JP4657463B2 - 真空ポンプ - Google Patents

真空ポンプ Download PDF

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Publication number
JP4657463B2
JP4657463B2 JP2001024998A JP2001024998A JP4657463B2 JP 4657463 B2 JP4657463 B2 JP 4657463B2 JP 2001024998 A JP2001024998 A JP 2001024998A JP 2001024998 A JP2001024998 A JP 2001024998A JP 4657463 B2 JP4657463 B2 JP 4657463B2
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JP
Japan
Prior art keywords
flange
casing
rotor
turbo molecular
molecular pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2001024998A
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English (en)
Japanese (ja)
Other versions
JP2002227765A5 (enExample
JP2002227765A (ja
Inventor
明 山内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Japan Ltd
Original Assignee
Edwards Japan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Japan Ltd filed Critical Edwards Japan Ltd
Priority to JP2001024998A priority Critical patent/JP4657463B2/ja
Priority to EP02250514A priority patent/EP1231383A1/en
Priority to US10/061,130 priority patent/US6679677B2/en
Priority to KR1020020005845A priority patent/KR20020064216A/ko
Publication of JP2002227765A publication Critical patent/JP2002227765A/ja
Publication of JP2002227765A5 publication Critical patent/JP2002227765A5/ja
Application granted granted Critical
Publication of JP4657463B2 publication Critical patent/JP4657463B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/5853—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps heat insulation or conduction

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
JP2001024998A 2001-02-01 2001-02-01 真空ポンプ Expired - Fee Related JP4657463B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2001024998A JP4657463B2 (ja) 2001-02-01 2001-02-01 真空ポンプ
EP02250514A EP1231383A1 (en) 2001-02-01 2002-01-25 Vacuum pump
US10/061,130 US6679677B2 (en) 2001-02-01 2002-01-31 Vacuum pump
KR1020020005845A KR20020064216A (ko) 2001-02-01 2002-02-01 진공 펌프

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001024998A JP4657463B2 (ja) 2001-02-01 2001-02-01 真空ポンプ

Publications (3)

Publication Number Publication Date
JP2002227765A JP2002227765A (ja) 2002-08-14
JP2002227765A5 JP2002227765A5 (enExample) 2007-12-06
JP4657463B2 true JP4657463B2 (ja) 2011-03-23

Family

ID=18890059

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001024998A Expired - Fee Related JP4657463B2 (ja) 2001-02-01 2001-02-01 真空ポンプ

Country Status (4)

Country Link
US (1) US6679677B2 (enExample)
EP (1) EP1231383A1 (enExample)
JP (1) JP4657463B2 (enExample)
KR (1) KR20020064216A (enExample)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4007130B2 (ja) * 2002-09-10 2007-11-14 株式会社豊田自動織機 真空ポンプ
DE10305038A1 (de) * 2003-02-07 2004-08-19 Pfeiffer Vacuum Gmbh Vakuumpumpanordnung
ITTO20030421A1 (it) * 2003-06-05 2004-12-06 Varian Spa Pompa da vuoto compatta
JP4499388B2 (ja) * 2003-08-27 2010-07-07 エドワーズ株式会社 分子ポンプおよび結合装置
JP4671624B2 (ja) * 2004-05-25 2011-04-20 エドワーズ株式会社 真空ポンプ
JP2005344610A (ja) * 2004-06-03 2005-12-15 Boc Edwards Kk 真空排気装置
US7389629B2 (en) * 2004-07-23 2008-06-24 Reynolds Foil Inc. Portable vacuum pump for use with reclosable, evacuable containers
US20100193594A1 (en) * 2004-12-20 2010-08-05 Edc Automotive, Llc Electronic thermostat
EP1837521A4 (en) * 2004-12-20 2009-04-15 Edwards Japan Ltd STRUCTURE FOR CONNECTING END PARTS AND VACUUM SYSTEM USING THIS STRUCTURE
US20070020115A1 (en) * 2005-07-01 2007-01-25 The Boc Group, Inc. Integrated pump apparatus for semiconductor processing
US7395755B1 (en) 2006-02-13 2008-07-08 Deese Henry W Container crusher and method of use thereof
US8712758B2 (en) 2007-08-31 2014-04-29 Microsoft Corporation Coreference resolution in an ambiguity-sensitive natural language processing system
JP5483684B2 (ja) * 2009-09-03 2014-05-07 株式会社大阪真空機器製作所 分子ポンプ
DE102012112492A1 (de) * 2012-12-18 2014-06-18 Pfeiffer Vacuum Gmbh Vakuumsystem
US10037869B2 (en) 2013-08-13 2018-07-31 Lam Research Corporation Plasma processing devices having multi-port valve assemblies
JP6206002B2 (ja) * 2013-08-30 2017-10-04 株式会社島津製作所 ターボ分子ポンプ
EP3051138B1 (de) * 2015-01-27 2021-03-10 Pfeiffer Vacuum Gmbh Vakuumpumpengehäuse, Vakuumpumpe und Verfahren zur Herstellung eines Vakuumpumpengehäuses
GB201701833D0 (en) * 2017-02-03 2017-03-22 Edwards Ltd Pump cooling systems
EP3657022B1 (de) 2018-11-22 2022-09-07 Pfeiffer Vacuum Gmbh Vakuumpumpe mit einem peltierelement
JP7242321B2 (ja) * 2019-02-01 2023-03-20 エドワーズ株式会社 真空ポンプ及び真空ポンプの制御装置
WO2025032712A1 (ja) * 2023-08-08 2025-02-13 株式会社Fuji 作業装置及び基板支持部材
CN117514855A (zh) * 2023-11-22 2024-02-06 北京中科科仪股份有限公司 一种磁悬浮分子泵及其控制方法

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2574810B2 (ja) * 1987-09-11 1997-01-22 株式会社日立製作所 真空ポンプ
JPH01195993A (ja) * 1988-01-31 1989-08-07 Shimadzu Corp ターボ分子ポンプ
US4926648A (en) * 1988-03-07 1990-05-22 Toshiba Corp. Turbomolecular pump and method of operating the same
US4873833A (en) * 1988-11-23 1989-10-17 American Telephone Telegraph Company, At&T Bell Laboratories Apparatus comprising a high-vacuum chamber
JP2538796B2 (ja) * 1989-05-09 1996-10-02 株式会社東芝 真空排気装置および真空排気方法
JPH048896A (ja) * 1990-04-25 1992-01-13 Hitachi Ltd 真空ポンプ
KR950007378B1 (ko) * 1990-04-06 1995-07-10 가부시끼 가이샤 히다찌 세이사꾸쇼 진공펌프
JPH05172093A (ja) * 1991-12-24 1993-07-09 Hitachi Ltd 真空ポンプ
JP2527398B2 (ja) * 1992-06-05 1996-08-21 財団法人真空科学研究所 タ―ボ分子ポンプ
WO1994000694A1 (de) * 1992-06-19 1994-01-06 Leybold Aktiengesellschaft Gasreibungsvakuumpumpe
JPH0612794U (ja) * 1992-07-13 1994-02-18 株式会社大阪真空機器製作所 複合型真空ポンプの加熱装置
JP2719298B2 (ja) * 1993-07-29 1998-02-25 アプライド マテリアルズ インコーポレイテッド 真空装置の冷却構造
JP3672630B2 (ja) * 1995-07-21 2005-07-20 株式会社大阪真空機器製作所 分子ポンプ
IT1296155B1 (it) * 1996-04-05 1999-06-09 Varian Spa Rotore di pompa turbomolecolare
JPH10122143A (ja) * 1996-10-11 1998-05-12 Anelva Corp クライオポンプ
US5938406A (en) * 1997-04-18 1999-08-17 Varian, Inc. Rotor for turbomolecular pump
JPH10306790A (ja) * 1997-05-01 1998-11-17 Daikin Ind Ltd 分子ポンプ
IT1302694B1 (it) * 1998-10-19 2000-09-29 Getters Spa Dispositivo di schermatura mobile in funzione della temperatura trapompa getter e pompa turbomolecolare collegate in linea.
JP2000205126A (ja) * 1999-01-12 2000-07-25 Canon Inc 真空容器の排気方法、画像表示装置の製造方法、真空容器の排気装置、及び画像表示装置の製造装置

Also Published As

Publication number Publication date
US20020108569A1 (en) 2002-08-15
US6679677B2 (en) 2004-01-20
KR20020064216A (ko) 2002-08-07
JP2002227765A (ja) 2002-08-14
EP1231383A1 (en) 2002-08-14

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