KR20020064216A - 진공 펌프 - Google Patents

진공 펌프 Download PDF

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Publication number
KR20020064216A
KR20020064216A KR1020020005845A KR20020005845A KR20020064216A KR 20020064216 A KR20020064216 A KR 20020064216A KR 1020020005845 A KR1020020005845 A KR 1020020005845A KR 20020005845 A KR20020005845 A KR 20020005845A KR 20020064216 A KR20020064216 A KR 20020064216A
Authority
KR
South Korea
Prior art keywords
casing
exhaust
rotor
inlet
flange
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR1020020005845A
Other languages
English (en)
Korean (ko)
Inventor
야마우치아키라
Original Assignee
세이코 인스트루먼트 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 세이코 인스트루먼트 가부시키가이샤 filed Critical 세이코 인스트루먼트 가부시키가이샤
Publication of KR20020064216A publication Critical patent/KR20020064216A/ko
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/5853—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps heat insulation or conduction

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
KR1020020005845A 2001-02-01 2002-02-01 진공 펌프 Withdrawn KR20020064216A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001024998A JP4657463B2 (ja) 2001-02-01 2001-02-01 真空ポンプ
JPJP-P-2001-00024998 2001-02-01

Publications (1)

Publication Number Publication Date
KR20020064216A true KR20020064216A (ko) 2002-08-07

Family

ID=18890059

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020020005845A Withdrawn KR20020064216A (ko) 2001-02-01 2002-02-01 진공 펌프

Country Status (4)

Country Link
US (1) US6679677B2 (enExample)
EP (1) EP1231383A1 (enExample)
JP (1) JP4657463B2 (enExample)
KR (1) KR20020064216A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190107054A (ko) * 2017-02-03 2019-09-18 에드워즈 리미티드 펌프 냉각 시스템

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4007130B2 (ja) * 2002-09-10 2007-11-14 株式会社豊田自動織機 真空ポンプ
DE10305038A1 (de) * 2003-02-07 2004-08-19 Pfeiffer Vacuum Gmbh Vakuumpumpanordnung
ITTO20030421A1 (it) * 2003-06-05 2004-12-06 Varian Spa Pompa da vuoto compatta
JP4499388B2 (ja) * 2003-08-27 2010-07-07 エドワーズ株式会社 分子ポンプおよび結合装置
JP4671624B2 (ja) * 2004-05-25 2011-04-20 エドワーズ株式会社 真空ポンプ
JP2005344610A (ja) * 2004-06-03 2005-12-15 Boc Edwards Kk 真空排気装置
US7389629B2 (en) * 2004-07-23 2008-06-24 Reynolds Foil Inc. Portable vacuum pump for use with reclosable, evacuable containers
US20100193594A1 (en) * 2004-12-20 2010-08-05 Edc Automotive, Llc Electronic thermostat
EP1837521A4 (en) * 2004-12-20 2009-04-15 Edwards Japan Ltd STRUCTURE FOR CONNECTING END PARTS AND VACUUM SYSTEM USING THIS STRUCTURE
US20070020115A1 (en) * 2005-07-01 2007-01-25 The Boc Group, Inc. Integrated pump apparatus for semiconductor processing
US7395755B1 (en) 2006-02-13 2008-07-08 Deese Henry W Container crusher and method of use thereof
US8712758B2 (en) 2007-08-31 2014-04-29 Microsoft Corporation Coreference resolution in an ambiguity-sensitive natural language processing system
JP5483684B2 (ja) * 2009-09-03 2014-05-07 株式会社大阪真空機器製作所 分子ポンプ
DE102012112492A1 (de) * 2012-12-18 2014-06-18 Pfeiffer Vacuum Gmbh Vakuumsystem
US10037869B2 (en) 2013-08-13 2018-07-31 Lam Research Corporation Plasma processing devices having multi-port valve assemblies
JP6206002B2 (ja) * 2013-08-30 2017-10-04 株式会社島津製作所 ターボ分子ポンプ
EP3051138B1 (de) * 2015-01-27 2021-03-10 Pfeiffer Vacuum Gmbh Vakuumpumpengehäuse, Vakuumpumpe und Verfahren zur Herstellung eines Vakuumpumpengehäuses
EP3657022B1 (de) 2018-11-22 2022-09-07 Pfeiffer Vacuum Gmbh Vakuumpumpe mit einem peltierelement
JP7242321B2 (ja) * 2019-02-01 2023-03-20 エドワーズ株式会社 真空ポンプ及び真空ポンプの制御装置
WO2025032712A1 (ja) * 2023-08-08 2025-02-13 株式会社Fuji 作業装置及び基板支持部材
CN117514855A (zh) * 2023-11-22 2024-02-06 北京中科科仪股份有限公司 一种磁悬浮分子泵及其控制方法

