JP4715652B2 - 圧電振動片 - Google Patents
圧電振動片 Download PDFInfo
- Publication number
- JP4715652B2 JP4715652B2 JP2006181525A JP2006181525A JP4715652B2 JP 4715652 B2 JP4715652 B2 JP 4715652B2 JP 2006181525 A JP2006181525 A JP 2006181525A JP 2006181525 A JP2006181525 A JP 2006181525A JP 4715652 B2 JP4715652 B2 JP 4715652B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- piezoelectric
- vibrating
- thin film
- vibrating piece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000010409 thin film Substances 0.000 claims description 36
- 239000000463 material Substances 0.000 claims description 26
- 239000010453 quartz Substances 0.000 claims description 17
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 17
- 230000005684 electric field Effects 0.000 claims description 12
- 230000015572 biosynthetic process Effects 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 3
- 239000013078 crystal Substances 0.000 description 14
- 238000005452 bending Methods 0.000 description 12
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- 238000005530 etching Methods 0.000 description 6
- 238000012986 modification Methods 0.000 description 5
- 230000004048 modification Effects 0.000 description 5
- 230000002411 adverse Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 238000001039 wet etching Methods 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 239000007779 soft material Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000009931 harmful effect Effects 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000010295 mobile communication Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
Images
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006181525A JP4715652B2 (ja) | 2006-06-30 | 2006-06-30 | 圧電振動片 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006181525A JP4715652B2 (ja) | 2006-06-30 | 2006-06-30 | 圧電振動片 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010098563A Division JP2010206821A (ja) | 2010-04-22 | 2010-04-22 | 圧電振動片 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2008011348A JP2008011348A (ja) | 2008-01-17 |
JP2008011348A5 JP2008011348A5 (fr) | 2009-07-16 |
JP4715652B2 true JP4715652B2 (ja) | 2011-07-06 |
Family
ID=39069118
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006181525A Expired - Fee Related JP4715652B2 (ja) | 2006-06-30 | 2006-06-30 | 圧電振動片 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4715652B2 (fr) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5316748B2 (ja) * | 2008-03-28 | 2013-10-16 | セイコーエプソン株式会社 | 振動片の製造方法 |
TW201032470A (en) | 2008-10-24 | 2010-09-01 | Seiko Epson Corp | Bending vibration piece, bending vibrator, and piezoelectric device |
JP5381149B2 (ja) * | 2009-02-20 | 2014-01-08 | セイコーエプソン株式会社 | 振動片および振動子 |
JP2010226609A (ja) * | 2009-03-25 | 2010-10-07 | Seiko Epson Corp | 振動片および振動子 |
JP2011004035A (ja) | 2009-06-17 | 2011-01-06 | Seiko Epson Corp | 屈曲振動片および屈曲振動片の製造方法 |
JP2011082945A (ja) | 2009-09-08 | 2011-04-21 | Seiko Epson Corp | 屈曲振動片、屈曲振動子、および電子デバイス |
