electronics Ltd Tuning fork type piezoelectric oscillator
JP2001221638A (ja) * 2000-02-07 2001-08-17 Seiko Epson Corp 振動子及び角速度検出装置
JP2001235331A (ja) * 2000-02-22 2001-08-31 Seiko Epson Corp 角速度検出装置
JP2003227719A (ja) * 2001-11-27 2003-08-15 Matsushita Electric Ind Co Ltd 薄膜微小機械式共振子、薄膜微小機械式共振子ジャイロ、この薄膜微小機械式共振子ジャイロを用いたナビゲーションシステム及び自動車
JP2004061486A (ja) * 2002-06-04 2004-02-26 Murata Mfg Co Ltd 音叉形振動子およびそれを用いた振動ジャイロおよびそれを用いた電子装置および音叉形振動子の製造方法
JP2005172542A (ja) * 2003-12-10 2005-06-30 Murata Mfg Co Ltd 音叉型振動子、音叉型振動子の製造方法、および角速度センサ
JP2005345416A (ja) * 2004-06-07 2005-12-15 Murata Mfg Co Ltd 角速度センサ

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Publication number Publication date
JP2008011348A (ja) 2008-01-17

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