JP4673449B1 - 液体気化システム - Google Patents

液体気化システム Download PDF

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Publication number
JP4673449B1
JP4673449B1 JP2010537983A JP2010537983A JP4673449B1 JP 4673449 B1 JP4673449 B1 JP 4673449B1 JP 2010537983 A JP2010537983 A JP 2010537983A JP 2010537983 A JP2010537983 A JP 2010537983A JP 4673449 B1 JP4673449 B1 JP 4673449B1
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liquid
liquid material
vaporizer
diaphragm
mesh
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JP2010537983A
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English (en)
Japanese (ja)
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JPWO2011040067A1 (ja
Inventor
雅之 纐纈
寛 板藤
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CKD Corp
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CKD Corp
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D1/00—Evaporating
    • B01D1/22—Evaporating by bringing a thin layer of the liquid into contact with a heated surface
    • B01D1/221—Composite plate evaporators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01B—BOILING; BOILING APPARATUS ; EVAPORATION; EVAPORATION APPARATUS
    • B01B1/00—Boiling; Boiling apparatus for physical or chemical purposes ; Evaporation in general
    • B01B1/005—Evaporation for physical or chemical purposes; Evaporation apparatus therefor, e.g. evaporation of liquids for gas phase reactions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J7/00—Apparatus for generating gases
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
    • H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Organic Chemistry (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Nozzles (AREA)
JP2010537983A 2009-09-30 2010-03-30 液体気化システム Active JP4673449B1 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2009226691 2009-09-30
JP2009226691 2009-09-30
PCT/JP2010/055652 WO2011040067A1 (ja) 2009-09-30 2010-03-30 液体気化システム

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2011003760A Division JP5410456B2 (ja) 2009-09-30 2011-01-12 液体気化システム

Publications (2)

Publication Number Publication Date
JP4673449B1 true JP4673449B1 (ja) 2011-04-20
JPWO2011040067A1 JPWO2011040067A1 (ja) 2013-02-21

Family

ID=43825904

Family Applications (2)

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JP2010537983A Active JP4673449B1 (ja) 2009-09-30 2010-03-30 液体気化システム
JP2011003760A Active JP5410456B2 (ja) 2009-09-30 2011-01-12 液体気化システム

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2011003760A Active JP5410456B2 (ja) 2009-09-30 2011-01-12 液体気化システム

Country Status (6)

Country Link
US (1) US8361231B2 (enExample)
JP (2) JP4673449B1 (enExample)
KR (1) KR101234409B1 (enExample)
CN (1) CN102470282B (enExample)
TW (1) TWI414361B (enExample)
WO (1) WO2011040067A1 (enExample)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012038868A (ja) * 2010-08-05 2012-02-23 Tokyo Electron Ltd 気化装置、基板処理装置、塗布現像装置、および基板処理方法
KR20130035881A (ko) 2011-09-30 2013-04-09 시케이디 가부시키가이샤 액체 제어 장치
KR20130089183A (ko) 2012-02-01 2013-08-09 시케이디 가부시키가이샤 액체 제어 장치
KR20140009044A (ko) * 2012-07-12 2014-01-22 시케이디 가부시키가이샤 액체 제어 장치 및 액체 제어 장치에 적용되는 망상체 조립체
US9010736B2 (en) 2011-09-30 2015-04-21 Cdk Corporation Liquid control apparatus
US9127359B2 (en) 2011-01-19 2015-09-08 Ckd Corporation Liquid vaporizer