JP2012147347A (ja) * | 2011-01-14 | 2012-08-02 | Seiko Epson Corp | 振動片、振動子、発振器及び電子機器 |
JP5685962B2 (ja) | 2011-02-02 | 2015-03-18 | セイコーエプソン株式会社 | 振動片、振動子、発振器及び電子機器 |
US8581669B2 (en) | 2011-02-02 | 2013-11-12 | Seiko Epson Corporation | Vibrator element, vibrator, oscillator, and electronic apparatus |
JP5923862B2 (ja) * | 2011-03-18 | 2016-05-25 | セイコーエプソン株式会社 | 振動片、振動子、発振器及び電子機器 |
JP6482169B2 (ja) | 2013-07-19 | 2019-03-13 | セイコーエプソン株式会社 | 振動片、振動子、発振器、電子機器及び移動体 |
JP6435596B2 (ja) * | 2013-08-09 | 2018-12-12 | セイコーエプソン株式会社 | 振動素子、振動デバイス、電子機器、および移動体 |
Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5330893A (en) * | 1976-09-03 | 1978-03-23 | Seiko Instr & Electronics Ltd | Tuning fork type crystal vibrator |
JPS5343490A (en) * | 1976-10-01 | 1978-04-19 | Seiko Instr & Electronics Ltd | Tuning fork type crystal vibrator |
JPS53116797A (en) * | 1976-10-22 | 1978-10-12 | Seiko Instr & Electronics Ltd | Tuning fork crystal vibrator |
JPS56136016A (en) * | 1980-03-26 | 1981-10-23 | Seiko Instr & Electronics Ltd | Tuning fork type piezoelectric oscillator |
JP2001221638A (ja) * | 2000-02-07 | 2001-08-17 | Seiko Epson Corp | 振動子及び角速度検出装置 |
JP2001235331A (ja) * | 2000-02-22 | 2001-08-31 | Seiko Epson Corp | 角速度検出装置 |
JP2003227719A (ja) * | 2001-11-27 | 2003-08-15 | Matsushita Electric Ind Co Ltd | 薄膜微小機械式共振子、薄膜微小機械式共振子ジャイロ、この薄膜微小機械式共振子ジャイロを用いたナビゲーションシステム及び自動車 |
JP2004061486A (ja) * | 2002-06-04 | 2004-02-26 | Murata Mfg Co Ltd | 音叉形振動子およびそれを用いた振動ジャイロおよびそれを用いた電子装置および音叉形振動子の製造方法 |
JP2005172542A (ja) * | 2003-12-10 | 2005-06-30 | Murata Mfg Co Ltd | 音叉型振動子、音叉型振動子の製造方法、および角速度センサ |
JP2005345416A (ja) * | 2004-06-07 | 2005-12-15 | Murata Mfg Co Ltd | 角速度センサ |
-
2006
- 2006-06-30 JP JP2006181525A patent/JP4715652B2/ja not_active Expired - Fee Related
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5330893A (en) * | 1976-09-03 | 1978-03-23 | Seiko Instr & Electronics Ltd | Tuning fork type crystal vibrator |
JPS5343490A (en) * | 1976-10-01 | 1978-04-19 | Seiko Instr & Electronics Ltd | Tuning fork type crystal vibrator |
JPS53116797A (en) * | 1976-10-22 | 1978-10-12 | Seiko Instr & Electronics Ltd | Tuning fork crystal vibrator |
JPS56136016A (en) * | 1980-03-26 | 1981-10-23 | Seiko Instr & Electronics Ltd | Tuning fork type piezoelectric oscillator |
JP2001221638A (ja) * | 2000-02-07 | 2001-08-17 | Seiko Epson Corp | 振動子及び角速度検出装置 |
JP2001235331A (ja) * | 2000-02-22 | 2001-08-31 | Seiko Epson Corp | 角速度検出装置 |
JP2003227719A (ja) * | 2001-11-27 | 2003-08-15 | Matsushita Electric Ind Co Ltd | 薄膜微小機械式共振子、薄膜微小機械式共振子ジャイロ、この薄膜微小機械式共振子ジャイロを用いたナビゲーションシステム及び自動車 |
JP2004061486A (ja) * | 2002-06-04 | 2004-02-26 | Murata Mfg Co Ltd | 音叉形振動子およびそれを用いた振動ジャイロおよびそれを用いた電子装置および音叉形振動子の製造方法 |
JP2005172542A (ja) * | 2003-12-10 | 2005-06-30 | Murata Mfg Co Ltd | 音叉型振動子、音叉型振動子の製造方法、および角速度センサ |
JP2005345416A (ja) * | 2004-06-07 | 2005-12-15 | Murata Mfg Co Ltd | 角速度センサ |
Also Published As
Publication number | Publication date |
---|---|
JP2008011348A (ja) | 2008-01-17 |
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