JP2008011348A5 - - Google Patents

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Publication number
JP2008011348A5
JP2008011348A5 JP2006181525A JP2006181525A JP2008011348A5 JP 2008011348 A5 JP2008011348 A5 JP 2008011348A5 JP 2006181525 A JP2006181525 A JP 2006181525A JP 2006181525 A JP2006181525 A JP 2006181525A JP 2008011348 A5 JP2008011348 A5 JP 2008011348A5
Authority
JP
Japan
Prior art keywords
electrode
thin film
vibrating
piezoelectric thin
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006181525A
Other languages
English (en)
Japanese (ja)
Other versions
JP4715652B2 (ja
JP2008011348A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2006181525A priority Critical patent/JP4715652B2/ja
Priority claimed from JP2006181525A external-priority patent/JP4715652B2/ja
Publication of JP2008011348A publication Critical patent/JP2008011348A/ja
Publication of JP2008011348A5 publication Critical patent/JP2008011348A5/ja
Application granted granted Critical
Publication of JP4715652B2 publication Critical patent/JP4715652B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2006181525A 2006-06-30 2006-06-30 圧電振動片 Expired - Fee Related JP4715652B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006181525A JP4715652B2 (ja) 2006-06-30 2006-06-30 圧電振動片

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006181525A JP4715652B2 (ja) 2006-06-30 2006-06-30 圧電振動片

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2010098563A Division JP2010206821A (ja) 2010-04-22 2010-04-22 圧電振動片

Publications (3)

Publication Number Publication Date
JP2008011348A JP2008011348A (ja) 2008-01-17
JP2008011348A5 true JP2008011348A5 (fr) 2009-07-16
JP4715652B2 JP4715652B2 (ja) 2011-07-06

Family

ID=39069118

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006181525A Expired - Fee Related JP4715652B2 (ja) 2006-06-30 2006-06-30 圧電振動片

Country Status (1)

Country Link
JP (1) JP4715652B2 (fr)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5316748B2 (ja) * 2008-03-28 2013-10-16 セイコーエプソン株式会社 振動片の製造方法
TW201032470A (en) 2008-10-24 2010-09-01 Seiko Epson Corp Bending vibration piece, bending vibrator, and piezoelectric device
JP5381149B2 (ja) * 2009-02-20 2014-01-08 セイコーエプソン株式会社 振動片および振動子
JP2010226609A (ja) * 2009-03-25 2010-10-07 Seiko Epson Corp 振動片および振動子
JP2011004035A (ja) 2009-06-17 2011-01-06 Seiko Epson Corp 屈曲振動片および屈曲振動片の製造方法
JP2011082945A (ja) 2009-09-08 2011-04-21 Seiko Epson Corp 屈曲振動片、屈曲振動子、および電子デバイス
JP2012147347A (ja) * 2011-01-14 2012-08-02 Seiko Epson Corp 振動片、振動子、発振器及び電子機器
US8581669B2 (en) 2011-02-02 2013-11-12 Seiko Epson Corporation Vibrator element, vibrator, oscillator, and electronic apparatus
JP5685962B2 (ja) 2011-02-02 2015-03-18 セイコーエプソン株式会社 振動片、振動子、発振器及び電子機器
JP5923862B2 (ja) * 2011-03-18 2016-05-25 セイコーエプソン株式会社 振動片、振動子、発振器及び電子機器
JP6482169B2 (ja) 2013-07-19 2019-03-13 セイコーエプソン株式会社 振動片、振動子、発振器、電子機器及び移動体
JP6435596B2 (ja) 2013-08-09 2018-12-12 セイコーエプソン株式会社 振動素子、振動デバイス、電子機器、および移動体

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5851686B2 (ja) * 1976-09-03 1983-11-17 セイコーインスツルメンツ株式会社 音叉型水晶振動子
JPS5343490A (en) * 1976-10-01 1978-04-19 Seiko Instr & Electronics Ltd Tuning fork type crystal vibrator
JPS5851687B2 (ja) * 1976-10-22 1983-11-17 セイコーインスツルメンツ株式会社 音叉型水晶振動子
JPS56136016A (en) * 1980-03-26 1981-10-23 Seiko Instr & Electronics Ltd Tuning fork type piezoelectric oscillator
JP3736257B2 (ja) * 2000-02-07 2006-01-18 セイコーエプソン株式会社 振動子及び角速度検出装置
JP3767303B2 (ja) * 2000-02-22 2006-04-19 セイコーエプソン株式会社 角速度検出装置
JP3972790B2 (ja) * 2001-11-27 2007-09-05 松下電器産業株式会社 薄膜微小機械式共振子および薄膜微小機械式共振子ジャイロ
JP3791485B2 (ja) * 2002-06-04 2006-06-28 株式会社村田製作所 音叉形振動子およびそれを用いた振動ジャイロおよびそれを用いた電子装置および音叉形振動子の製造方法
JP4507578B2 (ja) * 2003-12-10 2010-07-21 株式会社村田製作所 角速度センサ
JP2005345416A (ja) * 2004-06-07 2005-12-15 Murata Mfg Co Ltd 角速度センサ

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