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8752544B2 (en) 2011-03-21 2014-06-17 General Electric Company Medical vaporizer and method of monitoring of a medical vaporizer
CN103608484B (zh) * 2011-04-20 2016-06-22 Oled工厂有限责任公司 用于气相沉积应用的测量设备和方法
JP5810004B2 (ja) * 2012-02-27 2015-11-11 Ckd株式会社 液体制御装置
JP5919089B2 (ja) * 2012-05-15 2016-05-18 Ckd株式会社 液体制御装置
CN104520975B (zh) * 2012-07-30 2018-07-31 株式会社日立国际电气 衬底处理装置及半导体器件的制造方法
US8977115B2 (en) * 2013-03-08 2015-03-10 Steris Inc. Vaporizer with secondary flow path
US10490429B2 (en) 2014-11-26 2019-11-26 Applied Materials, Inc. Substrate carrier using a proportional thermal fluid delivery system
US9983892B2 (en) 2015-11-06 2018-05-29 Samsung Electronics Co., Ltd. Deep linking to mobile application states through programmatic replay of user interface events
JP6626322B2 (ja) * 2015-11-27 2019-12-25 Ckd株式会社 気体圧駆動機器、及びその制御方法
US10610659B2 (en) 2017-03-23 2020-04-07 General Electric Company Gas mixer incorporating sensors for measuring flow and concentration
US10946160B2 (en) 2017-03-23 2021-03-16 General Electric Company Medical vaporizer with carrier gas characterization, measurement, and/or compensation
US20190351443A1 (en) * 2018-05-17 2019-11-21 Indose Inc. Vaporizer with clog-free channel
KR101913556B1 (ko) * 2018-06-01 2018-10-31 주식회사 태진중공업 강제 송풍 대기식 기화기
TWI697352B (zh) * 2019-05-08 2020-07-01 翁子勝 液體蒸發裝置
CN115279941B (zh) * 2020-03-23 2024-09-24 株式会社堀场Stec 气化系统和气化装置的固定方法
JP2023176814A (ja) * 2022-05-31 2023-12-13 ワッティー株式会社 集積化ガスシステム用加熱器
CN118653196B (zh) * 2024-08-19 2025-01-21 宁波劳伦斯表面技术有限公司 一种常温蒸发系统
CN119733256B (zh) * 2025-03-04 2025-06-13 泉州泉港区正源新材料有限公司 一种用于甲缩醛精制的脱轻塔
CN120057903B (zh) * 2025-04-25 2025-07-18 新疆中蓄电新材料有限公司 一种气溶胶辅助制备单壁碳纳米管系统和方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05156448A (ja) * 1991-12-05 1993-06-22 Ishikawajima Harima Heavy Ind Co Ltd Ｃｖｄ用原料蒸発器
JPH06232035A (ja) * 1993-01-29 1994-08-19 Tokyo Electron Ltd 処理装置
JP2005057193A (ja) * 2003-08-07 2005-03-03 Shimadzu Corp 気化器
JP2006352001A (ja) * 2005-06-20 2006-12-28 Dainippon Screen Mfg Co Ltd 処理ガス供給装置および基板処理装置
JP2009038047A (ja) * 2006-04-26 2009-02-19 Entegris Inc 液体気化装置

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69312436T2 (de) 1992-12-15 1998-02-05 Applied Materials Inc Verdampfung von flüssigen Reaktionspartnern für CVD
JP2872891B2 (ja) 1993-08-06 1999-03-24 株式会社東芝 気化装置
US5777300A (en) * 1993-11-19 1998-07-07 Tokyo Electron Kabushiki Kaisha Processing furnace for oxidizing objects
DE19605500C1 (de) * 1996-02-14 1997-04-17 Linde Ag Vorrichtung und Verfahren zum Verdampfen einer Flüssigkeit
TW322602B (enExample) * 1996-04-05 1997-12-11 Ehara Seisakusho Kk
JP3938391B2 (ja) * 1997-06-04 2007-06-27 シーケーディ株式会社 液体原料の気化装置
US6099653A (en) * 1997-12-12 2000-08-08 Advanced Technology Materials, Inc. Liquid reagent delivery system with constant thermal loading of vaporizer
US7011710B2 (en) * 2000-04-10 2006-03-14 Applied Materials Inc. Concentration profile on demand gas delivery system (individual divert delivery system)
JP2001295050A (ja) 2000-04-11 2001-10-26 Sony Corp 気化器、気化器の使用方法および液体原料の気化方法
JP2003268552A (ja) * 2002-03-18 2003-09-25 Watanabe Shoko:Kk 気化器及びそれを用いた各種装置並びに気化方法
TW200401841A (en) * 2002-05-29 2004-02-01 Watanabe M & Co Ltd Vaporizer, various apparatus including the same and method of vaporization
JP2006523810A (ja) 2003-04-14 2006-10-19 スワゲロック カンパニー ダイヤフラムバルブシート
JP4035728B2 (ja) 2003-07-07 2008-01-23 Ｓｍｃ株式会社 サックバックバルブ
JP2005101454A (ja) * 2003-09-26 2005-04-14 Watanabe Shoko:Kk 気化器
JP4607474B2 (ja) * 2004-02-12 2011-01-05 東京エレクトロン株式会社 成膜装置
KR100629793B1 (ko) * 2005-11-11 2006-09-28 주식회사 방림 전해도금으로 마그네슘합금과 밀착성 좋은 동도금층 형성방법
US20100022097A1 (en) * 2006-02-27 2010-01-28 Youtec Co., Ltd. Vaporizer, semiconductor production apparatus and process of semiconductor production
JP5385002B2 (ja) * 2008-06-16 2014-01-08 株式会社日立国際電気 基板処理装置及び半導体デバイスの製造方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05156448A (ja) * 1991-12-05 1993-06-22 Ishikawajima Harima Heavy Ind Co Ltd Ｃｖｄ用原料蒸発器
JPH06232035A (ja) * 1993-01-29 1994-08-19 Tokyo Electron Ltd 処理装置
JP2005057193A (ja) * 2003-08-07 2005-03-03 Shimadzu Corp 気化器
JP2006352001A (ja) * 2005-06-20 2006-12-28 Dainippon Screen Mfg Co Ltd 処理ガス供給装置および基板処理装置
JP2009038047A (ja) * 2006-04-26 2009-02-19 Entegris Inc 液体気化装置