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2574810B2 (ja) * 1987-09-11 1997-01-22 株式会社日立製作所 真空ポンプ
JPH01195993A (ja) * 1988-01-31 1989-08-07 Shimadzu Corp ターボ分子ポンプ
US4926648A (en) * 1988-03-07 1990-05-22 Toshiba Corp. Turbomolecular pump and method of operating the same
US4873833A (en) * 1988-11-23 1989-10-17 American Telephone Telegraph Company, At&T Bell Laboratories Apparatus comprising a high-vacuum chamber
JP2538796B2 (ja) * 1989-05-09 1996-10-02 株式会社東芝 真空排気装置および真空排気方法
JPH048896A (ja) * 1990-04-25 1992-01-13 Hitachi Ltd 真空ポンプ
KR950007378B1 (ko) * 1990-04-06 1995-07-10 가부시끼 가이샤 히다찌 세이사꾸쇼 진공펌프
JPH05172093A (ja) * 1991-12-24 1993-07-09 Hitachi Ltd 真空ポンプ
JP2527398B2 (ja) * 1992-06-05 1996-08-21 財団法人真空科学研究所 タ―ボ分子ポンプ
WO1994000694A1 (de) * 1992-06-19 1994-01-06 Leybold Aktiengesellschaft Gasreibungsvakuumpumpe
JPH0612794U (ja) * 1992-07-13 1994-02-18 株式会社大阪真空機器製作所 複合型真空ポンプの加熱装置
JP2719298B2 (ja) * 1993-07-29 1998-02-25 アプライド マテリアルズ インコーポレイテッド 真空装置の冷却構造
JP3672630B2 (ja) * 1995-07-21 2005-07-20 株式会社大阪真空機器製作所 分子ポンプ
IT1296155B1 (it) * 1996-04-05 1999-06-09 Varian Spa Rotore di pompa turbomolecolare
JPH10122143A (ja) * 1996-10-11 1998-05-12 Anelva Corp クライオポンプ
US5938406A (en) * 1997-04-18 1999-08-17 Varian, Inc. Rotor for turbomolecular pump
JPH10306790A (ja) * 1997-05-01 1998-11-17 Daikin Ind Ltd 分子ポンプ
IT1302694B1 (it) * 1998-10-19 2000-09-29 Getters Spa Dispositivo di schermatura mobile in funzione della temperatura trapompa getter e pompa turbomolecolare collegate in linea.
JP2000205126A (ja) * 1999-01-12 2000-07-25 Canon Inc 真空容器の排気方法、画像表示装置の製造方法、真空容器の排気装置、及び画像表示装置の製造装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190107054A (ko) * 2017-02-03 2019-09-18 에드워즈 리미티드 펌프 냉각 시스템

Also Published As

Publication number Publication date
US20020108569A1 (en) 2002-08-15
US6679677B2 (en) 2004-01-20
JP4657463B2 (ja) 2011-03-23
JP2002227765A (ja) 2002-08-14
EP1231383A1 (en) 2002-08-14

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Legal Events

Date Code Title Description
PA0109 Patent application

Patent event code: PA01091R01D

Comment text: Patent Application

Patent event date: 20020201

PG1501 Laying open of application
N231 Notification of change of applicant
PN2301 Change of applicant

Patent event date: 20040315

Comment text: Notification of Change of Applicant

Patent event code: PN23011R01D

PC1203 Withdrawal of no request for examination
WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid