DE60336617D1 - Piezoelektrischer Resonator, piezoelektrischer Filter und Kommunikationsvorrichtung - Google Patents

Piezoelektrischer Resonator, piezoelektrischer Filter und Kommunikationsvorrichtung

Info

Publication number
DE60336617D1
DE60336617D1 DE60336617T DE60336617T DE60336617D1 DE 60336617 D1 DE60336617 D1 DE 60336617D1 DE 60336617 T DE60336617 T DE 60336617T DE 60336617 T DE60336617 T DE 60336617T DE 60336617 D1 DE60336617 D1 DE 60336617D1
Authority
DE
Germany
Prior art keywords
piezoelectric
concavity
vibrating section
opening
communication device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60336617T
Other languages
English (en)
Inventor
Tadashi Nomura
Hajime Yamada
Ryuichi Kubo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Application granted granted Critical
Publication of DE60336617D1 publication Critical patent/DE60336617D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/173—Air-gaps
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02086—Means for compensation or elimination of undesirable effects
    • H03H9/02102—Means for compensation or elimination of undesirable effects of temperature influence
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02157—Dimensional parameters, e.g. ratio between two dimension parameters, length, width or thickness
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/174—Membranes
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezo-electric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H03H9/564—Monolithic crystal filters implemented with thin-film techniques
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezo-electric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H03H9/566—Electric coupling means therefor
    • H03H9/568—Electric coupling means therefor consisting of a ladder configuration
DE60336617T 2002-09-25 2003-09-18 Piezoelektrischer Resonator, piezoelektrischer Filter und Kommunikationsvorrichtung Expired - Lifetime DE60336617D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002279428A JP3879643B2 (ja) 2002-09-25 2002-09-25 圧電共振子、圧電フィルタ、通信装置

Publications (1)

Publication Number Publication Date
DE60336617D1 true DE60336617D1 (de) 2011-05-19

Family

ID=31987094

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60336617T Expired - Lifetime DE60336617D1 (de) 2002-09-25 2003-09-18 Piezoelektrischer Resonator, piezoelektrischer Filter und Kommunikationsvorrichtung

Country Status (7)

Country Link
US (1) US7161447B2 (de)
EP (2) EP1755216B1 (de)
JP (1) JP3879643B2 (de)
KR (1) KR100550086B1 (de)
CN (1) CN1322671C (de)
AT (2) ATE504975T1 (de)
DE (1) DE60336617D1 (de)

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US7369013B2 (en) * 2005-04-06 2008-05-06 Avago Technologies Wireless Ip Pte Ltd Acoustic resonator performance enhancement using filled recessed region
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JP4803183B2 (ja) * 2005-11-04 2011-10-26 株式会社村田製作所 圧電薄膜共振子
US7612636B2 (en) * 2006-01-30 2009-11-03 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Impedance transforming bulk acoustic wave baluns
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JP4870541B2 (ja) * 2006-12-15 2012-02-08 太陽誘電株式会社 圧電薄膜共振器およびフィルタ
DE112007002969B4 (de) 2007-01-24 2017-12-21 Murata Mfg. Co., Ltd. Piezoelektrischer Resonator und piezoelektrisches Filter
US7791435B2 (en) * 2007-09-28 2010-09-07 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Single stack coupled resonators having differential output
US7855618B2 (en) * 2008-04-30 2010-12-21 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Bulk acoustic resonator electrical impedance transformers
US7732977B2 (en) * 2008-04-30 2010-06-08 Avago Technologies Wireless Ip (Singapore) Transceiver circuit for film bulk acoustic resonator (FBAR) transducers
JP5229945B2 (ja) * 2008-09-09 2013-07-03 太陽誘電株式会社 フィルタ、デュープレクサ、および通信装置
US8248185B2 (en) * 2009-06-24 2012-08-21 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic resonator structure comprising a bridge
US8902023B2 (en) * 2009-06-24 2014-12-02 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator structure having an electrode with a cantilevered portion
US8456257B1 (en) * 2009-11-12 2013-06-04 Triquint Semiconductor, Inc. Bulk acoustic wave devices and method for spurious mode suppression
US8193877B2 (en) * 2009-11-30 2012-06-05 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Duplexer with negative phase shifting circuit
US8796904B2 (en) 2011-10-31 2014-08-05 Avago Technologies General Ip (Singapore) Pte. Ltd. Bulk acoustic resonator comprising piezoelectric layer and inverse piezoelectric layer
US9243316B2 (en) 2010-01-22 2016-01-26 Avago Technologies General Ip (Singapore) Pte. Ltd. Method of fabricating piezoelectric material with selected c-axis orientation
US8962443B2 (en) 2011-01-31 2015-02-24 Avago Technologies General Ip (Singapore) Pte. Ltd. Semiconductor device having an airbridge and method of fabricating the same
US9154112B2 (en) 2011-02-28 2015-10-06 Avago Technologies General Ip (Singapore) Pte. Ltd. Coupled resonator filter comprising a bridge
US9136818B2 (en) 2011-02-28 2015-09-15 Avago Technologies General Ip (Singapore) Pte. Ltd. Stacked acoustic resonator comprising a bridge
US9203374B2 (en) 2011-02-28 2015-12-01 Avago Technologies General Ip (Singapore) Pte. Ltd. Film bulk acoustic resonator comprising a bridge
US9425764B2 (en) 2012-10-25 2016-08-23 Avago Technologies General Ip (Singapore) Pte. Ltd. Accoustic resonator having composite electrodes with integrated lateral features
US9048812B2 (en) 2011-02-28 2015-06-02 Avago Technologies General Ip (Singapore) Pte. Ltd. Bulk acoustic wave resonator comprising bridge formed within piezoelectric layer
US9083302B2 (en) 2011-02-28 2015-07-14 Avago Technologies General Ip (Singapore) Pte. Ltd. Stacked bulk acoustic resonator comprising a bridge and an acoustic reflector along a perimeter of the resonator
US9148117B2 (en) 2011-02-28 2015-09-29 Avago Technologies General Ip (Singapore) Pte. Ltd. Coupled resonator filter comprising a bridge and frame elements
US9490418B2 (en) 2011-03-29 2016-11-08 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator comprising collar and acoustic reflector with temperature compensating layer
US9401692B2 (en) 2012-10-29 2016-07-26 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator having collar structure
US9444426B2 (en) 2012-10-25 2016-09-13 Avago Technologies General Ip (Singapore) Pte. Ltd. Accoustic resonator having integrated lateral feature and temperature compensation feature
US8575820B2 (en) 2011-03-29 2013-11-05 Avago Technologies General Ip (Singapore) Pte. Ltd. Stacked bulk acoustic resonator
US9490771B2 (en) 2012-10-29 2016-11-08 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator comprising collar and frame
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CN102567779A (zh) * 2012-01-05 2012-07-11 天津理工大学 IDT/ ZnO/ Al/金刚石多层膜结构的声表面波射频识别标签
US9385684B2 (en) 2012-10-23 2016-07-05 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator having guard ring
KR101959204B1 (ko) * 2013-01-09 2019-07-04 삼성전자주식회사 무선 주파수 필터 및 무선 주파수 필터의 제조방법
WO2016158048A1 (ja) * 2015-03-31 2016-10-06 株式会社村田製作所 共振子
JP6903471B2 (ja) 2017-04-07 2021-07-14 太陽誘電株式会社 圧電薄膜共振器、フィルタおよびマルチプレクサ
KR20200046535A (ko) * 2018-10-25 2020-05-07 삼성전기주식회사 탄성파 필터 장치
CN111193488B (zh) * 2018-11-14 2024-01-26 天津大学 散热结构、带散热结构的体声波谐振器、滤波器和电子设备
CN111193490A (zh) * 2018-11-14 2020-05-22 天津大学 散热结构、带散热结构的体声波谐振器、滤波器和电子设备
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CN111010132A (zh) * 2019-07-08 2020-04-14 天津大学 体声波谐振器、滤波器及电子设备
CN111010129A (zh) * 2019-07-15 2020-04-14 天津大学 体声波谐振器器件、滤波器和电子设备

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Also Published As

Publication number Publication date
EP1755216B1 (de) 2012-04-25
KR20040027353A (ko) 2004-04-01
ATE504975T1 (de) 2011-04-15
EP1406386A2 (de) 2004-04-07
EP1755216A3 (de) 2007-02-28
EP1755216A2 (de) 2007-02-21
JP3879643B2 (ja) 2007-02-14
ATE555544T1 (de) 2012-05-15
EP1406386A3 (de) 2006-03-29
EP1406386B1 (de) 2011-04-06
JP2004120219A (ja) 2004-04-15
US20040056735A1 (en) 2004-03-25
KR100550086B1 (ko) 2006-02-08
CN1497842A (zh) 2004-05-19
CN1322671C (zh) 2007-06-20
US7161447B2 (en) 2007-01-09

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