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012038868A (ja) * 2010-08-05 2012-02-23 Tokyo Electron Ltd 気化装置、基板処理装置、塗布現像装置、および基板処理方法
US9127359B2 (en) 2011-01-19 2015-09-08 Ckd Corporation Liquid vaporizer
US9010736B2 (en) 2011-09-30 2015-04-21 Cdk Corporation Liquid control apparatus
JP2013083344A (ja) * 2011-09-30 2013-05-09 Ckd Corp 液体制御装置
US9031391B2 (en) 2011-09-30 2015-05-12 Ckd Corporation Woven mesh form liquid control apparatus
KR20130035881A (ko) 2011-09-30 2013-04-09 시케이디 가부시키가이샤 액체 제어 장치
KR101892758B1 (ko) 2011-09-30 2018-10-04 시케이디 가부시키가이샤 액체 제어 장치
KR101966992B1 (ko) * 2011-09-30 2019-04-08 시케이디 가부시키가이샤 액체 제어 장치
KR20130089183A (ko) 2012-02-01 2013-08-09 시케이디 가부시키가이샤 액체 제어 장치
JP2013154336A (ja) * 2012-02-01 2013-08-15 Ckd Corp 液体制御装置
US9266130B2 (en) 2012-02-01 2016-02-23 Ckd Corporation Liquid control apparatus
KR102012048B1 (ko) * 2012-02-01 2019-08-19 시케이디 가부시키가이샤 액체 제어 장치
KR20140009044A (ko) * 2012-07-12 2014-01-22 시케이디 가부시키가이샤 액체 제어 장치 및 액체 제어 장치에 적용되는 망상체 조립체
US9022366B2 (en) 2012-07-12 2015-05-05 Ckd Corporation Liquid control device and mesh-like body assembly applied thereto
KR101892762B1 (ko) 2012-07-12 2018-10-04 시케이디 가부시키가이샤 액체 제어 장치 및 액체 제어 장치에 적용되는 망상체 조립체

Also Published As

Publication number Publication date
JP5410456B2 (ja) 2014-02-05
KR20120049387A (ko) 2012-05-16
US20120180724A1 (en) 2012-07-19
JPWO2011040067A1 (ja) 2013-02-21
CN102470282A (zh) 2012-05-23
TW201111043A (en) 2011-04-01
KR101234409B1 (ko) 2013-02-18
CN102470282B (zh) 2013-02-13
WO2011040067A1 (ja) 2011-04-07
JP2011097088A (ja) 2011-05-12
US8361231B2 (en) 2013-01-29
TWI414361B (zh) 2013-11-11

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